1461142311-d1136cdf-c9cc-4e91-8f54-e2dbf1d111e4

1. A method comprising:
designating a first set of logical units in an erase block as units available for storing data;
designating a second set of logical units in the erase block as overhead units;
changing the designation of one or more of the second set of logical units from overhead units to units available for storing data in response to one or more of the first set of logical units being marked as dirty or invalid; and
changing the designation of the one or more of the first set of logical units marked as dirty or invalid from units available for storing data to overhead units.
2. The method of claim 1 wherein the logical units in the first set and the logical units in the second set are each equal to a predetermined fixed size.
3. The method of claim 1 wherein the erase block corresponds to a group of logical units in a flash memory device to be erased as a group.
4. The method of claim 2 wherein the flash memory device comprises a NOR flash memory device.
5. The method of claim 1 further comprising:
determining a number of logical units marked as dirty or invalid in the erase block;
determining whether the number of logical units marked as dirty or invalid exceeds a pre-selected threshold value;
generating an indication of zero logical units marked as dirty or invalid if the number of logical units marked as dirty or invalid is less then, or equal to, the threshold value; and
generating an indication of logical units marked as dirty or invalid as the number of logical units marked as dirty or invalid minus the threshold value.
6. The method of claim 4 wherein the threshold value is equal to the number of logical units in the second set of logical units.
7. The method of claim 4 further comprising performing a reclamation operation on the erase block if the indication of logical units marked as dirty or invalid exceeds a reclamation threshold value.
8. An apparatus comprising:
an array of memory cells grouped as multiple erase blocks, each erase block having multiple logical units;
a control agent coupled with the array of memory cells to control a state corresponding to each of the multiple logical units, wherein the control unit is configured to designate a first set of logical units in a selected erase block as units available for storing data, designate a second set of logical units in the erase block as overhead units, change the designation of one or more of the second set of logical units from overhead units to units available for storing data in response to one or more of the first set of logical units being marked as dirty or invalid, and change the designation of the one or more of the first set of logical units marked as dirty or invalid from units available for storing data to overhead units.
9. The apparatus of claim 8 wherein the logical units in the first set and the logical units in the second set are each equal to a predetermined fixed size.
10. The apparatus of claim 8 wherein the control agent comprises a file system driver.
11. The apparatus of claim 8 wherein the control agent comprises a memory control agent within a flash memory device.
12. The apparatus of claim 8 wherein the array of memory cells comprise NOR flash memory cells.
13. The apparatus of claim 8 wherein the control agent is further configured to determine a number of logical units marked as dirty or invalid in the erase block, determine whether the number of logical units marked as dirty or invalid equals or exceeds a pre-selected threshold value, generate an indication of zero logical units marked as dirty or invalid if the number of logical units marked as dirty or invalid is less then or equal to the threshold value, and generate an indication of logical units marked as dirty or invalid as the number of logical units marked as dirty or invalid minus the threshold value.
14. The apparatus of claim 13 wherein the threshold value is equal to the number of logical units in the second set of logical units.
15. The apparatus of claim 13 wherein the control agent is further configured to perform a reclamation operation on the erase block if the indication of logical units marked as dirty or invalid is equal to or exceeds a reclamation threshold value.
16. A system comprising:
a substantially omni-directional antenna;
a processor coupled with the antenna;
an array of memory cells grouped as multiple erase blocks, each erase block having multiple logical units;
a control agent coupled with the array of memory cells and the processor to control a state corresponding to each of the multiple logical units, wherein the control unit is configured to designate a first set of logical units in a selected erase block as units available for storing data, designate a second set of logical units in the erase block as overhead units, change the designation of one or more of the second set of logical units from overhead units to units available for storing data in response to one or more of the first set of logical units being marked as dirty or invalid, and change the designation of the one or more of the first set of logical units marked as dirty or invalid from units available for storing data to overhead units.
17. The system of claim 16 wherein the logical units in the first set and the logical units in the second set are each equal to a predetermined fixed size.
