1. An intake air cooler for a dual-stage turbocharged internal combustion engine, characterized in that it comprises a first cooling stage (24) and a second cooling stage (26) traversed by intake air and grouped together in a single heat exchanger housing (30) and sharing a common heat exchanger bundle (28), accommodated in the heat exchanger housing (30) and traversed by a cooling liquid;
the first cooling stage (24) and the second cooling stage (26) respectively comprising a first conduit (40) and a second conduit (42) separated by a partition (44) and each having an inlet (50; 54) and an outlet (52; 56) for the intake air and wherein the heat exchanger bundle (28) comprises a first part (58) and a second part (60) accommodated respectively in the first conduit (40) and the second conduit (42);
wherein the partition (44) comprises a fixed part (74) and at least one mobile part (76) movable between a first position in which the first conduit (40) and the second conduit (42) are isolated and a second position in which the first conduit (40) and the second conduit (42) communicate.
2. The intake air cooler as claimed in claim 1, characterized in that the inlet (50) and the outlet (52) of the first conduit (40) are respectively opposite the inlet (54) and the outlet (56) of the second conduit (42) so that the intake air flows therein in opposite directions, and in that the heat exchanger bundle (28) is arranged so that the cooling liquid flows in succession in the first part (58) and the second part (60) of the bundle.
3. The intake air cooler as claimed in claim 2, characterized in that the heat exchanger bundle (28) is arranged so that the cooling liquid flows in the opposite direction to the intake air both in the first part (58) and in the second part (60) of the heat exchanger bundle (28).
4. The intake air cooler as claimed in claim 3, characterized in that the partition (44) is formed by the housing (30) andor the bundle (28).
5. The intake air cooler as claimed in claim 1, characterized in that the inlet (50) and the outlet (52) of the first conduit (40) are respectively on the same side as the inlet (54) and the outlet (56) of the second conduit (42), so that the intake air flows therein in the same direction, and in that the heat exchanger bundle (28) is arranged so that the cooling liquid flows simultaneously in the first part (58) and the second part (60) of the heat exchanger bundle (28).
6. The intake air cooler as claimed in claim 5, characterized in that the heat exchanger bundle (28) is arranged so that the cooling liquid flows in the opposite direction to the intake air both in the first part (58) and in the second part (60) of the heat exchanger bundle (28).
7. The intake air cooler as claimed in claim 5, characterized in that the partition (44) is formed by the housing (30) andor the bundle (28).
8. The intake air cooler as claimed in claim 1, characterized in that the heat exchanger bundle (28) comprises a stack of plates (62) and corrugated inserts (64) bounding cooling liquid flow streams alternating with intake air flow channels.
9. The intake air cooler as claimed in claim 8, characterized in that the cooling liquid flow streams, each formed between two contiguous plates (62), bound a flow path having at least one U-shape.
10. The intake air cooler as claimed in claim 1, characterized in that the partition (44) is formed by the housing (30) andor the bundle (28).
11. The intake air cooler as claimed in claim 10, characterized in that the partition (44) is a fixed partition.
12. The intake air cooler as claimed in claim 10, characterized in that the partition (44) comprises a fixed part (74) and at least one mobile part (76) movable between a first position in which the first conduit (40) and the second conduit (42) are isolated and a second position in which the first conduit (40) and the second conduit (42) communicate.
13. The intake air cooler as claimed in claim 1, characterized in that the partition (44) is a fixed partition.
14. The intake air cooler as claimed in claim 1, characterized in that the respective air inlets (50; 54) of the first conduit (40) and the second conduit (42) are placed at opposite ends of the heat exchanger housing, and in that the partition comprises a single mobile part (76) located at one of the ends of the heat exchanger housing.
15. The intake air cooler as claimed in claim 1, characterized in that the respective air inlets (50; 54) of the first conduit (40) and the second conduit (42) are placed at the same end of the heat exchanger housing, and in that the partition comprises two mobile parts (76) located respectively at the two ends of the heat exchanger housing.
