Author: claimsbot

What is claimed is:

1. A plasma processing apparatus comprising:
a vacuum chamber accommodating therein a substrate to be processed, allowing an inner space of the vacuum chamber to be maintained at a vacuum level;
a first electrode fixedly disposed at a location in the vacuum chamber;
a second electrode installed in the vacuum chamber and facing the first electrode, the second electrode being vertically movable so as to vary a distance between the first electrode and the second electrode;
a driving mechanism for vertically moving the second electrode, the driving mechanism being installed outside the vacuum chamber;
a bellows unit for air-tightly sealing an opening, the bellows unit having a frame-shaped member connected to the driving mechanism, wherein the opening, through which the second electrode is driven by the driving mechanism from the outside of the vacuum chamber, is provided at the vacuum chamber;
an electrode supporting member for connecting the frame-shaped member to the second electrode, the electrode supporting member being installed in the vacuum chamber; and
a high frequency power source generating plasma by supplying a high frequency power between the first electrode and the second electrode.
2. The plasma processing apparatus of claim 1, wherein the first electrode and the second electrode are a lower electrode and an upper electrode, respectively.
3. The plasma processing apparatus of claim 2, wherein the upper electrode is supported from underneath the lower electrode.
4. The plasma processing apparatus of claim 3, wherein the electrode supporting member includes an exhaust ring for uniformly exhausting the vacuum chamber.
5. The plasma processing apparatus of claim 3, wherein the electrode supporting member includes a cylindrical member for protecting an inner wall of the vacuum chamber.
6. The plasma processing apparatus of claim 3, further comprising a substrate supporting member for supporting the substrate to be processed above the lower electrode, the substrate supporting member being vertically movable by the driving mechanism to pass through the lower electrode.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of manipulating a substrate, the method comprising:
gripping a lower surface of the substrate with a master vacuum gripper mounted on a first motorized stage, wherein the master vacuum gripper is adapted to rotate about a Z-axis;
gripping the lower surface of the substrate with a slave vacuum gripper mounted on a second motorized stage, wherein the slave vacuum gripper is adapted to rotate about the Z-axis; and
actuating the second motorized stage in a first direction, thereby causing the slave vacuum gripper to move laterally in both the first direction and a second direction and the master vacuum gripper to rotate about the Z-axis.
2. The method of claim 1 wherein the master vacuum gripper and the slave vacuum gripper are adapted to move vertically along the Z-axis during actuation of the second motorized stage.
3. The method of claim 1 further comprising:
actuating the second motorized stage in the first direction; and
actuating the first motorized stage in the first direction, thereby indexing the substrate in the first direction.
4. The method of claim 3 wherein squaring and indexing operations are performed without releasing and re-gripping of the substrate.
5. The method of claim 1 wherein:
the first motorized stage comprises a plurality of motor controlled actuators in the first and second directions; and
the second stage motorized stage comprises a motor controlled actuator in the first direction.
6. The method of claim 5 wherein the second motorized stage comprises a flexible coupler compressible and extendable in the second direction.
7. The method of claim 6 wherein the first direction is a Y-direction and the second direction is an X-direction.
8. The method of claim 6 wherein the flexible coupler comprises a spring.
9. The method of claim 1 wherein the substrate comprises a glass panel suitable for flat panel displays.
10. An apparatus for manipulating a position of a substrate, the apparatus comprising:
a support member;
a plurality of support bars coupled to the support member and arrayed to form a parallel rank of support bars;
a first X-Y table coupled to the support member and adapted to translate under motor control in a Y-direction of an X-Y plane;
a second X-Y table coupled to the support member and adapted to translate under motor control in both the Y-direction and an X-direction of the X-Y plane;
a first vacuum gripper coupled to the first X-Y table and controllable in a Z-direction, wherein the first vacuum gripper is adapted to rotate about a Z-axis; and
a second vacuum gripper coupled to the second X-Y table and controllable in the z-direction, wherein the second vacuum gripper is adapted to rotate about the Z-axis.
