Author: claimsbot

1. An electrochemical deposition chamber for depositing material onto microfeature workpieces, the chamber comprising:
a processing unit including a first flow system configured to convey a flow of a first processing fluid to a microfeature workpiece at a processing site;
a barrier unit having a first portion detachably mounted to the processing unit such that the barrier unit is below the processing unit and a second portion below the first portion, wherein the first portion has an upper region at the processing unit and a lower region canted at an angle, and wherein the second portion has an upper section at the lower region of the first portion;
an electrode unit releasably coupled to the second portion of the barrier unit such that the electrode unit is below the barrier unit and spaced apart from the processing unit, the electrode unit including an electrode compartment and a second flow system separate from the first flow system, the second flow system being configured to convey a flow of a second processing fluid through the electrode compartment;
a plurality of independent electrodes in the electrode compartment; and
a barrier between the lower region of the first portion of the barrier unit and the upper section of the second portion of the barrier unit, wherein the barrier is canted at the angle of the lower region of the first portion of the barrier unit and configured to inhibit selected matter from passing between the first and second processing fluids.
2. The chamber of claim 1 wherein:
the electrodes comprise a first electrode and a second electrode;
the electrode unit further comprises a dielectric divider between the first electrode and the second electrode; and
the barrier extends over the first and second electrodes.
3. The chamber of claim 1 wherein:
the electrodes comprise a first electrode and a second electrode arranged concentrically with the first electrode; and
the processing unit further comprises a field shaping module, the field shaping module being composed of a dielectric material and having a first opening facing a first section of the processing site through which ions influenced by the first electrode can pass and a second opening facing a second section of the processing site through which ions influenced by the second electrode can pass; and
the first portion of the barrier unit has one first channel in fluid communication with the first opening of the field shaping unit and another first channel in fluid communication with the second opening of the field shaping unit, and the second portion of the barrier unit has second channels aligned with corresponding first channels of the first portion of the barrier unit.
4. The chamber of claim 3 wherein the barrier is a nonporous barrier extending across the first and second channels of the barrier unit that prevents nonionic species from passing between the first and second processing fluids.
5. The chamber of claim 3 wherein the barrier is a semipermeable barrier extending across the first and second channels of the barrier unit that allows either cations or anions to pass through the barrier between the first and second processing fluids.
6. The chamber of claim 3 wherein the barrier is a semipermeable barrier extending across the first and second channels of the barrier unit that separates the flow of the first processing fluid from the flow of the second processing fluid.
7. The chamber of claim 1 wherein the barrier allows electrical current to pass therethrough in the presence of an electrolyte.
8. The chamber of claim 1 wherein:
the electrodes selectively induce corresponding electrical fields; and
the processing unit further comprises a field shaping module that shapes the electrical fields induced by the electrodes.
9. The chamber of claim 1 wherein:
the electrodes comprise a first electrode and a second electrode; and
the electrode unit further comprises a first electrical connector coupled to the first electrode and a second electrical connector coupled to the second electrode, the first and second electrodes being operable independently of each other.
10. The chamber of claim 1, further comprising:
the first processing fluid, wherein the first processing fluid has a concentration of between approximately 10 gl and approximately 200 gl of acid; and
the second processing fluid, wherein the second processing fluid has a concentration of between approximately 0.1 gl and approximately 200 gl of acid.
11. The chamber of claim 10 wherein the second processing fluid has a concentration of between approximately 0.1 gl and approximately 1.0 gl of acid.
12. The chamber of claim 1, further comprising:
the first processing fluid, wherein the first processing fluid has a first concentration of acid; and
the second processing fluid, wherein the second processing fluid has a second concentration of acid, the ratio of the first concentration to the second concentration being between approximately 1:1 and approximately 20,000:1.
13. The chamber of claim 1, further comprising a first quick-release mechanism securing the processing unit to the first portion of the barrier unit and a second quick release mechanism securing the electrode unit to the second portion of the barrier unit.
14. The chamber of claim 1, further comprising a barrier unit coupled to the processing and electrode units, the barrier unit including the barrier.
15. The chamber of claim 1 wherein:
the barrier includes a first side and a second side opposite the first side;
the first flow system is configured to flow the first processing fluid at least proximate to the first side of the barrier; and
the second flow system is configured to flow the second processing fluid at least proximate to the second side of the barrier.
