What is claimed is:
1. A GALVANO-micromirror comprising:
a first substrate having a light-reflective mirror face on one surface thereof and a first electrode on one or both surface(s) thereof; and
a second substrate including a frame-form base, a second electrode located opposedly to the first electrode, a joint holder section located under the mirror face for holding the first substrate, and a torsion bar section located under the mirror face for connecting the frame-form base to the joint holder section and supporting the joint holder section pivotally within a range of angles,
wherein a part of a surface of the first substrate on which the mirror face is not formed is joined to the joint holder section of the second substrate.
2. A GALVANO-micromirror comprising:
a frame-form base;
a mirror section located inside the base which has, on one surface thereof, a mirror face and an electrode for electrostatic actuation; and
two torsion bar sections for connecting the base to the mirror section and supporting the mirror section pivotally within a range of angles,
wherein recesses are formed in a part of the mirror face, and the torsion bar sections are arranged in the recesses so as to connect edges of the recesses in the mirror face to parts of the base.
3. The GALVANO-micromirror according to claim 1, wherein the first and second substrates are formed of semiconductor bulk substrates.
4. A process for manufacturing a GALVANO-micromirror comprising the steps of:
forming a mirror face of a light-reflective film on one surface of a first substrate made of a semiconductor bulk substrate, a first electrode of a metal thin film on one surface or first electrodes of thin metal films on both surfaces of the first substrate, and a joint section in a protrusive form on a surface on which the mirror face is not formed;
forming, on one surface of a second substrate made of a semiconductor bulk substrate, a second electrode opposed to the first electrode(s), a joint holder section in a protrusive form for holding the first substrate, and a torsion bar section for pivotally supporting the joint holder section within a range of angles;
forming a peripheral frame and a separation trench for separating the peripheral frame from the first substrate, on a surface of the semiconductor bulk substrate forming the first substrate on which surface the mirror face is not formed;
forming a peripheral frame and a separation trench corresponding to the peripheral frame and the separation trench formed on the first substrate, on the surface of the semiconductor bulk substrate forming the second substrate on which surface the joint holder section is formed; and
joining the first and second substrates so that the joint section of the first substrate contacts the joint holder section of the second substrate and thereafter boring the trenches through, thereby separating the substrates from the peripheral frames.
5. The process according to claim 4, wherein, in the case where the first electrodes are formed on both surfaces of the first substrate, a through hole is formed in the first substrate for electrical connection of the first electrodes on both surfaces.
6. A process for manufacturing a GALVANO-micromirror comprising the steps of:
forming a mirror face of a light-reflective film and a first electrode on one surface of a semiconductor bulk substrate;
forming, on another surface of the semiconductor bulk substrate, a first trench for separating a mirror section including the mirror face and the first electrode from a frame-form base to be formed in a periphery of the substrate, and a second trench for forming a recess in the mirror face and two torsion bar sections, the second trench being formed under the torsion bar sections and the torsion bar sections being formed within the recess in the mirror face for supporting the mirror face pivotally within a range of angles;
boring through the first trench, thereby separating the mirror section from the frame-form base; and
boring through the recess in the mirror face so that the mirror section is connected to the frame-form base by the torsion bar sections,
wherein the step of separating the mirror section from the frame-form base and the step of boring through the recess in the mirror face are performed by etching.
7. The process according to claim 6, wherein the recess in the mirror face is so formed that its area is negligibly small with respect to the area of the entire mirror face.
8. The process according to claim 6, wherein the step of separating the mirror section from the base by the first separation trench and the step of boring through the recess in the mirror face are performed by dry etching.
9. The process according to claim 6, wherein the first electrode is also formed on another surface of the semiconductor bulk substrate in a position corresponding to the first electrode formed in said one surface, and a through hole is formed for electrical connection of the first electrodes on both the surfaces.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An ignition timing controller controlling a primary current supplied to an ignition coil which receives high voltage so that a spark plug of an internal combustion engine generates spark, the ignition timing controller comprising:
a crank angle sensor outputting a crank angle signal pulse every when a crankshaft rotates a predetermined crank angle;
a measuring means for measuring a time period sufficient for rotating a crankshaft between adjacent crank angle signal pulses, the time period referred to as a rotating time period;
an estimating means for estimating a next rotating time period between pulses including a next required ignition timing based on the rotating time period measured by the measuring means at a time when an engine speed is lower than a predetermined value; and
a setting means for setting a start timing at which a primary current begins to be supplied based on the next timing period.
2. The ignition timing controller according to claim 1, further comprising
a memory means storing a map of a coefficient for estimating the next rotating period between pulses including the next required ignition timing based on the rotating time period in which the crankshaft is rotated by a stator motor without any combustion of the internal combustion engine, wherein
the estimating means selects the coefficient from the map, which corresponds to the rotating time measured by the measuring means, in order to estimate the next rotating time period by means of the coefficient.
3. The ignition timing controller according to claim 2, wherein
the estimating means corrects the coefficient based on a relationship between a previous value and a current value of the rotating time period.
4. The ignition timing controller according to claim 1, wherein
the estimating means estimates a first rotating time for a first crank angle which is just before a second crank angle including the next required ignition timing based on the rotating time measured by the measuring means, and estimates a second rotating time for the second crank angle based on the first rotating time.
5. The ignition timing controller according to claim 4, wherein
the estimating means re-estimates the second rotating time at a time when the first rotating time is measured by the measuring means.
6. An ignition timing controller controlling a primary current supplied to an ignition coil which receives high voltage so that a spark plug of an internal combustion engine generates spark, the ignition timing controller comprising:
a crank angle sensor outputting a crank angle signal pulse every when a crankshaft rotates a predetermined crank angle;
a measuring means for measuring a time period sufficient for rotating a crankshaft between adjacent crank angle signal pulses, the time period referred to a rotating time period;
an estimating means for estimating a next rotating time period between pulses including a next required ignition timing based on the rotating time period measured by the measuring means at a time when an engine speed is lower than a predetermined value; and
a setting means for setting a stop timing at which a primary current ends to be supplied based on the next timing period.