Author: claimsbot

I claim:

1. The combination of a removable sewer basket with a sewer basket support for retaining said basket at a selected level within a vertical sewer pipe having an interior surface and an opening at street level, said basket including a plurality of filter units, each one of said filter units having a frame and a filter screen secured to and closing said frame, said basket support being adapted for fixing to said interior surface of said sewer pipe at the selected level below street level, and a plurality of handle devices accessible at said street level to position and place a respective one of said filter units on and to retrieve said filter units from said basket support, said filter units adjacently and releasably resting on said basket support.
2. The combination as defined in claim 1, wherein said basket support being expandable and having at least one pair of opposite spaced free ends, an adjustable expansion device joining said opposite ends to expand said basket support against said interior surface of said sewer pipe and to fix said support to said interior surface at the selected level below street level.
3. The combination as defined in claim 2, wherein said basket support including a frame forming strip, said opposite ends formed by the ends of said strip include inturned perforated ears, and said expansion device includes a bolt extending through and joining said ears and nuts screwed onto said bolts and engaging said ears to spread said ears apart and retain said ears spaced apart from each other.
4. The combination as defined in claim 3, wherein said strip having inwardly directed ears on which said filter units removably rest.
5. The combination as defined in claim 4, wherein said basket support further including an intermediate support releasably resting on said strip, said intermediate support having a substantially flat lattice shape releasably supporting said filter units resting thereon.
6. The combination as defined in claim 1, wherein said opening at street level being of a small size relative to a cross-section of said vertical sewer pipe, each one of said filter units having an overall horizontal dimension so as to get through said opening while being in a substantially horizontal orientation.
7. The combination as defined in claim 1, wherein each one of said frames including a crossbar secured to opposite sections of said frame, each one of said handle devices including a post with a handle at an upper end of said post, a lower end of said post adjustably and releasably attaching to a respective one of said crossbars via a connecting member.
8. The combination as defined in claim 7, wherein each one of said connecting members being substantially located at a center of gravity of a respective one of said filter units.
9. The combination as defined in claim 7, wherein each one of said crossbars being straight and overlies said filter screen.
10. The combination as defined in claim 7, wherein each one of said connecting members being a nut secured to said crossbar, said lower end of said post being externally threaded to releasably and adjustably engage said nut.
11. The combination as defined in claim 10, wherein each one of said crossbars having a through hole slidably engaged by said post, said nut engaging said threaded lower section of said post below said through hole.
12. The combination as defined in claim 10, wherein said intermediate support including at least two adjacent parts releasably resting on said strip.
13. The combination as defined in claim 12, wherein each one of said at least two adjacent parts having a flat lattice shape.
14. The combination as defined in claim 12, wherein one of said at least two adjacent parts having a common positioning member.
15. The combination as defined in claim 14, wherein said common positioning member being located at a center area of said intermediate support overlying and freely abutting on the others of said at least two adjacent parts.
16. The combination as defined in claim 1, wherein said basket support including a plurality right angle brackets each having a lateral wall and a top wall, each one of said right angle brackets including a fastening member securing said lateral wall against said interior surface of said sewer pipe at the selected level below street level, each one of said top walls supporting at least on of said filter units thereon.
17. The combination as defined in claim 16, wherein said basket support further including an intermediate support releasably resting on said top walls, said intermediate support having a substantially flat lattice shape and releasably supporting said filter units resting thereon.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A compound selected from Formulas Ia and Ib:
and pharmaceutically acceptable salts thereof, wherein:
X is O, S or NR10;
Z2 and Z3 are independently selected from CR4 and N, wherein zero or one of Z2 and Z3 is N;
R1 is H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, \u2014C(\u2550O)NR10R11, or \u2014(CR14R15)tNR10R11, or
