Author: claimsbot

1. A device for the illumination of an object comprising:
a) a block substantially transparent to radiation of a certain frequency range, said block having at least one entry surface and at least one surface of total reflection, such that said radiation introduced into said block via said at least one entry surface at a suitable range of angles relative to said at least one surface of total reflection is totally reflected from at least one of said at least one surface of total reflection, and wherein said surface of total reflection is configured to allow contact between said surface of total reflection and the object; and
b) a radiation source for introducing said radiation into said at least one entry surface at said suitable range of angles.
2. The device of claim 1 wherein a portion of said at least one surface of total reflection is shielded from said radiation source by at least one entry baffle.
3. The device of claim 1 wherein at least a portion of at least one of said surface of total reflection is substantially uniformly irradiated by said radiation.
4. The device of claim 1 wherein a portion of said block is substantially shaped as a parallelopiped.
5. The device of claim 1 wherein said radiation source is configured to introduce said electromagnetic radiation into said at least one entry surface as more than one uniform collimated beams.
6. The device of claim 5 wherein said radiation source is configured to introduce said electromagnetic radiation into said at least one entry surface as two uniform collimated beams.
7. The device of claim 1 wherein a portion of said block is substantially shaped as a cylinder.
8. The device of claim 1 wherein a portion of said block is substantially saucer shaped.
9. The device of claim 1 wherein a portion of said block is substantially shaped as a cylindrical tube.
10. The device of claim 1 wherein said block has at least one exit surface such that when an opaque object is placed in contact with at least one of said at least one surface of total reflection and said radiation is introduced through said at least one entry surface at said suitable range of angles, a portion of said radiation is reflected diffusely from said opaque object where said opaque object is in contact with said at least one surface of total reflection and some of said diffusely reflected radiation emerges from said exit surface.
11. The device of claim 10 wherein a portion of said at least one exit surface is shielded by at least one detector baffle.
12. The device of claim 1 wherein said radiation is electromagnetic radiation and said certain frequency range is includes the visible radiation range.
13. The device of claim 1 wherein said radiation is electromagnetic radiation and said certain frequency range is includes the infrared radiation range.
14. The device of claim 1 wherein said radiation is sonic radiaton.
15. The device of claim 1 wherein at least one of said at least one surface of total reflection is configured to be substantially rigid when in contact with the object.
16. A method for uniformly illuminating an object with at least one planar side and transparent to radiation of a certain frequency range, comprising:
a) providing a block, said block being substantially transparent to radiation of the certain frequency range, said block having at least one entry surface and at least one surface of total reflection, said surfaces being such that the radiation introduced to said block via said at least one entry surface at a suitable range of angles relative to said surface of total reflection is reflected at said at least one surface of total reflection;
b) placing the at least one planar side of the object in contact with one of said at least one surface of total reflection; and
c) introducing the radiation into said block via said at least one entry surface at said suitable range of angles.
17. The method of claim 16 wherein a portion of said at least one surface of total reflection is shielded by at least one entry baffle.
18. The device of claim 16 wherein at least a portion of at least one of said surface of total reflection is substantially uniformly irradiated by the radiation.
19. The method of claim 16 wherein a portion of said block is substantially shaped as a parallelopiped.
20. The method of claim 16 wherein said source of radiation is introduced into said at least one entry surface as more than one uniform collimated beams.
21. The method of claim 16 wherein a portion of said block is substantially shaped as a cylinder.
22. The method of claim 16 wherein a portion of said block is substantially shaped as a cylindrical tube.
23. The method of claim 16 wherein at least one of said at least one surface of total reflection is configured to be substantially rigid when in contact with the object.
24. A method for uniformly illuminating an object opaque to radiation of a certain range of frequencies, the opaque object having a plurality of sides, comprising
a) placing the object in contact with a block, said block being substantially transparent to radiation of the certain frequency range, said block having at least one entry surface and at least one surface of total reflection, and at least one exit surface, said surfaces being such that the radiation introduced to said block via said at least one entry surface at a suitable range of angles relative to said surface of total reflection is totally reflected at said at least one surface of total reflection, and said surfaces being such that when the radiation is introduced via said at least one entry surface at said suitable range of angles, some of the radiation is reflected diffusely from said object where said object is in contact with said at least one surface of total reflection, and some of the diffusely reflected radiation emerges from said at least one exit surface; and
b) introducing the radiation into said block via said at least one entry surface at said suitable range of angles.
