Author: claimsbot

1. A method of etching, by a plasma of an etching gas in a processing vessel, a lower layer film of an organic material formed on a substrate, using an upper layer film of an Si-containing organic material as a mask, wherein
a mixed gas containing an NH3 gas and an O2 gas is supplied into the processing vessel as the etching gas,
a CD shift value of etching is controlled by adjusting a flow ratio of the O2 gas to the NH3 gas,
the plasma is formed between a pair of opposed electrodes disposed in the processing vessel, and
a residence time represented by VS takes a value from 20 to 60 msec, where V (m3) represents an effective processing space volume as a product of an area of the substrate and a distance between the electrodes, and S (m3sec) represents a gas exhaust velocity from the processing vessel.
2. The etching method according to claim 1, wherein
a pressure in the processing vessel is not less than 2.7 Pa and less than 13.3 Pa.
3. The etching method according to claim 1, wherein
a pressure in the processing vessel is not less than 6.7 Pa and less than 13.3 Pa.
4. The etching method according to claim 1, wherein
a temperature of a support member supporting the substrate in the processing vessel is from 0 to 20\xb0 C.
5. The etching method according to claim 1, wherein
the substrate has a surface layer to be etched with the lower layer film used as a mask, the surface layer being formed under the lower layer film.
6. The etching method according to claim 1, wherein
the etching method is carried out by a capacitively coupled plasma etching system, which forms a high-frequency electric field between a pair of opposed electrodes disposed in the processing vessel to generate the plasma.
7. A method of etching, by a plasma of an etching gas in a processing vessel, a lower layer film of an organic material formed on a substrate, using an upper layer film of an Si-containing organic material as a mask, wherein
a mixed gas containing an NH3 gas and an O2 gas is supplied into the processing vessel as the etching gas,
a flow ratio of the O2 gas to the NH3 gas is from 0.5 to 20%,
the plasma is formed between a pair of opposed electrodes disposed in the processing vessel, and
a residence time represented by VS takes a value from 20 to 60 msec, where V (m3) represents an effective processing space volume as a product of an area of the substrate and a distance between the electrode, and S (m3sec) represents a gas exhaust velocity from the processing vessel.
8. The etching method according to claim 7, wherein
the flow ratio of the O2 gas to the NH3 gas is from 5 to 10%.
9. The etching method according to claim 7, wherein
a pressure in the processing vessel is not less than 2.7 Pa and less than 13.3 Pa.
10. The etching method according to claim 7, wherein
a pressure in the processing vessel is not less than 6.7 Pa and less than 13.3 Pa.
11. The etching method according to claim 7, wherein
a temperature of a support member supporting the substrate in the processing vessel is from 0 to 20\xb0 C.
12. The etching method according to claim 7, wherein
the substrate has a surface layer to be etched with the lower layer film used as a mask, the surface layer being formed under the under the lower layer film.
13. The etching method according to claim 7, wherein
the etching method is carried out by a capacitively coupled plasma etching system, which forms a high-frequency electric field between a pair of opposed electrodes disposed in the processing vessel to generate the plasma.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A reservoir structure of a fuel delivery structure for a diesel vehicle, the reservoir structure including:
a fuel reservoir having a bottom surface,
a primary fill opening in the bottom surface for permitting fuel to pass from a fuel tank of the vehicle into the reservoir,
a secondary fill opening in the reservoir that is elevated from the bottom surface,
a first valve member associated with the primary fill opening constructed and arranged to close the primary fill opening under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, to permit fuel to enter the reservoir through the primary fill opening, and
a second valve member associated with the secondary fill opening constructed and arranged to close the secondary fill opening under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, to permit fuel to enter the reservoir through the secondary fill opening in the event the primary opening is substantially blocked.
2. The reservoir structure of claim 1, wherein each of the first and second valve members is of generally umbrella shape and comprised of elastomer material.
3. The reservoir structure of claim 1, wherein the secondary opening is associated with a pocket in the bottom of the reservoir.
4. The reservoir structure of claim 3, wherein the pocket is defined by a step in the bottom of the reservoir.
5. The reservoir structure of claim 1, in combination with a suction tube in the reservoir, the suction tube being constructed and arranged to be coupled with a suction unit to draw fuel under certain conditions into the reservoir via at least the secondary fill opening.
6. The combination of claim 5, in further combination with a fuel tank, the reservoir resting on a bottom surface of the fuel tank.
7. The combination of claim 6, wherein the secondary fill opening and a bottom opening of the suction tube are generally at the same height with respect to the bottom surface of the fuel tank.