16. The intake air cooler as claimed in claim 1, characterized in that the mobile part (76) is a pivoting flap.
17. An intake air circuit for a dual-stage turbocharged internal combustion engine, comprising a low pressure upstream compressor (18) and a high pressure downstream compressor (22), characterized in that it further comprises an intake air cooler (20) according to claim 1, whereof the first cooling stage (24) is inserted between the upstream compressor and the downstream compressor, while the second cooling stage (26) is connected at the outlet of the downstream compressor.
18. The intake air circuit as claimed in claim 17, in which the intake air cooler (20) is equipped with a partition having at least one mobile part (76) movable between a first position which isolates and a second position which enables communication, characterized in that, in the first position, the intake air is passing in succession through the upstream compressor (18), the first cooling stage (24), the downstream compressor (22), then the second cooling stage (26), while, in the second position, the intake air is passing in succession through the upstream compressor (18), the first cooling stage (24), then the second cooling stage (26), while circumventing the downstream compressor (22).
19. The intake air cooler as claimed in claim 1, characterized in that the heat exchanger bundle (28) comprises a stack of plates (62) and corrugated inserts (64) bounding cooling liquid flow streams alternating with intake air flow channels.
20. An intake air cooler for a dual-stage turbocharged internal combustion engine, characterized in that it comprises a first cooling stage (24) and a second cooling stage (26) traversed by intake air and grouped together in a single heat exchanger housing (30) and sharing a common heat exchanger bundle (28), accommodated in the heat exchanger housing (30) and traversed by a cooling liquid;
the first cooling stage (24) and the second cooling stage (26) respectively comprising a first conduit (40) and a second conduit (42) separated by a partition (44) and each having an inlet (50; 54) and an outlet (52; 56) for the intake air and wherein the heat exchanger bundle (28) comprises a first part (58) and a second part (60) accommodated respectively in the first conduit (40) and the second conduit (42);
wherein the partition (44) is formed by the housing (30) andor the bundle (28)
wherein the partition (44) comprises a fixed part (74) and at least one mobile part (76) movable between a first position in which the first conduit (40) and the second conduit (42) are isolated and a second position in which the first conduit (40) and the second conduit (42) communicate.
21. An intake air circuit for a dual-stage turbocharged internal combustion engine, comprising a low pressure upstream compressor (18), a high pressure downstream compressor (22), and an intake air cooler (20),
the air intake cooler comprising a first cooling stage (24) and a second cooling stage (26) traversed by intake air and grouped together in a single heat exchanger housing (30) and sharing a common heat exchanger bundle (28), accommodated in the heat exchanger housing (30) and traversed by a cooling liquid;
the first cooling stage (24) and the second cooling stage (26) respectively comprising a first conduit (40) and a second conduit (42) separated by a partition (44) and each having an inlet (50; 54) and an outlet (52; 56) for the intake air and wherein the heat exchanger bundle (28) comprises a first part (58) and a second part (60) accommodated respectively in the first conduit (40) and the second conduit (42);
wherein the intake air cooler (20) is equipped with a partition having at least one mobile part (76) movable between a first position which isolates and a second position which enables communication, characterized in that, in the first position, the intake air is passing in succession through the upstream compressor (18), the first cooling stage (24), the downstream compressor (22), then the second cooling stage (26), while, in the second position, the intake air is passing in succession through the upstream compressor (18), the first cooling stage (24), then the second cooling stage (26), while circumventing the downstream compressor (22); and
wherein the first cooling stage (24) is inserted between the upstream compressor and the downstream compressor, while the second cooling stage (26) is connected at the outlet of the downstream compressor.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sample holder for confocal microcopy of a chemical mechanical polishing pad (CMP) sample cut or otherwise removed from either a new or used CMP pad that maintains a uniform load and pressure over the part of the sample visible to a confocal microscope by placing the sample behind a transparent window and holding it against the said window, the sample holder comprising:
means for retaining an upper part of the transparent window which has an offset adjacent the transparent window having the same or essentially the same refractive index as the sample so that when the sample is held against the transparent window, the edges of the sample are outside an outer edge of the transparent window;
means for retaining the lower part of the sample which presses the sample under a known load against the transparent window, which means possesses lateral dimensions the same as or less than the corresponding dimensions of the sample;
means for transmitting a force via a spherical member pressed against the means for retaining the lower part of the sample, the force being transmitted through a load cell to measure the load transferred to the sample, via the means for retaining the lower part of the sample via the means for transmitting force via the spherical member, via a means for transferring and then via the load cell from a posterior housing of the sample holder which is forced together with the means for retaining the upper part of the window by a means for generating a force; and
means for adjusting the known load.
