1461115696-1f719c7e-ab54-4624-b40d-c8a87b8633bf

What is claimed is:

1. A GALVANO-micromirror comprising:
a first substrate having a light-reflective mirror face on one surface thereof and a first electrode on one or both surface(s) thereof; and
a second substrate including a frame-form base, a second electrode located opposedly to the first electrode, a joint holder section located under the mirror face for holding the first substrate, and a torsion bar section located under the mirror face for connecting the frame-form base to the joint holder section and supporting the joint holder section pivotally within a range of angles,
wherein a part of a surface of the first substrate on which the mirror face is not formed is joined to the joint holder section of the second substrate.
2. A GALVANO-micromirror comprising:
a frame-form base;
a mirror section located inside the base which has, on one surface thereof, a mirror face and an electrode for electrostatic actuation; and
two torsion bar sections for connecting the base to the mirror section and supporting the mirror section pivotally within a range of angles,
wherein recesses are formed in a part of the mirror face, and the torsion bar sections are arranged in the recesses so as to connect edges of the recesses in the mirror face to parts of the base.
3. The GALVANO-micromirror according to claim 1, wherein the first and second substrates are formed of semiconductor bulk substrates.
4. A process for manufacturing a GALVANO-micromirror comprising the steps of:
forming a mirror face of a light-reflective film on one surface of a first substrate made of a semiconductor bulk substrate, a first electrode of a metal thin film on one surface or first electrodes of thin metal films on both surfaces of the first substrate, and a joint section in a protrusive form on a surface on which the mirror face is not formed;
forming, on one surface of a second substrate made of a semiconductor bulk substrate, a second electrode opposed to the first electrode(s), a joint holder section in a protrusive form for holding the first substrate, and a torsion bar section for pivotally supporting the joint holder section within a range of angles;
forming a peripheral frame and a separation trench for separating the peripheral frame from the first substrate, on a surface of the semiconductor bulk substrate forming the first substrate on which surface the mirror face is not formed;
forming a peripheral frame and a separation trench corresponding to the peripheral frame and the separation trench formed on the first substrate, on the surface of the semiconductor bulk substrate forming the second substrate on which surface the joint holder section is formed; and
joining the first and second substrates so that the joint section of the first substrate contacts the joint holder section of the second substrate and thereafter boring the trenches through, thereby separating the substrates from the peripheral frames.
5. The process according to claim 4, wherein, in the case where the first electrodes are formed on both surfaces of the first substrate, a through hole is formed in the first substrate for electrical connection of the first electrodes on both surfaces.
6. A process for manufacturing a GALVANO-micromirror comprising the steps of:
forming a mirror face of a light-reflective film and a first electrode on one surface of a semiconductor bulk substrate;
forming, on another surface of the semiconductor bulk substrate, a first trench for separating a mirror section including the mirror face and the first electrode from a frame-form base to be formed in a periphery of the substrate, and a second trench for forming a recess in the mirror face and two torsion bar sections, the second trench being formed under the torsion bar sections and the torsion bar sections being formed within the recess in the mirror face for supporting the mirror face pivotally within a range of angles;
boring through the first trench, thereby separating the mirror section from the frame-form base; and
boring through the recess in the mirror face so that the mirror section is connected to the frame-form base by the torsion bar sections,