R1 is C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, CN, CF3, oxo, \u2014OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014(CR14R15)n\u2014NR10R11, \u2014NR10C(\u2550Y)R13, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)NR10R11, \u2014NR12SO2R10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, C1-C20 heteroaryl, \u2014(CR14R15)\u2014NR12C(\u2550O)(CR14R15)NR10R11, and (CR14R15)tNR10R11, or
R1 is NRxRy;
R2 is H, CF3, CN, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014C(\u2550O)NR12(CR14R15)tNR10R11, \u2014SR10, \u2014S(O)R10, \u2014S(O)2R10, S(O)2NR10R11, \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl, and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, (CH2)nOR10, (CH2)nNR10R11, heteroaryl and heterocyclyl;
R3 is C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl or C1-C20 heteroaryl, wherein said carbocyclyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, CN, CF3, OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, \u2014NR10C(\u2550Y)R13, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)NR10R11, \u2014NR12C(\u2550O)C(\u2550O)R10R11, \u2014NR12C(\u2550O)C(\u2550O)ORa, \u2014NR12SO2R10, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)NR10R11, \u2014NR12C(\u2550Y1)NR10C(\u2550Y2)(CR14R15)nR11, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)(CR14R15)mR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl and C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, cycloalkyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, OH, C1-C12 alkyl, NR10R11, and (CR14R15)n-aryl;
R4 is H, F, Cl, Br, CF3, CN, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, NR10C(\u2550Y)R10, NR10C(\u2550Y)OR11, NR12C(\u2550Y)NR10R11, \u2014NR12SO2NR10R11, \u2014OR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014C(\u2550O)NR12(CR14R15)tNR10R11, \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014SR10, \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl;
R10, R11 and R12 are independently H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, (CR14R15)nC2-C20 heterocyclyl, (CR14R15)nC6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl, and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, SO2Rc, CN, ORa, NRaRb, C(\u2550O)NRaRb, CRaC(\u2550O)Rb, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C6-C20 aryl, and C1-C20 heteroaryl,
or R10 and R11 together with the nitrogen to which they are attached optionally form a saturated, partially unsaturated or fully unsaturated C3-C20 heterocyclic ring optionally containing one or more additional ring atoms selected from N, O or S, wherein said heterocyclic ring is optionally substituted with one or more groups independently selected from oxo, (CH2)nORa, NRaRb, CF3, F, Cl, Br, I, SO2Ra, C(\u2550O)Ra, NR10C(\u2550Y)R11, C(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl and C1-C20 heteroaryl,
or R10 and R12 together with the atoms to which they are attached form an oxo-substituted C3-C20 heterocyclic ring optionally fused to a benzene ring;
R13 is H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, (CR14R15)n-cycloalkyl, (CR14R15)n-heterocyclyl, (CR14R15)n-aryl, (CR14R15)n-heteroaryl, (CR14R15)\u2014O\u2014(CR14R15)m-aryl, (CR14R15), \u2014OR10, (CR14R15)n\u2014NR10R11, (CR14R15)n\u2014NR10C(\u2550O)R11, or (CR14R15)n\u2014NR10(SO2Me)-R11, wherein said alkyl, alkenyl, alkynyl, cycloalkyl, heterocycloalkyl, and heteroaryl portions are optionally substituted with one or more groups independently selected from F, Cl, Br, I, oxo, SO2Rc, CN, ORa, C(\u2550O)Ra, C(\u2550O)ORa, NRaRb, NRaC(\u2550O)Rb, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, and C1-C20 heteroaryl;
each R14 and R15 is independently H, C1-C12 alkyl, or (CH2)t-aryl,
or R14 and R15 together with the atoms to which they are attached form a saturated or partially unsaturated C3-C12 carbocyclic ring,
or R10 and R15 together with the atoms to which they are attached form an oxo-substituted saturated or partially unsaturated monocyclic or bicyclic C1-C20 heterocyclic ring optionally further substituted with one or more groups independently selected from F, Cl, Br, I, ORa, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl and aryl are optionally substituted with one or more groups independently selected from F, Cl, Br, and I,
or R14 is null and R10 and R15 together with the atoms to which they are attached form a C1-C20 heteroaryl ring having one or more heteroatoms;
Ra and Rb are independently H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl, and heteroaryl are optionally substituted with one or more alkyl groups;
Rc is C1-C12 alkyl or C6-C20 aryl, wherein said alkyl and aryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, ORa and C(\u2550O)NRaRb;
Rx is H or C1-C6 alkyl;
Ry is (i) (C1-C6 alkyl)NRjRk wherein Rj and Rk are independently H or C1-C6 alkyl; (ii) C5-C6 cycloalkyl optionally substituted with OH or \u2014OC(\u2550O)CF3; or (iii) a 5-6 membered heterocyclic ring having 1 to 2 ring heteroatoms independently selected from N and O and optionally substituted with a halogen group, C1-C6 alkyl, (C1-C6 alkyl)OH, (C1-C6 alkyl)O(C1-C6 alkyl), or C1-C6 fluoroalkyl;
Y, Y1 and Y2 are independently O or S;
t is 1, 2, 3, 4, 5 or 6; and
n and m are independently 0, 1, 2, 3, 4, 5 or 6.
