1. A droplet dispensing control method comprising:
detecting an amount of positional deviation in a rotation direction in a stage plane between a stage mounting a substrate on which an imprint material from an ink jet head lands and a template that is pressed into the imprint material on the substrate, as a template positional deviation amount;
detecting an amount of positional deviation in a rotation direction in the stage plane between a movement direction of the stage and a nozzle array direction of a plurality of nozzles provided on the ink jet head, as a nozzle positional deviation amount;
calculating a stage movement direction correction value configured to correct the movement direction of the stage and an ejection timing correction value configured to correct the ejection timing of the imprint material ejected from the respective nozzles, as a correction value for eliminating the positional deviation of a landing position of the imprint material occurring due to the template positional deviation amount and the nozzle positional deviation amount; and
controlling the movement direction of the stage using the stage movement direction correction value and controlling the ejection timing of the imprint material ejected from the respective nozzles using the ejection timing correction value.
2. The droplet dispensing control method according to claim 1,
wherein position detection marks are formed in advance on the template, and
wherein the template positional deviation amount is detected by measuring the positions of the position detection marks when the template is loaded on the stage.
3. The droplet dispensing control method according to claim 1,
wherein the template positional deviation amount is detected by measuring the position of a template pattern on the template when the template is loaded on the stage.
4. The droplet dispensing control method according to claim 1,
wherein the template positional deviation amount is detected in a state where the template is pressed into the imprint material on the substrate.
5. The droplet dispensing control method according to claim 1,
wherein the nozzle positional deviation amount is detected by measuring the landing position when the imprint material is dispensed onto the substrate from the ink jet head without correcting the movement direction of the stage and the ejection timing of the imprint material.
6. The droplet dispensing control method according to claim 1,
wherein, when the template positional deviation amount is \u03b8t, the nozzle positional deviation amount is \u03b8d, and the movement direction of the stage before correcting the movement direction of the stage is an X-direction,
the movement directions X\u2032 and Y\u2032 of the stage after correcting the movement direction of the stage are expressed by X\u2032=X\u2212(X\xd7\u03b8t\xd7cos((1\u2212\u03b8t)2)) and Y\u2032=X\xd7sin((1\u2212\u03b8t)2), respectively.
7. The droplet dispensing control method according to claim 1,
wherein, when the template positional deviation amount is \u03b8t, the nozzle positional deviation amount is \u03b8d, the nozzle pitch of the nozzle array is D, and the movement direction of the stage before correcting the movement direction of the stage is an X-direction,
an ejection timing correction value X(Dn) of the imprint material for a nozzle that is disposed on the n-th order from a reference nozzle position is expressed by X(Dn)=n(\u03b8t+\u03b8d).
8. A droplet dispensing control device comprising:
a first detection unit that detects an amount of positional deviation of a rotation direction in a stage plane between a stage mounting a substrate on which an imprint material from an ink jet head lands and a template that is pressed into the imprint material on the substrate, as a template positional deviation amount;
a second detection unit that detects an amount of positional deviation of a rotation direction in the stage plane between a movement direction of the stage and a nozzle array direction of a plurality of nozzles provided on the ink jet head, as a nozzle positional deviation amount;
a correction value calculation unit that calculates a stage movement direction correction value configured to correct the movement direction of the stage and an ejection timing correction value configured to correct the ejection timing of the imprint material ejected from the respective nozzles, as a correction value for eliminating the positional deviation of a landing position of the imprint material occurring due to the template positional deviation amount and the nozzle positional deviation amount; and
a first control unit that controls the movement direction of the stage using the stage movement direction correction value; and
a second control unit that controls the ejection timing of the imprint material ejected from the respective nozzles using the ejection timing correction value.
9. The droplet dispensing control device according to claim 8,
wherein position detection marks are formed in advance on the template, and
wherein the first detection unit detects the template positional deviation amount by measuring the positions of the position detection marks when the template is loaded on the stage.
10. The droplet dispensing control device according to claim 8,
wherein the first detection unit detects the template positional deviation amount by measuring the position of a template pattern on the template when the template is loaded on the stage.
11. The droplet dispensing control device according to claim 8,
wherein the first detection unit detects the template positional deviation amount in a state where the template is pressed into the imprint material on the substrate.
