1. A polishing apparatus, comprising:
a conductive polishing pad;
an electrode; and
a spacer disposed between the electrode and the conductive polishing pad, the spacer having a first surface facing the electrode extending from a center of the spacer to an edge of the spacer, wherein a portion of the first surface proximate the edge is closer to the conductive pad than a portion of the first surface proximate the center of the spacer.
2. The apparatus of claim 1, wherein the first surface of the spacer comprises at least a portion of a cone, an ellipsoid, a sphere or a planar surface.
3. The apparatus of claim 1, wherein at least a portion of the first surface of the spacer is orientated at an acute angle relative to a centerline of the conductive polishing pad.
4. The apparatus of claim 1, wherein the spacer is permeable to electrolyte.
5. The apparatus of claim 1, wherein the spacer is comprise a plurality of apertures formed therethrough.
6. The apparatus of claim 1, wherein the spacer is formed of a dielectric material.
7. The apparatus of claim 1, wherein the spacer is formed of a polymer.
8. The apparatus of claim 1, wherein the spacer is formed of a ceramic.
9. The apparatus of claim 1, wherein the first surface of the spacer includes a plurality of ribs extending therefrom.
10. The apparatus of claim 1 further comprising at least one permeable membrane disposed adjacent the first surface.
11. The apparatus of claim 1, wherein the membrane is adhered to the first surface.
12. The apparatus of claim 1 further comprising a tray supporting the electrode, the tray having a port adapted to flow electrolyte to the conductive polishing pad.
13. The apparatus of claim 12, wherein the tray further comprises:
a basin having sides and a bottom adapted to retain the electrode; and
a plenum cap disposed on the bottom of the basin and defining a plenum therebetween that is in fluid communication with the port.
14. The apparatus of claim 13, wherein the plenum cap further comprises:
a cap plate having a plurality of apertures formed therethrough, the apertures in fluid communication with the plenum.
15. The apparatus of claim 13, wherein the plenum cap further comprises:
a cap plate having a plurality of apertures formed therethrough, the apertures in fluid communication with the plenum and orientated at an acute angle relative to a center axis of the plenum cap.
16. A polishing apparatus, comprising:
a conductive polishing pad having a substantially planar polishing surface;
an electrode; and
a permeable membrane disposed between the electrode and the conductive polishing pad, the membrane having a non-parallel orientation relative the polishing surface of the conductive pad.
17. The apparatus of claim 16, wherein the membrane has a form comprising at least a portion of a cone, an ellipsoid, a sphere or a planar surface.
18. The apparatus of claim 16, wherein at least a portion of the membrane is orientated at an acute angle relative to a centerline of the conductive polishing pad.
19. A polishing apparatus, comprising:
a conductive polishing pad having a substantially planar polishing surface;
an electrode;
a spacer disposed between the electrode and the conductive polishing pad, the spacer having a first surface facing and substantially parallel to the polishing surface, and a second surface facing the electrode; and
a permeable membrane disposed adjacent the second side of the spacer, the membrane having a first portion disposed closer to the conductive pad than a second portion.
20. The apparatus of claim 19 further comprising:
a spacer disposed between the membrane and the conductive polishing pad, the spacer having a first surface facing and substantially parallel to the polishing surface, and a second surface following a contour of the membrane.
21. The apparatus of claim 19 further comprising:
a basin having sides and a bottom adapted to retain the electrode;
a port formed through the bottom; and
a plenum cap disposed on the bottom of the basin and having a plurality of apertures therethrough, the basin and plenum cap defining a plenum therebetween, the port and apertures in fluid communication with the plenum.
22. A polishing apparatus, comprising:
a conductive polishing pad having a polishing surface substantially perpendicular having a central axis;
an electrode disposed adjacent the tray bottom; and
a permeable membrane disposed between the electrode and conductive polishing pad in an orientation non-perpendicular to the central axis.
23. Apparatus for polishing a substrate, comprising:
a basin having sides and a bottom adapted to contain electrolyte during a polishing process;
a plenum cap disposed on the bottom of the basin and plenum cap defining a plenum therebetween;
a plurality of apertures formed through the plenum cap and coupled to the plenum; and
a port formed through the bottom of the basin and coupled to the plenum.
24. The apparatus of claim 23, wherein the bottom comprises:
a first recess formed therein that accepts at least a portion of the plenum cap; and
a second recess formed in the bottom inwards of the first recess, the second recess forming the plenum.