16. The chamber of claim 1 wherein the electrodes comprise a pure copper electrode.
17. The chamber of claim 1 wherein the electrodes comprise a copper-phosphorous electrode.
18. An electrochemical deposition chamber for depositing material onto microfeature workpieces, the chamber comprising:
a head assembly including a workpiece holder configured to position a microfeature workpiece at a processing site and a plurality of electrical contacts arranged to provide electrical current to a layer on the workpiece; and
a vessel including (a) a processing unit for carrying one of a catholyte and an anolyte proximate to the workpiece, (b) an electrode unit having a housing configured to carry the other of the catholyte and the anolyte and a plurality of electrodes including at least first and second electrodes in the housing, and (c) a barrier between the processing unit and the electrode unit to separate the catholyte and the anolyte, wherein the barrier is canted at an angle from one side of the housing to the other side to block bubbles from the first and second electrodes from rising through the processing unit and allow the bubbles to migrate to a high side of the barrier.
19. The chamber of claim 18 wherein the barrier is a semipermeable barrier that allows either cations or anions to pass through the barrier between the first and second processing fluids.
20. The chamber of claim 18 wherein the barrier is a nonporous barrier that separates a flow of the catholyte and a flow of the anolyte.
21. The chamber of claim 18 wherein:
the electrodes comprise a first electrode and a second electrode; and
the electrode unit further comprises a dielectric divider between the first electrode and the second electrode.
22. A tool for wet chemical processing of microfeature workpieces, the tool comprising:
a processing unit for conveying a first processing fluid to a microfeature workpiece;
an electrode unit including a plurality of electrodes and being positioned below the processing unit;
a barrier unit mounted to a lower portion of the processing and an upper portion of the electrode unit, the barrier unit including a barrier, and the barrier unit being releasably attached to the electrode unit by a quick-release mechanism having a latch;
a first flow system for carrying the first processing fluid, the first flow system including a first portion in the processing unit and a second portion in the barrier unit in fluid communication with the first portion in the processing unit; and
a second flow system for carrying a second processing fluid at least proximate to the electrodes, the second flow system including a first portion in the electrode unit and a second portion in the barrier unit in fluid communication with the first portion in the electrode unit, wherein the barrier is between the first processing fluid in the first flow system and the second processing fluid in the second flow system.
23. A system for wet chemical processing of microfeature workpieces, the system comprising:
a processing unit for conveying a first electrolyte to a microfeature workpiece;
a first reservoir in fluid communication with the processing unit, the first reservoir and the processing unit having a first volume for the first electrolyte;
an electrode unit for carrying a second electrolyte and a plurality of electrodes proximate to the second electrolyte;
a second reservoir in fluid communication with the electrode unit, the second reservoir and the electrode unit having a second volume for the second electrolyte, the first volume of the processing unit and the first reservoir being at least twice the second volume of the electrode unit and the second reservoir; and
a barrier between the processing unit and the electrode unit to divide the second electrolyte and the first electrolyte.
24. The system of claim 23 wherein the ratio of the first volume of the first electrolyte to the second volume of the second electrolyte is between approximately 2.0:1 and approximately 10:1.
25. The system of claim 23, further comprising:
the first electrolyte, wherein the first electrolyte has a concentration of between approximately 10 gl and approximately 200 gl of acid; and
the second electrolyte, wherein the second electrolyte has a concentration of between approximately 0.1 gl and approximately 1.0 gl of acid.
26. The system of claim 23, further comprising:
the first electrolyte, wherein the first electrolyte has a concentration of between approximately 10 gl and approximately 50 gl of copper; and
the second electrolyte, wherein the second electrolyte has a concentration of between approximately 10 gl and approximately 50 gl of copper.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A rifle bow assembly comprising, in combination:
an outer barrel slide subassembly having an elongate cavity disposed therethrough, said outer barrel slide subassembly configured to be affixedly attached to a bow assembly such that said outer barrel slide subassembly remains stationary relative to said bow assembly;
a projectile barrel subassembly having a first end, a second end, and an outer wall, said projectile barrel subassembly configured to be slidingly received within said elongate cavity of said outer barrel slide subassembly, and said projectile barrel subassembly having a helical projectile passageway extending in a lengthwise direction thereof;
a magazine subassembly coupled to said second end of said projectile barrel subassembly, said magazine subassembly having attachment means for securing a projectile magazine thereto; and
a release subassembly coupled to an end portion of said magazine subassembly, said release subassembly including at least one string release mechanism for releasably engaging a bow string of said bow assembly, said at least one string release mechanism including a notch formed therein for receiving said bow string of said bow assembly, and said at least one string release mechanism being disposed outside of said helical projectile passageway and outwardly from said outer wall of said projectile barrel subassembly.
