All The Claims

1. A system, comprising:
a source of radiation configured to produce at least a substantially coherent beam;
a stationary angular distribution changing element; and
a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form an incoherent beam,
wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time.
2. The system of claim 1, wherein the angular distribution changing element comprises a diffuser or a diffuser and a reflecting device.
3. The system of claim 2, wherein the diffuser comprises a wet etched or holographic diffuser.
4. The system of claim 1, wherein the angular distribution changing element comprises a diffractive optical element or a diffractive optical element and a reflecting device.
5. The system of claim 1, wherein the angular distribution changing element comprises a refractive optical element, a refractive optical element and lens, or a refractive optical element and a reflecting device.
6. The system of claim 1, wherein the angular distribution changing element comprises a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate or a reflecting device and a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate.
7. The system of claim 1, wherein the rotating optical element comprises a rotating mirror.
8. The system of claim 7, wherein the rotating mirror comprises a rotating polygonal minor.
9. The system of claim 1, wherein the rotating optical element comprises a piezoelectric table.
10. The system of claim 1, wherein the rotating optical element comprises an opto-electric modulator.
11. The system of claim 1, wherein the angular distribution changing element is configured to increase angular distribution of the beam of radiation.
12. The system of claim 1, wherein the angular distribution changing element includes a reflecting surface having an optical power.
13. The system of claim 1, wherein the rotating optical element includes reflecting surfaces having optical power.
14. The system of claim 1, further comprising:
an illuminator, wherein the rotating optical element is configured to direct the incoherent beam onto the illuminator.
15. The system of claim 1, wherein the rotating optical element is configured to reflect the incoherent beam from the angular distribution changing element onto an illuminator, an optical system, or a patterning device.
16. A laser that outputs an incoherent output beam, comprising:
a source of radiation configured to produce at least a substantially coherent beam;
a stationary angular distribution changing element; and
a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form the incoherent output beam,
wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time.
17. The laser of claim 16, wherein the rotating optical element is further configured to receive the incoherent beam from the angular distribution changing element.
18. The laser of claim 16, wherein the angular distribution changing element comprises a diffuser, a wet etched diffuser, a holographic diffuser, a diffractive optical element, a refractive optical element, a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate.
19. The laser of claim 18, wherein the angular distribution changing element further comprises a lens or a reflecting device.
20. The laser of claim 16, wherein the rotating optical element comprises a rotating mirror, a rotating polygonal mirror, a piezoelectric table, or an opto-electric device.
21. The laser of claim 16, wherein at least one of the angular distribution changing element or the rotating optical element includes a reflecting surface having optical power.
22. An illuminator that outputs an incoherent illumination beam, comprising:
a source of radiation configured to produce at least a substantially coherent beam;
a stationary angular distribution changing element; and
a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form the incoherent illumination beam,
wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time.
23. The illuminator of claim 22, wherein the rotating optical element is further configured to receive the incoherent beam from the angular distribution changing element.
24. The illuminator of claim 22, wherein the angular distribution changing element comprises a diffuser, a wet etched diffuser, a holographic diffuser, a diffractive optical element, a refractive optical element, a zone lens, a Fresnel zone lens, a zone plate, or a Fresnel zone plate.
25. The illuminator of claim 24, wherein the angular distribution changing element further comprises a lens or a reflecting device.
26. The illuminator of claim 22, wherein the rotating optical element comprises a rotating mirror, a rotating polygonal mirror, a piezoelectric table, or an opto-electric device.
27. The illuminator of claim 22, wherein at least one of the angular distribution changing element or the rotating optical element includes a reflecting surface having optical power.
28. A system, comprising:
a source of radiation configured to produce at least a substantially coherent beam;
an angular distribution changing element; and
a rotating optical element that is configured to,
receive the substantially coherent beam from the source of radiation,
direct the received substantially coherent beam to reflect from the angular distribution changing element to from in an incoherent beam, wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time,
receive the incoherent beam from the angular distribution changing element, and
direct the incoherent beam for formation of an illumination beam.