18. The system of claim 16 wherein the control agent comprises a file system driver.
19. The system of claim 16 wherein the control agent comprises a memory control agent within a flash memory device.
20. The system of claim 16 wherein the array of memory cells comprise NOR flash memory cells.
21. The system of claim 16 wherein the control agent is further configured to determine a number of logical units marked as dirty or invalid in the erase block, determine whether the number of logical units marked as dirty or invalid equals or exceeds a pre-selected threshold value, generate an indication of zero logical units marked as dirty or invalid if the number of logical units marked as dirty or invalid is less then or equal to the threshold value, and generate an indication of logical units marked as dirty or invalid as the number of logical units marked as dirty or invalid minus the threshold value.
22. The system of claim 16 wherein the threshold value is equal to the number of logical units in the second set of logical units.
23. The system of claim 16 wherein the control agent is further configured to perform a reclamation operation on the erase block if the indication of logical units marked as dirty or invalid is equal to or exceeds a reclamation threshold value.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An angular velocity detection device comprising:
an outer frame including a fixed portion and an outer beam portion connected to the fixed portion;
a sensing part surrounded by the outer frame with a first slit therebetween; and
a joint connecting the outer frame to the sensing part,

wherein the sensing part includes:
an inner beam portion having a hollow region inside, and being square-shaped when viewed from above;
a flexible portion disposed in the hollow region of the inner beam portion, and connected to an inner edge of the inner beam portion; and
a detector disposed in the flexible portion, wherein
the first slit is formed to surround the sensing part excluding the joint,
the flexible portion includes:
a central beam portion connecting opposite sides of the inner beam portion together, and being in parallel with the outer beam portion;
a first arm disposed inside the inner beam portion, and connected to the central beam portion;
a second arm disposed inside the inner beam portion, connected to the central beam portion, disposed on a same side as the first arm with respect to the central beam portion, and formed line-symmetrically with respect to the first arm;
a third arm disposed inside the inner beam portion, connected to the central beam portion, disposed on an opposite side of the first arm with respect to the central beam portion, and formed line-symmetrically with respect to the first arm; and
a fourth arm disposed inside the inner beam portion, connected to the central beam portion, disposed on a same side as the third arm with respect to the central beam portion, and formed line-symmetrically with respect to the third arm,
wherein the detector is one of detectors and the detectors are disposed on the first arm, the second arm, the third arm, and the fourth arm respectively,
the detectors are disposed symmetrically with respect to the Y axis and the X axis, and
the inner beam portion has a second slit formed centrally within the inner beam portion adjacent a corner of the inner beam portion.
2. The angular velocity detection device of claim 1, wherein
the first arm, the second arm, the third arm, and the fourth arm are provided thereon with drivers respectively.
3. The angular velocity detection device of claim 1, wherein
the fixed portion is one of fixed portions and the fixed portions are formed as an opposing pair with the outer beam portions therebetween;
the outer beam portion is one of outer beam portions and the outer beam portions are formed as an opposing pair with the fixed portions therebetween; and
the joint is one of joints and the joints are formed at two places where the outer beam portions and the inner beam portion are parallel to each other.
4. An angular velocity detection device comprising:
an outer frame including a fixed portion and an outer beam portion connected to the fixed portion;
a sensing part surrounded by the outer frame with a first slit therebetween; and
a joint connecting the outer frame to the sensing part, wherein the sensing part includes:
an inner beam portion having a hollow region inside, and being square-shaped when viewed from above;
a flexible portion disposed in the hollow region of the inner beam portion, and connected to an inner edge of the inner beam portion; and
a detector disposed in the flexible portion, wherein

the first slit is formed to surround the sensing part excluding the joint, wherein the fixed portion is one of fixed portions and the fixed portions are formed as an opposing pair with the outer beam portions therebetween;
the outer beam portion is one of outer beam portions and the outer beam portions are formed as an opposing pair with the fixed portions therebetween; and
the joint is one of joints and the joints are formed at two places where the outer beam portions and the inner beam portion are parallel to each other, wherein
where X, Y, and Z axes are orthogonal to each other, the angular velocity detection device extends in an X-Y plane formed of the X axis and the Y axis; and
the detector is an angular velocity detector around the Z axis, and wherein
the angular velocity detection device further comprises an angular velocity detector around the X axis formed on a side, which is parallel to the fixed portions, of the inner beam portion, and the inner beam portion has a second slit formed centrally within the inner beam portion and adjacent to the angular velocity detector around the X axis.