2. The rifle bow assembly according to claim 1, wherein said outer barrel slide subassembly comprises a plurality of corner glides disposed in said elongate cavity thereof, said plurality of corner glides being disposed outwardly from said outer wall of said projectile barrel subassembly.
3. The rifle bow assembly according to claim 1, wherein said outer barrel slide subassembly comprises a fastener access aperture disposed in a first side thereof, said outer barrel slide subassembly further comprising a fastener aperture disposed on a second side thereof, said second side of said outer barrel slide subassembly being disposed opposite to said first side, and said fastener access aperture in said first side enabling a tool to gain access to a fastener received within said fastener aperture on said second side.
4. The rifle bow assembly according to claim 1, wherein said projectile barrel subassembly comprises an elongate slot disposed along a length thereof, said elongate slot configured to receive said bow string therein.
5. The rifle bow assembly according to claim 4, wherein said elongate slot of said projectile barrel subassembly only extends along a portion of the length of said projectile barrel subassembly.
6. The rifle bow assembly according to claim 1, wherein said helical projectile passageway of said projectile barrel subassembly has a substantially circular cross-sectional shape.
7. The rifle bow assembly according to claim 1, wherein said helical projectile passageway of said projectile barrel subassembly comprises at least one groove disposed in a side thereof, said at least one groove configured to receive at least one protrusion of a projectile shell.
8. The rifle bow assembly according to claim 7, wherein said at least one groove comprises two grooves oppositely disposed with respect to one another, each of said two grooves being configured to receive a respective protrusion of a projectile shell.
9. The rifle bow assembly according to claim 1, wherein said projectile barrel subassembly includes a magazine aperture disposed in a side thereof proximate to said second end, said magazine aperture being in communication with said helical projectile passageway of said projectile barrel subassembly, said magazine aperture configured to accommodate a projectile passing therethrough.
10. The rifle bow assembly according to claim 9, wherein said magazine subassembly comprises a magazine aperture that is generally aligned with at least a portion of said magazine aperture of said projectile barrel subassembly.
11. The rifle bow assembly according to claim 1, wherein said magazine subassembly is configured to slidingly engage with said second end of said projectile barrel subassembly, said magazine subassembly comprising an elongate slot disposed along a length thereof, said elongate slot of said magazine subassembly configured to receive said bow string therein, and said elongate slot of said magazine subassembly generally aligned with said elongate slot of said projectile barrel subassembly.
12. The rifle bow assembly according to claim 1, further comprising a handle portion coupled to said end portion of said magazine subassembly, said handle portion including a cavity disposed therein for receiving a retractable chamber insert member that is configured to be slidingly received within a portion of said helical projectile passageway of said projectile barrel subassembly.
13. The rifle bow assembly according to claim 1, wherein said release subassembly comprises a slot configured to accommodate said bow string therein.
14. The rifle bow assembly according to claim 1, wherein said release subassembly comprises a trigger mechanism configured to disengage said at least one string release mechanism from said bow string of said bow assembly so as to discharge a projectile from said first end of said projectile barrel subassembly.
15. A rifle bow comprising, in combination:
a bow assembly, said bow assembly comprising a central portion, an upper limb extending upwardly from said central portion, a lower limb extending downwardly from said central portion, and a bow string extending between an upper end portion of said upper limb and a lower end portion of said lower limb;
a rifle bow assembly coupled to said bow assembly, said rifle bow assembly including:
an outer barrel slide subassembly having an elongate cavity disposed therethrough, said outer barrel slide subassembly being affixedly attached to said central portion of said bow assembly such that said outer barrel slide subassembly remains stationary relative to said central portion of said bow assembly;
a projectile barrel subassembly having a first end, a second end, and an outer wall, said projectile barrel subassembly slidingly received within said elongate cavity of said outer barrel slide subassembly, and said projectile barrel subassembly having a helical projectile passageway extending in a lengthwise direction thereof;
a magazine subassembly coupled to said second end of said projectile barrel subassembly, said magazine subassembly having attachment means for securing a projectile magazine thereto; and
a release subassembly coupled to an end portion of said magazine subassembly, said release subassembly including at least one string release mechanism for releasably engaging said bow string of said bow assembly, said at least one string release mechanism including a notch formed therein for receiving said bow string of said bow assembly, and said at least one string release mechanism being disposed outside of said helical projectile passageway and outwardly from said outer wall of said projectile barrel subassembly;

wherein said projectile barrel subassembly is configured to retract with said bow string when said bow string is pulled back by a user, and wherein said projectile barrel subassembly is configured to remain stationary when a projectile is discharged from said rifle bow.