2. The compound of claim 1, wherein:
X is O, S or NR10;
Z2 and Z3 are independently selected from CR4 and N, wherein zero or one of Z2 and Z3 is N;
R1 is H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, \u2014C(\u2550O)NR10R11, or \u2014(CR14R15)tNR10R11, or
R1 is C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, CN, CF3, oxo, \u2014OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014(CR14R15), \u2014NR10R11, \u2014NR10C(\u2550Y)R13, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)N\u2014R10R11, \u2014NR12SO2R10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, C1-C20 heteroaryl, \u2014(CR14R15)\u2014NR12C(\u2550O)(CR14R15)NR10R11, and (CR4R5)NR10R11,
R2 is H, CF3, CN, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014C(\u2550O)NR12(CR14R15)tNR10R11, \u2014SR10, \u2014S(O)R10, \u2014S(O)2R10, S(O)2NR10R11, \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl, and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, (CH2)nOR10, (CH2)nNR10R11, heteroaryl and heterocyclyl;
R3 is C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl or C1-C20 heteroaryl, wherein said carbocyclyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, CN, CF3, OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, \u2014NR10C(\u2550Y)R11, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)NR10R11, \u2014NR12C(\u2550O)C(\u2550O)R10R11, \u2014NR12C(\u2550O)C(\u2550O)ORa, \u2014NR12SO2R10, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)NR10R11, \u2014NR12C(\u2550Y1)NR10C(\u2550Y2)(CR14R15)nR11, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)(CR14R15)mR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl and C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, cycloalkyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, OH, C1-C12 alkyl, NR10R11, and (CR14R15)n-aryl;
R4 is H, F, Cl, Br, CF3, CN, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, \u2014NR10C(\u2550Y)R11, NR10C(\u2550Y)OR11, NR12C(\u2550Y)NR10R11, \u2014NR12SO2NR10R11, \u2014OR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014C(\u2550O)NR12(CR14R15)tNR10R11, \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014SR10, \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl;
R10, R11 and R12 are independently H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl, and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, SO2Rc, CN, ORa, NRaRb, C(\u2550O)NRaRb, CRaC(\u2550O)Rb, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C6-C20 aryl, and C1-C20 heteroaryl,
or R10 and R11 together with the nitrogen to which they are attached optionally form a saturated, partially unsaturated or fully unsaturated C3-C20 heterocyclic ring optionally containing one or more additional ring atoms selected from N, O or S, wherein said heterocyclic ring is optionally substituted with one or more groups independently selected from oxo, (CH2)nORa, NRaRb, CF3, F, Cl, Br, I, SO2Ra, C(\u2550O)Ra, NR10C(\u2550Y)R11, C(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl and C1-C20 heteroaryl,
or R10 and R12 together with the atoms to which they are attached form an oxo-substituted C3-C20 heterocyclic ring optionally fused to a benzene ring;
R13 is H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, (CR14R15)n-cycloalkyl, (CR14R15)n-heterocyclyl, (CR14R15)n-aryl, (CR14R15)n-heteroaryl, (CR14R15)n\u2014O\u2014(CR14R15)m-aryl, (CR14R15)n\u2014OR10, (CR14R15)n\u2014NR10R11, (CR14R15)n\u2014NR10C(\u2550O)R11, or (CR14R15)n\u2014NR10(SO2Me)-R11, wherein said alkyl, alkenyl, alkynyl, cycloalkyl, heterocycloalkyl, and heteroaryl portions are optionally substituted with one or more groups independently selected from F, Cl, Br, I, oxo, SO2RcC, CN, ORa, C(\u2550O)Ra, C(\u2550O)ORa, NRaRb, NRaC(\u2550O)Rb, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, and C1-C20 heteroaryl;
each R14 and R15 is independently H, C1-C12 alkyl, or (CH2)t-aryl,
or R14 and R15 together with the atoms to which they are attached form a saturated or partially unsaturated C3-C12 carbocyclic ring,
or R10 and R15 together with the atoms to which they are attached form an oxo-substituted saturated or partially unsaturated C1-C20 heterocyclic ring optionally further substituted with one or more groups independently selected from F, Cl, Br, I, ORa, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl and aryl are optionally substituted with one or more groups independently selected from F, Cl, Br, and I,
or R14 is null and R10 and R15 together with the atoms to which they are attached form a C1-C20 heteroaryl ring having one or more heteroatoms;
Ra and Rb are independently H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl, and heteroaryl are optionally substituted with one or more groups independently selected from C1-C6 alkyl and halogen;
Rc is C1-C12 alkyl or C6-C20 aryl, wherein said alkyl and aryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, ORa and C(\u2550O)NRaRb;
Y, Y1 and Y2 are independently O or S;
t is 1, 2, 3, 4, 5 or 6; and
n and m are independently 0, 1, 2, 3, 4, 5 or 6.
3. The compound of claim 1, wherein Formulas Ia and Ib are:
wherein R1 is H, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, \u2014C(\u2550O)NR10R11, or \u2014(CR14R15)tNR10R11, or
R1 is C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl or C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, carbocyclyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, CN, CF3, oxo, \u2014OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014(CR14R15)\u2014NR10R11, \u2014NR10C(\u2550Y)R13, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)NR10R11, \u2014NR12SO2R10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl, C1-C20 heteroaryl, \u2014(CR14R15)\u2014NR12C(\u2550O)(CR14R15)NR10R11, and (CR14R15)tNR10R11, or
R1 is NRxRy; and
R3 is C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl or C1-C20 heteroaryl, wherein said carbocyclyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, CN, CF3, OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, \u2014NR10C(\u2550Y)R13, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)NR10R11, \u2014NR12C(\u2550O)C(\u2550O)R10R11, \u2014NR12C(\u2550O)C(\u2550O)ORa, \u2014NR12SO2R10, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)NR10R11, \u2014NR12C(\u2550Y1)NR10C(\u2550Y2)(CR14R15)nR11, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)(CR14R15)mR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl and C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, cycloalkyl; heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, OH, C1-C12 alkyl, NR10R11, and (CR14R15)n-aryl.
