1460735529-7b968773-5fdd-4d40-9871-7bdce28aadd3

1. A system for generating electricity from steam, comprising:
a steam source for providing steam at a source pressure, the source being communicated with a steam load which requires steam at a load pressure lower than the source pressure, the steam load comprising a chiller;
a flow line connected between the steam source and the steam load and having a pressure reduction valve adapted to reduce steam pressure from the source pressure to the load pressure; and
a pressure reduction valve bypass circuit bypassing the pressure reduction valve and including a steam turbine system operated by steam from the steam source at source pressure for converting a portion of the source pressure to electric power and producing steam at the load pressure, the turbine being communicated to provide power to an electric power load.
2. The system of claim 1, wherein the turbine system comprises a turbine and a motor, the turbine being mounted vertically above the motor and operatively associated with the motor whereby steam drives the turbine and the turbine drives the motor to generate electric current.
3. The system of claim 2, wherein the motor and the turbine each have rotatable elements and wherein the rotatable elements rotate around substantially vertical axes of rotation.
4. The system of claim 2, wherein the turbine is a shrouded wheel turbine.
5. The system of claim 1, wherein the turbine system comprises a two stage turbine.
6. The system of claim 1, wherein the turbine system has a pressure reduction ratio of between about 2 and about 10.
7. The system of claim 1, wherein the turbine system has an efficiency of at least about 60%.
8. The system of claim 1, wherein the steam load comprises a parallel arrangement of said chiller and a heater.
9. The system of claim 1, wherein the turbine system has a nominal rating of at least about 150 kW.
10. The system of claim 1, wherein the turbine system has a nominal rating of at least about 275 kW.
11. The system of claim 1, wherein the chiller is an absorptive chiller and wherein the power load comprises an electric chiller.
12. The system of claim 1, wherein the power load is selected from the group consisting of electric motors, pumps, compressors, fans and combinations thereof
13. The system of claim 1, further comprising a control unit communicated with an inlet valve to the turbine for controlling flow to the inlet to maintain a desired steam pressure.
14. The system of claim 13, wherein the desired steam pressure is the load pressure.
15. A method for generating electric current from steam, comprising the steps of:
providing a steam load requiring steam at a load pressure, the steam load comprising a chiller;
communicating the steam load with a source of steam at a pressure higher than the load pressure;
passing steam from the steam source to the steam load through a pressure reduction valve bypass circuit including a steam turbine system for converting steam to electric current and producing steam at the load pressure, the turbine system being communicated to provide electric current to an electric power load.
16. The method of claim 15, wherein the chiller is an absorptive chiller.
17. The method of claim 15, wherein the steam turbine system comprises a two-stage turbine.
18. The method of claim 15, wherein the steam turbine system has a pressure reduction ratio between about 2 and about 10.
19. The method of claim 15, wherein the turbine system has an efficiency of at least about 60%.
20. The method of claim 15, wherein the turbine system has a nominal rating of at least about 150 kW.
21. The method of claim 15, wherein the turbine system has a nominal rating of at least about 275 kW.
22. The method of claim 15, wherein the electric power load is selected from the group consisting of electric motors, pumps, compressors, fans and combinations thereof.
23. The system of claim 15, wherein the chiller is an absorptive chiller and wherein the power load comprises an electric chiller.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A vapor phase deposition apparatus comprising:
a chamber;
a support table arranged in the chamber, and having a first support unit which is in contact with a back side surface of a substrate and on which the substrate is placed and a second support unit which is connected to the first support unit to support the first support unit;
a heat source arranged at a position having a distance from a back side surface of the substrate, the distance being larger than a distance between back side surface of the support table and the heat source, and which heats the substrate;
a first flow path configured to supply a gas to form a film into the chamber; and
a second flow path configured to exhaust the gas from the chamber.
2. The vapor phase deposition apparatus according to claim 1, wherein
a material of the first support unit uses a material having a heat conductivity higher than that of a material used in the second support unit.
3. The vapor phase deposition apparatus according to claim 2, wherein
silicon carbide (SiC) is used as a material of the first support unit.
4. The vapor phase deposition apparatus according to claim 3, wherein
silicon nitride (Si3N4) is used as a material of the second support unit.