wherein the step of separating the mirror section from the frame-form base and the step of boring through the recess in the mirror face are performed by etching.
7. The process according to claim 6, wherein the recess in the mirror face is so formed that its area is negligibly small with respect to the area of the entire mirror face.
8. The process according to claim 6, wherein the step of separating the mirror section from the base by the first separation trench and the step of boring through the recess in the mirror face are performed by dry etching.
9. The process according to claim 6, wherein the first electrode is also formed on another surface of the semiconductor bulk substrate in a position corresponding to the first electrode formed in said one surface, and a through hole is formed for electrical connection of the first electrodes on both the surfaces.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An ignition timing controller controlling a primary current supplied to an ignition coil which receives high voltage so that a spark plug of an internal combustion engine generates spark, the ignition timing controller comprising:
a crank angle sensor outputting a crank angle signal pulse every when a crankshaft rotates a predetermined crank angle;
a measuring means for measuring a time period sufficient for rotating a crankshaft between adjacent crank angle signal pulses, the time period referred to as a rotating time period;
an estimating means for estimating a next rotating time period between pulses including a next required ignition timing based on the rotating time period measured by the measuring means at a time when an engine speed is lower than a predetermined value; and
a setting means for setting a start timing at which a primary current begins to be supplied based on the next timing period.
2. The ignition timing controller according to claim 1, further comprising
a memory means storing a map of a coefficient for estimating the next rotating period between pulses including the next required ignition timing based on the rotating time period in which the crankshaft is rotated by a stator motor without any combustion of the internal combustion engine, wherein
the estimating means selects the coefficient from the map, which corresponds to the rotating time measured by the measuring means, in order to estimate the next rotating time period by means of the coefficient.
3. The ignition timing controller according to claim 2, wherein
the estimating means corrects the coefficient based on a relationship between a previous value and a current value of the rotating time period.
4. The ignition timing controller according to claim 1, wherein
the estimating means estimates a first rotating time for a first crank angle which is just before a second crank angle including the next required ignition timing based on the rotating time measured by the measuring means, and estimates a second rotating time for the second crank angle based on the first rotating time.
5. The ignition timing controller according to claim 4, wherein
the estimating means re-estimates the second rotating time at a time when the first rotating time is measured by the measuring means.
6. An ignition timing controller controlling a primary current supplied to an ignition coil which receives high voltage so that a spark plug of an internal combustion engine generates spark, the ignition timing controller comprising:
a crank angle sensor outputting a crank angle signal pulse every when a crankshaft rotates a predetermined crank angle;
a measuring means for measuring a time period sufficient for rotating a crankshaft between adjacent crank angle signal pulses, the time period referred to a rotating time period;
an estimating means for estimating a next rotating time period between pulses including a next required ignition timing based on the rotating time period measured by the measuring means at a time when an engine speed is lower than a predetermined value; and
a setting means for setting a stop timing at which a primary current ends to be supplied based on the next timing period.