8. The reservoir structure of claim 1, in combination with a pump module including a fuel pump disposed in the reservoir, the fuel pump being constructed and arranged to draw fuel under certain conditions into the reservoir via at least the secondary fill opening.
9. A reservoir structure of a fuel delivery structure for a diesel vehicle, the reservoir structure including:
a fuel reservoir having a bottom surface,
first means for permitting fuel to pass from a fuel tank of the vehicle into the reservoir,
second means in the reservoir for permitting fuel to pass from the fuel tank into the reservoir that is elevated from the bottom surface,
means for closing the first means under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, for permitting fuel to enter the reservoir through the first means, and
means for closing the second means under certain pressure conditions in the reservoir and, under pressure conditions in the reservoir different from the certain pressure conditions, for permitting fuel to enter the reservoir through the second means in the event the first means is substantially blocked.
10. The reservoir structure of claim 9, wherein each of the means for closing is a valve member of generally umbrella shape comprised of elastomer material.
11. The reservoir structure of claim 9, wherein the second means is an opening in the reservoir that is associated with a pocket in the bottom of the reservoir.
12. The reservoir structure of claim 11, wherein the pocket is defined by a step in the bottom of the reservoir.
13. The reservoir structure of claim 9, in combination with a suction tube in the reservoir, the suction tube being constructed and arranged to be coupled with a suction unit to draw fuel under certain conditions into the reservoir via at least the second means.
14. The combination of claim 13, in further combination with a fuel tank, the reservoir resting on a bottom surface of the fuel tank.
15. The combination of claim 14, wherein the second means is an opening in the reservoir and wherein the opening and a bottom opening of the suction tube are generally at the same height with respect to the bottom surface of the fuel tank.
16. The reservoir structure of claim 9, in combination with a pump module including a fuel pump disposed in the reservoir, the fuel pump being constructed and arranged to draw fuel under certain conditions into the reservoir via at least the second means.

1. An electric machine module comprising:
a housing at least partially defining a machine cavity; and
an electric machine positioned substantially within the machine cavity and at least partially enclosed by the housing, the electric machine including a rotor assembly including a rotor hub coupled to a plurality of rotor laminations,
the rotor hub including a first axial end and a second axial end, the first axial end substantially opposing the second axial end,
at least a portion of the rotor laminations comprising at least one aperture so that when the plurality of rotor laminations are coupled to the rotor hub, the apertures of the rotor laminations are configured and arranged to support at least one magnet,
the rotor assembly comprising a plurality of coolant channels fluidly coupled with the machine cavity,
at least a first rotor hub inlet disposed in a portion of the rotor hub substantially adjacent to the first axial end, and at least a second rotor hub inlet disposed in a portion of the rotor hub substantially adjacent to the second axial end,
the first rotor hub inlet fluidly coupled with at least one of the plurality of coolant channels and the second rotor hub inlet fluidly coupled with at least one of the plurality of coolant channels, and
wherein the at least one coolant channel that is fluidly coupled with the first rotor hub inlet and the at least one coolant channel that is fluidly coupled with the second rotor hub inlet are not the same coolant channels.
2. The electric machine module of claim 1 and further comprising at least one end ring coupled to at least one of the first axial end and the second axial end of the rotor assembly.
3. The electric machine module of claim 2, wherein the at least one balance ring is configured and arranged to guide a coolant into the machine cavity from the plurality of coolant channels.
4. The electric machine module of claim 1, wherein the at least one coolant channel that is fluidly coupled with the first rotor hub inlet is substantially sealed immediately adjacent to the first axial end so that the coolant channel is fluidly coupled with the machine cavity only at the second axial end.
5. The electric machine module of claim 4, wherein the at least one coolant channel that is fluidly coupled with the second rotor hub inlet is substantially sealed immediately adjacent to the second axial end so that the coolant channel is fluidly coupled with the machine cavity only at the first axial end.
6. The electric machine module of claim 1 and further comprising a coolant jacket positioned within the housing and a plurality of coolant apertures positioned through a portion of the housing so that the coolant jacket is in fluid communication with the machine cavity.
7. The electric machine module of claim 1, wherein the rotor assembly comprises a first flange positioned substantially adjacent to the first axial end and a second flange positioned substantially adjacent to the second axial end, wherein the first flange and second flange are configured and arranged to guide at least a portion of a coolant toward the first and the second rotor hub inlets, respectively.
8. The electric machine module of claim 1, wherein the electric machine further comprises a stator assembly substantially circumscribing at least a portion of the rotor assembly.