5. The vapor phase deposition apparatus according to claim 2, wherein
a notched portion is formed on at least one upper surface side of the first support unit and the second support unit at a position which the first support unit and the second support unit are connected to each other.
6. The vapor phase deposition apparatus according to claim 2, wherein
a notched portion is formed in the first support unit.
7. The vapor phase deposition apparatus according to claim 6, wherein
the notched portion is formed in a surface being in contact with the back side surface of the substrate.
8. The vapor phase deposition apparatus according to claim 1, wherein
a notched portion is formed in the first support unit.
9. The vapor phase deposition apparatus according to claim 8, wherein
the notched portion is formed in a surface being in contact with the back side surface of the substrate.
10. The vapor phase deposition apparatus according to claim 1, wherein
the first support unit has an annular projecting portion extending on the back side at an outer peripheral portion, and
the second support unit has an opening formed on an inner peripheral side, is in contact with a distal end portion of the projecting portion on a bottom surface of the opening to support the first support unit.
11. The vapor phase deposition apparatus according to claim 1, wherein
the first support unit has a plurality of projecting portions formed on a back surface;
the second support unit has an opening formed on an inner peripheral side, is in contact with a distal end portion of the projecting portion on a bottom surface of the opening to support the first support unit.
12. The vapor phase deposition apparatus according to claim 11, wherein
the first support unit further has a plurality of second projecting portions which are in contact with a side surface of the opening when the first support unit substantially moves in a horizontal direction and which extends to an outer peripheral side.
13. The vapor phase deposition apparatus according to claim 11, wherein
the second support unit has a plurality of second projecting portions which are in contact with a side surface of the first support unit when the first support unit substantially moves in a horizontal direction and which extend to an inner peripheral side.
14. The vapor phase deposition apparatus according to claim 1, wherein
the second support unit has an opening formed on an inner peripheral side and a plurality of projecting portions formed on a bottom surface of the opening, and is in contact with a back surface of the first support unit at a distal end portion of the projecting portion to support the first support unit.
15. The vapor phase deposition apparatus according to claim 14, wherein
the first support unit has a plurality of second projecting portions which are in contact with a side surface of the opening when the first support unit substantially moves in a horizontal direction and which extend to an outer peripheral side.
16. The vapor phase deposition apparatus according to claim 14, wherein
the second support unit has a plurality of second projecting portions which are in contact with a side surface of the first support unit when the first support unit substantially moves in a horizontal direction and which extend to an inner peripheral side.
17. The vapor phase deposition apparatus according to claim 1, wherein
the first and second support units are formed as physically different parts, and the first support unit is placed on a part of the second support unit.
18. A vapor phase deposition apparatus comprising:
a chamber;
a support table arranged in the chamber and formed a first opening which a substrate is placed on its bottom surface, and a second opening what is an annular opening and is located on an outer peripheral side of the first opening and inside an outer peripheral side;
a heat source arranged at a position having a distance from the back side surface of the substrate, the distance being larger than a distance between the substrate and the support table, and which heats the substrate;
a first flow path configured to supply a gas to form a film into the chamber; and
a second flow path configured to exhaust the gas from the chamber.
19. The vapor phase deposition apparatus according to claim 18, wherein
a thickness of a portion of the support table where the second opening is formed is smaller than a thickness of an inner portion of the second opening.
20. A support table for placing a substrate thereon in a chamber held in a vapor phase deposition apparatus, comprising:
a first support unit being in contact with the substrate; and
a second support portion connected to the first support portion and made of a material having a heat conductivity lower than that of a material used in the first support unit.

1460735521-202dd096-5ee3-472b-9daa-cf3801c02508

1. A wireless phone having an antenna disposed in a lanyard-shaped fin, the fin coupled to the phone at 2 points, the antenna coupled to a transceiver within the phone.
2. A wireless phone having two sets of keys, the sets each having a different number of keys, the sets of keys each separately accessible via the placement of bezel corresponding to the different sets of keys.
3. A method, comprising:
receiving an indication to dial a phone number;
determining if the phone number is an emergency number;
increasing the transmit power, and thus SAR, of a wireless phone if the phone number is an emergency number; and
dialing the phone number.