4. The compound of claim 1, wherein R2 is C1-C6 alkyl or H.
5. The compound of claim 4, wherein Z2 and Z3 are CR4, and each R4 is independent of the other.
6. The compound of claim 5, wherein Z2 is CH, CCl, CF or CC(\u2550O)NH2 and Z3 is CH.
7. The compound of claim 5, wherein Z2 is CH and Z3 is CH.
8. The compound of claim 5, wherein X is O.
9. The compound of claims 5, wherein X is NR10.
10. The compound of claim 9, wherein X is the structure:
11. The compound of claim 8, wherein R1 is H, C1-C4 alkyl, CF3, CHF2 or CH2F.
12. The compound of claim 8, wherein R1 is alkynyl optionally substituted by (CR14R15)\u2014NR12C(\u2550O)(CR14R15)NR10R11 or (CR4R5)tNR10R11.
13. The compound of claim 12 wherein R1 is selected from the structures:
14. The compound of claim 8 wherein R1 is
(i) phenyl optionally substituted with halogen, C1-C6 alkyl, C(\u2550O)C1-C6 alkyl, C(\u2550O)(C3-C6 cycloalkyl), C(\u2550O)O(C1-C6 alkyl), CH2-heteroaryl (wherein said heteroaryl is a 5 membered ring having 2-3 ring nitrogen atoms), CH2-hetCyc (wherein hetCyc is a 6 membered ring having 1 to 2 ring heteroatoms independently selected from N and O and optionally substituted with C1-C6 alkyl), C(\u2550O)NH(CH2)2-hetCyc wherein hetCyc is a 6 membered ring having 1 to 2 ring heteroatoms independently selected from N and O), SO2NH(C1-C6 alkyl), NMeOMe, C(\u2550O)NRhRi, or NRhRi wherein Rh and Ri are independently H or C1-C6 alkyl, or
(ii) a 5-6 membered heteroaryl having a ring heteroatom selected from N and O and optionally substituted with C(\u2550O)NH(C1-C6 alkyl) or CH2-hetCyc wherein hetCyc is a 6 membered azacycle (such as a piperazinyl group) optionally substituted with C1-C6 alkyl.
15. The compound of claim 14 wherein R1 is selected from:
16. The compound of claim 8, wherein R1 is a 5 membered heteroaryl having at least one N heteroatom and optionally substituted with C1-C6 alkyl.
17. The compound of claim 16, wherein R1 is selected from the structures:
18. The compound of claim 8, wherein R1 is \u2014C(\u2550O)NR10R11 or \u2014(CR14R15)tNR10R11.
19. The compound of claim 18, wherein R1 is selected from the structures
20. The compound of claim 8, wherein R1 is alkyl optionally substituted with one or more groups independently selected from OR10, NR10R11, heterocyclyl and heteroaryl.
21. The compound of claim 20, wherein R1 is methyl, CH2OH, CH2CH2OH, CH2CH2CH2OH, CH(OH)CH2OH,
22. The compound of claim 8, wherein R1 is a 5-6 membered heteroaryl ring having 1 to 2 ring heteroatoms independently selected from N and O and optionally substituted with one or more groups independently selected from Br, hetCyc and CH2-hetCyc, wherein hetCyc is a 6 membered heterocyclic ring having a ring nitrogen atom and optionally having a second ring heteroatom selected from N and O, wherein hetCyc is optionally substituted with C1-C6 alkyl or (C1-C6 alkyl)OH.
23. The compound of claim 22, wherein R1 is selected from the structures:
24. The compound of claim 8, wherein R1 is a saturated or partially unsaturated 5-10 membered monocyclic or bicyclic heterocyclic ring, wherein said ring has one or two ring atoms independently selected from N and O and is optionally substituted with C1-C6 alkyl, (C1-C6 alkyl)O(C1-C6 alkyl), NR10R11 or CH2NR10R11 wherein R10 and R11 are independently H, C1-C6 alkyl, hetCyc or CH2hetCyc, wherein hetCyc is a 5-6 membered ring having one or two ring nitrogen atoms.