29. The system of claim 28, wherein:
the substantially coherent beam received from the source of radiation is directed from a first facet in a first plane of the rotating optical element; and
the incoherent beam from the angular distribution changing element is reflected from a second facet in a second plane of the rotating optical element.
30. A system, comprising:
a source of radiation configured to produce at least a substantially coherent beam;
a stationary angular distribution changing element; and
a rotating optical element that is configured to (a) receive the substantially coherent beam from the source of radiation and (b) direct the received substantially coherent beam to reflect from the angular distribution changing element to form an incoherent beam,
wherein the substantially coherent beam is directed at varying angles or positions onto the angular distribution changing element based on a rotation speed of the rotating optical element, the angles varying as a function of time, and
wherein the incoherent beam comprises a plurality of sub-copies of the substantially coherent beam generated by the stationary angular distribution changing element.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of handling instructions for a wireless device, comprising:
receiving, over a network, a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device;
determining whether the remote action list version number is different from a local action list version number;
sending, over a network, a request for the remote action list in response to determining the remote action list version number is different from the local action list version number; and
receiving, over a network, the remote action list.
2. The method of claim 1 further comprising: sending, over a network, a request for a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device.
3. The method of claim 1 further comprising: executing the instruction contained in the remote action list.
4. The method of claim 1 further comprising: replacing the local action list version number with the remote action list version number.
5. A method of handling instructions for a wireless device, comprising:
storing, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
sending, over a network, the remote action list version number associated with the remote action list;
receiving, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
sending, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
6. The method of claim 5 further comprising: receiving, over a network, a request for the remote action list version number associated with the remote action list.
7. A method of handling instructions for a wireless device, comprising:
storing, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
sending from the wireless device, over a network, a request for the remote action list version number associated with the remote action list;
receiving at a server, over a network, the request for the remote action list version number associated with the remote action list;
sending from a server, over a network, the remote action list version number associated with the remote action list;
receiving at the wireless device, over a network, the remote action list version number associated with the remote action list;
determining at the wireless device whether the remote action list version number is different from a local action list version number;
sending from the wireless device, over a network, a request for the remote action list in response to determining the remote action list version number is different from the local action list version number;
receiving at a server, over a network, the request for the remote action list;
sending from a server, over a network, the remote action list in response to determining the remote action list version number is different from the local action list version number;
receiving at the wireless device, over a network, the remote action list;
executing, at the wireless device, the instructions contained in the remote action list; and
replacing, at the wireless device, the local action list version number with the remote action list version number.
8. A method of handling instructions for a wireless device, comprising:
maintaining an action list associated with at least one wireless device group, the action list containing at least one instruction for a wireless device, the wireless device group capable of having a plurality of wireless devices as members;
generating a remote action list for a particular wireless device by identifying at least one wireless device group for which the wireless device is a member and by aggregating the action lists associated with the at least one wireless device group; and
generating a remote action list version number associated with the remote action list, the remote action list version number for use by the wireless device to determine whether the remote action list version number is different from a local action list version number.
9. The method of claim 8 further comprising:
receiving, over a network, a request for the remote action list version number associated with the remote action list; and
sending, over a network, the remote action list version number associated with the remote action list.
10. The method of claim 8 further comprising:
receiving, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
sending, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
11. A wireless device capable of handling instructions, comprising:
logic configured to receive, over a network, a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device;
logic configured to determine whether the remote action list version number is different from a local action list version number;
logic configured to send, over a network, a request for the remote action list in response to determining the remote action list version number is different from the local action list version number; and
logic configured to receive, over a network, the remote action list.
12. The wireless device of claim 11 further comprising: logic configured to send, over a network, a request for a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device.
13. The wireless device of claim 11 further comprising: logic configured to execute the instruction contained in the remote action list.
14. The wireless device of claim 11 further comprising: logic configured to replace the local action list version number with the remote action list version number.
15. A server for handling instructions for a wireless device, comprising:
logic configured to store, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
logic configured to send, over a network, the remote action list version number associated with the remote action list;
logic configured to receive, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
logic configured to send, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
16. The server of claim 15 further comprising: logic configured to receive, over a network, a request for the remote action list version number associated with the remote action list.