25. The method of claim 24 wherein a portion of said at least one exit is shielded by at least one detector baffle.
26. The method of claim 24 wherein a portion of said block is substantially shaped as a parallelopiped.
27. The device of claim 24 wherein at least a portion of at least one of said surface of total reflection is substantially uniformly irradiated by the radiation.
28. The method of claim 24 wherein said radiation source is configured to introduce said radiation into said at least one entry surface as more than one uniform collimated beams.
29. The method of claim 24 wherein at least one of said at least one surface of total reflection is configured to be substantially rigid when in contact with the object.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A tent cloth canvas, comprising:
a photocatalyst layer;
a tent cloth canvas layer;
a film consisting of a vinyl chloride resin on the tent cloth canvas layer; and
an adhesive layer disposed between the photocatalyst layer and the tent cloth canvas layer,
wherein the tent cloth canvas layer includes plasticizer having a molecular weight of 400 or more and comprises a foundation cloth member made of a fiber material and a resin layer formed on at least one surface of the foundation cloth member by impregnating a resin solution into the foundation cloth member, wherein the plasticizer is at least one selected from the group consisting of n-heptyl-n-undecyl phthalate, diisononyl phthalate, ditridecyl phthalate, n-heptyl n-nonyl phthalate, n-nonyl n-undecyl phthalate, n-octyl n-decyl phthalate, tri(2-ethylhexyl) phosphate, di-2-ethylhexyl sebacate, tributyl acetylcitrate and chlorinated paraffin.
2. A tent cloth canvas, comprising:
a photocatalyst layer;
an adhesive layer disposed beneath the photocatalyst layer;
a tent cloth canvas layer;
a film consisting of a vinyl chloride resin on the tent cloth canvas layer; and
a plasticizer migration restricting layer disposed between the adhesive layer and the tent cloth canvas layer,
wherein the tent cloth canvas layer includes a plasticizer having a molecular weight of 400 or more and comprises a foundation cloth member made of a fiber material and a resin layer formed on at least one surface of the foundation cloth member by impregnating a resin solution into the foundation cloth member, wherein the plasticizer is at least one selected from the group consisting of n-heptyl-n-undecyl phthalate, diisononyl phthalate, ditridecyl phthalate, n-heptyl n-nonyl phthalate, n-nonyl n-undecyl phthalate, n-octyl n-decyl phthalate, tri(2-ethylhexyl) phosphate, di-2-ethylhexyl sebacate, tributyl acetylcitrate and chlorinated paraffin.
3. The tent cloth canvas according to claim 2, wherein the plasticizer migration restricting layer is 0.5 to 5 \u03bcm thick.
4. The tent cloth canvas according to claim 1 or 2, wherein the adhesive layer is a silicone modified resin containing 2 to 60% by weight of silicone converted to oxide, a resin containing 3 to 60% by weight of polysiloxane converted to oxide, or a resin containing 5 to 40% by weight of colloidal silica converted to oxide; and the photocatalyst layer is a photocatalyst particle complex containing 25 to 95% by weight of a metal oxide gel andor metal hydroxide gel converted to oxide.
5. The tent cloth canvas according to claim 2, wherein the plasticizer migration restricting layer includes at least one material selected from acrylic resins, acrylic silicone resins, fluorine resins, polyethylene, polypropylene, polyamide, polyester, ethylene-vinyl acetate copolymers, polyurethane, silicone resins, vinyl chloride-vinyl acetate copolymers, neoprene, Hypalon, polynitrile rubber, SBR, polyisobutylene rubber, butyl rubber, polybutadiene rubber, rubber containing fluorine, and silicon rubber.
6. The tent cloth canvas according to claim 2, wherein the plasticizer migration restricting layer includes 0.5 to 5 \u03bcm thickness of at least one material selected from acrylic resins, fluorine resins, polyethylene, polypropylene, polyamide, polyester, ethylene-vinyl acetate copolymers, polyurethane, and vinyl chloride-vinyl acetate copolymers.
7. The tent cloth canvas according to any one of claims 1, 2, 3, 5, or 6, wherein more than 50% in amount of a plasticizer contained in the tent cloth canvas layer remains, in comparison with that at an initial stage, 1500 hours after the canvas is subject to a sunshine carbon arc type accelerated weathering test as specified in JIS-K5400.
8. The tent cloth canvas according to any one of claims 1, 2, 3, 5, or 6, wherein more than 50% in amount of a plasticizer contained in the tent cloth canvas layer remains, in comparison with that at an initial stage, after the canvas is exposed outdoors for 3 years.
