What is claimed is:
1. A method for manufacturing a surface emitting semiconductor laser, the method comprising:
forming, on the main surface of a semiconductor substrate, a lower reflection layer, an active layer in which a quantum well layer is formed, and an upper reflection layer having a surface layer which forms a light emitting surface of a light emitting region on an inner layer side or an upper layer side of said upper reflection layer;
forming a post portion in the shape of a pillar with at least the upper reflection layer partially remaining;
forming a boundary region for suppressing light emission of oscillation modes except for a specific oscillation mode; and
substantially forming a light emitting spot corresponding to the specific oscillation mode by processing a part of the region of the surface of the upper reflection layer which is exposed to the surface of the post portion.
2. A method for manufacturing a surface emitting semiconductor laser according to claim 1, wherein forming the lower reflection layer, the active layer and the upper reflection layer includes forming an etching preventing layer on the lower layer side of the surface layer.
3. The method of claim 1, wherein forming the lower reflection layer, the active layer and the upper reflection layer comprises laminating the lower reflection layer, the active layer and the upper reflection layer.
4. The method of claim 3, wherein laminating the lower reflection layer, the active layer and the upper reflection layer comprises laminating in sequence the lower reflection layer, the active layer and the upper reflection layer.
5. The method of claim 2, wherein forming the etching preventing layer comprises laminating the etching preventing layer on the lower layer side of the surface layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A polymer of formula I
wherein
A is on each occurrence identically or differently a group selected from the group consisting of the following formulae
B is on each occurrence identically or differently a group selected from the group consisting of the following formulae
X1 and X2 are on each occurrence identically or differently, and independently of each other, 0, S or Se,
R1 and R2 are on each occurrence identically or differently, and independently of each other, \u2014CO\u2014Ry, \u2014CO\u2014O\u2014Ry, or \u2014O\u2014CO\u2014Ry,
Ry is a straight-chain, branched or cyclic alkyl with 1 to 30 C atoms, in which one or more non-adjacent C atoms are optionally replaced by \u2014O\u2014, \u2014S\u2014, \u2014CO\u2014, \u2014CO\u2014O\u2014, \u2014O\u2014CO\u2014, \u2014O\u2014CO\u2014O\u2014, \u2014CR0\u2550CR00\u2014 or \u2014C\u2261C\u2014 and in which one or more H atoms are optionally replaced by F, Cl, Br, I or CN, or is aryl or heteroaryl having 2 to 30 C atoms that is unsubstituted or substituted by one or more non-aromatic groups R5,
R3 and R4 on each occurrence identically or differently, and independently of each other, denote H or have one of the meanings given for R1,
R0 and R00 are independently of each other H or an optionally substituted carbyl or hydrocarbyl group optionally comprising one or more hetero atoms,
Ar is on each occurrence identically or differently an aryl or heteroaryl group that is optionally substituted by one or more groups R1,
R5 is on each occurrence identically or differently H, halogen, \u2014CN, \u2014NC, \u2014NCO, \u2014NCS, \u2014OCN, \u2014SCN, \u2014C(\u2550O)NR0R0, \u2014C(\u2550O)X0, \u2014C(\u2550O)R0, \u2014NH2, \u2014NR0R00, \u2014SH, \u2014SR0, \u2014SO3H, \u2014SO2R0, \u2014OH, \u2014NO2, \u2014CF3, \u2014SF5, optionally substituted silyl, carbyl or hydrocarbyl with 1 to 40 C atoms that is optionally substituted and optionally comprises one or more hetero atoms, or P-Sp-,
P is a polymerisable group,
Sp is a spacer group or a single bond,
X0 is halogen,
m is on each occurrence identically or differently 0 or 1, wherein in at least one repeating unit m is 1,
o is on each occurrence identically or differently 0 or 1, wherein in at least one repeating unit o is 1,
i and k are on each occurrence identically or differently, and independently of each other, 0 or 1, wherein in at least one repeating unit at least one of i and k is 1,
n is an integer >1.