25. The compound of claim 24, wherein R1 is:
26. The compound of claim 8, wherein R1 is NRxRy.
27. The compound of claim 26, wherein R1 is
28. The compound of claim 8, wherein R1 is \u2014(CR14R15)tNR10R11.
29. The compound of claim 28, wherein R1 is the structure:
30. The compound of claim 8, wherein:
R4 is
Z4, Z5, Z6, and Z7 are independently CR4a or N and 0, 1, or 2 of Z4, Z5, Z6, and Z7 is N, wherein when Z4 and Z5 or Z6 and Z7 are CR4a, then Z4 and Z5 or Z6 and Z7 optionally form a saturated, partially unsaturated or fully unsaturated carbocyclic or heterocyclic ring;
each R4a is independently H, F, Cl, Br, CF3, CN, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, NR10C(\u2550Y)R11, NR10C(\u2550Y)OR11, NR12C(\u2550Y)NR10R11, \u2014NR12SO2NR10R11, \u2014OR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014C(\u2550O)NR12(CR14R15)tNR10R11, \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014SR10, \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 carbocyclyl, C2-C20 heterocyclyl, C6-C20 aryl, or C1-C20 heteroaryl; and
R5 is F, Cl, Br, I, CN, CF3, OR10, SR10, \u2014C(\u2550Y)R10, \u2014C(\u2550Y)OR10, \u2014C(\u2550Y)NR10R11, \u2014NR10R11, \u2014NR10C(\u2550Y)R13, \u2014NR10C(\u2550Y)OR11, \u2014NR12C(\u2550Y)NR10R11, \u2014NR12C(\u2550O)C (\u2550O)R10R11, NR12C(\u2550O)C(\u2550O)ORa, \u2014NR12SO2R10, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)NR10R11, \u2014NR12C(\u2550Y1)NR10C(\u2550Y2)(CR14R15)nR11, \u2014NR12C(\u2550Y1)(CR14R15)nC(\u2550Y2)(CR14R15)mR10, \u2014OC(\u2550Y)R10, \u2014OC(\u2550Y)OR10, \u2014OC(\u2550Y)NR10R11, \u2014OS(O)2(OR10), \u2014OP(\u2550Y)(OR10)(OR11), \u2014OP(OR10)(OR11), \u2014S(O)R10, \u2014S(O)2R10, \u2014S(O)2NR10R11, \u2014S(O)(OR10), \u2014S(O)2(OR10), \u2014SC(\u2550Y)R10, \u2014SC(\u2550Y)OR10, \u2014SC(\u2550Y)NR10R11, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C3-C12 cycloalkyl, C2-C20 heterocyclyl, C6-C20 aryl and C1-C20 heteroaryl, wherein said alkyl, alkenyl, alkynyl, cycloalkyl, heterocyclyl, aryl and heteroaryl are optionally substituted with one or more groups independently selected from alkyl, NR10R11, and (CR14R15)n-aryl.
31. The compound of claim 30, wherein R3 is selected from the structures:
and substituted forms thereof.
32. The compound of claim 31, wherein R3 is selected from the structures
33. The compound of claim 30, wherein
R3 is
and
each R4a is independently H, F, Cl, C1-C6 alkyl, O\u2014(C1-C6 alkyl), or CN.
34. The compound of claim 33, wherein R3 is selected from the structures:
35. The compound of claim 30 wherein R3 is
36. The compound of claim 30, wherein R5 is
37. The compound of claim 36, wherein R11 is an aryl group optionally substituted with F.
38. The compound of claim 36, wherein R14 and R15 together with the atom to which they are attached form an optionally substituted carbocyclic ring.
39. The compound of claim 36, wherein R15 and R10 together with the atoms to which they are attached form an oxo-substituted 5, 6 or 7 membered monocyclic or bicyclic heterocycle.
40. The compound of claim 36, wherein R5 is
41. The compound of claim 36, wherein R14 is null and R10 and R15 together with the atoms to which they are attached form an oxo-substituted 6 membered heteroaryl ring having one or two ring nitrogen atoms.
42. The compound of claim 41, wherein R5 is selected from the structures:
wherein Rd is F, Cl, Br, I, SO2Rc, CN, ORa, NRaRb, C(\u2550O)NRaRb, CRaC(\u2550O)Rb, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C6-C20 aryl, or C1-C20 heteroaryl.
43. The compound of claim 30, wherein R5 has the structure:
wherein R14a and R15a are H, or R14 and R15 together with the atoms to which they are attached form a cyclopropylidene group.
44. The compound of claim 43, wherein R10 is phenyl or CH2-phenyl optionally substituted with a halogen group.
45. The compound of claim 44, wherein R5 is selected from the structures:
46. The compound of claim 30, wherein R5 has the structure:
wherein R11 is phenyl optionally substituted with halogen.
47. The compound of claim 46, wherein R5 is selected from the structures
48. The compound of claim 30, wherein R5 has the structure:
wherein R13 is:
(i) C1-C6 alkyl;
(ii) (CR14R15)\u2014O\u2014(CH2)m-phenyl, wherein said phenyl is optionally substituted with halogen, R14 and R15 are independently H or methyl, and m is 0 or 1;
(iii) ORa, wherein R1 is C1-C6 alkyl or phenyl;
(iv) (C1-C3 alkyl)-phenyl;
(v) (C1-C2 alkyl)-hetAr wherein hetAr is a 6 membered heteroaryl ring having one or two ring nitrogen atoms. A particular example of R13 is (C1-C2 alkyl)-pyridyl;
(vi) a 5-6 membered heteroaryl ring having 1 to 2 ring atoms independently selected from N, O and S and optionally substituted with one or two groups independently selected from NH-phenyl, morpholinyl, phenyl, and C1-C6 alkyl;
(vii) phenyl optionally substituted with one or two groups independently selected from CN, F, O-phenyl, N(C1-C6 alkyl)2, and NHC(\u2550O)(C1-C6 alkyl);
(viii) CH2\u2014N(C1-C4 alkyl)SO2Ra or CH2\u2014N(CH2Ph)SO2Ra, wherein Ra is C1-C6 alkyl, phenyl or a 5 membered heteroaryl ring having one or two ring heteroatoms independently selected from N and O and optionally substituted with C1-C6 alkyl;
(ix) (CH2)n-hetCyc wherein n is 0 or 1 and hetCyc is a saturated or partially saturated 6 membered heterocyclic ring having a ring nitrogen atom and optionally substituted with oxo, C(\u2550O)(C1-C6 alkyl), SO2\u2014(C1-C6 alkyl), SO2-phenyl or C(\u2550O)O(C1-C6 alkyl);
(x) C1-C6 alkyl optionally substituted with (C3-C6)cycloalkyl or O\u2014(C1-C6 alkyl);
(xi) CH2N(C1-C6 alkyl)C(\u2550O)phenyl; or
(xii) (CR14R15)hetAr.