4. A method, comprising:
receiving a call;
determining the phone number of the caller;
determining if the phone number matches an authorized phone number; and
generating a ring tone if the phone number matches an authorized number.
5. The method of claim 4, further comprising illuminating a button on a wireless phone corresponding to the phone number if the phone number matches an authorized number.
6. The method of claim 4, wherein the authorized phone numbers are stored in a database, and wherein the method further comprises:
receiving a message to add an authorized phone number to the database; and
deleting the added phone number from the database after a period of time.
7. The method of claim 4, wherein if the phone number does not match an authorized phone number then receiving a voice password; determining if the voice password matches a password; and generating a ring tone if the voice password matches the password.
8. A system, comprising:
a dialer engine capable of receiving an indication to dial a phone number, capable of determining if the phone number is an emergency number, and capable of dialing the number; and
a SAR engine capable of increasing the transmit power, thus increasing SAR, of a wireless phone if the phone number is an emergency number.
9. A system, comprising:
a called ID engine capable of determining the phone number of the caller;
an authorizer engine capable of determining if the phone number matches an authorized phone number and generating a ring tone if the phone number matches an authorized number.
10. The system of claim 9, further comprising an LED capable of illuminating a button on a wireless phone corresponding to the phone number if the phone number matches an authorized number.
11. The system of claim 9, wherein the authorized phone numbers are stored in a database, and wherein the system further comprises:
an SMS engine capable of receiving a message to add an authorized phone number to the database and deleting the added phone number from the database after a period of time.
12. The system of claim 9 further comprising a voice recognition engine capable of determining if a voice password matches a password; and wherein the authorizer engine generates a ring tone if the voice password matches the password.
13. A system, comprising:
means for receiving an indication to dial a phone number;
means for determining if the phone number is an emergency number;
means for increasing the SAR of a wireless phone if the phone number is an emergency number; and
dialing the phone number.
14. A system, comprising:
means for receiving a call;
means for determining the phone number of the caller;
means for determining if the phone number matches an authorized phone number; and
means for generating a ring tone if the phone number matches an authorized number.
15. A method, comprising:
entering a phone number on a wireless phone having an antenna disposed in a lanyard-shaped fin, the fin coupled to the phone at 2 points, the antenna coupled to a transceiver within the phone; and
pressing a send key to dial the number.
16. A method, comprising:
providing a wireless phone having two sets of keys, the sets each having a different number of keys, the sets of keys each separately accessible via the placement of bezel corresponding to the different sets of keys; and
changing between the bezels.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A micro-mirror device for an image display apparatus, comprising:
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad,
wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror,
wherein the girder includes:
a support plate for supporting the second post, the support plate having connecting portions which protrude from sides of the support plate in a direction parallel to a lengthwise direction of the pair of base electrodes and are point-symmetrical to each other on the basis of the second post; and
a pair of springs which connect an upper surface of each of the pair of first posts to each of the connecting portions,
wherein the pair of springs are elastically deformed when the mirror is vertically inclined by the electrostatic attraction between the mirror and the base electrodes.
2. The micro-mirror device for an image display apparatus of claim 1, wherein each of the pair of base electrodes has a protruding portion protruding inward to widen an area that faces the girder, and
wherein a longest side of the base electrode is parallel to a side of the mirror.
3. The micro-mirror device for an image display apparatus of claim 1, wherein the girder further comprises:
landing tips protruding from opposite sides of the support plate, which contact the landing pad during pivoting.
4. The micro-mirror device for an image display apparatus of claim 1, wherein the pair of first posts have a height that is lower than a height of the second post, so that the mirror does not make an adhesive contact with the pair of base electrodes.
5. A micro-mirror device for an image display apparatus comprising:
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad,
wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror,
wherein the pair of first posts have a height that is lower than a height of the second post, so that the mirror does not make an adhesive contact with the pair of base electrodes, and
wherein the girder includes:
a support plate for supporting the second post, the support plate having connecting portions which protrude from sides of the support plate in a direction parallel to a lengthwise direction of the pair of base electrodes and are point-symmetrical to each other on the basis of the second post; and
a pair of springs which connect an upper surface of each of the pair of first posts to each of the connecting portions,
wherein the pair of springs are elastically deformed in opposite directions when the mirror is vertically inclined by the electrostatic attraction between the mirror and the pair of base electrodes.