2. The polymer according to claim 1, which is of the following formula
wherein R1-4, A, B, Ar, i, k, m, n and o on each occurrence identically or differently have the meanings given for the polymer of formula I, and R6 and R7 have independently of each other one of the meanings of R1, or denote \u2014CH2Cl, \u2014CHO, \u2014CH\u2550CH2, \u2014SiR\u2032R\u2033R\u2032\u2033, \u2014SnR\u2032R\u2033R\u2032\u2033, \u2014BR\u2032R\u2033, \u2014B(OR\u2032)(OR\u2033), \u2014B(OH)2, or P-Sp, wherein P and Sp are as defined for the polymer of formula I, R\u2032, R\u2033 and R\u2032\u2033 have independently of each other one of the meanings of H or an optionally substituted carbyl or hydrocarbyl group optionally comprising one or more hetero atoms, and R\u2032 and R\u2033 may also form a ring together with the hetero atom to which they are attached, and R0, R00 and R5 are as defined for the polymer of formula I.
3. The polymer according to claim 1, wherein Ar is selected from the group consisting of benzo2,1,3thiadiazole-4,7-diyl, 5,6-dialkyl-benzo2,1,3thiadiazole-4,7-diyl, 5,6-dialkoxybenzo2,1,3thiadiazole-4,7-diyl, benzo2,1,3selenadiazole-4,7-diyl, 5,6-dialkoxy-benzo2,1,3selenadiazole-4,7-diyl, benzo1,2,5thiadiazole-4,7,diyl, benzo1,2,5selenadiazole-4,7,diyl, benzo2,1,3oxadiazole-4,7-diyl, 5,6-dialkoxybenzo2,1,3oxadiazole-4,7-diyl, 2H-benzotriazole-4,7-diyl, 2,3-dicyano-1,4-phenylene, 2,5-dicyano,1,4-phenylene, 2,3-difluro-1,4-phenylene, 2,5-difluoro,1,4-phenylene, 2,3,5,6-tetrafluoro,1,4-phenylene, 3,4-difluorothiophene-2,5-diyl, thieno3,4-bpyrazine-2,5-diyl, quinoxaline-5,8-diyl, thieno3,4-bthiophene-4,6-diyl, thieno3,4-bthiophene-6,4-diyl, and 3,6-pyrrolo3,4-cpyrrole-1,4-dione, all of which are unsubstituted, mono- or polysubstituted with R1 as defined for the polymer of formula I and wherein \u201calkyl\u201d means a straight-chain or branched alkyl group with 1 to 30 C atoms and \u201calkoxy\u201d means a straight-chain or branched alkoxy group with 1 to 30 C atoms.
4. The polymer according to claim 1, which is selected from the following formulae
wherein R1, R2, R4 and n have the meanings given for the polymer of formula I, with R4 being different from H, R10 and R11 have independently of each other one of the meanings of R1, and wherein formula I2, I4, 6, I8, I10, I12, I14, I16, I18 and I20 denote random copolymers formed by units wherein a=1 and b=0 and units wherein a=0 and b=1.
5. A monomer of formula IIIa
wherein
A is on each occurrence identically or differently a group selected from the following formulae
B is on each occurrence identically or differently a group selected from the following formulae
X1 and X2 are on each occurrence identically or differently, and independently of each other, O, S or Se,
R1 and R2 are on each occurrence identically or differently, and independently of each other, \u2014CO\u2014Ry, \u2014CO\u2014O\u2014Ry, or \u2014O\u2014CO\u2014Ry,
Ry is a straight-chain, branched or cyclic alkyl with 1 to 30 C atoms, in which one or more non-adjacent C atoms are optionally replaced by \u2014O\u2014, \u2014S\u2014, \u2014CO\u2014, \u2014CO\u2014O\u2014, \u2014O\u2014CO\u2014, \u2014O\u2014CO\u2014O\u2014, \u2014CR0\u2550CR00\u2014 or \u2014C\u2261C\u2014 and in which one or more H atoms are optionally replaced by F, Cl, Br, I or CN, or is aryl or heteroaryl having 2 to 30 C atoms that is unsubstituted or substituted by one or more non-aromatic groups R5,
R3 and R4 on each occurrence identically or differently, and independently of each other, denote H or have one of the meanings given for R1,
R0 and R00 are independently of each other H or an optionally substituted carbyl or hydrocarbyl group optionally comprising one or more hetero atoms,
Ar is on each occurrence identically or differently an aryl or heteroaryl group that is optionally substituted by one or more groups R1,