12. The droplet dispensing control device according to claim 8,
wherein the second detection unit detects the nozzle positional deviation amount by measuring the landing position when the imprint material is dispensed onto the substrate from the ink jet head without correcting the movement direction of the stage and the ejection timing of the imprint material.
13. The droplet dispensing control device according to claim 8,
wherein, when the template positional deviation amount is \u03b8t, the nozzle positional deviation amount is \u03b8d, and the movement direction of the stage before correcting the movement direction of the stage is an X-direction,
the correction value calculation unit calculates the movement directions X\u2032 and Y\u2032 of the stage after correcting the movement direction of the stage by an expression of X\u2032=X\u2212(X\xd7\u03b8t\xd7cos((1\u2212\u03b8t)2)) and Y\u2032=X\xd7sin((1\u2212\u03b8t)2), respectively.
14. The droplet dispensing control device according to claim 8,
wherein, when the template positional deviation amount is \u03b8t, the nozzle positional deviation amount is \u03b8d, the nozzle pitch of the nozzle array is D, and the movement direction of the stage before correcting the movement direction of the stage is an X-direction,
the correction value calculation unit calculates an ejection timing correction value X(Dn) of the imprint material for a nozzle that is disposed on the n-th order from a reference nozzle position by an expression of X(Dn)=n(\u03b8t+\u03b8d).
15. A method of manufacturing semiconductor devices comprising:
detecting an amount of positional deviation of a rotation direction in a stage plane between a stage mounting a substrate on which an imprint material from an ink jet head lands and a template that is pressed into the imprint material on the substrate, as a template positional deviation amount;
detecting an amount of positional deviation of a rotation direction in the stage plane between a movement direction of the stage and a nozzle array direction of a plurality of nozzles provided on the ink jet head, as a nozzle positional deviation amount;
calculating a stage movement direction correction value configured to correct the movement direction of the stage and an ejection timing correction value configured to correct the ejection timing of the imprint material ejected from the respective nozzles as a correction value for eliminating the positional deviation of a landing position of the imprint material occurring due to the template positional deviation amount and the nozzle positional deviation amount;
dispensing the imprint material onto the substrate while controlling the movement direction of the stage using the stage movement direction correction value and controlling the ejection timing of the imprint material ejected from the respective nozzles using the ejection timing correction value;
pressing the template into the imprint material on the substrate to thereby transfer the pattern of the template to the imprint material.
16. The method of manufacturing semiconductor devices according to claim 15,
wherein position detection marks are formed in advance on the template, and
wherein the template positional deviation amount is detected by measuring the positions of the position detection marks when the template is loaded on the stage.
17. The method of manufacturing semiconductor devices according to claim 15,
wherein the template positional deviation amount is detected by measuring the position of a template pattern on the template when the template is loaded on the stage.
18. The method of manufacturing semiconductor devices according to claim 15,
wherein the template positional deviation amount is detected in a state where the template is pressed into the imprint material on the substrate.
19. The method of manufacturing semiconductor devices according to claim 15,
wherein the nozzle positional deviation amount is detected by measuring the landing position when the imprint material is dispensed onto the substrate from the ink jet head without correcting the movement direction of the stage and the ejection timing of the imprint material.
20. The method of manufacturing semiconductor devices according to claim 15,
wherein, when the template positional deviation amount is \u03b8t, the nozzle positional deviation amount is \u03b8d, the nozzle pitch of the nozzle array is D, and the movement direction of the stage before correcting the movement direction of the stage is an X-direction,
the movement directions X\u2032 and Y\u2032 of the stage after correcting the movement direction of the stage are expressed by X\u2032=X\u2212(X\xd7\u03b8t\xd7cos((1\u2212\u03b8t)2)) and Y\u2032=X\xd7sin((1\u2212\u03b8t)2), respectively, and
an ejection timing correction value X(Dn) of the imprint material for a nozzle that is disposed on the n-th order from a reference nozzle position is expressed by X(Dn)=n(\u03b8t+\u03b8d).
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A bobbin for a bar antenna, comprising:
a core holding portion being configured to be mounted with a stick-shaped core; and
a restriction portion being connected to the core holding portion, the restriction portion being configured to restrict a turned-back portion of a conductive wire from moving to a side where a lamination portion is positioned, the conductive wire forming the lamination portion by being wound to the core in a first direction in a longitudinal direction of the core, the turned-back portion serving as a portion being turned back in a second direction that is different from the first direction.