16. A rifle bow comprising, in combination:
a bow assembly, said bow assembly comprising a central portion, an upper limb extending upwardly from said central portion, a lower limb extending downwardly from said central portion, and a bow string extending between an upper end portion of said upper limb and a lower end portion of said lower limb;
a rifle bow assembly coupled to said bow assembly, said rifle bow assembly including:
an outer barrel slide subassembly having an elongate cavity disposed therethrough, said outer barrel slide subassembly being affixedly attached to said central portion of said bow assembly such that said outer barrel slide subassembly remains stationary relative to said central portion of said bow assembly;
a projectile barrel subassembly having a first end, a second end, and an outer wall, said projectile barrel subassembly slidingly received within said elongate cavity of said outer barrel slide subassembly, and said projectile barrel subassembly having a helical projectile passageway extending in a lengthwise direction thereof;
a magazine subassembly coupled to said second end of said projectile barrel subassembly, said magazine subassembly having attachment means for securing a projectile magazine thereto;
a release subassembly coupled to an end portion of said magazine subassembly, said release subassembly including at least one string release mechanism for releasably engaging said bow string of said bow assembly, said at least one string release mechanism including a notch formed therein for receiving said bow string of said bow assembly, and said at least one string release mechanism being disposed outside of said helical projectile passageway and outwardly from said outer wall of said projectile barrel subassembly; and
a projectile magazine coupled to said magazine subassembly by said attachment means, said projectile magazine having a plurality of projectiles disposed therein;

wherein said projectile barrel subassembly is configured to retract with said bow string when said bow string is pulled back by a user, and wherein said projectile barrel subassembly is configured to remain stationary when said projectile is discharged from said rifle bow.
17. The rifle bow according to claim 16, wherein one or more of said plurality of projectiles includes a projectile body portion, a blade disposed on a frontal portion of said projectile body portion, and two oppositely disposed blades located on a circular side of said projectile body portion, each of said two oppositely disposed blades having a tip that protrudes from said frontal portion of said projectile body portion when said two oppositely disposed blades are in a retracted position, and each of said two oppositely disposed blades configured to rotate into an extended position when said one or more of said plurality of projectiles contacts an object.
18. The rifle bow according to claim 16, wherein each of said plurality of projectiles is not in the form of an arrow.
19. The rifle bow according to claim 16, wherein each of said plurality of projectiles does not comprise a nock.
20. The rifle bow according to claim 16, wherein one or more of said plurality of projectiles comprises a shot shell with a plurality of small pellets disposed therein, said plurality of small pellets configured to be expelled from said shot shell when said shot shell reaches said first end of said projectile barrel subassembly.

1. A wire bundle comprising:
a halogen-free electric wire; and
an electric wire having a conductor and a covering material, the covering material covering the outer surface of the conductor, an outermost layer of the covering material containing cross-linked polyvinyl chloride by being irradiated with ionizing radiation, wherein:
the halogen-free electric wire has a conductor and a covering material, the covering material covering the outer surface of the conductor and including a polyolefin resin and a flame retardant,
the polyolefin resin is cross-linked by being irradiated with ionizing radiation,
the polyolefin resin is selected from a polyethylene, polybutene or ethylene-base polymer,
the quantity of the flame retardant is in the range of 30 to 150 parts by weight relative to 100 parts by weight of the polyolefin resin, and
the flame retardant contains aluminum hydroxide at a ratio of 80 weight percent or more.
2. The wire bundle of claim 1, wherein the aluminum hydroxide in the flame retardant has an average particle size in the range of 0.1 to 10 \u03bcm.
3. The wire bundle of claim 1, wherein the aluminum hydroxide in the flame retardant has an average particle size in the range of 0.5 to 3 \u03bcm.