R5 is on each occurrence identically or differently H, halogen, \u2014CN, \u2014NC, \u2014NCO, \u2014NCS, \u2014OCN, \u2014SCN, \u2014C(\u2550O)NR0R00, \u2014C(\u2550O)X, \u2014C(\u2550O)R, \u2014NH2, \u2014NR0R00, \u2014SH, \u2014SR0, \u2014SO3H, \u2014SO2R, \u2014OH, \u2014NO2, \u2014CF, \u2014SF5, optionally substituted silyl, carbyl or hydrocarbyl with 1 to 40 C atoms that is optionally substituted and optionally comprises one or more hetero atoms, or P-Sp-,
P is a polymerisable group,
Sp is a spacer group or a single bond,
X0 is halogen,
i, k, m and o are independently of each other 0 or 1, with at least one of i, k and o being 1, and
R8 and R9 are, on each occurrence identically or differently, and independently of each other, halogen, a straight-chain, branched or cyclic alkyl with 1 to 35 C atoms, in which one or more non-adjacent C atoms are optionally replaced by \u2014O\u2014, \u2014S\u2014, \u2014CO\u2014, \u2014CO\u2014O\u2014, \u2014O\u2014CO\u2014O\u2014, \u2014CR0\u2550CR00\u2014 or \u2014C\u2261C\u2014 and in which one or more H atoms are optionally replaced by F, Cl, Br, I or CN, or an aryl, heteroaryl, aryloxy or heteroaryloxy group having 2 to 40 ring atoms that is unsubstituted or substituted by one or more non-aromatic groups R5, \u2014CH2Cl, \u2014CHO, \u2014CH\u2550CH2, \u2014SiR\u2032R\u2033R\u2032\u2033, \u2014SnR\u2032R\u2033R\u2032\u2033, \u2014BR\u2032R\u2033, \u2014B(OR\u2032)(OR\u2033), \u2014B(OH)2, or P-Sp Cl, Br, I, O-tosylate, O-triflate, O-mesylate, O-nonaflate, \u2014SiMe2F, \u2014SiMeF2, \u2014O\u2014SO2Z1, \u2014B(OZ2)2, \u2014CZ3\u2550C(Z3)2, \u2014C\u2261CH or Sn(Z4)3,
R\u2032, R\u2033 and R\u2032\u2033 have independently of each other one of the meanings of H or an optionally substituted carbyl or hydrocarbyl group optionally comprising one or more hetero atoms, and R\u2032 and R\u2033 may also form a ring together with the hetero atom to which they are attached, and
Z1-4 are selected from the group consisting of alkyl and aryl, each being optionally substituted, and two groups Z2 may also form a cyclic group.
6. The polymer according to claim 1, wherein R1 and R2 denote \u2014CO\u2014Ry or \u2014CO\u2014O\u2014Ry, wherein Ry is straight-chain, branched or cyclic alkyl with 1 to 30 C atoms, and wherein in all aforementioned groups one or more H atoms are optionally replaced by F.
7. The polymer according to claim 1, wherein R3 and R4 denote straight-chain or branched alkyl, alkoxy or thioalkyl with 1 to 15 C atoms, wherein one or more H atoms are optionally replaced by F.
8. A polymer blend comprising one or more polymers according to claim 1, and one or more further polymers, which are optionally selected from polymers having semiconducting, charge transport, holeelectron transport, holeelectron blocking, electrically conducting, photoconducting or light emitting properties.
9. A formulation comprising one or more polymers or according to claim 1, and one or more solvents, which are optionally selected from organic solvents, and optionally one or more further polymers, which are optionally selected from polymers having semiconducting, charge transport, holeelectron transport, holeelectron blocking, electrically conducting, photoconducting or light emitting properties.
10. A charge transport, semiconducting, electrically conducting, photoconducting or light emitting material in optical, electrooptical, electronic, electroluminescent or photoluminescent component or device, comprising one or more polymers according to claim 1 and optionally one or more solvents, which are optionally selected from organic solvents, and optionally one or more further polymers, which are optionally selected from polymers having semiconducting, charge transport, holeelectron transport, holeelectron blocking, electrically conducting, photoconducting or light emitting properties.
11. An optical electrooptical or electronic component or device comprising one or more polymers according to claim 1 and optionally one or more solvents, which are optionally selected from organic solvents, and optionally one or more further polymers, which are optionally selected from polymers having semiconducting, charge transport, holeelectron transport, holeelectron blocking, electrically conducting, photoconducting or light emitting properties.