1461115686-465ab96f-5cfa-487f-b799-c2f64d45ac55

1. A process comprising the steps:
A) using an editor computer program to control a computer to display diagrams and textual interactive dialogs which a user of said computer can use to enter requirements data which is stored in and defines a Conceptual Model of an application computer program to be automatically written by a translator program controlling a computer, said Conceptual Model defining the object classes, attributes, services, functionality, behavior and user interface of said application computer program;
B) controlling a computer using said editor computer program or another computer program to automatically convert said Conceptual Model into a Formal Specification of said application computer program written in a formal specification language which has rules of syntax and semantics, each piece of requirements data stored in said Conceptual Model having a formal language counterpart, and each piece of requirements data being converted into its formal language counterpart as it is entered, and controlling said computer to use said rules of syntax and semantics to check said Formal Specification to ensure said Formal Specification is complete and correct;
C) using said Formal Specification as a source of data, controlling a computer with a one or more translator programs to perform a translation process to automatically generate source code for said application computer program including object server code for every service defined in said Conceptual Model, and controlling a computer with said one or more translator programs to automatically generate source code which implements the user interface for said application computer program which is modeled in said Conceptual Model, said translation process functioning to automatically generate source code which implements said user interface.
2. A process comprising:
using an editor program to control a computer to display tools structured to allow a designer who is designing an application program to enter requirements data that comprises articulated conceptual patterns or building blocks from a meta model based upon a formal specification language, said building blocks defining a Conceptual Model that defines at least the desired class structure, behavior and user interface of said application program; and
controlling a computer to automatically convert each said building block which has been articulated by requirements data entered by said designer using said tools to complete said Conceptual Model, said automatic conversion occurring as said requirements data of said building block is entered, said conversion resulting in conversion of each said articulated building block into a formal language counterpart thereof written in said formal specification language, and wherein said formal specification has rules of syntax and semantics, and controlling said computer to store said formal language counterparts as a Formal Specification in memory of said computer, and wherein said conversion of each articulated building block into its formal language counterpart occurs without a need for said designer to have any knowledge of how to write formal specifications of computer programs using said formal specification language.
3. The process of claim 2 wherein said computer displays said tools in the form of diagrams and textual interactive dialogs of a graphical modeling environment which causes said editor program to act as a graphical editor for said Formal Specification, said computer being controlled by said graphical editor to display tools which are structured to allow said designer to enter requirements data defining an Object Model, a Dynamic Model, a Functional Model and a Presentation Model, and wherein said Object Model stores requirements data which defines a class architecture for said application program via class definitions for classes in said application program, and wherein said Dynamic Model stores requirements data which specifies the behavior of objects in said classes in response to the execution of services, triggers and global transactions wherein said behavior is specified by said designer entering requirements data in a state transition diagram and an object interaction diagram, and wherein said Functional Model store requirements data which defines the semantics of any change of an object’s state for all objects in said classes defined in said Object Model, said computer displaying textual interactive dialogs which allow said designer to enter requirements data to specify a class, an attribute of said class and event, i.e., a single service of said class, and define a mathematical or logical formula that defines how the attribute’s value will be changed when said event happens, and wherein said Presentation Model stores requirements data which selects patterns from a pattern language and selects and articulates elemental patterns which further define the selected patterns.
4. The process of claim 3 where said computer displays and processes requirements data received from said designer through use of said diagrams and textual interactive dialogs, and said diagrams and textual interactive dialogs are structured to only allow entry of relevant building block information from a meta-model based upon said formal specification language, each said building block of requirements data being a conceptual modeling pattern having a formal specification language counterpart from said formal specification language in said Formal Specification, said building blocks from said meta-model being:
A) from the class definitions in said Object Model:
constant, variable and derived attributes;
a set of services including private and shared events and local transactions which are conglomerations of services defined by a transaction formula;
integrity constraints specified for each class; and
derivation formulas that define how the value of each said derived attribute is calculated;

B) from the state transition diagram of said Dynamic Model:
event preconditions which are formulas labeling the event transitions shown in said state transition diagram;
a process definition for each class which defines a template for valid object lives for said class;

C) from the object interaction diagram of said Dynamic Model:
trigger relationships;
global transactions which are transactions involving different objects;

D) from said Functional Model:
valuation formulas which define the effect of events on attributes;