6. The micro-mirror device for an image display apparatus of claim 5, wherein the girder further comprises:
landing tips protruding from opposite sides of the support plate, which contact the landing pad during pivoting.
7. The micro-mirror device for an image display apparatus of claim 4, wherein each of the pair of base electrodes has a protruding portion protruding inward to widen an area that faces the girder.
8. The micro-mirror device for an image display apparatus of claim 1, wherein the mirror is pivoted around an axis that is parallel to a lengthwise direction of the pair of base electrodes, the lengthwise direction being parallel to a side of the mirror.
9. An image display device, comprising:
a plurality of micro-mirror devices, wherein each of the plurality of micro-mirror devices comprises:
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, an receives power via the landing pad,
wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirrors,
wherein said girder includes a pair of spring members, and said mirror has an axis of rotation which is perpendicular to a lengthwise direction of said pair of spring members, wherein the pair of spring members respectively connect the girder to the pair of first posts.
10. The image display device of claim 9, wherein the plurality of micro-mirror devices are arrayed to form a two-dimensional structure.
11. The image display device of claim 9, wherein an area ratio of each of the plurality of micro-mirror devices is controlled by the electrostatic attraction between the pair of base electrodes and the mirror.
12. A method of reflecting light using a micro-mirror device in an image display apparatus, comprising:
supplying a driving voltage to at least one of a pair of base electrodes of the micro-mirror device, the base electrodes having a landing pad disposed therebetween;
creating an electrostatic attraction between the at least one of the pair of the base electrodes and a mirror, wherein the mirror is pivotally supported by a pair of spring members so as to be pivoted around an axis formed in a lengthwise direction of the pair of base electrodes such that one of the spring members is forced in a direction opposite a direction of the other of the spring members when the mirror is pivoted, the spring members being connected to a support plate; and
altering the driving voltage which is supplied to the at least one of the pair of base electrodes so that a reflection angle of light incident upon the mirror is controlled and so that landing tips, which protrude from the support plate, contact the landing pad when the mirror is pivoted.
13. The micro-mirror device for an image display apparatus of claim 1, wherein the pair of base electrodes oppose each other in a non-diagonal manner with respect to the mirror.
14. The image display device of claim 9, wherein the pair of base electrodes oppose each other in a non-diagonal manner with respect to the mirror.
15. A micro-mirror device for an image display apparatus comprising:
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad,
wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror,
wherein said girder includes a pair of spring members, each spring member respectively having an end in connection with one of said first posts, and wherein said spring members are disposed so that one of said spring members is forced in a direction opposite direction of the other of said spring members when said mirror is pivoted, and
wherein the girder includes landing tips which protrude from sides of the girder and contact the landing pad when the mirror is pivoted.
16. A micro-mirror device for an image display apparatus, comprising:
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad,
wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror,
wherein said girder includes a pair of spring members, and said mirror has an axis of rotation which is perpendicular to a lengthwise direction of said pair of spring members, wherein the pair of spring members respectively connect the girder to the pair of first posts.
17. An image display device, comprising:
a plurality of micro-mirror devices, wherein each of the plurality of micro-mirror devices comprises:
a substrate;
a landing pad provided on the substrate;
a pair of base electrodes provided on opposite sides of the landing pad;
a pair of first posts that protrude from an upper surface of the landing pad, which are isolated from each other by a predetermined interval;
a girder supported by the pair of first posts, which is operative to pivot toward sides of the base electrodes;
a second post protruding from an upper surface of the girder; and
a mirror supported by the second post, which reflects incident light, and receives power via the landing pad,
wherein the mirror is pivoted toward the sides of the landing pad by an electrostatic attraction between the pair of base electrodes and the mirror,
wherein said girder includes a pair of spring members, each spring member respectively having an end in connection with one of said first posts, and wherein said spring members are disposed so that one of said spring members is forced in a direction opposite a direction of the other of said spring members when said mirror is pivoted, and
wherein the girder includes landing tips which protrude from sides of the girder and contact the landing pad when the mirror is pivoted.