49. The compound of claim 48, wherein R5 is selected from the structures:
50. The compound of claim 30, wherein R5 is
wherein R11 is aryl or heteroaryl optionally substituted with C1-C6 alkyl.
51. The compound of claim 50, wherein R5 is selected from the structures:
52. The compound of claim 50, wherein R10 and R12 together with the atoms to which they are attached form an oxo-substituted 6 membered heterocyclic ring, wherein said heterocyclic ring is optionally fused to a phenyl ring.
53. The compound of claim 52, wherein R5 is selected from the structures:
54. The compound of claim 30, wherein R5 is NR12SO2R10, wherein R10 is phenyl optionally substituted with halogen, O\u2014(C1-C6 alkyl), or C(\u2550O)NH(C1-C6 alkyl).
55. The compound of claim 54, wherein R5 is selected from the structures:
56. The compound of claim 30, wherein R5 is NR12C(\u2550O)C(\u2550O)NR10R11.
57. The compound of claim 56, wherein R5 is
58. The compound of claim 30, wherein R5 is NR12C(\u2550O)C(\u2550O)ORa.
59. The compound of claim 58, wherein R5 is
60. The compound of claim 30, wherein R5 is selected from the structures:
wherein R20 is alkyl, cycloalkyl, aryl, or heteroaryl, and R21 and R22 are independently selected from H or alkyl, wherein said alkyl, cycloalkyl, aryl, heteroaryl are optionally substituted with one or more groups independently selected from F, Cl, Br, I, alkyl and C3-C6 cycloalkyl.
61. The compound of claim 60, wherein R5 is selected from the structures:
wherein:
Rd is F, Cl, Br, I, SO2Rc, CN, ORa, NRaRb, C(\u2550O)NRaRb, CRaC(\u2550O)Rb, C1-C12 alkyl, C2-C8 alkenyl, C2-C8 alkynyl, C6-C20 aryl, and C1-C20 heteroaryl; and
each Re is independently H or C1-C4 alkyl.
62. The compound of claim 30, wherein R5 is NR10R11, wherein R10 is H and R11 is hetAr, wherein hetAr is a substituted or unsubstituted 5-6 membered heteroaryl group having at least one ring nitrogen atom and optionally having a second ring heteroatom selected from N and O, and hetAr is optionally substituted with one or two groups independently selected from C1-C6 alkyl and C(\u2550O)NRaRb.
63. The compound of claim 62, wherein R5 is
64. A compound of Formula I as defined in claim 1 and named in Examples 1-160.
65. A pharmaceutical composition comprising a compound according to claim 1 and a pharmaceutically acceptable carrier.
66. The composition according to claim 65, further comprising an additional therapeutic agent selected from an anti-proliferative agent, an anti-inflammatory agent, an immunomodulatory agent, a neurotropic factor, an agent for treating cardiovascular disease, an agent for treating liver disease, an anti-viral agent, an agent for treating blood disorders, an agent for treating diabetes, or an agent for treating immunodeficiency disorders.
67. A method of treating a disease or condition selected from the group consisting of cancer, stroke, diabetes, hepatomegaly, cardiovascular disease, Alzheimer’s disease, cystic fibrosis, viral disease, autoimmune diseases, atherosclerosis, restenosis, psoriasis, allergic disorders, inflammation, neurological disorders, a hormone-related disease, conditions associated with organ transplantation, immunodeficiency disorders, destructive bone disorders, proliferative disorders, infectious diseases, conditions associated with cell death, thrombin-induced platelet aggregation, chronic myelogenous leukemia (CML), liver disease, pathologic immune conditions involving T cell activation, and CNS disorders in a patient, comprising administering to said patient a compound of claim 1.
68. The method of claim 67, wherein said disease is cancer.
69. The use of a compound as defined in claim 1 in the manufacture of a medicament for the treatment of a hyperproliferative disease in a mammal.
70. The use of a compound according to claim 1 for the treatment of cancer.
71. A method for inhibiting or modulating receptor tyrosine kinase activity, comprising contacting a receptor tyrosine kinase with an effective inhibitory amount of a compound of claim 1.