11. The apparatus of claim 10 wherein an upper surface of the plurality of support bars defines a plane aligned with a lower portion of the substrate.
12. The apparatus of claim 10 wherein the first X-Y table comprises a spring constraining translation of the first X-Y table in the X-direction.
13. The apparatus of claim 10 wherein the first X-Y table and the second X-Y table are adapted to translate a distance greater than 2 meters in the Y-direction.
14. The apparatus of claim 10 wherein at least one of the first vacuum gripper or the second vacuum gripper comprises a gripping surface coupled to a gripper shaft extending into a tandem bearing, wherein the tandem bearing comprises:
a first air bearing characterized by a first diameter;
a second air bearing characterized by a second diameter less than the first diameter.
15. The apparatus of claim 14 wherein the first air bearing and the second air bearing are aligned concentric with a central axis of the tandem bearing.
16. The apparatus of claim 15 wherein the first air bearing is an upper bearing forming a portion of the tandem bearing proximate to the substrate and the second air bearing is a lower bearing forming an opposing portion of the tandem bearing.
17. A vacuum gripper for use in substrate positioning operations, the vacuum gripper comprising:
a vacuum pad adapted to make contact with the substrate;
a shaft connected to the vacuum pad, wherein the shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad;
a first air bearing surrounding the portion of the shaft proximal to the vacuum pad;
a second air bearing surrounding the portion of the shaft distal to the vacuum pad;
an air source in fluid communication with the first air bearing and the second air bearing;
an exhaust port in fluid communication with the first air bearing and the second air bearing;
a valve in fluid communication with the exhaust port; and
a first flow restrictor in fluid communication with the valve.
18. The vacuum gripper of claim 17 further comprising a second flow restrictor in fluid communication with the valve, wherein the valve is adapted to place either the first flow restrictor or the second flow restrictor in fluid communication with the exhaust port.
19. The vacuum gripper of claim 18 wherein an orifice of the first flow restrictor is characterized by a diameter of different size than an orifice of the second flow restrictor.
20. The vacuum gripper of claim 17 wherein the valve is a solenoid valve.
21. The vacuum gripper of claim 17 wherein the first air bearing is a cylindrical bearing.
22. The vacuum gripper of claim 17 wherein the second air bearing is a cylindrical bearing.
23. The vacuum gripper of claim 17 wherein the first air bearing and the second air bearing comprise a porous material.
24. A method of translating a vacuum gripper adapted for use in substrate positioning operations, the vacuum gripper comprising a vacuum pad adapted to make contact with a substrate and a shaft connected to the vacuum pad, the method comprising:
receiving a gas at a first input port in fluid communication with a first air bearing surrounding a portion of the shaft proximal to the vacuum pad;
receiving the gas at a second input port in fluid communication with a second air bearing surrounding a portion of the shaft distal to the vacuum pad;
internally exhausting the gas through the first air bearing and the second air bearing into a plenum formed between the first air bearing and the second air bearing;
externally exhausting the gas through an outlet port in fluid communication with the plenum; and
actuating a valve to establish a differential pressure in the plenum and thereby translate the vacuum gripper.
25. The method of claim 24 wherein actuating the valve comprises externally exhausting the gas via either a first flow restrictor or a second flow restrictor, the first flow restrictor and the second flow restrictor being in fluid communication with the valve.
26. The method of claim 24 wherein the shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad.
27. The method of claim 24 wherein the gas is pressurized air.
28. The method of claim 24 wherein the plenum comprises an annular region centered on a center line of the shaft and aligned with the outlet port.
29. The method of claim 24 wherein the vacuum gripper is translated along a direction parallel to a longitudinal axis of the shaft.
