1. An exposure apparatus, comprising:
a light source adapted to emit light;
a photomask in a path of the light between the light source and a semiconductor substrate, the photomask being in a mask plane (MP) and having patterns to be transcribed onto the semiconductor substrate; and
a spatial light modulator (SLM) in a first image correction region of the photomask between the light source and the photomask, the SLM being adapted to adjust a distribution of intensity of the light.
2. The exposure apparatus as claimed in claim 1, wherein the first image correction region extends to a first distance from a conjugate plane (CP) of the MP along a first direction and to a second distance from the CP of the MP along the second direction, each of the first and second distances being substantially equal to a thickness of the photomask, the first direction being opposite the second direction, the first and second directions being perpendicular to the CP.
3. The exposure apparatus as claimed in claim 1, wherein the semiconductor substrate is in a second image correction region of the photomask, the second image correction region of the photomask being different than the first image correction region of the photomask.
4. The exposure apparatus as claimed in claim 1, wherein the SLM includes a micromirror array adapted to reflect light delivered from the light source.
5. The exposure apparatus as claimed in claim 4, wherein the micromirror array includes a plurality of micromirrors, each micromirror of the plurality of micromirrors being adapted to adjust an angle thereof with respect to a surface supporting the micromirror array.
6. The exposure apparatus as claimed in claim 1, further comprising a polarization beam splitter (PBS) between the photomask and the SLM, the PBS being adapted to reflect light delivered from the light source toward the SLM.
7. The exposure apparatus as claimed in claim 6, further comprising a first quarter wavelength (\u03bb4) plate between the PBS and the SLM.
8. The exposure apparatus as claimed in claim 6, further comprising an aperture between the PBS and the SLM.
9. The exposure apparatus as claimed in claim 6, further comprising a first lens between the PBS and the SLM, the first lens being adapted to collimate from the PBS in.
10. The exposure apparatus as claimed in claim 9, further comprising a second lens between the first lens and the SLM, the second lens being adapted to focus light from the first lens.
11. The exposure apparatus as claimed in claim 10, further comprising a third lens between the second lens and the SLM, the third lens being adapted to collimate light from the second lens.
12. The exposure apparatus as claimed in claim 6, further comprising a micro-fly’s eye lens in the path of the light between the light source and the PBS.
13. The exposure apparatus as claimed in claim 12, further comprising a beam delivery module between the light source and the PBS.
14. The exposure apparatus as claimed in claim 6, further comprising a second quarter wavelength (\u03bb4) plate between the PBS and the photomask.
15. The exposure apparatus as claimed in claim 6, further comprising a fourth lens between the PBS and the photomask, the fourth lens being adapted to collimate light from the PBS.
16. An exposure apparatus, comprising:
a light source adapted to emit light;
a photomask in a path of the light between the light source and a
semiconductor substrate, the photomask having patterns to be transcribed onto the semiconductor substrate; and
a uniformity adjustment module between the light source and the photomask, the uniformity adjustment module including a polarization beam splitter (PBS) and a spatial light modulator (SLM), the PBS being adapted to reflect light delivered from the light source toward the SLM, and the SLM being adapted to adjust a distribution of intensity of the light.
17. The exposure apparatus as claimed in claim 16, wherein the SLM is in a first image correction region of the photomask between the light source and the photomask.
18. The exposure apparatus as claimed in claim 17, wherein the semiconductor substrate is disposed in a second image correction region of the photomask, the second image correction region of the photomask being different than the first image correction region of the photomask.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system for fast forward error correction coding and decoding, the system comprising:
a transmitting device, wherein the transmitting device comprises:
a data source;
at least one forward error correction (FEC) encoder couple to the data source, wherein the at least one FEC encoder is adapted to encode data from the data source;
a channelizer coupled to the at least one FEC encoder, wherein the channelizer is adapted to interleave the encoded data among a plurality of communication channels;
wherein the data source is adapted to place control information prior to other information so that the control information is encoded and interleaved prior to the other information;
at least one receiving device, the at least one receiving device adapted to receive the plurality of communication channels, wherein the receiving device comprises:
a dechannelizer, wherein the dechannelizer is adapted to de-interleave the plurality of communication channels; and
a decoder coupled to the dechannelizer.
2. A system as in claim 1 wherein the at least one FEC encoder comprises a convolutional FEC encoder.
3. A system as in claim 2 wherein the convolutional FEC encode comprises a punctured convolutional FEC encoder.
4. A system as in claim 1 wherein the at least one FEC encoder comprises a block FEC encoder.
5. A system as in claim 1 wherein the decoder comprises a Viterbi decoder.
6. A system as in claim 5 wherein the Viterbi decoder comprises a hard decision Viterbi decoder.
7. A system as in claim 5 wherein the Viterbi decoder comprises a soft decision Viterbi decoder.
8. A communications system for fast forward error correction coding and decoding, the communications system comprising:
a transmission device, the transmission device comprising:
a data source;
a controller coder, wherein the controller coder is adapted to encode data from the data source;
a plurality of pseudo-noise (PN) code generators;
a plurality of mixers, the plurality of mixers adapted to spread encoded data from the controller coder, wherein the controller coder is further adapted to interleave the encoded data amongst the plurality of mixers according to a predetermined arrangement;
a plurality of modulators, the plurality of modulators adapted to modulate the interleaved PN code spread encoded data from the plurality of mixers onto at least one carrier frequency;
wherein the data source is adapted to place control information prior to other information so that the control information is encoded and interleaved prior to the other information;
a receiving device adapted to receive the at least one carrier frequency, wherein the receiving device comprises:
at least one decoder, wherein the at least one decoder comprises:
a plurality of PN code despreaders;
a de-interleaver coupled to the plurality of PN code despreaders, wherein the de-interleaver is adapted to reconstitute the encoded data from the data source; and
a FEC decoder.