17. A system for handling instructions for a wireless device, comprising:
a server, including:
logic configured to store, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
logic configured to receive, over a network, a request for the remote action list version number associated with the remote action list;
logic configured to send, over a network, the remote action list version number associated with the remote action list;
logic configured to receive, over a network, a request for the remote action list;
logic configured to send, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version number; and

a wireless device, including:
logic configured to send, over a network, the request for the remote action list version number associated with the remote action list;
logic configured to receive, over a network, the remote action list version number associated with the remote action list;
logic configured to determine whether the remote action list version number is different from the local action list version number;
logic configured to send, over a network, the request for the remote action list in response to determining the remote action list version number is different from the local action list version number;
logic configured to receive, over a network, the remote action list;
logic configured to execute the instructions contained in the remote action list; and
logic configured to replace the local action list version number with the remote action list version number.
18. A server for handling instructions for a wireless device, comprising:
logic configured to maintain an action list associated with at least one wireless device group, the action list containing at least one instruction for a wireless device, the wireless device group capable of having a plurality of wireless devices as members;
logic configured to generate a remote action list for a particular wireless device by identifying at least one wireless device group for which the wireless device is a member and by aggregating the action lists associated with the at least one wireless device group; and
logic configured to generate a remote action list version number associated with the remote action list, the remote action list version number for use by the wireless device to determine whether the remote action list version number is different from a local action list version number.
19. The server of claim 18 further comprising:
logic configured to receive, over a network, a request for the remote action list version number associated with the remote action list; and
logic configured to send, over a network, the remote action list version number associated with the remote action list.
20. The server of claim 18 further comprising:
logic configured to receive, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
logic configured to send, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
21. A computer program embodied on a computer readable medium, the computer program capable of handling instructions for a wireless device, the computer program comprising:
code operable to receive, over a network, a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device;
code operable to determine whether the remote action list version number is different from a local action list version number;
code operable to send, over a network, a request for the remote action list in response to determining the remote action list version number is different from the local action list version number; and
code operable to receive, over a network, the remote action list.
22. The computer program of claim 21 further comprising: code operable to send, over a network, a request for a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device.
23. The computer program of claim 21 further comprising: code operable to execute the instruction contained in the remote action list.
24. The computer program of claim 21 further comprising: code operable to replace the local action list version number with the remote action list version number.
25. A computer program embodied on a computer readable medium, the computer program capable of handling instructions for a wireless device, the computer program comprising:
code operable to store, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
code operable to send, over a network, the remote action list version number associated with the remote action list;
code operable to receive, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
code operable to send, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
26. The computer program of claim 25 further comprising: logic configured to receive, over a network, a request for the remote action list version number associated with the remote action list.
27. A computer program embodied on a computer readable medium, the computer program capable of handling instructions for a wireless device, the computer program comprising:
code operable to maintain an action list associated with at least one wireless device group, the action list containing at least one instruction for a wireless device, the wireless device group capable of having a plurality of wireless devices as members;
code operable to generate a remote action list for a particular wireless device by identifying at least one wireless device group for which the wireless device is a member and by aggregating the action lists associated with the at least one wireless device group; and
code operable to generate a remote action list version number associated with the remote action list, the remote action list version number for use by the wireless device to determine whether the remote action list version number is different from a local action list version number.
28. The computer program of claim 27 further comprising:
code operable to receive, over a network, a request for the remote action list version number associated with the remote action list; and
code operable to send, over a network, the remote action list version number associated with the remote action list.
29. The computer program of claim 27 further comprising:
code operable to receive, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
code operable to send, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
30. A wireless device capable of handling instructions, comprising:
means for receiving, over a network, a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device;
means for determining whether the remote action list version number is different from a local action list version number;
means for sending, over a network, a request for the remote action list in response to determining the remote action list version number is different from the local action list version number; and
means for receiving, over a network, the remote action list.
31. The wireless device of claim 30 further comprising: means for sending, over a network, a request for a remote action list version number, the remote action list version number associated with a remote action list containing an instruction for the wireless device.
32. The wireless device of claim 30 further comprising: means for executing the instruction contained in the remote action list.