30. The method of claim 24 wherein the first air bearing and the second air bearing comprise a porous material.

1. A game system for executing a sport game in which a player character and an opponent character rally a hit object in a virtual game space, comprising:
movement control means for moving the player character in the virtual game space in accordance with an operation by a player;
moving amount detection means for detecting the player character’s moving amount per predetermined unit time at each predetermined time interval;
parameter calculation means for calculating a predetermined parameter value at each predetermined time interval based on the moving amount detected at each predetermined time interval by the moving amount detection means;
addition means for adding the predetermined parameter value calculated at each predetermined time interval by the parameter calculation means for accumulation; and
motion control means for causing the player character to perform a predetermined motion, in response to a predetermined operation performed by the player, on a condition such that a value obtained as a result of the addition by the addition means reaches a predetermined value.
2. The game system according to claim 1, further comprising:
score calculation means for calculating scores of the player character and the opponent character;
score difference calculation means for calculating a difference between the scores of the player character and the opponent character; and
first correction means for correcting the predetermined parameter value calculated by the parameter calculation means based on the score difference calculated by the score difference calculation means,
wherein the addition means adds the predetermined parameter value corrected by the first correction means to the current addition results.
3. The game system according to claim 2,
wherein the first correction means corrects the predetermined parameter value in such a manner that the greater a value obtained by subtracting the score of the opponent character from the score of the player character is, the smaller the predetermined parameter value becomes.
4. The game system according to claim 1, further comprising:
rally determination means for determining, at each predetermined time interval, whether or not a rally is continued,
wherein the moving amount detection means detects the moving amount only when the rally determination means determines that a rally is continued.
5. The game system according to claim 1, further comprising:
gage amount display means for displaying a gage indicating a value, which is obtained as a result of the addition by the addition means, in a position which is determined with respect to the player character.
6. The game system according to claim 1, further comprising:
character selection means for selecting any one player character from among a plurality of types of player characters; and
second correction means for correcting the predetermined parameter value calculated by the parameter calculation means by a correction factor which is previously set in accordance with a type of the player character selected by the character selection means.
7. A game system for executing a sport game in which a player character and an opponent character rally a hit object in a virtual game space, comprising:
waiting decision means for deciding, when an operation for causing the player character to perform a hitting motion is performed by a player, whether the hitting motion is performed immediately or postponed, based on relative positions of the player character and the hit object;
waiting time measurement means for measuring a waiting time of the hitting motion when the waiting decision means decides that the hitting motion is postponed;
hitting execution means for causing the player character to perform a hitting motion having a strength corresponding to a length of the waiting time measured by the waiting time measurement means when the waiting decision means decides that the hitting motion is performed;
parameter calculation means for calculating a predetermined parameter value based on a waiting time in such a manner that the shorter the waiting time measured by the waiting time measurement means, the greater the predetermined parameter value;
addition means for adding the predetermined parameter value calculated by the parameter calculation means for accumulation; and
motion control means for causing the player character to perform the predetermined motion, in response to a predetermined operation performed by the player, on a condition such that a value obtained as a result of the addition by the addition means reaches a predetermined value.
8. The game system according to claim 7, further comprising:
gage amount display means for displaying a gage indicating a value, which is obtained as a result of the addition by the addition means, in a position which is determined with respect to the player character.
9. The game system according to claim 7, further comprising:
character selection means for selecting any one player character from among a plurality of types of player characters; and
second correction means for correcting the predetermined parameter value calculated by the parameter calculation means by a correction factor which is previously set in accordance with a type of the player character selected by the character selection means.
10. A storage medium storing a game program causing a computer of a game system, which executes a sport game in which a player character and an opponent character rally a hit object in a virtual game space, to function as:
movement control means for moving the player character in the virtual game space in accordance with an operation by a player;
moving amount detection means for detecting the player character’s moving amount per predetermined unit time at each predetermined time interval;
parameter calculation means for calculating a predetermined parameter value at each predetermined time interval based on the moving amount detected at each predetermined time interval by the moving amount detection means;
addition means for adding the predetermined parameter value calculated at each predetermined time interval by the parameter calculation means for accumulation; and
motion control means for causing the player character to perform a predetermined motion, in response to a predetermined operation performed by the player, on a condition such that a value obtained as a result of the addition by the addition means reaches a predetermined value.