9. The electric machine module of claim 1 and further comprising a plurality of first rotor hub inlets positioned substantially adjacent to the first axial end and each of the plurality of first rotor hub inlets fluidly coupled with at least one of the plurality of coolant channels, and a plurality of second rotor hub inlets positioned substantially adjacent to the second axial end and each of the plurality of second rotor hub inlets is fluidly coupled with at least one of the plurality of coolant channels.
10. The electric machine module of claim 9, wherein the coolant channels fluidly coupled with the plurality of first rotor hub inlets are fluidly coupled with the machine cavity only at the second axial end and the coolant channels fluidly coupled with the plurality of second rotor hub inlets are fluidly coupled with the machine cavity only at the first axial end.
11. An electric machine module comprising:
a housing at least partially defining a machine cavity; and
an electric machine positioned substantially within the machine cavity and at least partially enclosed by the housing, the electric machine including a rotor assembly, including a rotor hub,
the rotor assembly operatively coupled to an output shaft, the output shaft including at least one output shaft coolant channel and at least one output shaft coolant outlet in fluid communication with the output shaft coolant channel,
the rotor assembly including at least one magnet, a first axial end, and a second axial end, the first axial end substantially opposing the second axial end,
the rotor assembly including a plurality of coolant channels extending from the first axial to the second axial end, the plurality of coolant channels in fluid communication with the machine cavity,
at least one rotor hub channel positioned through a portion of the rotor assembly, the at least one rotor hub channel fluidly couples the at least one output shaft coolant outlet to at least a portion of the plurality of coolant channels,
at least a first rotor hub inlet disposed in a portion of the rotor assembly substantially adjacent to the first axial end, and at least a second rotor hub inlet disposed in a portion of the rotor assembly substantially adjacent to the second axial end,
the first rotor hub inlet is fluidly coupled with at least a portion of the plurality of coolant channels and the second rotor hub inlet is fluidly coupled with at least a portion of the plurality of coolant channels, and
wherein the portion of the plurality of coolant channels that are fluidly coupled with the first rotor hub inlet, the portion of the plurality of coolant channels that are fluidly coupled with the second rotor hub inlet, and the portion of the plurality of coolant channels that are fluidly coupled with the at least one rotor hub channel are not the same coolant channels.
12. The electric machine module of claim 11 and further comprising at least one balance ring coupled to at least one of the first axial end and the second axial end of the rotor assembly.
13. The electric machine module of claim 12, wherein the at least one balance ring is configured and arranged to guide a coolant into the machine cavity from the plurality of coolant channels.
14. The electric machine module of claim 11, wherein the portion of the plurality of coolant channels that are fluidly coupled with the first rotor hub inlet are substantially sealed immediately adjacent to the first axial end so that the portion of the plurality of coolant channels that are fluidly coupled with the machine cavity only at the second axial end.
15. The electric machine of claim 14, wherein the portion of the plurality of coolant channels that are fluidly coupled with the second rotor hub inlet are substantially sealed immediately adjacent to the second axial end so that the coolant channel are fluidly coupled with the machine cavity only at the first axial end.
16. The electric machine of claim 11 and further comprising a coolant jacket positioned within the housing and a plurality of coolant apertures positioned through a portion of the housing so that the coolant jacket is in fluid communication with the machine cavity.
17. The electric machine module of claim 11, wherein the rotor assembly comprises a first flange positioned substantially adjacent to the first axial end and a second flange positioned substantially adjacent to the second axial end, wherein the first flange and second flange are configured and arranged to guide at least a portion of a coolant through the first and the second rotor hub inlets, respectively.
18. The electric machine module of claim 11 and further comprising a plurality of rotor hub channels fluidly coupling a plurality of output shaft coolant outlets and a portion of the plurality of coolant channels.
19. A method for cooling an electric machine module, the method comprising:
providing a housing at least partially defining a machine cavity;
positioning an electric machine substantially within the machine cavity and at least partially enclosed by the housing, the electric machine including a rotor assembly, including a rotor hub, at least one magnet, a first axial end, and a second axial end, and the first axial end substantially opposing the second axial end;
operatively coupling the rotor assembly to an output shaft, the output shaft including at least one output shaft coolant channel and at least one output shaft coolant outlet in fluid communication with the output shaft coolant channel;
positioning a plurality of coolant channels within the rotor assembly so that the plurality of coolant channels extend from the first axial to the second axial end, the plurality of coolant channels are fluidly coupled with the machine cavity;
positioning at least one rotor hub channel through a portion of the rotor assembly, the at least one rotor hub channel is fluidly coupled with the at least one output shaft coolant outlet and at least a portion of the plurality of coolant channels;
disposing at least a first rotor hub inlet in a portion of the rotor assembly substantially adjacent to the first axial end; and
disposing at least a second rotor hub inlet in a portion of the rotor assembly substantially adjacent to the second axial end,
the first rotor hub inlet is fluidly coupled with at least a portion of the plurality of coolant channels and the second rotor hub inlet is fluidly coupled with at least a portion of the plurality of coolant channels, and
wherein the portion of the plurality of coolant channels that are fluidly coupled with the first rotor hub inlet, the portion of the plurality coolant channels that are fluidly coupled with the second rotor hub inlet, and the portion of the plurality of coolant channels that are fluidly coupled with the at least one rotor hub channel are not the same coolant channels.