2. A sample holder for confocal microscopy of a sample of chemical mechanical polishing pad samples according to claim 1 wherein the means for retaining an upper part of the transparent window is a window mounting ring affixed to the inside bottom of a cup placed over a posterior wall closed cylindrical housing and secured to a ring mounted on a stepped ledge in or alternatively part of said cylindrical housing, which transparent window ring may be opaque or transparent, and the open portion of which comprises a regular curved or polygonal geometric shape perpendicular to the direction of transmission, completely encompassed by the dimensions of the sample and the means for retaining the lower part of the sample comprising a sheet of hard material resting under the sample, pressing the sample opposite the transparent window, the said sheet of hard material corresponding approximately to the dimensions and geometric shape of the transparent portion of the window, and in which the means for transmitting force is a force transfer unit supported within the cup by spacing rings.
3. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad at a known load according to claim 2 wherein the transparent window material comprises sapphire.
4. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 2 wherein the shape of the uncovered portion of the window is a circle.
5. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 2 wherein the geometric shape of the sheet of hard material corresponds precisely or is the same size as the geometric shape of the uncovered portion of the transparent window.
6. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 2 wherein the covering of the outer part of the transparent window is accomplished by a window mounting ring that comprises an opaque layer or plate surrounding the same and affixed to or resting on the inside of said cap covering the cup and apparatus.
7. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 2 wherein heat is applied to the sample.
8. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 7 wherein the said heat is applied to the sample by means of a heater external to a spindle of thermally conductive material surrounding the force transfer unit and supported by spacing rings.
9. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 8 wherein the heat is applied to the sample by a heater surrounding the thermally conductive portion of the spindle.
10. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 8 wherein the sample temperature is determined by a thermocouple.
11. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 2 wherein the load applied results in pressures on the transparent window in the range of 0 pounds per square inch to 11 pounds per square inch.
12. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 1 wherein the means for generating a force comprises a cup secured by spring compressed bolts through holes in a ring supported by an outward turning lip of the cup to threaded holes in a ring resting on a step in the cylindrical walls.
13. A sample holder for confocal microscopy of a sample of a chemical mechanical polishing pad at a known load according to claim 1 wherein the load is applied to the sample through the force transfer unit by means of a threaded shaft housed in a sliding tube, one end of which is affixed to the bottom of the cup, said threaded shaft passing through a fixed end hearing affixed to the other end of the said sliding tube, a threaded slider it within the tube with a single or concentric spring between the load cell and the shaft and a free end bearing sitting under the load cell and transferring load thereto.
14. A sample holder of confocal microscopy of a sample of a chemical mechanical polishing (CMP) pad according to claim 1 wherein the means for retaining an upper part of the transparent window is a window mounting ring affixed to or resting on the inside bottom surface of a cup placed over a posterior wall closed cylindrical housing and secured to a ring mounted on a stepped ledge in or alternatively part of the said cylindrical housing, which transparent window ring may be opaque or transparent, and the open portion of which comprises a regular curved or polygonal geometric shape perpendicular to the direction of transmission, completely encompassed by the dimensions of the sample and the means for retaining the lower part of the sample, comprising a sheet or hard material resting under the sample, pressing the lower part of the sample opposite the window, said sheet of hard material corresponding approximately to the dimensions and geometric shape of the transparent portion of the transparent window, and in which the means for transferring force comprises a force transfer unit supported within the cup by spacing rings.