2. The bobbin for the bar antenna according to claim 1, wherein
the restriction portion includes a first restriction portion and a second restriction portion; and
the first restriction portion and the second restriction portion are arranged to be spaced apart from each other in a transverse direction of the core.
3. The bobbin for the bar antenna according to claim 2, wherein
the first restriction portion serving as the first restriction portion of the restriction portion includes a first lamination side surface serving as a surface being formed at the side where the lamination portion is positioned, the first restriction portion includes a first restriction surface serving as a surface being positioned opposite to the first lamination side surface in the longitudinal direction of the core; and
the second restriction portion serving as the second restriction portion of the restriction portion includes a second lamination side surface serving as a surface being formed at the side where the lamination portion is positioned, the second restriction portion includes a second restriction surface serving as a surface being positioned opposite to the second lamination side surface in the longitudinal direction of the core.
4. The bobbin for the bar antenna according to claim 3, wherein the first lamination side surface and the second lamination side surface are dislocated from each other in the longitudinal direction of the core.
5. The bobbin for the bar antenna according to claim 1, further comprising:
a core housing portion being formed with a space that is configured to contain the core; wherein
the core holding portion is connected to an end portion of the core housing portion in the longitudinal direction of the core; and
the restriction portion is formed at one of the core housing portion and the core holding portion.
6. The bobbin for the bar antenna according to claim 5, wherein the core housing portion is formed with a plurality of grooves being positioned along a winding direction of the conductive wire.
7. The bobbin for the bar antenna according to claim 4, wherein the first lamination side surface and the second lamination side surface are dislocated from each other by a length that is different from a diameter of the conductive wire in the longitudinal direction of the core.
8. The bobbin for the bar antenna according to claim 7, wherein the first lamination side surface and the second lamination side surface are dislocated from each other by a length that is a half of the diameter of the conductive wire in the longitudinal direction of the core.
9. A bar antenna, comprising:
a stick-shaped core;
a conductive wire being wound around the core; and
a bobbin of the bar antenna including:
a core holding portion being mounted with the core; and
a restriction portion being connected to the core holding portion,
the restriction portion restricting a turned-back portion of the conductive wire from moving to a side where a lamination portion is positioned, the conductive wire forming the lamination portion by being wound to the core in a first direction in a longitudinal direction of the core, the turned-back portion serving as a portion being turned back in a second direction that is different from the first direction.
10. The bar antenna according to claim 9, wherein
the restriction portion includes a first restriction portion and a second restriction portion; and
the first restriction portion and the second restriction portion are arranged to be spaced apart from each other in a transverse direction of the core.
11. The bar antenna according to claim 10, wherein
the first restriction portion serving as the first restriction portion of the restriction portion includes a first lamination side surface serving as a surface being formed at the side where the lamination portion is positioned, the first restriction portion includes a first restriction surface serving as a surface being positioned opposite to the first lamination side surface in the longitudinal direction of the core; and
the second restriction portion serving as the second restriction portion of the restriction portion includes a second lamination side surface serving as a surface being formed at the side where the lamination portion is positioned, the second restriction portion includes a second restriction surface serving as a surface being positioned opposite to the second lamination side surface in the longitudinal direction of the core.
12. The bar antenna according to claim 11, wherein the first lamination side surface and the second lamination side surface are dislocated from each other in the longitudinal direction of the core.
13. The bar antenna according to claim 9, further comprising:
a core housing portion being formed with a space that contains the core; wherein
the core holding portion is connected to an end portion of the core housing portion in the longitudinal direction of the core; and
the restriction portion is formed at one of the core housing portion and the core holding portion.
14. The bar antenna according to claim 13, wherein the core housing portion is formed with a plurality of grooves being positioned along a winding direction of the conductive wire.
15. The bar antenna according to claim 12, wherein the first lamination side surface and the second lamination side surface are dislocated from each other by a length that is different from a diameter of the conductive wire in the longitudinal direction of the core.
16. The bar antenna according to claim 15, wherein the first lamination side surface and the second lamination side surface are dislocated from each other by a length that is a half of the diameter of the conductive wire in the longitudinal direction of the core.