20. The method of claim 19 and further comprising substantially sealing at least some of the portion of the coolant channels that are fluidly coupled with the first rotor hub inlets adjacent to the first axial end, and substantially sealing at least some of the portion of the coolant channels that are fluidly coupled with the second rotor hub inlets adjacent to the second axial end.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method for providing verification information to a requesting application by an authenticated server comprising the steps of:
generating pre-signed certificates at an authenticated server;
receiving a query for verification information from a requesting application after the pre-signed certificates are generated;
examining policies for verification and available certificates and computing a query response to said query; and
determining whether to give an on-line or an off-line response, the on-line response being determined if the authenticated server is able to sign its responses and the off-line response being determined if the authenticated server is unable to sign its responses; and
if an off-line response is to be given, computing which of the pre-signed certificates to return to said requesting application and returning the pre-signed certificates computed for return to said requesting application;
if an on-line response is to be given, returning an on-line response comprising said query response and information identifying said query.
2. The method of claim 1, where said step of receiving a query for verification information from a requesting application comprises the step of receiving information over a distributed computer network; and said steps of returning the pre-signed certificates to said requesting application and of returning an on-line response comprising said query response and said query comprise the step of returning information over said distributed computer network.
3. The method of claim 2, where said distributed computer network is the Internet.
4. The method of claim 1, said step of examining a policy for verification and available certificates and computing a query response to said query; and further comprising the step of:
determining whether verification information should be requested from one or more other authenticated data servers, and, if verification information should be requested, sending requests for verification information to said one or more other authenticated data servers.
5. The method of claim 1, wherein said step of computing which of the pre-signed certificates to return comprises the step of:
determining which of said examined certificates were used to compute said query response.
6. The method of claim 1, wherein said steps of computing which of the pre-signed certificates to return and returning the pre-signed certificates computed for return if an off-line response is to be given comprises the steps of:
determining which of said examined certificates were used to compute said query response; and
returning, to said requesting application, pre-signed certificates corresponding to the determined certificates used to compute said query response.
7. The method of claim 1, further comprising the step of:
computing, at said requesting application, a query response to said query from the computed pre-signed certificates if the pre-signed certificates computed for return to said requesting application are returned to said requesting application.
8. A method for providing verification information to a requesting application by an authenticated server comprising the steps of:
programming a first server to receive a query for verification information from a requesting application;
programming said first server to examine first server policies for verification and first server available certificates and computing a query response to said query;
programming said first server to determine whether said query necessitates a remote query to a second server, and, if so, to send said remote query to said second server;
programming said second server to generate pre-signed certificates, said pre-signed certificates generated before said remote query is received by said second server;
programming said second server to examine said remote query, second server policies for verification, second server available certificates and computing a remote query response to said remote query;
programming said second server to determine whether to give an on-line or an off-line response, the on-line response being determined if the authenticated server is able to sign its responses and the off-line response being determined if the authenticated server is unable to sign its responses; and
if an off-line response is to be given, computing which of the pre-signed certificates to return to said first server and returning to said first server the pre-signed certificates computed for return;
if an on-line response is to be given, returning to said first server an on-line response comprising said query response and information identifying said query;
programming said first server to receive responses from said second server and to determine whether an on-line or an off-line response was given to a remote query;
programming said first server to respond to receipt of an off-line response to a remote query by examining said first server policies for verification and said first server available certificates and said off-line response and computing a first server remote query response to said remote query;
programming said first server to use said first server remote responses, said on-line responses, said first server policies for verification and said first server available certificates to compute a query response to said query for verification information;
programming said first server to send said query response to said query for verification information to said requesting application.
9. The method of claim 8, where said query, said first and second server policies for verification, said first and second server available certificates, said remote query, said first server remote query responses, and said on-line or off-line response are expressed using a programming language which includes two syntactically distinct classes of names and variables, one of said classes expressing positive information, and the second of said classes negative information.