1. An etching solution, comprising, in volume percent:
hydrofluoric acid in an amount of about 2 to 30%;
nitric acid in an amount of about 4 to 60%;
acetic acid in an amount of about 20 to 90%; and
a further etchant of an alkali bromide or an alkali bromate in an amount sufficient to enhance etching performance of the solution.
2. The etching solution of claim 1 wherein the hydrofluoric acid and nitric acid are present in amounts sufficient to provide a molar ratio of hydrofluoric acidnitric acid of from about 1:2 to about 1:15.
3. The etching solution of claim 2, wherein the hydrofluoric acid and acetic acid are present in amounts sufficient to provide a molar ratio of hydrofluoric acid and acetic acid of from about 1:5 to about 1:15.
4. The etching solution of claim 1, wherein the alkali bromide is sodium bromide or the alkali bromate is sodium bromate.
5. The etching solution of claim 1, wherein the alkali bromide and alkali bromate are each present and in sufficient amounts to provide a molar ratio of alkali bromidealkali bromate of from about 2:1 to 10:1.
6. The etching solution of claim 1 wherein the alkali bromide and alkali bromate are each present and in sufficient amounts to provide a molar bromine concentration, resulting from the reaction of bromate and bromide according to the equation NaBrO3+5NaBr+6H+\u21923Br2+3H2O+6Na+, that is from about 0.02 to about 0.5.
7. An etching solution, consisting essentially of, in volume percent:
hydrofluoric acid in an amount of about 2 to 30%;
nitric acid in an amount of about 4 to 60%;
acetic acid in an amount of about 20 to 90%; and
a further etchant of an alkali bromide or an alkali bromate in an amount sufficient to
enhance etching performance of the solution,
wherein the alkali bromide and alkali bromate are each present and in sufficient amounts to provide a molar bromine concentration, resulting from the reaction of bromate and bromide according to the equation NaBrO3+5NaBr+6H+\u21923Br2+3H2O+6Na+, that is from about 0.02 to about 0.5;
wherein the hydrofluoric acid is an aqueous solution of HF having a concentration of above 30%, and is present in an amount of about 10 to 25%;
the nitric acid is present in an amount to provide a molar ratio of hydrofluoric acidnitric acid of from about 1:2 to about 1:15; and
the acetic acid is present in an amount of about 50 to 90% and in an amount sufficient to provide a molar ratio of hydrofluoric acid and acetic acid of from about 1:5 to about 1:15.
8. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 1 to a silicon surface.
9. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 2 to a silicon surface.
10. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 3 to a silicon surface.
11. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 4 to a silicon surface.
12. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 5 to a silicon surface.
13. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 6 to a silicon surface.
14. A method for characterizing defects on silicon surfaces, which comprises applying an etching solution according to claim 7 to a silicon surface.
15. The method of claim 8, wherein the silicon surface is present on a silicon layer upon an insulating substrate.
16. The method of claim 15, wherein the silicon surface comprises strained silicon, and wherein the strained silicon is upon an insulating substrate.
17. The method of claim 15, wherein the method further comprises a pretreatment of the silicon surface with hydrofluoric acid.
18. The method of claim 15, wherein the method further comprises post-treating the silicon surface by rinsing it with deionized water.
19. The method of claim 15, which further comprises visually evaluating the treated silicon surface.
20. The method of claim 8, which further comprises post-treating the silicon substrate by rinsing it with deionized water and dipping it into a hydrofluoric acid solution for a sufficient period of time to delineate defects.
21. The method of claim 8, wherein the treating of the silicon surface with an etching solution takes place at a temperature in the range of 5\xb0 C. to 25\xb0 C.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A belt retractor frame, which is suitable for fixing at a vehicle panel,
wherein the belt retractor frame has:
at least one hook for hooking the belt retractor frame into the vehicle panel,
wherein the at least one hook is adapted to be placed on a rectilinear panel edge section of a panel edge of the vehicle panel and engages a rear side of the vehicle panel, and
at least one bent tab, which produces a preload with the vehicle panel after the at least one hook has been hooked in,
wherein the at least one bent tab is formed by a plate section of a frame plate which is bent out of a frame plate plane of the belt retractor frame in the direction of the vehicle panel, namely in such a way that it exerts a pressure load on a surface section of a front side of the vehicle panel, and
wherein the surface section of the front side of the vehicle panel on which the bent tab exerts the preload is at a distance from the rectilinear panel edge of the vehicle panel.
2. The belt retractor frame as claimed in claim 1,
wherein the at least one hook has:
a bearing section, which rests on a panel edge of the vehicle panel after the hook has been hooked in, and
a rear engagement section, which adjoins the bearing section and engages behind the rear side of the vehicle panel once the belt retractor frame has been hooked in from the front side of the vehicle panel.
3. The belt retractor frame as claimed in claim 1,
wherein the belt retractor frame is formed by an integral frame plate which is bent several times and has a plurality of frame plate sections, and
the at least one hook is formed by a plate section which is bent out of the frame plate plane of one of the frame plate sections.