9. The tent cloth canvas according to claim 1, wherein lowering of tear strength of the tent cloth canvas is within 30%, in comparison with that at an initial stage, 1500 hours after the canvas is subjected to a sunshine carbon arc type accelerated weathering test.
10. A method of producing a tent cloth canvas of any one of claims 1, 3, 5, 6, and 9, comprising
laminating a plasticizer migration restriction layer, an adhesive layer and a photocatalyst layer in that order on a tent cloth canvas layer, wherein
the plasticizer migration restricting layer and the adhesive layer are laminated on the tent cloth canvas layer in one process.

1. A pneumatic isolator for supporting a payload which comprises:
a pneumatic isolator assembly having a pressure vessel defining a chamber sealed with a piston secured to the pressure vessel by a flexible diaphragm, the pneumatic isolator assembly having a longitudinal axis, the pneumatic isolator assembly having a load plate for coupling the payload to the piston;
means for pressurizing the isolator assembly to form a pressurized air volume;
means for suspending the isolator assembly, said means having upper ends which are grounded and lower ends which flexibly suspend the isolator assembly; and
means rigidly secured to the load plate for resisting tilt of the load plate with reference to the longitudinal axis of the isolator assembly.
2. The isolator of claim 1 wherein the means for resisting tilt comprises:
an elongated member depending from and rigidly secured to the load plate; and
means for restricting the motion of the lower end of the member in the horizontal plane.
3. The isolator of claim 1 wherein the means for resisting tilt of the load plate comprises:
a rod depending from the piston; and
a linear bearing secured to the isolator assembly, the rod being received in the linear bearing.
4. The isolator of claim 1 wherein the means for resisting tilt comprises:
an elongated member having an upper and lower end, the upper end of the elongated member depending from and rigidly secured to the piston; and
means for restricting the motion of the lower end of the elongated member in the horizontal plane.
5. The isolator of claim 1 wherein the means for restricting motion in the horizontal plane comprises:
a flexure secured to the isolator assembly; and
wherein the elongated member comprises a rod rigidly secured to and depending from the load plate and secured at its lower end to the flexure.
6. The isolator of claim 5 wherein the rod is external to the pressurized air volume.
7. A pneumatic isolator for supporting a payload which comprises:
a pneumatic isolator assembly having a pressure vessel defining a chamber sealed with a piston secured to the pressure vessel by a flexible diaphragm, the pneumatic isolator assembly having a longitudinal axis, the pneumatic isolator assembly having a load plate for coupling the payload to the piston;
means for pressurizing the isolator assembly to form a pressurized air volume;
means for suspending the isolator assembly, said means having upper ends which are grounded and lower ends which flexibly suspend the isolator assembly; and
means for resisting tilt of the load plate with reference to the longitudinal axis of the isolator assembly;
wherein the means for resisting tilt includes an elongated member depending from and rigidly secured to the load plate, and means for restricting the motion of the lower end of the member in the horizontal plane;
wherein the means for restricting motion in the horizontal plane includes a flexure secured to the isolator assembly; and
wherein the elongated member comprises a rod rigidly secured to and depending from the load plate and secured at its lower end to the flexure.
8. The isolator of claim 7 wherein the rod is external to the pressurized air volume.
9. A pneumatic isolator for vertically supporting a payload which comprises:
a pneumatic isolator assembly having a pressure vessel defining a chamber sealed with a piston secured to the pressure vessel by a flexible diaphragm, the pneumatic isolator assembly having a longitudinal axis, the pneumatic isolator assembly having a load plate for coupling the payload to the piston;
means for suspending said isolator assembly, said means having upper ends which are grounded and lower ends which flexibly suspend said isolator assembly; and
means for resisting tilt of said load plate with references to said longitudinal axis of said isolator assembly, the means for resisting tilt comprising
(a) a rod having an upper and lower end, the upper end of the rod rigidly secured to and depending from said piston; and
(b) a first flexure secured to said isolator assembly and secured to the lower end of the rod.
10. The isolator of claim 9 further comprising:
a second flexure intermediate to said first flexure and said piston, said second flexure secured to said isolator assembly; and
wherein said rod passes through said second flexure.