72. The method of claim 71 wherein the kinase is c-Met.
73. A method for inhibiting or modulating kinase activity in a mammal, comprising administering to the mammal a therapeutically effective amount of a compound of claim 1.

1. Device for wet treatment of wafers comprising
a first plate
a second plate substantially parallel to said first plate
holding means for holding a wafer between said first and said second plate substantially parallel to said plates.
first dispensing means for introducing fluid into a first gap between said first plate and a wafer when being treated
second dispensing means for introducing fluid into a second gap between said second plate and a wafer when being treated
at least one vibrating element acoustically coupled to at least said second plate rotating means for rotating said holding means and said second plate relative to each other about an axis substantially perpendicular to said second plate.
2. Device according to claim 1 wherein said plates are substantially horizontally arranged.
3. Device according to claim 1 wherein means for rotating at least one of said two plates.
4. Device according to claim 1 wherein holding means and first plate are coupled to each other to form a holding unit.
5. Device according to claim 1 wherein gripping means are provided for securely gripping a wafer.
6. Device according to claim 1 wherein second plate is not rotatable.
7. Device according to claim 1 wherein a liquid collector is circumferentially surrounding said holding means for collecting liquid that flows off a wafer during being treated with liquid.
8. Device according to claim 1 wherein said second plate is sealed against said liquid collector.
9. Device according to claim 1 further comprising means for varying distance from the first plate to the second plate to insert a wafer to the space defined between said two plates and to withdraw a wafer therefrom.
10. Device according to claim 1 further comprising first spacer means for keeping the first plate and the holding means in certain distance during treating the wafer to form a gap between the wafer and the first plate of 0.1 mm to 10 mm preferably 0.5 mm to 5 mm during treating the wafer.
11. Device according to claim 1 further comprising second spacer means for keeping the second plate and the holding means in certain distance during treating the wafer to form a gap between the wafer and the second plate of 0.1 mm to 10 mm preferably 0.5 mm to 5 mm during treating the wafer.
12. Device according to claim 1 wherein at least one of said at least one vibrating element is arranged with respect to the surface of the second plate facing the wafer so that ultrasonic waves are substantially directed to the wafer when treated taking an angle \u03b1\u2032 of 85\xb0 to 60\xb0 to the plane provided for the wafer.
13. Device according to claim 1 further comprising additional gas dispenser for at least one of said first and second gap.
14. Device according to claim 1 wherein an opening in at least one of said first or second plate does not include the rotational center.
15. Device according to claim 1 wherein at least one vibrating element is arranged to cover the area of the rotational axis.
16. Device according to claim 1 further comprising means for opening and closing holding elements of said holding means during treatment of the wafer.
17. Device according to claim 1 wherein at least one plate at least partly comprises material having a specific sound-propagation velocity deferring not more to the specific sound-propagation velocity of water.
18. Method for wet treating a single wafer comprising
holding a single wafer in a plane B
providing a first plate having a plane A facing the wafer thereby creating a first gap of a distance d1
providing a second plate having a plane C facing the wafer thereby creating a second gap of a distance d2
inserting a first liquid into said first gap thereby substantially completely filling said first gap
inserting a second liquid into said second gap thereby substantially completely filling said second gap
applying ultrasonic energy to said second plate while less than 10% of the ultrasonic energy applied to said second plate is applied to said first plate.
relatively rotating wafer and second plate against each other about a rotation axis substantially perpendicular to the wafer’s main surfaces.
19. Method according to claim 18 wherein the wafer is rotating.
20. Method according to claim 18 wherein during term of processing substantially all parts of one wafer side are at least temporarily covered by the second plate.
21. Method according to claim 18 wherein said second liquid is inserted into said second gap through an opening offset to the rotation axis.
22. Device for wet treatment of wafers comprising
a first plate
holding means for holding a wafer in a certain distance substantially parallel to said first plate.
first dispensing means for introducing fluid into a first gap between said first plate and a wafer when being treated
at least one vibrating element acoustically coupled to said first plate rotating means for rotating said holding means and said first plate relative to each other about an axis substantially perpendicular to said second plate.
adjustment-elements are provided in order to direct ultrasonic waves at an angle \u03b1\u2032 of less than 89\xb0 to a wafer when treated.
23. Device according to claim 22 wherein adjustment-elements comprise a slanted plane or slanted planes wherein at least one of said at least one transducers is placed.
24. Device according to claim 23 wherein said at least one transducer placed in a slanted plane is acoustically coupled to an intermediate liquid chamber, said intermediate liquid chamber is further acoustically coupled to said first plate.
25. Device according to claim 24 wherein said intermediate liquid chamber is connected to a liquid circuit.
26. Device according to claim 22 wherein adjustment-elements comprise an array of a plurality of transducers with at least one ultrasonic generator to separately agitate said plurality of transducers in a phase-shifted way in order to generate an ultrasonic wave directed from said array of transducers at an angle \u03b1\u2032 of less than 89\xb0.
27. Device according to claim 26 wherein said array of transducers is a two dimensionally arranged plurality of transducers.
