What is claimed is:
1. A characterization vehicle, comprising:
a substrate having at least one layer; and
a plurality of pairs of lines on a single surface of a single layer of the substrate, each pair of lines having a shared pad therebetween.
2. The characterization vehicle of claim 1, wherein the lines are nested serpentine lines.
3. The characterization vehicle of claim 2, wherein none of the nested serpentine lines crosses any other one of the nested serpentine lines.
4. The characterization vehicle of claim 2, wherein the nested serpentine lines within each pair are not adjacent to each other.
5. The characterization vehicle of claim 2, wherein:
each pair of lines includes a respective first line and a respective second line;
the first lines are arranged in a first sequence; and
the second lines are arranged in a second sequence different from the first sequence.
6. The characterization vehicle of claim 5, wherein:
each first line has a respective position within the first sequence;
each second line has a respective position within the second sequence; and
within each pair of lines, the position of the second line within the second sequence is different from the position of the corresponding first line within the first sequence.
7. The characterization vehicle of claim 5, wherein:
the first line in each pair is adjacent to one or more neighboring first lines;
the second line in each pair is adjacent to one or more neighboring second lines; and
the one or more neighboring second lines corresponding to the second line in each respective pair belong to different pairs of lines than the one or more neighboring lines corresponding to the first line in that pair.
8. The characterization vehicle of claim 5, wherein:
for each position, the first line having that position in the first sequence belongs to a different pair of lines than the second line having that position within the second sequence.
9. The characterization vehicle of claim 2, wherein:
the surface has first and second sides;
each pair of nested serpentine lines includes a first line and a second line, such that:
the first line extends beyond the pads on the first side of the surface;
the second line extends beyond the pads on the second side of the surface; and
none of the nested serpentine lines crosses any other one of the nested serpentine lines.
10. A method of designing a characterization vehicle, comprising the steps of:
arranging a plurality of pairs of lines on a single surface of a single layer of a substrate; and
locating a respective shared pad between the lines of each pair of lines.
11. The method of claim 10, wherein the lines are nested serpentine lines.
12. The method of claim 11, wherein none of the nested serpentine lines crosses any other one of the nested serpentine lines.
13. The method of claim 11, wherein the nested serpentine lines within each pair are not adjacent to each other.
14. The method of claim 11, wherein:
each pair of lines includes a respective first line and a respective second line;
the first lines are arranged in a first sequence; and
the second lines are arranged in a second sequence different from the first sequence.
15. The method of claim 14, wherein:
each first line has a respective position within the first sequence;
each second line has a respective position within the second sequence; and
within each pair of lines, the position of the second line within the second sequence is different from the position of the corresponding first line within the first sequence.
16. The method of claim 14, wherein:
the first line in each pair is adjacent to one or more neighboring first lines;
the second line in each pair is adjacent to one or more neighboring second lines; and
the one or more neighboring second lines corresponding to the second line in each respective pair belong to different pairs of lines than the one or more neighboring lines corresponding to the first line in that pair.
17. A method of identifying defects, comprising the steps of:
fabricating a characterization vehicle by forming a plurality of pairs of lines on a single surface of a single layer of a substrate, each pair of lines having a shared pad therebetween; and
collecting defect data from the characterization vehicle.
18. The method of claim 17, wherein the lines are nested serpentine lines.
19. The method of claim 18, further comprising determining which one of a pair of serpentine lines sharing a pad therebetween has a defect by identifying a sequence of serpentine lines that are shorted together.
20. A method of determining defect size distributions, comprising the steps of:
(a) collecting defect size distributions from a characterization vehicle by forming a plurality of pairs of lines on a single surface of a single layer of a substrate, each pair of nested having a shared pad therebetween; and
(b) determining which one of a pair of lines sharing a pad therebetween has a defect by identifying a sequence of the that are shorted together.
21. The method of claim 20, wherein the lines are nested serpentine lines.
22. The method of claim 21, wherein step (a) includes forming a histogram of a number of defects detected versus defect size.
23. The method of claim 21, wherein step (a) includes forming a histogram of a number of defects detected versus defect size.
24. The method of claim 23, further comprising using the defect density function to form a yield model.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An amorphous microwire coated with an insulating sleeve, consisting of:
a metal core made up of an alloy of transition metals and metalloid elements, in a proportion between 65%\u201390% and 10%\u201335%, respectively,
an insulating glass sleeve
characterized in that
the transition metals are at least iron, the relative proportion of iron being between 65%\u2013100% of the total transition metals,
and in that
the core diameter (Dc) is comprised between 2 \u03bcm and 20 \u03bcm, such that the magnetostriction constant (\u03bb) of the metal alloy is comprised between 1 and 30 ppm, and the natural ferromagnetic resonance frequency is comprised between 3 and 20 GHz.
2. A microwire according to claim 1, characterized in that the core diameter (Dc) is comprised between 2 \u03bcm and 10 \u03bcm.
3. A microwire according to claim 1, characterized in that the metalloid elements are manganese, silicon, boron and carbon.
4. A microwire according to claim 1, characterized in that the proportion of the core diameter (Dc) to the total diameter (Dt) of the microwire is comprised between 0.18 and 0.6.
5. A microwire according to claim 1, characterized in that the composition of the metal core is Fe89B1Si3C3Mn4.
6. A microwire according to claim 1, characterized in that the composition of the metal core is Fe69B16Si10C5.
7. A microwire according to claim 1, characterized in that it has a bistable magnetic behavior.
8. A microwire according to claim 1, characterized in that it has an anisotropy field comprised between 0.5 and 10 Oe.
9. A microwire according to claim 1, characterized in that its natural ferromagnetic resonance frequency increases with the anisotropy field.