33. The wireless device of claim 30 further comprising: means for replacing the local action list version number with the remote action list version number.
34. A server for handling instructions for a wireless device, comprising:
means for storing, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
means for sending, over a network, the remote action list version number associated with the remote action list;
means for receiving, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
means for sending, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.
35. The server of claim 34 further comprising: means for receiving, over a network, a request for the remote action list version number associated with the remote action list.
36. A system for handling instructions for a wireless device, comprising:
a server, including:
means for storing, remote from a wireless device, a remote action list containing an instruction associated with the wireless device, the remote action list having an associated remote action list version number;
means for receiving, over a network, a request for the remote action list version number associated with the remote action list;
means for sending, over a network, the remote action list version number associated with the remote action list;
means for receiving, over a network, a request for the remote action list;
means for sending, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version number; and

a wireless device, including:
means for sending, over a network, the request for the remote action list version number associated with the remote action list;
means for receiving, over a network, the remote action list version number associated with the remote action list;
means for determining whether the remote action list version number is different from the local action list version number;
means for sending, over a network, the request for the remote action list in response to determining the remote action list version number is different from the local action list version number;
means for receiving, over a network, the remote action list;
means for executing the instructions contained in the remote action list; and
means for replacing the local action list version number with the remote action list version number.
37. A server for handling instructions for a wireless device, comprising:
means for maintaining an action list associated with at least one wireless device group, the action list containing at least one instruction for a wireless device, the wireless device group capable of having a plurality of wireless devices as members;
means for generating a remote action list for a particular wireless device by identifying at least one wireless device group for which the wireless device is a member and by aggregating the action lists associated with the at least one wireless device group; and
means for generating a remote action list version number associated with the remote action list, the remote action list version number for use by the wireless device to determine whether the remote action list version number is different from a local action list version number.
38. The server of claim 37 further comprising:
means for receiving, over a network, a request for the remote action list version number associated with the remote action list; and
means for sending, over a network, the remote action list version number associated with the remote action list.
39. The server of claim 37 further comprising:
means for receiving, over a network, a request for the remote action list, the request for the remote action list generated in response to determining the remote action list version number is different from an action list version number stored at the wireless device; and
means for sending, over a network, the remote action list in response to determining the remote action list version number is different from a local action list version.

1. A process for cleaning a substance from a reactor surface, said process comprising:
providing a reactor containing the reactor surface, wherein: (a) the reactor surface is at least partially coated with a film of the substance; (b) the substance is at least one member selected from the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide, a Group 13 metal silicate, a nitrogen containing Group 13 metal oxide, a nitrogen containing Group 13 metal silicate, a nitrogen containing transition metal oxide, a nitrogen containing transition metal silicate, or a laminate comprising at least one layer selected from the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide, a Group 13 metal silicate, a nitrogen containing transition metal oxide, a nitrogen containing transition metal silicate, a nitrogen containing Group 13 metal oxide, or a nitrogen containing Group 13 metal silicate; and (c) the substance has a dielectric constant greater than the dielectric constant of silicon dioxide;
reacting the substance with a reactive agent to form a volatile product, wherein the reactive agent comprises at least one member selected from the group consisting of a halogen-containing compound; a boron-containing compound, a carbon-containing compound, a hydrogen-containing compound, a nitrogen-containing compound, a chelating compound, a chlorosilane compound, a hydrochlorosilane compound, or an organochlorosilane compound; and
removing the volatile product from the reactor to thereby remove the substance from the surface.
2. The process of claim 1, wherein the reactor is an atomic layer deposition reactor.
3. The process of claim 1, wherein the substance is at least one member selected from the group consisting of Al2O3, HfO2, ZrO2, HfSixOy, and ZrSixOy wherein x is a number greater than 0 and y is 2x 2, and any of the aforementioned compounds containing nitrogen.
4. The process of claim 1 wherein the reactive agent is at least one member selected from the group consisting of BCl3, COCl2, HCl, Cl2, ClF3, and NFzCl3-z, where z is an integer from 0 to 2.