E) from said Presentation Model:
Service Presentation patterns;
Instance Presentation patterns;
Class Population Presentation patterns; and
Master-Detail Presentation patterns;
and elemental patterns that articulate the aforementioned patterns including Introduction patterns, Defined Selection patterns, Population Selection patterns, Dependency patterns, Status Recovery patterns, Supplementary Information patterns, Argument Grouping Presentation pattern, Filter Expressions, Order Criterion and Display Sets.
5. The process of claim 3 further comprising the step of controlling said computer with a validator program to carry out a validation process to validate said Formal Specification by checking each statement in said Formal Specification against a set of validation rules stored in said computer and bringing errors to the attention of said designer for correction, said validation rules being based upon the syntax and semantics of whatever formal specification language was used to write said Formal Specification, said computer also using said validation rules to validate every inter-class action between any class defined in said Formal Specification, said validation process ensuring said Formal Specification is complete and correct.
6. The process of claim 4 further comprising the step of controlling said computer with a validator program to carry out a validation process to validate said Formal Specification by checking each said formal language counterpart of a building block or conceptual modeling pattern against a set of validation rules, said validation rules being based upon the syntax and semantics of whatever formal specification language was used to write said Formal Specification, and
each time requirements data defining a building block or conceptual pattern has been added, deleted or changed, controlling said computer to carry out a partial validation process using said validation rules, said partial validation process not resulting in any error messages being generated but causing any portion of said Formal Specification rendered invalid by a change that has been made to be marked as invalid, and
at the end of entry of said requirements data when conceptual modeling is complete, conducting a full validation by checking each statement in said Formal Specification against a set of validation rules stored in said computer and bringing errors to the attention of said designer for correction by generation of error messages, said computer also using said validation rules to validate every inter-class action between any class defined in said Formal Specification, said validation process ensuring said Formal Specification is complete and correct.
7. The process of claim 5 wherein said computer is controlled to validate said semantics of said Formal Specification by verifying at least:
that no statement in said Formal Specification attempts to add or otherwise attempt to perform any other mathematical operation between an integer or floating point number and an alphanumeric string;
that whenever an integer is added to a floating point number, the result is a floating point number and not an integer;
that for every attribute which is defined as variable, there is a service which changes the value of said attribute;
that for every attribute which is defined as constant, there is no service which attempts to change its value;
that if a service destroys or erases or eliminates an attribute, that is no service which attempts to change the value of said attribute after it has been eliminated;
that there are no mathematical formulas that attempts to combine entities that are not mathematically combinable;
that every formula that combines different types of numbers results in the correct type of output number;
that no mathematical formula attempts to divide a number by zero;
that no statement in said Formal Specification attempts to perform any operation which is mathematically undefined.
8. The process of claim 3 further comprising the step of controlling said computer with a validator program to carry out a validation process to validate said Formal Specification by checking each statement in said Formal Specification against a set of validation rules stored in said computer and bringing errors to the attention of said designer for correction, said validation rules being based upon the syntax and semantics of whatever formal specification language was used to write said Formal Specification, said computer also using said validation rules to validate every inter-class action between any class defined in said Formal Specification, said validation process ensuring said Formal Specification is complete and correct,
wherein validation for completeness means there is no missing information in said Formal Specification in that each element of said Formal Specification has been fully defined in that no piece of requirements data needed to fully define a property of said element is missing and all properties have valid values,
and wherein correctness means all formulas in said Formal Specification are \u201cwell formed\u201d meaning said formula is both syntactically correct according to the syntax of said formal specification language for a formula that type and semantically consistent.
9. The process of claim 8 wherein each of the different types of said formulas which exist in said Formal Specification has its own set of operators and terms which are allowed for use in a formula of that type, and wherein each of said different types of formulas has a validation process and a set of rules each of which is specific to formulas of that type, and wherein said step of validation for correctness means controlling said computer to validate each formula found in said Formal Specification with the validation process and set of rules which are specific to formulas of that type.
10. The process of claim 9 wherein the following types of formulas are allowed for use as building blocks in said Conceptual Model and wherein each said formula has a formal language counterpart in said Formal Specification:
Default Value Calculation of:
constant and variable class attributes;
service and transaction arguments;

Inheritance specialization conditions;
static and dynamic integrity constraints;
derivations and valuation formulas for calculation of the values of derived and variable attributes and for calculation of conditions;
preconditions for actions in services or transactions;
control conditions for transitions between states on a State Transition Diagram which is part of said Dynamic Model;
trigger conditions; and
local and global transaction formulas;

and wherein each of these formulas is validated at the time it is introduced into said Conceptual Model by preventing said designer from leaving an textual interactive dialog if the requirements data said designer has entered to define said formula is not syntactically and semantically correct.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method for testing a plurality of digital systems, comprising;
forming a connection between a serving device and a plurality of digital systems under test;
serving from a sequencer running on the serving device to the digital systems, command messages, each command message specifying for a listener within a digital system under test a plurality of nested directories and at least one command;
placing command messages in a queue of a listener to enable execution of one command before execution of another command is completed; and
implementing by the system under test the specified directories for the duration of at least one command within a command message and executing by the system under test the command within the implemented directories.
2. The method of claim 1, wherein a listener transmits to the sequencer a result message comprising information concerning execution of a command by the system under test while at least one other command is being executed by the system under test.
3. The method of claim 1, wherein commands of command messages sent by one or more sequencers to different listeners are executed by the devices under test simultaneously using the directories contained within each individual command message.
4. The method of claim 1, wherein commands of command messages sent from different sequencers to a single listener are executed by that device under test corresponding to the listener within the directories specified within each individual command message.
5. The method of claim 1, wherein a listener comprises a first-in-first-out directory to receive command messages.
6. The method of claim 1, wherein a command of a command message specifies a listener queue to transmit a command.