4. The wire bundle of claim 1, wherein the flame retardant contains additional flame retardant other than the aluminum hydroxide.
5. The wire bundle of claim 4, wherein the additional flame retardant includes magnesium hydroxide.
6. The wire bundle of claim 1, wherein the covering material of the halogen-free electric wire has thermal durability to satisfy a thermal aging requirement in which no crack or no breaking on the surface is observed after 42 days of contact with a polyvinyl chloride resin at temperature of 150\xb0 C.
7. The wire bundle of claim 6, wherein the thermal durability is tested on a condition that:
the halogen-free electric wire and six cross-linked polyvinyl chloride electric wire are cut into pieces each having a length of 300 mm, wherein
the halogen-free electric wire is prepared by melt-extruding pellets of a halogen-free composition onto an annealed copper stranded wire conductor so as to form an insulating coating of 0.7 mm in thickness, and then irradiating at 200 kGy onto the coating with electron beams having an accelerating voltage of 2 MeV, and
the six cross-linked polyvinyl chloride electric wire are prepared by melt-extruding pellets of a polyvinyl chloride onto an annealed copper stranded wire conductor so as to form an insulating coating of 0.7 mm in thickness, and then irradiating at 100 kGy onto the coating with electron beams having an accelerating voltage of 2 MeV,

the wire pieces are bundled in harness-shaped samples such that the halogen-free electric wire is disposed at the center, and the outer periphery of the wire bundle is wrapped with a cross-linked polyvinyl chloride adhesive tape so as to be pressed with it,
the samples are aged in a Geer oven for 42 days at temperature of 150\xb0 C.,
the samples are disassembled to take out the halogen-free electric wires,
the halogen-free electric wires are wound around a mandrel having the same diameter as that of the halogen-free electric wires, and
the halogen-free electric wires are inspected as to the occurrence of cracks and breakings.
8. A wire bundle comprising:
halogen-free electric wires each having a conductor and a covering material,
the covering material covering the outer surface of the conductor and including a polyolefin resin and a flame retardant,
the polyolefin resin being cross-linked by being irradiated with ionizing radiation,
the polyolefin resin is selected from a polyethylene, polybutene or ethylene-base polymer,
the quantity of the flame retardant being in the range of 30 to 150 parts by weight relative to 100 parts by weight of the polyolefin resin,
the flame retardant containing aluminum hydroxide at a ratio of 80 weight percent or more,
wherein a bundling material containing a cross-linked polyvinyl chloride resin, which is cross-linked by being irradiated with ionizing radiation, bundles the electric wires or protects the outer periphery of the wire bundle.
9. An automotive wiring harness comprising the wire bundle according to claim 1 or claim 8.
10. The wire bundle of claim 8, wherein the aluminum hydroxide in the flame retardant has an average particle size in the range of 0.1 to 10 \u03bcm.
11. The wire bundle of claim 8, wherein the aluminum hydroxide in the flame retardant has an average particle size in the range of 0.5 to 3 \u03bcm.
12. The wire bundle of claim 8, wherein the flame retardant contains additional flame retardant other than the aluminum hydroxide.
13. The wire bundle of claim 12, wherein the additional flame retardant includes magnesium hydroxide.
14. The wire bundle of claim 8, wherein the covering material of the halogen-free electric wire has thermal durability to satisfy a thermal aging requirement in which no crack or no breaking on the surface is observed after 42 days of contact wilth a polyvinyl chloride resin at temperature of 150\xb0 C.