5. The angular velocity detection device of claim 4, wherein
the second slit is formed closer to a corner of the inner beam portion than the angular velocity detector around the X axis.
6. The angular velocity detection device of claim 5, wherein
the second slit is a right trapezoid when viewed from the above, the second slit having an upper base, a lower base longer than the upper base, and an oblique side connecting the upper base to the lower base;
the lower base is disposed on an outer side of the inner beam portion in a width direction; and
the oblique side is disposed closer to the corner of the inner beam portion.
7. An angular velocity detection device comprising:
an outer frame including a fixed portion and an outer beam portion connected to the fixed portion;
a sensing part surrounded by the outer frame with a first slit therebetween; and
a joint connecting the outer frame to the sensing part, wherein the sensing part includes:
an inner beam portion having a hollow region inside, and being square-shaped when viewed from above;
a flexible portion disposed in the hollow region of the inner beam portion, and connected to an inner edge of the inner beam portion; and
a detector disposed in the flexible portion, wherein

the first slit is formed to surround the sensing part excluding the joint, wherein the fixed portion is one of fixed portions and the fixed portions are formed as an opposing pair with the outer beam portions therebetween;
the outer beam portion is one of outer beam portions and the outer beam portions are formed as an opposing pair with the fixed portions therebetween; and
the joint is one of joints and the joints are formed at two places where the outer beam portions and the inner beam portion are parallel to each other, wherein
where X, Y, and Z axes are orthogonal to each other, the angular velocity detection device extends in an X-Y plane formed of the X axis and the Y axis; and
the detector is an angular velocity detector around the Z axis, and wherein
the angular velocity detection device further comprises an angular velocity detector around the Y axis disposed on a side, which is parallel to the outer beam portions, of the inner beam portion, and the inner beam portion has a second slit formed centrally within the inner beam portion and adjacent to the angular velocity detector around the Y axis.
8. The angular velocity detection device of claim 7, wherein
the second slit is formed closer to a corner of the inner beam portion than the angular velocity detector around the Y axis.
9. The angular velocity detection device of claim 8, wherein
the second slit is a right trapezoid when viewed from the above, the second slit having an upper base, a lower base longer than the upper base, and an oblique side connecting the upper base to the lower base;
the lower base is disposed on an outer side of the inner beam portion in a width direction; and
the oblique side is disposed closer to the corner of the inner beam portion.
10. An angular velocity sensor comprising:
the angular velocity detection device of claim 1; and
a detecting circuit for processing signals supplied from the detectors of the angular velocity detection device.

1461142297-b67f17c6-846f-4c88-ad85-c8db6819db55

1. A method of disassembling a preloaded and interlocked assembly having a first element and a second element, the method comprising:
heating the first element comprising an initial dimension to a first temperature sufficient to expand the initial dimension to a first dimension, the first dimension greater than the initial dimension; and
removing the first element from the assembly
wherein the preloaded and interlocked assembly comprises at least one of the first element or the second element being deformed, wherein the first element can only be removed from the assembly when the first element reaches the first temperature, and wherein heating the first element from the assembly is a means to disassemble the assembly.
2. The method of claim 1, wherein a coefficient of thermal expansion of the first element comprises a first value and a coefficient of thermal expansion of the assembly comprises a second value, the first value different than the second value.
3. The method of claim 2, wherein a means of heating the first element is one or more members selected from the group consisting of a hot liquid, a heating torch, an induction heating oven, a radiator, a heating pad, and a remote heating device.
4. The method of claim 1, wherein the first element is a metal having a thermal expansion coefficient of between approximately 10 micrometers per degree Celsius per meter and approximately 25 micrometers per degree Celsius per meter.
5. The method of claim 1, wherein the first element is fashioned from aluminum.
6. The method of claim 5, wherein the first element further comprises a polymer.
7. The method of claim 6, wherein the polymer has a coefficient of thermal expansion between approximately 0 micrometers per degree Celsius per meter and approximately 1000 micrometers per degree Celsius per meter.