9. A communications system as in claim 8 wherein the controller coder comprises a block FEC encoder.
10. A communications system as in claim 8 wherein the controller coder comprises a convolutional FEC encoder.
11. A communications system as in claim 8 wherein each of the plurality of PN code generators comprise a PN code substantially mutually orthogonal with each of the other PN codes.
12. A communications system as in claim 8 wherein the transmission device comprises a direct sequence code division multiple access (DS-CDMA) communications system.
13. A communications system as in claim 8 wherein the transmission device comprises a frequency hop code division multiple access (FH-CDMA) communications system.
14. A communications system as in claim 8 wherein the at least one decoder is a Viterbi decoder.
15. A method for fast forward error correction (FFEC) coding and decoding, the method comprising the steps of:
placing, in user data, control information prior to other information;
retrieving the user data;
encoding the user data according to a FEC scheme;
interleaving the FEC encoded data amongst a plurality of transmission channels;
transmitting the FEC encoded data, whereby the encoded and interleaved control information is transmitted prior to the encoded and interleaved other information;
receiving the plurality of transmission channels;
de-interleaving the FEC encoded data; and
FEC decoding the FEC encoded data to produce the user data.
16. A method as in claim 15 wherein the step of encoding the user data according to the FEC scheme further comprises the step of block FEC encoding the user data.
17. A method as in claim 15 wherein the step of encoding the user data according to the FEC scheme further comprises the step of convolutional FEC encoding the user data.
18. A method as in claim 15 wherein the step of transmitting the FEC encoded data further comprises the step of transmitting the FEC encoded data within a predetermined time frame.
19. A method as in claim 15 wherein the step of FEC decoding the FEC encoded data to produce the user data further comprises the step of Viterbi FEC decoding the FEC encoded data.
20. A method as in claim 15 wherein the step of FEC decoding further comprises the step of ReedSolomon FEC decoding the FEC encoded data.
21. A method for interleaving FEC coded packet data across multiple channels, the method comprising the steps of:
providing N transmission channels, where each N transmission channel comprises a transmit frame;
inserting channel preambles on each transmit frame; and
distributing next, after the channel preambles, the FEC packet data across each transmit frame, wherein the FEC packet data has control information placed prior to other information so that the control information is distributed prior to the other information.
22. A method as in claim 21 wherein the step of distributing, after the channel preambles, the FEC coded packet data across each transmit frame further comprises the step of distributing, FEC coded ATM packet data.
23. A method as in claim 21 wherein the step of distributing after the channel preambles, the FEC coded packet data across each transmit frame further comprises the step of distributing FEC coded control data.
24. A system for fast forward error correction data coding and decoding, the system comprising:
a communications device, wherein the communications device comprises:
a recordable media, the recordable media comprising a plurality of recordable tracks around which encoded packetized data may be interleaved;
a plurality of detectors adapted to read the interleaved encoded packetized data from the plurality of recordable tracks;
at least one receiving device, the at least one receiving device adapted to receive the interleaved encoded packetized data from the plurality of detectors, wherein the receiving device comprises:
a dechannelizer, wherein the dechannelizer is adapted to de-interleave the encoded packetized data from the plurality of detectors; and
a decoder coupled to the dechannelizer.
25. A system as in claim 24 further comprising:
a data source; and
at least one forward error correction (FEC) encoder coupled to the data source, wherein the at least one FEC encoder is adapted to encode packetized data from the data source.
26. A transmitting device that operates on data, the transmitting device comprising:
means for storing data, the means for storing placing control information in the data prior to placing other information in the data;
means for encoding the data, the means for encoding coupled to the means for storing data; and
means for interleaving the encoded data among a plurality of communication channels, the means for interleaving coupled to the means for encoding,
whereby the control information is encoded and interleaved prior to the other information.
27. The transmitting device of claim 26, wherein the transmitting device further comprises means for creating a single frame and means for placing the control information near a beginning of the single frame, wherein the single frame comprises a transmit frame on each of the communication channels.
28. A receiving device comprising:
means for de-interleaving data received from a plurality of communication channels, the received data having control information placed prior to other information so that the control information is received prior to the other information; and
means, coupled to the means for de-interleaving, for decoding the control information prior to decoding the other information.
29. The receiving device of claim 28, wherein the receiving device further comprises means for receiving a single frame, the single frame having the control information placed near a beginning of the single frame, wherein the single frame comprises a transmit frame on each of the communication channels.
30. A transmitting device that operates on data, the transmitting device comprising:
means for placing asynchronous transfer mode (ATM) information in the data prior to placing other information in the data;
means, coupled to the means for placing, for encoding the data; and
means, coupled to the means for encoding, for interleaving the encoded data among a plurality of communication channels,
whereby the ATM information is encoded and interleaved prior to the other information.