15. A method for using a sample holder for confocal microscopy of a chemical mechanical polishing (CMP) pad sample cut or otherwise removed from either a new or used CMP pad that maintains a uniform load and pressure over the part of the sample visible to a confocal microscope by placing the sample behind a transparent window and holding it against the said window, the sample holder comprising:
means for retaining an upper part of the transparent window which has an offset adjacent the transparent window having the same or essentially the same refractive index as the sample so that when the sample is held against the transparent window, the edges of the sample are outside an outer edge of the transparent window;
means for retaining the lower part of the sample which presses the sample under a known load against the transparent window, which means possesses lateral dimensions the same as or less than the corresponding dimensions of the sample;
means for transmitting force via a spherical member pressed against the means for retaining the lower part of the sample, the force being transmitted through a load cell to measure the load transferred to the sample via the means for retaining the lower part of the sample via the means for transmitting force via the spherical member, via a means for transferring force and then via the load cell from a posterior housing of the sample holder which is forced together with the means for retaining the upper part of the window by a means for generating a force; and
a means for adjusting the known load to view the sample of a new or used CMP pad by confocal microscope.
16. A method for using a sample holder for confocal microscopy of a chemical mechanical polishing pad sample according to claim 15 wherein the transparent window material comprises sapphire.
17. A method for using a sample holder fox confocal microscopy of a chemical mechanical polishing pad sample according to claim 15 wherein the shape of the uncovered portion of the window is a circle.
18. A method for using a sample holder for confocal microscopy of a chemical mechanical polishing pad sample according to claim 15 wherein the geometric shape of the sheet of hard material corresponds precisely or is the same size as the geometric shape of the uncovered portion of the transparent window.
19. A method of using a sample holder of confocal microscopy of a sample of chemical mechanical polishing pad according to claim 15 wherein the covering of the outer part of the transparent window is accomplished by a window mounting ring that comprises an opaque layer or plate surrounding the same and affixed to or resting on the inside of said cap covering the cup and apparatus.
20. A method of using a sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 15 wherein heat is applied to the sample.
21. A method for using a sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 20 wherein the said heat is applied to the sample by means of a heater external to a spindle of thermally conductive material surrounding the force transfer unit and supported by spacing rings.
22. A method for using a sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 21 wherein the heat is applied to the sample by a heater surrounding the thermally conductive portion of the spindle.
23. A method of using sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 22 wherein the means for generating force comprises a cup secured by spring compressed bolts through holes in a ring supported by an outward turning lip of the cup to threaded holes in a ring resting on a step in the cylindrical walls.
24. A method of using sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 21 wherein the sample temperature is determined by a thermocouple.
25. A method of using sample holder of confocal microscopy of a sample of a chemical mechanical polishing pad according to claim 15 wherein the load applied results in pressures on the transparent window in the range of 0 pounds per square inch to 11 pounds per square inch.
26. A method for observing a sample holder for confocal microscopy of a sample of a chemical mechanical polishing pad at a known load according to claim 15 wherein the load is applied to the sample through the force transfer unit by means of a threaded shaft housed in a sliding tube, one end of which is affixed to the bottom of the cup, said threaded shaft passing through a fixed end bearing affixed to the other end of the said sliding tube, a threaded slider it within the tube with a single or concentric spring between the load cell and the shaft and a free end bearing sitting under the load cell and transferring load thereto.
27. A method for observing a sample of a chemical mechanical polishing pad at a known load by confocal microscopy according to claim 15 wherein the means for turning the threaded shafts or bolts is mechanical or automated.