25. Apparatus for polishing a substrate, comprising
a basin having sides and a bottom adapted to contain electrolyte during a polishing process;
a plenum cap coupled to the bottom of the basin and having a plurality of apertures formed therethrough, the basin and plenum cap defining a plenum therebetween;
a port formed through the bottom of the basin and coupled to the plenum;
a plurality of apertures formed through the plenum cap and coupled to the plenum;
an electrode disposed adjacent the plenum cap;
a membrane disposed adjacent the electrode, the membrane having a center section disposed closer to the bottom of the basin than an edge of a membrane; and
a conductive polishing pad disposed adjacent the membrane.
26. A polishing apparatus, comprising
a tray;
a conductive polishing pad disposed in the tray;
an electrode disposed between the conductive polishing pad and a bottom of the tray;
a membrane disposed between the conductive polishing pad and the electrode, the membrane having an outer edge and a center portion, wherein the outer edge is disposed closer to the conductive pad than the center portion; and
at least one polishing head adapted to place a substrate retained in the polishing head in contact with the conductive polishing pad.
27. A polishing apparatus, comprising:
a) a chemical mechanical polishing station comprising:
at least one platen;
a polishing material disposed on the platen;
a polishing fluid delivery system adapted to provide a polishing fluid to the polishing material;
b) an electrochemical polishing station comprising:
at least one tray disposed adjacent the platen;
a conductive polishing pad retained by the tray;
an electrode disposed between the conductive polishing pad and the tray;
a membrane disposed between the conductive polishing pad and the electrode, the membrane having an outer edge and a center portion, wherein the outer edge is disposed closer to the conductive pad than the center portion; and
c) a transfer device comprising:
at least one polishing head adapted to selectively place a substrate retained in the polishing head in contact with the conductive polishing pad or the polishing material.
28. The apparatus of claim 27 further comprising an electrolyte delivery system coupled to the tray, the electrolyte delivery system comprising a tank having a plurality of baffles disposed therein and at least one pump adapted to flow electrolyte between the tank and the tray.
29. The apparatus of claim 28, wherein the tank further comprises an aperture adapted to allow removal andor escape of gas from said tank.
30. A method for electrochemical polishing a substrate, the method comprising:
placing the substrate parallel to a surface of a conductive pad;
moving the substrate relative to the conductive polishing pad;
flowing electrolyte between an electrode and the substrate, the electrolyte providing a conductive path between the electrode and the substrate through the conductive polishing pad and through a membrane disposed between the electrode and the conductive pad, the membrane having an edge and a center portion, the edge disposed closer to the conductive pad than the center portion.
31. The method of claim 30, further comprising:
flowing the electrolyte to the electrode through a plurality of apertures formed in a tray supporting the electrode.
32. The method of claim 31, wherein the apertures are coupled to a common plenum formed in the tray.
33. The method of claim 30, wherein gas entrained in the electrolyte is moved radially outward along the surface of the spacer of the membrane.
34. The method of claim 30 further comprising:
removing gas from the electrolyte prior to contacting the electrode.
35. The method of claim 34 wherein the step of removing gas further comprises flowing the electrolyte through a series of baffles disposed in a tank.
36. The method of claim 34, further comprising venting gas the tank.
37. The method of claim 34, further comprising reducing pressure of an atmosphere above the electrolyte in the tank.
38. The method of claim 34 further comprising filtering the electrolyte prior to flowing electrolyte to the electrode.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1.-10. (canceled)
11. A method of charging an electrochemical cell comprising a host material, the method comprising the steps of:
characterizing the state of health of the electrochemical cell;
selecting a charging voltage andor current according to the characterized state of health of the electrochemical cell; and
providing the selected voltage andor current to electrodes of the electrochemical cell to charge the electrochemical cell.
12. The method of claim 11, wherein the state of health of the electrochemical cell is a function of the number of chargedischarge cycles the electrochemical cell has experienced.
13. The method of claim 11, wherein the voltage andor current provided to the electrochemical cell is preselected according to the number of chargedischarges cycles the electrochemical cell has experienced.
14. The method of claim 11, wherein the step of characterizing the state of health of the electrochemical cell comprises the steps of:
determining \u0394G, \u0394S andor \u0394H of the electrochemical cell for a plurality of selected electrochemical cell compositions;
determining states of charge of the electrochemical cell for each of the plurality of selected electrochemical cell compositions;
identifying the states of charge and \u0394G, \u0394S andor \u0394H corresponding to an event or condition of the electrochemical cell; and
comparing the \u0394G, \u0394S andor \u0394H corresponding to the event or condition of the electrochemical cell to reference \u0394G, \u0394S andor \u0394H corresponding to the event or condition of a reference electrochemical cell.