8. The method of claim 1, wherein a means of heating the first element is one or more members selected from the group consisting of a hot liquid, a heating torch, an induction heating oven, a radiator, a heating pad, and a remote heating device.
9. The method of claim 1 wherein the means of heating the first element is a hot liquid.
10. The method of claim 1, further comprising
a preliminary step of heating the first element and adding the heated first element to the second element so as to create the preloaded and interlocked assembly such that at least one of the first element or the second element is deformed.
11. The method of claim 10, wherein the preliminary step further comprises cooling the first element from a first temperature to a third temperature wherein the third temperature is lower than the first temperature and the third temperature is sufficient to contract the first dimension to a lesser third dimension to interlock the assembly.
12. The method of claim 11, wherein the first element comprising the third dimension contacts the second element causing mechanical interference such that at least one of the first element or the second element is deformed to preload the assembly.
13. The method of claim 1, wherein the assembly is at least partially snap-fit.
14. The method of claim 1, wherein
the first element comprises at least one protrusion positioned at an end of a corresponding beam; and
the second element comprises at least one end which contacts the corresponding at least one protrusion positioned at the end of the corresponding beam of the first element.
15. The method of claim 14, wherein the at least one protrusion positioned at the end of the corresponding beam is a first protrusion and the at least one end of the second element is a first end, and wherein the first protrusion contacts the first end.
16. The method of claim 15, wherein at least one of the first protrusion or the first end is deformed.
17. A method of disassembling a preloaded and interlocked assembly wherein the assembly is comprised of a first element and a second element wherein at least one of the first element and second element is deformed, the method comprising:
heating the first element comprising an initial dimension to a first temperature sufficient to expand the initial dimension to a first dimension, the first dimension greater than the initial dimension wherein the first element and the second element are metals; and
removing the first element from the assembly when the first element reaches the first temperature
wherein the first element has a thermal expansion coefficient of between approximately 10 micrometers per degree Celsius per meter and approximately 25 micrometers per degree Celsius per meter.
18. A method of creating or disassembling a preloaded and interlocked assembly wherein the assembly is comprised of a first element and a second element, the method comprising:
heating the first element comprising an initial dimension to a first temperature sufficient to expand the initial dimension to a first dimension, the first dimension greater than the initial dimension wherein the first dimension allows
removal of the first element from the assembly thereby disassembling the assembly, or
coupling of the first element and the second element, wherein upon cooling of the first element from the first temperature to a third temperature, the first element contacts the second element causing a mechanical interference which deforms at least one of the first element or the second element, thereby creating the assembly.
19. The method of claim 18 wherein the method is for disassembling the assembly.
20. The method of claim 18 wherein the method is for creating the assembly.
21. The method of claim 18, wherein the preloaded and interlocked assembly remains assembled by frictional forces and mechanical interferences.
22. The method of claim 18, wherein the first element contacts the second element such that no clearance exists between the first element and the second element.
23. The method of claim 18, wherein the mechanical interference deforms the first element.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2L1<3.
2. The display device according to claim 1,
wherein the plurality of the columnar spacers is disposed regularly.
3. The display device according to claim 1,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
4. The display device according to claim 1,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
5. The display device according to claim 1,
wherein the width of the center portion is 20 \u03bcm or less
6. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2L1<3, and
wherein an angle between a tangent plane at a center portion and a surface of the second substrate is 65\xb0 to 115\xb0.
7. The display device according to claim 6,
wherein the plurality of the columnar spacers is disposed regularly.
8. The display device according to claim 6,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
9. The display device according to claim 6,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
10. The display device according to claim 6,
wherein the width of the center portion is 20 \u03bcm or less
11. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2L1<3, and
wherein a height of the spacer is 0.5 \u03bcm to 110 \u03bcm.
12. The display device according to claim 11,
wherein the plurality of the columnar spacers is disposed regularly.
13. The display device according to claim 11,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
14. The display device according to claim 11,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
15. The display device according to claim 11,
wherein the width of the center portion is 20 \u03bcm or less
16. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2L1<3, and
wherein a radius of curvature of an edge between a upper surface and a side surface of each of the plurality of spacers is 21 \u03bcm or less.