11. A pneumatic isolator for supporting a payload which comprises:
a pneumatic isolator assembly having a load plate which vertically supports the payload;
means for suspending said isolator assembly, said means having upper ends for grounding and lower ends which flexibly suspend said isolator assembly;
a spring flexure secured to said isolator assembly; and
an elongated member having a lower end, said elongated member depending from and rigidly secured to said load plate and secured at said lower end to said spring flexure.
12. A pneumatic isolator for supporting a payload which comprises:
a pneumatic isolator assembly having a pressure vessel defining a chamber sealed with a piston secured to the pressure vessel by a flexible diaphragm;
means for suspending said isolator assembly, said means having upper ends for grounding and lower ends which flexibly suspend said isolator assembly;
an elongated member depending from and rigidly secured to said piston; and a linear bearing secured to said isolator assembly, the elongated member being slideably received in said linear bearing.
13. A pneumatic isolator for supporting a payload comprising:
a pressure vessel defining an air chamber sealed with a piston secured to said pressure vessel by a flexible rubber diaphragm, a load plate to support the payload, and further including a rod having a first end and a second end, said first end secured to and depending from the piston, said second end connected to said pressure vessel by a spring flexure.
14. The pneumatic isolator according to claim 13, wherein said spring flexure is planar having one or more elongated apertures, thereby preventing said flexure from buckling under in-plane stress.
15. A pneumatic isolator for supporting a payload comprising:
a pressure vessel defining an air chamber sealed with a piston secured to an outside top of said pressure vessel by a flexible rubber diaphragm, a load plate to support the payload, and further including a rod having a first end and a second end, said first end depending from the piston and said second end connected to said pressure vessel by a first spring flexure,
said rod further comprising a mid-region, which is intermediate said first end and said second end, and which is connected to said pressure vessel by a second spring flexure.
16. The pneumatic isolator according to claim 15, wherein said first flexure is secured to said second end of said rod by an arm and a spacer, and is secured to said pressure vessel by a clamp.
17. The pneumatic isolator according to claim 15, wherein said first flexure is planar having one or more elongated apertures, thereby preventing said flexure from buckling under in-plane stress.
18. The pneumatic isolator according to claim 15, wherein said second flexure is planar having an opening shaped to receive said rod, wherein said rod passes through the opening in the second flexure.
19. A pneumatic isolator for supporting a payload comprising:
a pressure vessel defining an air chamber having a sidewall and an open top sealed with a piston secured to the pressure vessel by a flexible rubber diaphragm, a load plate to support the payload, and further including a rod having a first end and a second end, said first end depending from and rigidly secured to the piston of said pressure vessel and said second end connected to said pressure vessel by a linear bearing assembly, wherein the rod is slideably received in the linear bearing assembly.
20. A pneumatic isolator for supporting a payload which comprises:
a pneumatic isolator assembly having a pressure vessel defining a chamber sealed with a piston secured to the pressure vessel by a flexible diaphragm, the pneumatic isolator assembly having a longitudinal axis, the pneumatic isolator assembly having a load plate for coupling the payload to the piston;
means for pressurizing the isolator assembly to form a pressurized air volume;
means for suspending the isolator assembly, said means having upper ends which are grounded and lower ends which flexibly suspend the isolator assembly; and
means for resisting tilt of the load plate with reference to the longitudinal axis of the isolator assembly;
wherein the means for resisting tilt includes an elongated member having an upper and lower end, the upper end of the elongated member depending from and rigidly secured to the piston; and
means for restricting the motion of the lower end of the elongated member in the horizontal plane;
wherein the means for restricting motion in the horizontal plane includes;
a flexure secured to the pressure vessel of the isolator assembly; and
wherein the elongated member is secured at its lower end to the flexure.
21. The isolator of claim 20 wherein the flexure is a first flexure, and which comprises:
a second flexure intermediate to the first flexure and the piston, the second flexure secured to the pressure vessel of the isolator assembly; and
wherein the elongated member passes through the second flexure.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method comprising:
comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
wherein the derivable information being compared relates to a shape of the scanning interferometry signal for the first surface location of the test object.
2. The method of claim 1, further comprising determining an accurate characteristic for the test object based on the comparison.
3. The method of claim 1, further comprising determining a relative surface height for the first surface location based on the comparison.
4. The method of claim 3, wherein the determining of the relative surface height comprises determining which model corresponds to an accurate one of the characteristic for the test object based on the comparison, and using the model corresponding to the accurate characteristic to calculate the relative surface height.
5. The method of claim 4, wherein using the model corresponding to the accurate characteristic to calculate the relative surface height comprises determining a position of a peak in a correlation function used to compare the information for the test object to the information for the model corresponding to the accurate characteristic.