12. The component or device according to claim 11, which is selected from the group consisting of organic field effect transistors (OFET), thin film transistors (TFT), integrated circuits (IC), logic circuits, capacitors, radio frequency identification (RFID) tags, devices or components, organic light emitting diodes (OLED), organic light emitting transistors (OLET), flat panel displays, backlights of displays, organic photovoltaic devices (OPV), solar cells, laser diodes, photoconductors, photodetectors, electrophotographic devices, electrophotographic recording devices, organic memory devices, sensor devices, charge injection layers, charge transport layers or interlayers in polymer light emitting diodes (PLEDs), Schottky diodes, planarising layers, antistatic films, polymer electrolyte membranes (PEM), conducting substrates, conducting patterns, electrode materials in batteries, alignment layers, biosensors, biochips, security markings, security devices, and components or devices for detecting and discriminating DNA sequences.
13. The component or device according to claim 12, which is a bulk heterojunction OPV device.
14. A process of preparing a polymer according to claim 1, comprising coupling one or more identical or different monomers of formula IIIa
wherein
R1, R2, A, B and Ar have the meanings given for the polymer of formula I,
R8 and R9 are, on each occurrence identically or differently, and independently of each other, halogen, a straight-chain, branched or cyclic alkyl with 1 to 35 C atoms, in which one or more non-adjacent C atoms are optionally replaced by \u2014O\u2014, \u2014S\u2014, \u2014CO\u2014, \u2014CO\u2014O\u2014, \u2014O\u2014CO\u2014O\u2014, \u2014CR0\u2550CR00\u2014 or \u2014C\u2261C\u2014 and in which one or more H atoms are optionally replaced by F, Cl, Br, I or CN, or an aryl, heteroaryl, aryloxy or heteroaryloxy group having 2 to 40 ring atoms that is unsubstituted or substituted by one or more non-aromatic groups R5, or are \u2014CH2Cl, \u2014CHO, \u2014CH\u2550CH2, \u2014SiR\u2032R\u2033R\u2032\u2033, \u2014SnR\u2032R\u2033R\u2032\u2033\u2014BR\u2032R\u2033, \u2014B(OR\u2032)(OR\u2033), \u2014B(OH)2, P-Sp, Cl, Br, I, O-tosylate, O-triflate, O-mesylate, O-nonaflate, \u2014SiMe2F, \u2014SiMeF2, \u2014O\u2014SO2Z1, \u2014B(OZ2)2, \u2014CZ3\u2550C(Z3)2, \u2014C\u2261CH or \u2014Sn(Z4)3,
P, Sp, R0, R00 and R5 are as defined for the polymer of formula I,
R\u2032, R\u2033 and R\u2032\u2033 have independently of each other one of the meanings of H or an optionally substituted carbyl or hydrocarbyl group optionally comprising one or more hetero atoms, and R\u2032 and R\u2033 may also form a ring together with the hetero atom to which they are attached,
Z1-4 are selected from the group consisting of alkyl and aryl, each being optionally substituted, and two groups Z2 may also form a cyclic group,
o is 0, and
i and k are independently of each other 0 or 1,
with one or more identical or different comonomers of the formula
R8\u2014Ar\u2014R9
and optionally one or more identical or different comonomers selected from the following formulae
R8-A-R9
R8\u2014B\u2014R9
in an aryl-aryl coupling reaction.
15. The polymer according to claim 1, wherein R1 and R2 denote \u2014CO\u2014Ry or \u2014CO\u2014O\u2014Ry.
16. The monomer according to claim 5, wherein R1 and R2 denote \u2014CO\u2014Ry or \u2014CO\u2014O\u2014Ry.
17. A monomer according to claim 5, wherein R1 and R2 denote \u2014CO\u2014Ry or \u2014CO\u2014O\u2014Ry, wherein Ry is straight-chain, branched or cyclic alkyl with 1 to 30 C atoms, and wherein in all aforementioned groups one or more H atoms are optionally replaced by F.
18. The monomer according to claim 5, wherein R3 and R4 denote straight-chain or branched alkyl, alkoxy or thioalkyl with 1 to 15 C atoms, wherein one or more H atoms are optionally replaced by F.