17. The display device according to claim 16,
wherein the plurality of the columnar spacers is disposed regularly.
18. The display device according to claim 16,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
19. The display device according to claim 16,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
20. The display device according to claim 16,
wherein the width of the center portion is 20 \u03bcm or less
21. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2L1<3, and
wherein each of the plurality of spacer comprises resin material.
22. The display device according to claim 21,
wherein the plurality of the columnar spacers is disposed regularly.
23. The display device according to claim 21,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
24. The display device according to claim 21,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
25. The display device according to claim 21,
wherein the width of the center portion is 20 \u03bcm or less
26. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a plurality of spacers over the interlayer insulating film;
a first alignment film on the plurality of spacers and over the interlayer insulating film;
a second substrate;
a second alignment film over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the first substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 0.8<L2L1<3.
27. The display device according to claim 26,
wherein the plurality of the columnar spacers is disposed regularly.
28. The display device according to claim 26,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
29. The display device according to claim 26,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
30. The display device according to claim 26,
wherein the width of the center portion is 20 \u03bcm or less
31. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<L2L1<1.1.
32. The display device according to claim 31,
wherein the plurality of the columnar spacers is disposed regularly.
33. The display device according to claim 31,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
34. The display device according to claim 31,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
35. The display device according to claim 31,
wherein the width of the center portion is 20 \u03bcm or less
36. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<L2L2<1.1, and
wherein an angle between a tangent plane at a center portion and a surface of the second substrate is 65\xb0 to 115\xb0.
37. The display device according to claim 36,
wherein the plurality of the columnar spacers is disposed regularly.
38. The display device according to claim 36,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
39. The display device according to claim 36,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
40. The display device according to claim 36,
wherein the width of the center portion is 20 \u03bcm or less
41. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<L2L1<1.1, and
wherein a height of the spacer is 0.5 \u03bcm to 110 \u03bcm.
42. The display device according to claim 41,
wherein the plurality of the columnar spacers is disposed regularly.
43. The display device according to claim 41,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
44. The display device according to claim 41,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
45. The display device according to claim 41,
wherein the width of the center portion is 20 \u03bcm or less
46. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<L2L1<1.1, and
wherein a radius of curvature of an edge between a upper surface and a side surface of each of the plurality of spacers is 2 \u03bcm or less.
47. The display device according to claim 46,
wherein the plurality of the columnar spacers is disposed regularly.
48. The display device according to claim 46,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
49. The display device according to claim 46,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
50. The display device according to claim 46,
wherein the width of the center portion is 20 \u03bcm or less
51. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a first alignment film over the interlayer insulating film;
a second substrate;
a plurality of spacers over the second substrate;
a second alignment film on the plurality of spacers and over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the second substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<L2L1<1.1, and
wherein each of the plurality of spacer comprises resin material.
52. The display device according to claim 51,
wherein the plurality of the columnar spacers is disposed regularly.
53. The display device according to claim 51,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
54. The display device according to claim 51,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
55. The display device according to claim 51,
wherein the width of the center portion is 20 \u03bcm or less
56. A display device comprising:
a first substrate;
a plurality of pixels arranged in a matrix, each of which comprises a thin film transistor over the first substrate;
an interlayer insulating film over the thin film transistor;
a plurality of spacers over the interlayer insulating film;
a first alignment film on the plurality of spacers and over the interlayer insulating film;
a second substrate;
a second alignment film over the second substrate; and
a liquid crystal material interposed between the first alignment film and the second alignment film;
wherein each of the plurality of spacers has a first end, a second end between the first end and the first substrate, and a center portion between the first end and the second end,
wherein a width of the second end L2 and a width of the center portion L1 are set in the range of 1<L2L1<1.1.
57. The display device according to claim 56,
wherein the plurality of the columnar spacers is disposed regularly.
58. The display device according to claim 56,
wherein each of the plurality of spacers is disposed for every six pixels of the plurality of the pixels.
59. The display device according to claim 56,
wherein the plurality of spacer is disposed at a density of 10 to 200 ones per mm2.
60. The display device according to claim 56,
wherein the width of the center portion is 20 \u03bcm or less