1. In a system wherein a portable device, arranged for wireless data communications with a computer, is located using radio signals between said portable device and fixed devices, and wherein said computer uses a database relating radio signal characteristics to location to compute location of said device , and communicates location data to said portable device using wireless data communications, the improvement wherein said computer communicates characteristic data representing radio signal environment in a sub-area corresponding to said location data to said portable device, and wherein said portable device monitors received radio signals corresponding to said data representing radio signal environment to detect a change in location of said device.
2. The improvement specified in claim 1 wherein said portable device uses said characteristic data and said radio signals corresponding to said radio signal environment to update said location data.
3. The improvement specified in claim 2 wherein said device is arranged to transmit said location data to a computer in association with other data and wherein said device transmits said updated location data in association with said other data.
4. The improvement specified in claim 1 wherein said portable device signals said computer to provide updated location data if said device determines that it has changed location.
5. The improvement specified in claim 1 wherein said portable device signals said computer to provide an increased rate of updated location data if said device determines that it has moved.
6. A portable device arranged to communicate with a computer using wireless data communications, comprising:
at least one radio receiver for receiving signals including data communications signals; and
a processor arranged to receive from said radio and store location data and characteristic data representing radio signal environment in a sub-area corresponding to said location data, said processor being arranged to cause said receiver to monitor signals corresponding to said radio signal environment and to provide said processor with radio signal data corresponding to said radio signal environment, and said processor being further arranged to use said radio signal data and said characteristic data representing radio signal environment in a sub-area corresponding to said location data to determine if said device has changed location.
7. A portable device as specified in claim 6 wherein said processor is further arranged to use said radio signal data and said characteristic data representing radio signal environment in a sub-area corresponding to said location data to update said location data.
8. A portable device as specified in claim 7 wherein said device is arranged to transmit said location data to a computer in association with other data.
9. A portable device as specified in claim 6 wherein said portable device further includes a transmitter and wherein said processor is arranged to cause said transmitter to send a data message to said computer to cause said computer to update said location data if said device has changed location.
10. A portable device as specified in claim 6 wherein said portable device further includes a transmitter and wherein said processor is arranged to cause said transmitter to send a data message to said computer to cause said computer to provide an increased rate of location data if said device has changed location.
11. In a system wherein a portable device, arranged for wireless data communications with a computer, is located using radio signals between said portable device and fixed devices, and wherein said computer uses a database relating radio signal characteristics to location to compute location of said device, and communicates location data to said portable device using wireless data communications, the improvement wherein said portable device monitors received radio signals and compares received radio signal characteristics to the characteristics of previously received radio signals to detect a change in location of said device.
12. The improvement specified in claim 11 wherein said portable device signals said computer to provide updated location data if said device determines that it has changed location.
13. The improvement specified in claim 11 wherein said portable device signals said computer to provide an increased rate of updated location data if said device determines that it has changed locations.
14. A portable device arranged to communicate with a computer using wireless data communications, comprising:
at least one radio for sending and receiving signals including data communications signals; and
a processor arranged to cause said radio to monitor received radio signals and to provide said processor with radio signal data corresponding to characteristics of said radio signals, and said processor being arranged to compare said radio signal data to previously received radio signal data to determine if said device has changed location.
15. A portable device as specified in claim 14 wherein said portable device further includes a transmitter and wherein said processor is arranged to cause said transmitter to send a data message to said computer to cause said computer to update device location data if said device has changed location.
16. A portable device as specified in claim 14 wherein said portable device further includes a transmitter and wherein said processor is arranged to cause said transmitter to send a data message to said computer to cause said computer to provide an increased rate of updated location data if said device has changed location.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An apparatus for processing a substrate, the apparatus comprising:
a liquid supply unit, having an output port and an input port, wherein the output port outputs a processing liquid;
a nozzle unit, having a first port and a second port, wherein the first port is connected to the output port;
a first valve, connected between the second port and the input port; and
a second valve, connected between the second port and the output port, wherein switch states of the first and second valves are opposite to control the nozzle unit.
2. The apparatus of claim 1, wherein the first valve is a normal open valve, and the second valve is a normal close valve.
3. The apparatus of claim 1, wherein the apparatus further comprises:
a third valve, connected between the first valve and the output port.
4. The apparatus of claim 3, wherein the third valve is a normal close valve.
5. The apparatus of claim 3, wherein the third valve is a normal open valve to circulate the processing liquid from the output port to the input port.
6. The apparatus of claim 3, wherein the third valve is a solenoid valve or an air operation valve.
7. The apparatus of claim 1, wherein the apparatus further comprises:
a control unit, switching the switch states of the first and second valves by a same signal.
8. The apparatus of claim 1, wherein the liquid supply unit comprises a temperature control device to adjust a temperature of the processing liquid.
9. The apparatus of claim 1, wherein the liquid supply unit comprises a pressurizing device to pressure the processing liquid.
10. The apparatus of claim 1, wherein the first valve is a solenoid valve or an air operation valve.
11. The apparatus of claim 1, wherein the second valve is a solenoid valve or an air operation valve.
12. The apparatus of claim 1, wherein the apparatus further comprises:
a plurality of thermal insulation components to maintain a temperature of the processing liquid.
13. A method for spreading a processing liquid on a substrate, the method comprising:
placing a nozzle unit above the substrate, wherein the nozzle unit has a first port and a second port; and
inputting the processing liquid simultaneously from the first and second ports, wherein the processing liquid is distributed over the whole nozzle unit and is spread on the substrate.
14. The method of claim 13, wherein the processing liquid is provided by a liquid supply unit.
15. The method of claim 14, wherein a temperature of the processing liquid is adjusted by the liquid supply unit.
16. The method of claim 14, wherein when the processing liquid is to be spread on the substrate, a route from the liquid supply unit to the second port is opened, and a route from the second port to the liquid supply unit is closed; and
when the processing liquid is not being spread on the substrate, the route from the liquid supply unit to the second port is closed, and the route from the second port to the liquid supply unit is opened.
17. The method of claim 14, wherein the route from the second valve to the liquid supply unit is controlled by a first valve, the route from the liquid supply unit is controlled by a second valve, and switch states of the first and second valves are opposite.
18. The method of claim 17, wherein the switch states of the first and second valves are controlled by a same signal.
19. The method of claim 17, wherein the first valve is a normal open valve, and the second valve is a normal close valve.
20. The method of claim 17, wherein the first valve is a solenoid valve or an air operation valve.
21. The method of claim 17, wherein the second valve is a solenoid valve or an air operation valve.
22. The method of claim 14, wherein the method further comprising:
moving the nozzle unit from one end of the substrate to another end of the substrate.