28. Device according to claim 26 wherein the quotient of the distance a of the first plate to the wafer surface facing said first plate and the mean distance d between the centers of two adjacent transducers of the array is greater than 5 (ad>5).
29. Device according to claim 26 wherein the mean distance d between the centers of two adjacent transducers of the array is smaller than 2 mm.
30. Device according to claim 26 wherein the width D of the array of transducers is at least three times as big as the distance d1 of the first plate to the wafer surface facing said first plate (D\u22673*d1).
31. Device according to claim 22 a second plate substantially parallel to said first plate and second dispensing means for introducing fluid into a second gap between said second plate and a wafer when being treated.
32. Method for wet treating a single wafer comprising
holding a single wafer in a plane B
providing a first plate having a plane A facing the wafer thereby creating a first gap of a distance d1
inserting a first liquid into said first gap thereby substantially completely filling said first gap
applying ultrasonic energy to said first plate so that ultrasonic energy is applied to said plane B in an angle \u03b1\u2032 of less than 89\xb0
relatively moving wafer and first plate against each other along a direction substantially parallel to the wafer’s main surfaces
33. Method according to claim 32 wherein said relative movement of wafer and first plate against each other along a direction substantially parallel to the wafer’s main surfaces is carried out by relatively rotating wafer and second plate against each other about a rotation axis substantially perpendicular to the wafer’s main surfaces.
34. Method for wet treating a single wafer according to claim 32 further comprising providing a second plate having a plane C facing the wafer thereby creating a second gap of a distance d2
inserting a second liquid into said second gap thereby substantially completely filling said second gap.
35. Method according to claim 32 wherein during term of processing substantially all parts of one wafer side are at least temporarily covered by the second plate.
36. Method according to claim 32 wherein said ultrasonic energy applied to said first plate so that ultrasonic energy is applied to said plane B in an angle \u03b1\u2032 of less than 89\xb0 is generated an array of a plurality of transducers with at least one ultrasonic generator to separately agitate said plurality of transducers in a phase-shifted way in order to generate an ultrasonic wave directed from said array of transducers at an angle \u03b1\u2032 of less than 89\xb0.
37. Method according to claim 32 wherein angle \u03b1\u2032 is varied during the wafer being treated with liquid.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An image processing apparatus comprising:
a quantizing section, configured to quantize an input image in a pixel unit;
a generator, configured to generate first reference data and second reference data by reference quantized pixels close to a pixel of interest; and
an adder, configured to add an additional value based on one of the first reference data and the second reference data to a value of the pixel of interest,
wherein the first reference data is generated from a first pixel set which contains quantized pixels close to the pixel of interest, the second reference data is generated from a second pixel set which contains quantized pixels close to the pixel of interest, and a pixel arrangement of the second pixel set is different from that of the first pixel set, and
wherein the quantizing section quantizes the pixel of interest of which the additional value is added to the value using an error diffusion method.
2. The apparatus according to claim 1, wherein the adder selects the first or second reference data in accordance with a data pattern of the quantized pixels close to the pixel of interest.
3. The apparatus according to claim 1, wherein the adder selects the first or second reference data in accordance with an input value corresponding to the pixel of interest.
4. The apparatus according to claim 1, wherein the generator further generates third reference data from a third pixel set which contains quantized pixels close to the pixel of interest, wherein a pixel arrangement of the third pixel set is different from those of the first and second pixel sets, and a number of the quantized pixels contained in the third pixel set is lager than those in the first and second pixel sets,
wherein the adder selects one of the first to third reference data as the reference data for the pixel of interest, and
wherein, if an input value corresponding to the pixel of interest represents an intermediate density region, the adder selects the third reference data.
5. An image processing method comprising:
using a processor to perform the steps of:
quantizing an input image in a pixel unit;
generating first reference data and second reference data by reference quantized pixels close to a pixel of interest; and
adding an additional value based on one of the first reference data or the second reference data to a value of the pixel of interest,
wherein the first reference data is generated from a first pixel set which contains quantized pixels close to the pixel of interest, the second reference data is generated from a second pixel set which contains quantized pixels close to the pixel of interest, and a pixel arrangement of the second pixel set is different from that of the first pixel set, and
wherein, in the quantizing step, the pixel of interest of which the additional value is added to the value is quantized using an error diffusion method.
6. A non-transitory computer-readable medium storing a computer-executable program for causing a computer to perform an image processing method, the method comprising the steps of:
quantizing an input image in a pixel unit;
generating first reference data and second reference data by reference quantized pixels close to a pixel of interest; and
adding an additional value based on one of the first reference data and the second reference data to a value of the pixel of interest,
wherein the first reference data is generated from a first pixel set which contains quantized pixels close to the pixel of interest, the second reference data is generated from a second pixel set which contains quantized pixels close to the pixel of interest, and a pixel arrangement of the second pixel set is different from that of the first pixel set, and
wherein, in the quantizing step, the pixel of interest of which the additional value is added to the value is quantized using an error diffusion method.