5. The process of claim 4, wherein the reactive agent is COCl2 formed by an in situ reaction of CO and Cl2.
6. The process of claim 4, wherein the reactive agent is BCl3.
7. The process of claim 1 wherein the reactive agent is a carbon-containing compound having the formula CxHyClz, wherein x is a number ranging from 1 to 6, y is a number ranging from 0 to 13, and z is a number ranging 1 from 14.
8. The process of claim 1, wherein the reactive agent is conveyed to the substance from a gas cylinder, a safe delivery system or a vacuum delivery system.
9. The process of claim 1, wherein the reactive agent is formed in situ by a point-of-use generator.
10. The process of claim 1, wherein the substance is contacted with the reactive agent diluted with an inert gas diluent.
11. A process for removing a substance from at least a portion of the surface of a reaction chamber, the process comprising:
providing a reaction chamber wherein at least a portion of the surface is at least partially coated with the substance and wherein the substance has a dielectric constant of 4.1 or greater and is at least one member of the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide, a Group 13 metal silicate, a nitrogen containing Group 13 metal oxide, a nitrogen containing Group 13 metal silicate, a nitrogen containing transition metal oxide, a nitrogen containing transition metal silicate, or a laminate comprising at least one layer of the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide, a Group 13 metal silicate, a nitrogen containing Group 13 metal oxide, a nitrogen containing Group 13 metal silicate, a nitrogen containing transition metal oxide, a nitrogen containing transition metal silicate;
introducing a reactive agent into the reaction chamber wherein the reactive agent comprises at least one member selected from the group consisting of a halogen-containing compound; a boron-containing compound, a carbon-containing compound, a hydrogen-containing compound, a nitrogen-containing compound, a chelating compound, a chlorosilane compound, a hydrochlorosilane compound, or an organochlorosilane compound;
exposing the reactive agent to one or more energy sources sufficient to react the substance with the reactive agent and form a volatile product; and
removing the volatile product from the reaction chamber.
12. The process of claim 11, wherein the reactive agent is conveyed to the substance from a gas cylinder, a safe delivery system or a vacuum delivery system.
13. The process of claim 11, wherein the reactive agent is formed in situ by a point-of-use generator.
14. The process of claim 11, wherein the substance is contacted with the reactive agent diluted with an inert gas diluent.
15. The process of claim 11 wherein the reactive agent is deposited onto a nonreactive support.
16. The process of claim 11 wherein the reactive agent is exposed to one or more energy sources and the exposing step is conducted prior to the introducing step.
17. The process of claim 11 wherein the reactive agent is exposed to one or more energy sources and the exposing step is conducted during at least a portion of the introducing step.
18. The process of claim 11 wherein a temperature of the exposing step is at least 150 C.
19. The process of claim 11 wherein a pressure of the exposing step is at least 10 mTorr.
20. An apparatus for removing a substance from at least one surface of a reactor, the apparatus comprising:
an at least one reactive agent selected from the group consisting of a halogen-containing compound; a boron-containing compound, a carbon-containing compound, a hydrogen-containing compound, a nitrogen-containing compound, a chelating compound, a chlorosilane compound, a hydrochlorosilane compound, or an organochlorosilane compound; and
a non-reactive support having the at least one reactive agent deposited thereupon.
21. A mixture for removing a substance from at least one surface of a reactor, the mixture comprising:
an at least one reactive agent selected from the group consisting of a halogen-containing compound; a boron-containing compound, a carbon-containing compound, a hydrogen-containing compound, a nitrogen-containing compound, a chelating compound, a chlorosilane compound, a hydrochlorosilane compound, or an organochlorosilane compound; and
an inert diluent.