4. The belt retractor frame as claimed in claim 2,
wherein,
the bearing section of the at least one hook belongs to a first plate subsection, which is at an angle of 90 degrees to the frame plate plane,
the rear engagement section of the at least one hook is formed by a second plate subsection, and
the direction of extension (P) of the second plate subsection is parallel to the frame plate plane.
5. The belt retractor frame as claimed in claim 4,
wherein the second plate subsection rests against the rear side of the vehicle panel by means of an inner plate edge after the belt retractor frame has been hooked in.
6. The belt retractor frame as claimed in claim 1,
wherein the at least one bent tab extends from a connecting region thereof, which connects it to the rest of the belt retractor frame, in a direction which is antiparallel to the direction of extension of the rear engagement section of the hook.
7. The belt retractor frame as claimed in claim 1,
wherein the at least one tab is formed by a plate section of a frame plate which is bent out of a frame plate plane of the frame plate.
8. The belt retractor frame as claimed in claim 7,
wherein the at least one tab and the at least one hook are bent out of the same frame plate plane of the same frame plate section.
9. The belt retractor frame as claimed in claim 3,
wherein at least two hooks and at least one tab are bent out in a frame plate section of the frame plate,
there is a further frame plate section, which is arranged perpendicularly to said frame plate section,
there is a hole with locking teeth in the further frame plate section, into which teeth a locking flange of the belt retractor can be inserted, and
the arrangement of the two hooks is chosen in such a way that a virtual connecting line between bearing sections of the two hooks runs parallel to the axis of rotation of the inserted locking flange.
10. An arrangement having the belt retractor frame and the vehicle panel as claimed in claim 1,
wherein at least two hooks of the belt retractor frame are placed on a rectilinear panel edge section, without cutouts, of a panel edge of the vehicle panel.
11. The belt retractor frame as claimed in claim 1, which is suitable for fixing in a vehicle,
wherein the belt retractor frame is formed by an integral frame plate which is bent several times and has a plurality of frame plate sections,
wherein the belt retractor frame has the at least one hook for hooking the belt retractor frame into a vehicle panel,
wherein the at least one hook is formed by a plate section which is bent out of the frame plate plane of one of the frame plate sections,
wherein a further frame plate section is arranged perpendicularly to one frame plate section,
wherein there is a hole with locking teeth in the further frame plate section, into which teeth a locking flange of the belt retractor can be inserted,
wherein the belt retractor frame has the at least one bent tab, which produces a preload with the vehicle panel after the at least one hook has been hooked in, and
wherein the bending edge of the at least one hook is perpendicular to the axis of rotation of the inserted locking flange at the transition to the frame plate plane of one frame plate section.
12. The belt retractor frame as claimed in claim 3,
wherein the at least one tab and the at least one hook are bent out of the same frame plate plane of the same frame plate section, and
the bending edge of the tab is perpendicular to the bending edge of the at least one hook and runs parallel to the axis of rotation of an inserted locking flange.
13. The belt retractor frame as claimed in claim 3,
wherein the at least two hooks and the at least one tab are bent out in one frame plate section of the frame plate,
the arrangement of the two hooks is chosen in such a way that a virtual connecting line between the bearing sections of the two hooks runs parallel to the axis of rotation of the inserted locking flange, and
the bending edges of the two hooks are perpendicular to the virtual connecting line.
14. An arrangement having a belt retractor frame and a vehicle panel,
wherein the belt retractor frame has at least one hook for hooking the belt retractor frame into the vehicle panel and at least one bent tab, which produces a preload with the vehicle panel after the at least one hook has been hooked in,
wherein the at least one hook is adapted to be placed on a rectilinear panel edge section of a panel edge of the vehicle panel and engages a rear side of the vehicle panel,
wherein the at least one bent tab is formed by a plate section of a frame plate which is bent out of a frame plate plane of the belt retractor frame in the direction of the vehicle panel, namely in such a way that it exerts a pressure load on a surface section of a front side of the vehicle panel, and
wherein the surface section of the front side of the vehicle panel on which the bent tab exerts the preload is at a distance from the rectilinear panel edge of the vehicle panel.
15. The arrangement of claim 14
wherein the bent tab ends below the rectilinear panel edge section of the panel edge of the vehicle panel, and
wherein the surface section of the front side of the vehicle panel on which the bent tab exerts the preload is at a distance below the panel edge of the vehicle panel.
16. The arrangement of claim 14
wherein the belt retractor frame has at least two hooks for hooking the belt retractor frame into a vehicle panel,
wherein the at least two hooks of the belt retractor frame are placed on the rectilinear panel edge section of the panel edge of the vehicle panel, and
wherein the at least one bent tab extends from a connecting region thereof, which connects it to the rest of the belt retractor frame, in a direction which is antiparallel to the direction of extension of the rear engagement section of the hooks.
17. The arrangement of claim 16
wherein the bent tab ends below the rectilinear panel edge section of the panel edge of the vehicle panel, and
wherein the surface section of the front side of the vehicle panel on which the bent tab exerts the preload is at a distance below the panel edge of the vehicle panel.
18. The arrangement of claim 14, wherein the rectilinear panel edge section where the at least one hook is placed is cutout-free.
19. The arrangement of claim 16, wherein the rectilinear panel edge section where the at least two hooks are placed is cutout-free.