11. A storage means storing a game program causing a computer of a game system, which executes a sport game in which a player character and an opponent character rally a hit object in a virtual game space, to function as:
waiting decision means for deciding, when an operation for causing the player character to perform a hitting motion is performed by a player, whether the hitting motion is performed immediately or postponed, based on relative positions of the player character and the hit object;
waiting time measurement means for measuring a waiting time of the hitting motion when the waiting decision means decides that the hitting motion is postponed;
hitting execution means for causing the player character to perform a hitting motion having a strength corresponding to a length of the waiting time measured by the waiting time measurement means when the waiting decision means decides that the hitting motion is performed;
parameter calculation means for calculating a predetermined parameter value based on a waiting time in such a manner that the shorter the waiting time measured by the waiting time measurement means, the greater the predetermined parameter value;
addition means for adding the predetermined parameter value calculated by the parameter calculation means for accumulation; and
motion control means for causing the player character to perform the predetermined motion, in response to a predetermined operation performed by the player, on a condition such that a value obtained as a result of the addition by the addition means reaches a predetermined value.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A locking device that locks a power feeding plug to a power receiving connector, one of the power feeding plug and the power receiving connector including a hook, the other one of the power feeding plug and the power receiving connector including a catch, the locking device comprising:
a first restriction member moved between a first lock position, at which the first restriction member holds the hook on the catch, and a first unlock position, at which the first restriction member permits the hook to move away from the catch, wherein when the hook moves away from the catch, the first restriction member is moved to the first unlock position in cooperation with the hook;
a second restriction member moved between a second lock position, at which the second restriction member is engaged with the first restriction member and restricts movement of the first restriction member from the first lock position to the first unlock position, and a second unlock position, at which the second restriction member is disengaged from the first restriction member and permits movement of the first restriction member to the first unlock position;
a drive source arranged at a position separated from the power receiving connector, wherein the drive source generates driving force that moves the second restriction member; and
a transmission member that transmits the driving force of the drive source to the second restriction member.
2. The locking device according to claim 1, wherein
the drive source is a motor;
the transmission member includes:
a cam driven and rotated by the motor, and
an engagement member coupled to the second restriction member; and

the engagement member is engaged with and moved by the cam thereby moving the second restriction member from the second lock position to the second unlock position.
3. The locking device according to claim 1, wherein the second restriction member includes a wire.
4. The locking device according to claim 2, further comprising a wire that couples the engagement member to the second restriction member.
5. The locking device according to claim 1, further comprising:
a recess formed in one of the first restriction member and the second restriction member; and
a projection formed on the other one of the first restriction member and the second restriction member, wherein the projection is engageable with the recess;
wherein the projection engages with the recess when the second restriction member is moved from the second unlock position to the second lock position in a state in which the first restriction member is located at the first lock position.
6. The locking device according to claim 1, wherein the transmission member includes an engagement member coupled to the second restriction member, and the locking device further comprises a biasing member that biases the engagement member in a direction in which the second restriction member moves to the second lock position.
7. The locking device according to claim 6, wherein
the transmission member includes a cam driven and rotated by the drive source;
the cam includes a first peripheral surface, which defines an outer path, and a second peripheral surface, which defines an inner path;
when the second peripheral surface of the cam engages with the engagement member, the engagement member receives biasing force from the biasing member and moves the second restriction member to the second lock position; and
when the first peripheral surface of the cam engages with the engagement member, the engagement member pushes the biasing member and moves the second restriction member to the second unlock position.
8. The locking device according to claim 1, further comprising:
a first case arranged in the power receiving connector, wherein the first case accommodates the first restriction member; and
a second case separated from the first case, wherein the second case accommodates the drive source and the transmission member;
wherein the second restriction member is arranged between the first case and the second case.