22. A process for removing a substance from an at least one surface of a substrate, said process comprising:
providing the substrate wherein the substrate is at least partially coated with a film of the substance that is at least one member selected from the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide other than Al2O3, a Group 13 metal silicate, a nitrogen containing Group 13 metal oxide, a nitrogen containing Group 13 metal silicate, a nitrogen containing transition metal oxide, a nitrogen containing transition metal silicate, or a laminate comprising at least one layer of the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide, a Group 13 metal silicate, a nitrogen containing Group 13 metal oxide, a nitrogen containing Group 13 metal silicate, a nitrogen containing transition metal oxide, or a nitrogen containing transition metal silicate; and wherein the substance has a dielectric constant greater than a dielectric constant of silicon dioxide;
reacting the substance with a reactive agent to form a volatile product, wherein the reactive agent comprises at least one member from the group consisting of a halogen-containing compound ; a boron-containing compound, a carbon-containing compound, a hydrogen-containing compound, a nitrogen-containing compound, a chelating compound, a chlorosilane compound, a hydrochlorosilane compound, or an organochlorosilane compound; and
removing the volatile product from the substrate to thereby remove the substance from the substrate.
23. The process of claim 22, wherein the substance is at least one member selected from the group consisting of HfO2, ZrO2, HfSixOy, ZrSixOy where x is greater than 0 and y is 2x 2, Al2SiwOz, where w is greater than 0 and z is 2w 3, or any of the aforementioned compounds containing nitrogen.
24. The process of claim 22, wherein the substance is a laminate comprising layers of at least one material selected from the group consisting of a transition metal oxide, a transition metal silicate, a Group 13 metal oxide, a Group 13 metal silicate, a nitrogen containing transition metal oxide, a nitrogen containing transition metal silicate, a nitrogen containing Group 13 metal oxide, or a nitrogen containing Group 13 metal silicate.
25. The process of claim 22, wherein the reactive agent is at least one member selected from the group consisting of BCl3, COCl2, HCl, Cl2, ClF3, and NFzCl3-z, where z is an integer from 0 to 2.
26. The process of claim 25, wherein the substance is at least one member selected from the group consisting of HfO2, ZrO2, HfSixOy, ZrSixOy, where x is greater than 0 and y is 2x 2, Al2SiwOz, where w is greater than 0 and z is 2w 3, or any of the aforementioned compounds containing nitrogen.
27. The process of claim 25, wherein the reactive agent is COCl2 formed by an in situ reaction of CO and Cl2.
28. The process of claim 25, wherein the reactive agent is BCl3.
29. The process of claim 22 wherein the reactive agent is a carbon-containing compound having the formula CxHyClz, wherein x is a number ranging from 1 to 6, y is a number ranging from 0 to 13, and z is a number ranging 1 from 14.
30. The process of claim 22 wherein the reactive agent is conveyed to the substance from a gas cylinder, a safe delivery system or a vacuum delivery system.
31. The process of claim 22 wherein the reactive agent is formed in situ by a point-of-use generator.
32. The process of claim 22 wherein the substance is contacted with the reactive agent diluted with an inert gas diluent.
33. The process of claim 22, wherein the substance is coated on the substrate by atomic layer deposition.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

I claim:

1. A ratchet screwdriver comprising:
a handle;
a main body provided with an axial hole, a sleeve fitted thereover, a shaft rod having a gear mounted on an inner end thereof, a locking ring fastened with an outer end of said main body and provided with a center through hole via which an outer end of said shaft rod is jutted out of the outer end of said main body, said shaft rod being disposed in said axial hole of said main body in conjunction with two check plates, each having a stop side, said main body further provided with an insertion slot and a stop plate disposed in said insertion slot; and
a movable joint member fastened between said handle and said main body such that said movable joint member is adjustable in angle in relation to said handle;
wherein said main body is provided in an outer wall with two indented edges opposite to each other and extending along the longitudinal direction of said main body; wherein said sleeve is provided in an inner wall with two guide edges corresponding to said indented edges of said main body and contiguous to said stop sides of said check plates;
wherein said movable joint member is formed of a ratchet portion fastened with an inner end of said main body, and a locating device which is fastened pivotally at one end with said ratchet portion and at other end with said handle, said locating device comprising a position confining slot, a recovery spring, and a retaining member formed of a press portion and a retaining portion, said retaining member being urged by said recovery spring such that said retaining portion is retained by said ratchet portion, so as to fix said movable joint member whereby said retaining portion is forced to move away from said ratchet portion at such time when said press portion of said retaining member is exerted on by an external force, thereby enabling said movable joint member to swivel.