15. The method of claim 11, wherein when the characterized state of health corresponds to a first state of health of the electrochemical cell, a first charging voltage is selected and wherein when the characterized state of health corresponds to a second state of health of the electrochemical cell, a second charging voltage less than the first charging voltage is selected.
16. The method of claim 11, wherein when the characterized state of health corresponds to a chargedischarge cycle number of 20 to 2000, the charging voltage is selected over the range of 1.5-5.5 volts.
17. The method of claim 11, wherein when the characterized state of health corresponds to a chargedischarge cycle number of 200 to 1000, the charging voltage is selected over the range of 2.5-5.3 volts.
18. A system for charging an electrochemical cell comprising a host material, the system comprising:
means for delivering a voltage andor current to electrodes of the electrochemical cell;
means for characterizing a state of health of the electrochemical cell; and
a control circuit for:
receiving the characterized state of health; and
controlling the means for delivering a voltage andor current.
19. The system of claim 18, wherein the means for delivering a voltage andor current comprises a voltage andor current source.
20. The system of claim 18, wherein the means for delivering a voltage andor current comprises a voltage andor current controller.
21. The system of claim 18, wherein the means for characterizing the state of health of the electrochemical cell comprises a system configured for performing the method of claim 1.
22. The system of claim 18, wherein the means for characterizing the state of health of the electrochemical cell comprises a system configured for performing a method comprising the steps of:
determining changes in entropy, enthalpy or free energy of the electrochemical cell for a plurality of selected electrochemical cell compositions;
determining states of charge of the electrochemical cell for each of the plurality of selected electrochemical cell compositions;
identifying the states of charge and changes in entropy, enthalpy or free energy corresponding to an event or condition of the electrochemical cell; and
comparing the changes in entropy, enthalpy or free energy corresponding to the event or condition of the electrochemical cell to reference changes in entropy, enthalpy or free energy corresponding to the event or condition of a reference electrochemical cell.
23. The system of claim 18, wherein the means for characterizing the state of health of the electrochemical cell comprises:
a means for measuring open circuit voltages of the electrochemical cell as a function of time;
a composition controller electrically connected to the electrochemical cell for establishing selected electrochemical cell compositions corresponding to different stoichiometries of a species incorporated with a host material of the electrochemical cell, the composition controller configured for establishing a plurality of the selected compositions;
a temperature controller in thermal contact with the electrochemical cell for establishing a plurality of selected electrochemical cell temperatures for each of the selected compositions, thereby establishing a plurality of selected electrochemical cell temperature and composition combinations; and
an open circuit voltage analyzer for receiving open circuit voltage measurements as a function of time from the means for measuring open circuit voltages and for identifying open circuit voltages for thermochemically stabilized conditions of the electrochemical cell for the selected electrochemical cell temperature and compositions combinations.
24. The system of claim 18, wherein the control circuit selectively provides voltage andor current to electrodes of the electrochemical cell from the means for delivering a voltage andor current.
25. The system of claim 18, wherein the voltage andor current delivered to the electrodes of the electrochemical cell from the means for delivering a voltage andor current is determined by the control circuit based upon the characterized state of health of the electrochemical cell.
26. The system of claim 18, wherein the electrochemical cell is a battery in a mobile electronic device.
27. The system of claim 18, wherein the system comprises a component of a mobile electronic device.
28. The system of claim 18, configured for performing a method comprising the steps of:
characterizing the state of health of the electrochemical cell;
selecting a charging voltage andor current according to the characterized state of health of the electrochemical cell; and
providing the selected voltage andor current to electrodes of the electrochemical cell to charge the electrochemical cell.
29. A method of charging an electrochemical cell in a mobile electronic device, the method comprising the steps of:
monitoring a voltage profile of the electrochemical cell over at least one discharge cycle;
determining a charging voltage andor current based upon the monitored discharge voltage profile; and
providing the charging voltage andor current to electrodes of the electrochemical cell, thereby charging the electrochemical cell.
30. The method of claim 29, wherein the monitoring step comprises measuring a plurality of open circuit voltages of the electrochemical cell.
31. The method of claim 29, further comprising the step of monitoring a voltage profile of the electrochemical cell over at least one charge cycle.
32. The method of claim 29, further comprising the step of monitoring a temperature of the electrochemical cell over at least one discharge cycle.
33. The method of claim 29, further comprising the step of monitoring a temperature of the electrochemical cell over at least one charge cycle.