All The Claims

1. A method of adaptively controlling motion of a carriage in a carriage printer within a user’s environment, the method comprising:
controlling a motor to move a carriage of a carriage printer within a user’s environment according to a first motor control profile;
acquiring data relative to a motion of the carriage printer as the carriage is moved according to the first motor control profile;
analyzing the acquired data relative to the motion of the carriage printer corresponding to the carriage being moved according to the first motor control profile; and
controlling the motor to move the carriage of the carriage printer according to a second motor control profile.
2. The method according to claim 1, wherein the second motor control profile results in a reduced amount of motion of the carriage printer compared with an amount of motion of the carriage printer resulting from the first motor control profile.
3. The method according to claim 1 further comprising:
acquiring data relative to a motion of the carriage printer as the carriage is moved according to the second motor control profile;
analyzing the acquired data relative to the motion of the carriage printer corresponding to the carriage being moved according to the second motor control profile; and
controlling the motor to move the carriage according to a third motor control profile.
4. The method according to claim 1 further comprising attaching a motion detector to the carriage printer to acquire data corresponding to motion of the carriage printer.
5. The method according to claim 4, wherein attaching the motion detector to the carriage printer further includes attaching an accelerometer to the carriage printer.
6. The method according to claim 4, wherein attaching the motion detector to the carriage printer further includes attaching an optical sensor to the carriage printer.
7. The method according to claim 4, wherein attaching the motion detector to the carriage printer further includes detachably attaching the motion detector to the carriage printer.
8. The method according to claim 7, wherein detachably attaching the motion detector to the carriage printer further includes temporarily mounting a mobile communication device on a housing of the carriage printer.
9. The method according to claim 8, wherein acquiring data relative to the motion of the carriage printer further includes transmission of data from the mobile communication device.
10. The method according to claim 9, wherein analyzing the acquired data further includes transmission of data from the mobile communication device to a remote server and using the server to analyze the acquired data.
11. The method according to claim 1 further comprising providing motor control profile selection guidance for selecting the second motor control profile based on the analyzed data relative to the motion of the carriage printer corresponding to the carriage being moved according to the first motor control profile.
12. The method according to claim 11, wherein the motor control profile selection guidance includes a table.
13. The method according to claim 1, wherein analyzing the acquired data includes performing a fast Fourier transform of the acquired data to provide a vibration frequency spectrum.
14. The method according to claim 1 further comprising suppressing a resonant vibration of a coupled system that includes the carriage printer and the user’s support unit for the carriage printer.
15. The method according to claim 1, wherein a travel time of the carriage corresponding to the second motor control profile is substantially the same as a travel time of the carriage corresponding to the first motor control profile.
16. The method according to claim 1, wherein controlling the motor to move the carriage according to the first motor control profile includes:
accelerating the carriage to move in a first direction; and
decelerating the carriage to a stop.
17. The method according to claim 16, wherein controlling the motor to move the carriage according to the first motor control profile further includes:
accelerating the carriage to move in a second direction that is opposite the first direction; and
decelerating the carriage to a stop, thereby completing a carriage motion cycle.
18. The method according to claim 17, wherein controlling the motor to move the carriage according to the first motor control profile further includes accelerating and decelerating the carriage for a plurality of carriage motion cycles.
19. The method according to claim 1 further comprising sensing an amount of ink.
20. The method according to claim 1 further comprising displaying a message to the user regarding a support unit for the carriage printer.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. An illumination optical system configured to direct an illumination light beam to an object field along an illumination light path, the illumination optical system comprising:
an EUV mirror having a reflective surface with a nonplanar topography, the reflective surface of the EUV mirror being in the illumination light path; and
an EUV attenuator arranged upstream of the EUV mirror along the illumination path, the EUV attenuator having a surface which faces the reflective surface of the EUV mirror, the surface of the attenuator having a topography configured so that at least sections of the surface of the attenuator are arranged at a constant interval from the reflective surface of the EUV mirror without contacting the reflective surface of the EUV mirror,
wherein the illumination optical system is an EUV microlithography illumination optical system.
2. The illumination optical system of claim 1, wherein the constant interval is at most 200 \u03bcm.
3. The illumination optical system of claim 1, wherein the EUV attenuator comprises an EUV diaphragm.
4. The illumination optical system of claim 1, wherein the EUV attenuator comprises an EUV gray filter.
5. The illumination optical system of claim 1, wherein the reflective surface of the EUV mirror is a freeform surface.
6. The illumination optical system of claim 1, wherein the reflective surface of the EUV mirror is a facet surface comprising a plurality of individual reflective facets, and at least some of the individual reflective facets have an associated attenuator section of the EUV attenuator.
7. The illumination optical system of claim 6, wherein the attenuator sections are configured to produce individual attenuations.
8. The illumination optical system of claim 6, wherein the attenuator sections comprise diaphragms with shading edges associated with the individual reflective facets.
9. The illumination optical system of claim 6, wherein:
the facet surface is divided into a plurality of facet blocks;
each facet block comprises a plurality of individual facets;
the facet blocks have interposed distance sections on the facet surface; and
the surface of the EUV attenuator comprises reinforcing struts adjacent the distance sections.
10. The illumination optical system of claim 1, wherein the surface of the EUV attenuator is a layer formed from the reflective surface of the EUV mirror.
11. The illumination optical system of claim 10, wherein the surface of the EUV attenuator comprises nickel.
12. The illumination optical system of claim 10, wherein the surface of the EUV attenuator comprises a plurality of diaphragms.
13. The illumination optical system of claim 10, wherein the surface of the EUV attenuator includes nonattenuating through openings.
14. The illumination optical system of claim 6, wherein each attenuator section comprises a plurality of attenuator fingers which are diaphragms.
15. The illumination optical system of claim 14, wherein the attenuator fingers have individually shaped shading edges.
16. The illumination optical system of claim 14, wherein each individual facet has at most two associated attenuator fingers.
17. The illumination optical system of claim 14, wherein the attenuator fingers are carried by a common mounting support.
18. The illumination optical system of claim 17, wherein the common mounting support has supporting brackets arranged on both sides of a facet block which has a plurality of individual facets, and wherein the attenuator fingers are between the two supporting brackets associated with the facet block.
19. The illumination optical system of claim 18, wherein holding points for the attenuator fingers on the supporting brackets are arranged at a level depending on the shape of the individual facets to be spanned.
20. An illumination system, comprising:
an EUV radiation source; and
an illumination optical system according to claim 1.
21. A projection exposure installation, comprising:
an EUV radiation source;
an illumination optical system according to claim 1; and
a projection optical system configured to project the object field into an image field.
22. A method, comprising:
providing a projection exposure installation, comprising:
An illumination system comprising an illumination optical system according to claim 1; and
a projection optical system configured to project the object field into an image field