15. The wire bundle of claim 14, wherein the thermal durability is tested on a condition that:
the halogen-free electric wire and six cross-linked polyvinyl chloride electric wire are cut into pieces each having a length of 300 mm, wherein
the halogen-free electric wire is prepared by melt-extruding pellets of a halogen-free composition onto an annealed copper stranded wire conductor so as to form an insulating coating of 0.7 mm in thickness, and then irradiating at 200 kGy onto the coating with electron beams having an accelerating voltage of 2 MeV, and
the six cross-linked polyvinyl chloride electric wire are prepared by melt-extruding pellets of a polyvinyl chloride onto an annealed copper stranded wire conductor so as to form an insulating coating of 0.7 mm in thickness, and then irradiating at 100 kGy onto the coating with electron beams having an accelerating voltage of 2 MeV,

the wire pieces are bundled in harness-shaped samples such that the halogen-free electric wire is disposed at the center, and the outer periphery of the wire bundle is wrapped with a cross-linked polyvinyl chloride adhesive tape so as to be pressed with it,
the samples are aged in a Geer oven for 42 days at temperature of 150\xb0 C.,
the samples are disassembled to take out the halogen-free electric wires,
the halogen-free electric wires are wound around a mandrel having the same diameter as that of the halogen-free electric wires, and
the halogen-free electric wires are inspected as to the occurrence of cracks and breakings.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A data storage device, comprising:
an interface;
a buffer controller adjacent to and electrically connected to the interface;
a memory controller adjacent to and electrically connected to the buffer controller;
a non-volatile memory adjacent to and electrically connected to the memory controller; and
a self-powered semiconductor device adjacent to and electrically connected to the buffer controller, the self-powered semiconductor device including a semiconductor chip and a rechargeable micro-battery attached to the semiconductor chip,
wherein the rechargeable micro-battery comprises facing first and second current collectors, a first polarizing electrode in contact with the first current collector and facing the second current collector, a second polarizing electrode in contact with the second current collector and facing the first polarizing electrode, and an electrolyte layer formed between the first and second polarizing electrodes, and
wherein the rechargeable micro-battery further comprises a plurality of sets of small-sized batteries.
2. The device according to claim 1, wherein the self-powered semiconductor device further comprises a conductive plug, and one of the first and second current collectors is electrically connected to a power supply pad of the semiconductor chip by the conductive plug.
3. The device according to claim 1, wherein the rechargeable micro-battery further comprises a battery substrate adjacent to the first current collector, wherein the battery substrate is a semiconductor substrate.
4. The device according to claim 1, wherein the first and second polarizing electrodes include at least one material layer selected from a group consisting of; RuO, IrO, CoO, ZrO, SrTiO, SrRuO, carbon nanotubes (CNTs), carbon nanofibers (CNFs), and activated carbon.
5. The device according to claim 1, wherein the first and second polarizing electrodes are formed of a combination of RuO2 and CNTs, or a combination of RuO2 and activated carbon.
6. The device according to claim 1, wherein the electrolyte layer includes at least one selected from a group consisting of; polymer gels, LiClO4, NaClO4, LiAsF6, BF\u22124, CF3SO\u22123, and quaternary phosphonium (PH4\u2212) salts.
7. The device according to claim 6, wherein the electrolyte layer is at least one polymer gel, the polymer gel being a polymer-salt complex.
8. The device according to claim 7, wherein the polymer-salt complex comprises a polymer being one selected from a group consisting of; polyethylene oxide, polyacrylonitrile, polymethylmethacrylate, polythiophine, polypyrrole, polyaniline.
9. The device according to claim 7, wherein the polymer-salt complex comprises a salt being one selected from a group consisting of; SCN\u2212, I\u2212, ClO4\u2212, CF3SO3\u2212, Li+ (LiPON, LiF) and H+.
10. The device according to claim 1, wherein the electrolyte layer comprises a LiF or LiPON layer.
11. The device according to claim 1, wherein the first and second current collectors are formed from at least one selected from a group consisting of; Cu, W, WN, Co, Ru, Ni, Ag, Ti, TiN, Ta, TaN, Al, Au, Pt, and Sn.
12. A data storage device, comprising:
an interface;
a buffer controller adjacent to and electrically connected to the interface;
a memory controller adjacent to and electrically connected to the buffer controller;
a non-volatile memory adjacent to and electrically connected to the memory controller; and
a self-powered semiconductor device adjacent to and electrically connected to the buffer controller, the self-powered semiconductor device including a semiconductor chip and a rechargeable micro-battery attached to the semiconductor chip,
wherein the rechargeable micro-battery comprises facing first and second current collectors, a first polarizing electrode in contact with the first current collector and facing the second current collector, a second polarizing electrode in contact with the second current collector and facing the first polarizing electrode, and an electrolyte layer formed between the first and second polarizing electrodes, and
wherein the self-powered semiconductor device further comprises a separator formed between the semiconductor chip and the rechargeable micro-battery, the separator being formed of at least one selected from a group consisting of a silicon oxide layer, a silicon nitride layer, a silicon oxynitride layer, a metal layer, a porous metal layer, and a polymer layer.