1-19. (canceled)
20. A method for converting a subset of a plurality of semiconductor fins on a semiconductor structure into dielectric fins, comprising:
masking a first subset of the plurality of fins, leaving a second subset of the plurality of fins as unmasked fins; and
applying a gas cluster ion beam to the unmasked fins to convert the unmasked fins into dielectric fins.
21. The method of claim 20, wherein masking the first subset of fins comprises depositing photoresist.
22. The method of claim 20, wherein masking the first subset of fins comprises depositing oxide.
23. The method of claim 20, wherein applying a gas cluster ion beam to the unmasked fins comprises applying a gas cluster ion beam at an angle ranging from about 10 degrees to about 20 degrees from vertical.
24. The method of claim 20, wherein applying a gas cluster ion beam to the unmasked fins comprises applying a gas cluster ion beam with a nitrogen species, at an energy ranging from 1 KeV to 100 KeV, and at a dosage ranging from about 5E13 atoms per cubic centimeter to about 2E15 atoms per cubic centimeter.
25. A method for converting a subset of a plurality of semiconductor fins on a semiconductor structure into dielectric fins, comprising:
masking a first subset of the plurality of fins, leaving a second subset of the plurality of fins as unmasked fins; and
applying ion implantation to the unmasked fins to convert the unmasked fins into dielectric fins.
26. The method of claim 25, wherein masking the first subset of fins comprises depositing photoresist.
27. The method of claim 25, wherein masking the first subset of fins comprises depositing oxide.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A radiation hardened digital circuit, comprising:
a delay network configured to receive a global clock signal and generate a first delayed clock signal from the global clock signal such that the first delayed clock signal is delayed with respect to the global clock signal; and
a first Muller C element configured to receive the global clock signal and the first delayed clock signal, wherein the first Muller C element is configured to:
generate a first clock input signal;
set the first clock input signal to one of a set of clock states in response to the first delayed clock signal and the global clock signal each being provided in a same one of the set of clock states, wherein the set of clock states comprises a first clock state and a second clock state; and
hold the first clock input signal in the one of the set of clock states in response to the first delayed clock signal and the global clock signal being provided in different ones of the set of clock states.
2. The radiation hardened digital circuit of claim 1, further comprising:
a first pulsed clock generator configured to generate a first pulsed clock signal from the first clock input signal; and
a first latch configured to receive the first pulsed clock signal and a first input bit signal having a first input bit state, the first latch is being configured to:
generate a first output bit signal;
sample the first input bit state to set a first output bit state of the first output bit signal based on the first input bit state in response to the first pulsed clock signal being in one of the set of clock states; and
hold the first output bit state while the first pulsed clock signal is in an other one of the set of clock states.
3. The radiation hardened digital circuit of claim 1 further comprising a second Muller C element wherein:
the delay network is further configured to generate a second delayed clock signal from the first delayed clock signal such that that the second delayed clock signal is delayed with respect to the first delayed clock signal; and
the second Muller C element is configured to receive the global clock signal and the second delayed clock signal, wherein the second Muller C element is configured to:
generate a second clock input signal such that the second clock input signal is delayed with respect to the first clock input signal;
set the second clock input signal to one of a set of clock states in response to the second delayed clock signal and the global clock signal each being provided in a same one of the set of clock states; and
hold the second clock input signal in the one of the set of clock states in response to the second delayed clock signal and the global clock signal being provided in different ones of the set of clock states.
4. The radiation hardened digital circuit of claim 3, further comprising:
a first pulsed clock generator configured to generate a first pulsed clock signal from the first clock input signal;
a second pulsed clock generator configured to generate a second pulsed clock signal from the second clock input signal such that the second pulsed clock signal is delayed with respect to the first pulsed clock signal;
a first latch configured to receive the first pulsed clock signal and a first input bit signal having a first input bit state, the first latch is being configured to:
generate a first output bit signal;
sample the first input bit state to set a first output bit state of the first output bit signal based on the first input bit state in response to the first pulsed clock signal being in one of the set of clock states; and
hold the first output bit state while the first pulsed clock signal is in an other one of the set of clock states; and
a second latch configured to receive the second pulsed clock signal and the first input bit signal, the second latch is being configured to:
generate a second output bit signal;
sample the first input bit state to set a second output bit state of the second output bit signal based on the first input bit state in response to the second pulsed clock signal being in one of the set of clock states; and
hold the second output bit state while the second pulsed clock signal is in an other one of the set of clock states.
5. The radiation hardened digital circuit of claim 4 further comprising:
a third pulsed clock generator configured to receive the global clock signal and generate a third pulsed clock signal from the global clock signal; and
a third latch configured to receive the third pulsed clock signal and the first input bit signal, the third latch is being configured to:
generate a third output bit signal;
sample the first input bit state to set a third output bit state of the third output bit signal based on the first input bit state in response to the third pulsed clock signal being in one of the set of clock states; and
hold the third output bit state while the third pulsed clock signal is in an other one of the set of clock states.