a wafer having a coating which is photosensitive to the illumination light (10) is provided; and
using the projection objective to project at least a portion of a reticle onto a photosensitive coating of a wafer to provide an exposed photosensitive coating.
23. The method of claim 22, further comprising developing the exposed photosensitive layer.

What is claimed is:

1. A defect source identifier that provides information used to identify a source of a defect on a substrate, which defect source identifier comprises:
a LotRoute database generation process and a LotRoute database access process, wherein:
the LotRoute database generation process comprises a software application that runs on a server and that, in response to user input, defines a wafer route including wafer route information, and associates the wafer route with any one of a number of entities; and
the LotRoute database process comprises a software application that runs on the server and that, in response to input from the defect source identifier, retrieves the wafer route information using an identifier of one of the entities.
2. The defect source identifier of claim 2 wherein the entities are one of Lot ID, Step or Layer ID, InspectionReview Tool ID, and Fixed Route ID.
3. The defect source identifier of claim 2 wherein the LotRoute database generation process designates the wafer route associated with the Route ID as a default route.
4. The defect source identifier of claim 3 wherein the wafer route information associated with an entity comprises one or more tools specified by one or more of tool type and tool identifier.
5. The defect source identifier of claim 4 wherein the LotRoute database generation process enables a user to add, edit, or delete a wafer route.
6. The defect source identifier of claim 5 wherein the LotRoute database process comprises a retrieval algorithm that retrieves wafer route information by searching for a wafer route using Lot ID as a retrieval key, and if a wafer route associated with the Lot ID is found, returning the wafer route information; otherwise by searching for the wafer route using Step ID as a retrieval key, if specified, and if a wafer route associated with the Step ID is found, returning the wafer route information, otherwise by searching for the wafer route using Tool ID as a retrieval key, if specified, and if a wafer route associated with the Tool ID is found, returning the wafer route information, otherwise by returning the default wafer route information.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A stator for an electric machine comprising:
a cylindrical stator core including an outer perimeter surface and an inner perimeter surface with a plurality of slots formed between the inner perimeter surface and the outer perimeter surface, the inner perimeter surface defining an inner cylindrical space that extends in an axial direction within the stator, the inner cylindrical space extending past the cylindrical stator core;
a plurality of conductor segments positioned in the plurality of slots; and
a jumper including a straight portion extending into the inner cylindrical space and connecting two of the plurality of conductor segments, the jumper providing a phase connection member including a phase tapping location where a phase terminal is connected to the phase connection member.
2. The stator of claim 1 wherein the jumper includes a leg at an end of the straight portion coupled to one of the plurality of conductor segments.
3. The stator of claim 2 wherein each of the opposing ends of the stator core define a circular shape, and wherein the straight portion of the jumper appears as a chord of the circular shape when viewed from one of the opposing ends the stator core.
4. The stator of claim 3 wherein the jumper is a first jumper, the stator further comprising a second jumper connecting another two of the plurality of conductor segments.
5. The stator of claim 4 wherein the second jumper is generally arc shaped and appears to extend along the circular shape when viewed from the one of the opposing ends of the stator core.
6. The stator of claim 5 wherein the first jumper and the second jumper are tied together with an electrically insulative material.
7. The stator of claim 1 wherein the plurality of conductor segments are connected to form a multi-phase winding on the stator.
8. The stator of claim 7 wherein the phase connection member is a first phase connection member, the stator further comprising a second phase connection member and a third phase connection member, wherein the second phase connection member includes a straight portion that extends within the inner cylindrical space between another two of the plurality of conductor segments, and wherein the third phase connection member includes an arcuate portion that extends along one of the opposing ends of the stator core between yet another two of the plurality of conductor segments.
9. The stator of claim 1 wherein the plurality of conductor segments includes a plurality of series connected phase windings on the stator core, and wherein the stator further comprises a plurality of series winding connection loops, each series winding connection loop including an arcuate portion that extends along one of the opposing ends of the stator core and connects two of the phase windings in series.