6. The method of claim 1, further comprising comparing information derivable from the scanning interferometry signal for additional surface locations to the information corresponding to the multiple models.
7. The method of claim 6, further comprising determining a surface height profile for the test object based on the comparisons.
8. The method of claim 1, wherein the comparing comprises calculating one or more merit functions indicative of a similarity between the information derivable from the scanning interferometry signal and the information corresponding to each of the models.
9. The method of claim 1, wherein the comparing comprises fitting the information derivable from the scanning interferometry signal to an expression for the information corresponding to the models.
10. The method of claim 1, wherein the information for the test object relates to a fringe contrast magnitude in the shape of the scanning interferometry signal.
11. The method of claim 1, wherein the information for the test object relates to relative spacings between zero-crossings in the shape of the scanning interferometry signal.
12. The method of claim 1, wherein the information for the test object is a expressed as a function of scan position.
13. The method of claim 12, wherein the comparing comprises calculating a correlation function between the information for the test object and the information for each of the models.
14. The method of claim 12, wherein the comparing further comprises determining one or more peak values in each of the correlation functions.
15. The method of claim 14, further comprising determining an accurate characteristic for the test object based on the parameterization of the model corresponding to the largest peak value.
16. The method of claim 14, further comprising determining a relative surface height for the test object at the first surface location based on a coordinate for at least one of the peak values in the correlation functions.
17. The method of claim 1, wherein the scanning interferometry signal is produced by a scanning interferometry system, and wherein the comparing comprises accounting for systematic contributions to the scanning interferometry signal arising from the scanning interferometry system.
18. The method of claim 17, further comprising calibrating the systematic contributions of the scanning interferometry system using another test object having known properties.
19. The method of claim 1, wherein the series of characteristics comprises a series of values for at least one physical parameter of the test object.
20. The method of claim 19, wherein the test object comprises a thin film layer having a thickness, and the physical parameter is the thickness of the thin film at the first location.
21. The method of claim 1, wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
22. The method of claim 21, wherein the test object comprises structure at the second surface location that diffracts light to contribute to the scanning interferometry signal for the first surface location.
23. The method of claim 21, wherein the series of characteristics at the second surface location comprises permutations of a magnitude for a step height at the second location and a position for the second location.
24. The method of claim 21, wherein the series of characteristics at the second surface location comprises permutations of a modulation depth for a grating and an offset position of the grating, wherein the grating extends over the second location.
25. The method of claim 1, wherein the series of characteristics is a series of surface materials for the test object.
26. The method of claim 1, wherein the models correspond to a fixed surface height for the test object at the first surface location.
27. The method of claim 1, wherein the scanning interferometry signal is produced by imaging test light emerging from the test object to interfere with reference light on a detector, and varying an optical path length difference from a common source to the detector between interfering portions of the test and reference light, wherein the test and reference light are derived from the common source, and wherein the scanning interferometry signal corresponds to an interference intensity measured by the detector as the optical path length difference is varied.
28. The method of claim 27, further comprising producing the scanning interferometry signal.
29. The method of claim 27, wherein the test and reference light have a spectral bandwidth greater than 5% of a central frequency for the test and reference light.
30. The method of claim 27, wherein the common source has a spectral coherence length, and the optical path length difference is varied over a range larger than the spectral coherence length to produce the scanning interferometry signal.
31. The method of claim 27, wherein optics used to direct test light onto the test object and image it to the detector define a numerical aperture for the test light greater than 0.8.
32. The method of claim 28, wherein the common source is a spatially extended source.
33. Apparatus comprising:
a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
wherein the derivable information being compared relates to a shape of the scanning interferometry signal for the first surface location of the test object.
34. Apparatus comprising:
a scanning interferometry system configured to produce a scanning interferometry signal; and
an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
wherein the derivable information being compared relates to a shape of the scanning interferometry signal for the first surface location of the test object.
35. A method comprising:
comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
36. The method of claim 35, wherein the test object comprises structure at the second surface location that diffracts light to contribute to the scanning interferometry signal for the first surface location.
37. The method of claim 35, wherein the series of characteristics at the second surface location comprises permutations of a magnitude for a step height at the second location and a position for the second location.
38. The method of claim 35, wherein the series of characteristics at the second surface location comprises permutations of a modulation depth for a grating and an offset position of the grating, wherein the grating extends over the second location.