6. The radiation hardened digital circuit of claim 5 further comprising a majority gate configured to receive the first output bit signal, the second output bit signal, and the third output bit signal wherein the majority gate is configured to generate a first resultant output bit signal set to a majority bit state of the first output bit state, the second output bit state, and the third output bit state.
7. The radiation hardened digital circuit of claim 6 further comprising a first delay element configured to receive the global clock signal and generate the first delayed clock signal from the global clock signal.
8. The radiation hardened digital circuit of claim 7 further comprising a second delay element configured to receive the first delayed clock signal and generate the second delayed clock signal from the first delayed clock signal.
9. The radiation hardened digital circuit of claim 8 wherein the first delay element and the second delay element are identical.
10. The radiation hardened digital circuit of claim 4 further comprising a global clock tree wherein the first Muller C element and the second Muller C element are coupled to the first pulsed clock generator and the second pulsed clock generator through the global clock tree.
11. The radiation hardened digital circuit of claim 3 further comprising a third Muller C element wherein:
the delay network is further configured to generate a third delayed clock signal from the second delayed clock signal such that that the third delayed clock signal is delayed with respect to the third delayed clock signal; and
the third Muller C element is configured to receive the global clock signal and the third delayed clock signal, wherein the third Muller C element is configured to:
generate a third clock input signal such that the third clock input signal is delayed with respect to the second clock input signal;
set the third clock input signal to one of a set of clock states in response to the third delayed clock signal and the global clock signal each being provided in a same one of the set of clock states; and
hold the third clock input signal in the one of the set of clock states in response to the third delayed clock signal and the global clock signal being provided in different ones of the set of clock states.
12. The radiation hardened digital circuit of claim 11, further comprising:
a first pulsed clock generator configured to generate a first pulsed clock signal from the first clock input signal;
a second pulsed clock generator configured to generate a second pulsed clock signal from the second clock input signal such that the second pulsed clock signal is delayed with respect to the first pulsed clock signal;
a third pulsed clock generator configured to generate a third pulsed clock signal from the third clock input signal such that the third pulsed clock signal is delayed with respect to the second pulsed clock signal;
a first latch configured to receive the first pulsed clock signal and a first input bit signal having a first input bit state, the first latch is being configured to:
generate a first output bit signal;
sample the first input bit state to set a first output bit state of the first output bit signal based on the first input bit state in response to the first pulsed clock signal being in one of the set of clock states; and
hold the first output bit state while the first pulsed clock signal is in an other one of the set of clock states;
a second latch configured to receive the second pulsed clock signal and the first input bit signal, the second latch is being configured to:
generate a second output bit signal;
sample the first input bit state to set a second output bit state of the second output bit signal based on the first input bit state in response to the second pulsed clock signal being in one of the set of clock states; and
hold the second output bit state while the second pulsed clock signal is in an other one of the set of clock states; and
a third latch configured to receive the third pulsed clock signal and the first input bit signal, the third latch is being configured to:
generate a third output bit signal;
sample the first input bit state to set a third output bit state of the third output bit signal based on the first input bit state in response to the third pulsed clock signal being in one of the set of clock states; and
hold the third output bit state while the third pulsed clock signal is in an other one of the set of clock states.
13. The radiation hardened digital circuit of claim 12 further comprising a majority gate configured to receive the first output bit signal, the second output bit signal, and the third output bit signal wherein the majority gate is configured to generate a first resultant output bit signal set to a majority bit state of the first output bit state, the second output bit state, and the third output bit state.
14. The radiation hardened digital circuit of claim 13 further comprising a first delay element configured to receive the global clock signal and generate the first delayed clock signal from the global clock signal.
15. The radiation hardened digital circuit of claim 14 further comprising a second delay element configured to receive the first delayed clock signal and generate the second delayed clock signal from the first delayed clock signal.
16. The radiation hardened digital circuit of claim 15 further comprising a third delay element configured to receive the second delayed clock signal and generate the third delayed clock signal from the second delayed clock signal.
17. The radiation hardened digital circuit of claim 16 wherein the first delay element, the second delay element, and the third delay element are identical.
18. The radiation hardened digital circuit of claim 16 further comprising a global clock tree wherein the first delay element, the first Muller C element, the second Muller C element, the third Muller C element are each configured to receive the global clock signal through the global clock tree.
19. The radiation hardened digital circuit of claim 18 further comprising a global clock circuit coupled to the global clock tree and configured to generate the global clock circuit.
20. The radiation hardened digital circuit of claim 19 wherein the delay network, the first Muller C element, the second Muller C element, the third Muller C element, the first pulsed clock generator, the second pulsed clock generator, the third pulsed clock generator, the first latch, the second latch, the third latch, and the majority gate are each provided in a sequential state circuit.