39. The method of claim 35, further comprising determining an accurate characteristic for the test object based on the comparison.
40. The method of claim 35, further comprising determining a relative surface height for the first surface location based on the comparison.
41. The method of claim 40, wherein the determining of the relative surface height comprises determining which model corresponds to an accurate one of the characteristic for the test object based on the comparison, and using the model corresponding to the accurate characteristic to calculate the relative surface height.
42. The method of claim 41, wherein the using of the model corresponding to the accurate characteristic comprises compensating data from the scanning interferometry signal to reduce contributions arising from the accurate characteristic.
43. The method of claim 42, wherein the compensating of the data comprises removing a phase contribution arising from the accurate characteristic from a phase component of a transform of the scanning interferometry signal for the test object, and wherein the using of the model corresponding to the accurate characteristic further comprises calculating the relative surface height from the phase component of the transform after the phase contribution arising from the accurate characteristic has been removed.
44. The method of claim 42, wherein using the model corresponding to the accurate characteristic to calculate the relative surface height comprises determining a position of a peak in a correlation function used to compare the information for the test object to the information for the model corresponding to the accurate characteristic.
45. The method of claim 35, further comprising comparing information derivable from the scanning interferometry signal for additional surface locations to the information corresponding to the multiple models.
46. The method of claim 45, further comprising determining a surface height profile for the test object based on the comparisons.
47. The method of claim 35, wherein the comparing comprises calculating one or more merit functions indicative of a similarity between the information derivable from the scanning interferometry signal and the information corresponding to each of the models.
48. The method of claim 35, wherein the comparing comprises fitting the information derivable from the scanning interferometry signal to an expression for the information corresponding to the models.
49. The method of claim 35, wherein the information derivable from the scanning interferometry signal and which is being compared is a number.
50. The method of claim 35, wherein the information derivable from the scanning interferometry signal and which is being compared is a function.
51. The method of claim 50, wherein the function is a function of spatial frequency.
52. The method of claim 50, wherein the function is a function of scan position.
53. The method of claim 35, wherein the information for the test object is derived from a transform of the scanning interferometry signal for the test object into a spatial frequency domain.
54. The method of claim 53, wherein the transform is a Fourier transform.
55. The method of claim 53, wherein the information for the test object comprises information about an amplitude profile of the transform.
56. The method of claim 53, wherein the information for the test object comprises information about a phase profile of the transform.
57. The method of claim 35, wherein information for the test object relates to a shape of the scanning interferometry signal for the test object at the first location.
58. The method of claim 57, wherein the information for the test object relates to a fringe contrast magnitude in the shape of the scanning interferometry signal.
59. The method of claim 57, wherein the information for the test object relates to relative spacings between zero-crossings in the shape of the scanning interferometry signal.
60. The method of claim 57, wherein the information for the test object is a expressed as a function of scan position, wherein the function is derived from the shape of the scanning interferometry signal.
61. The method of claim 35, wherein the comparing comprises calculating a correlation function between the information for the test object and the information for each of the models.
62. The method of claim 61, wherein the correlation function is a complex correlation function.
63. The method of claim 61, wherein the comparing further comprises determining one or more peak values in each of the correlation functions.
64. The method of claim 63, further comprising determining an accurate characteristic for the test object based on the parameterization of the model corresponding to the largest peak value.
65. The method of claim 63, further comprising determining a relative surface height for the test object at the first surface location based on a coordinate for at least one of the peak values in the correlation functions.
66. The method of claim 35, wherein the scanning interferometry signal is produced by a scanning interferometry system, and wherein the comparing comprises accounting for systematic contributions to the scanning interferometry signal arising from the scanning interferometry system.
67. The method of claim 66, further comprising calibrating the systematic contributions of the scanning interferometry system using another test object having known properties.
68. Apparatus comprising:
a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
69. Apparatus comprising:
a scanning interferometry system configured to produce a scanning interferometry signal; and
an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
wherein the series of characteristics comprises a series of characteristics of the test object at a second surface location different from the first surface location.
70. A method comprising:
chemically mechanically polishing a test object;
collecting scanning interferometry data for a surface topography of the test object; and
adjusting process conditions for the chemically mechanically polishing of the test object based on information derived from the scanning interferometry data,
wherein adjusting the process conditions based on the information derived from the scanning interferometry data comprises comparing information derivable from the scanning interferometry signal for at least a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object.
71. The method of claim 70, where the process conditions comprise at least one of pad pressure and polishing slurry composition.