All The Claims

1. A lithography system, for example for projecting an image or an image pattern on to a target (1) such as a wafer, said target being included in said system by means of a target table (2), clamping means being present for clamping said target on said table, wherein said clamping means comprises a layer of stationary liquid (3), included at such thickness between target and target table that, provided the material of the liquid (C) and of the respective contacting faces (A, B) of the target (1) and target table (2), a pressure drop (PCap) arises.
2. System according to claim 1, wherein said pressure drop results in a pressure (Pliq) in said volume of liquid, which is below its vapour pressure.
3. Systems according to claim 1, wherein said pressure drop is realised in vacuum.
4. System according to claim 1, wherein a pressure (Pliq) arises, which is significantly lower than an actual environmental pressure (Penv) for said layer (3).
5. System according to claim 1, wherein said inclusion is arranged such that said lower pressure (PLiq) realises a negative pressure at vacuum condition, in particular at typical lithographic vacuum condition.
6. System according to claim 1, wherein the wafer table is provided with spacers (7, 15) for defining the thickness of the layer of stationary liquid (3).
7. System according to claim 1, wherein the wafer table is provided with burls, and the liquid (3) is maintained at a capillary condition (PCap) by means of a predefined burl height, i.e. gap height between target table and target, maintained at such minimal level that given the clamping conditions, the liquid (3) is prevented from a possibility to boil, i.e. from a possibility to cavitate.
8. System according to claim 1, wherein said capillary condition is realized by maintaining a nominal mutual distance of between 0.1 and 10 \u03bcm between target (1) and target table (8).
9. System according to claim 1, wherein circumferential sealing means such as O-rings are included, in particular for preventing liquid from vaporization.
10. System according to claim 9, wherein the sealing means is composed as an elastically deformable means, in particular having a generally C-shaped form as taken in cross section.
11. System according to claim 9, wherein an O-ring or sort like elastically deformable means is included circumferentially around said target.
12. System according to claim 9, wherein the sealing means is composed of an O-ring provided with circumferentially extending, slotted cut out, open to a radial side of the ring, in particular to the radial inner side, and extending over a substantial part of the diameter of the ring, in particular up to around the centre of the O-ring.
13. System according to claim 9, wherein the circumferential sealing means is composed as a circumferential air gap (9B) between target table (8) and target of a height equal or smaller than the height realized for maintaining said capillary condition.
14. System according to claim 1, wherein the wafer table is provided with a gutter for containing fluid, the gutter being of a width significantly larger than the height of the gap, and located circumferential to a target carrying part of the target table, within the circumference defined by said sealing means for sealing said capillary included liquid between said target and said target table.
15. System according to claim 1, wherein said table is provided with closeable discharge openings, in particular for release of air, at least gaseous material at entry of capillary liquid, in particular centrally closable.
16. System according to claim 15, wherein said openings are included in a recessed circumferential rim of said table, preferably circumferentially to a wafer carrying part of said wafer table, i.e. comprising chucks, in particular within the circumference defined by said sealing means.
17. System according to claim 15, wherein said discharge openings are included generally evenly spread over the surface of said table.
18. System according to claim 1, wherein said clamping liquid is composed of water.
19. System according to claim 1, wherein said table is provided with at least one preferably centrally closeable entry opening, in particular for entry of capillary liquid.
20. System according to claim 1, wherein entry of fluid is realized by spread application of liquid on to either one contact face of table and target.
21. Systems according to claim 1, in which the liquid is deposited in a controlled manner by means of a liquid depositing means releasing controlled volumes of liquid drops or lines on the table surface.
22. System according to claim 1, in which liquid is deposited by a precise depositing means comprising a plurality of depositing mouths.
23. System according to claim 7, wherein the density of burls on the contacting face of said table is determined by a nominal pitch value within the range of 1 to 3 mm.
24. Systems according to claim 1, wherein at least one of either mutual contacting face of target and table is provided with a coating of different material than of said face base.
25. System according to claim 1, wherein initial pressure means are provided for realizing an initial firm contact between target and table.
26. System according to claim 25, wherein said initial pressure means is realized by means of one or more e.g. centrally provided openings comprising a valve in a supply channel connected to such opening, either in a channel central to all such openings or in each separate channel, which valve is closed in advance of providing fluid to the gap between target and target table, and which gap is exposed to vacuum pressure via further openings, circumferential to a wafer carrying part of said wafer table.
27. System according to claim 25, wherein said initial pressure means comprises a pump such as a water pump and an air pump or blower, in particular for realizing a first contact between target and table by urging a stream of flowing material on to said target, in particular one of air and water.
28. System according to claim 1, in which the target table is adapted for loose inclusion, i.e. without connection of conduits in a lithographic apparatus for treating a target carried by the table.
29. Wafer table for insertion into a vacuum environment, such as in a lithographic apparatus, provided with clamping means adapted to the use of a stationary layer of liquid, in particular in accordance with claim 1, for clamping a target such as a wafer.
30. Table according to claim 29, wherein the means are adapted to realize said clamping outside the vacuum space of a lithographic apparatus, in particular before insertion thereof into the vacuum compartment of a lithographic apparatus for treating a target carried by said target table.
31. Method of clamping an object having a generally flat contacting face to another object also having a generally flat contacting face, wherein for the purpose of mutual clamping of said objects a layer of stationary held liquid is maintained capillary between said faces.
32. Method according to claim 31, wherein said objects are part of a vacuum operable lithographic system.
33. Method according to claim 31, wherein the two objects are pressed to one another, in particular by an air stream, in order to allow installment of said capillary inclusion as a clamping means.
34. Method according to claim 31, in which the wafer table is taken out of the lithography system for replacing a target thereon.
35. Method according to claim 31, wherein a wafer table in a lithographic apparatus is exchanged with another one for the purpose of exchanging a target in said lithographic apparatus.
36. Method according to claim 31, wherein the target table is treated outside a lithographic apparatus, in which treatment the temperature thereof is conditioned.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A display comprising:
at least one color interferometric modulator configured to selectively reflect ambient light having a characteristic color, said modulator having a spectral response characterized by a first spectral peak having a spectral width, wherein said first spectral peak corresponds to said characteristic color; and
at least one color filter having a spectral response characterized by a second spectral peak having a spectral width, said filter configured to transmit at least a portion of incident ambient light to said modulator and to transmit at least a portion of said selectively reflected ambient light to output light characterized by a third spectral peak,
wherein said third spectral peak has a spectral width that is narrower than the spectral width of the first spectral peak and wherein the spectral width of said first spectral peak is the range of wavelengths of said first spectral peak at the full width at half maximum of intensity of said selectively reflected light, the spectral width of said second spectral peak is the range of wavelengths of said second spectral peak at the full width at half maximum of intensity of said spectral response of said color filter and the spectral width of the third spectral peak is the range of wavelengths of said third spectral peak at the full width at half maximum of intensity of said output light.
2. The display of claim 1, wherein said filter comprises an absorptive filter.
3. The display of claim 1, wherein said filter comprises an interference filter.
4. The display of claim 1, wherein said at least one interferometric modulator comprises an interferometric modulator configured to output red light, an interferometric modulator configured to output green light, and an interferometric modulator configured to output blue light, wherein the at least one color filter comprises a red color filter configured to transmit said red light, a green color filter configured to transmit said green light, and a blue color filter configured to transmit said blue light, said transmitted red light, green light, and blue light combining to produce a color.
5. The display of claim 1, wherein the spectral width of the second spectral peak is substantially equal to or narrower than the spectral width of the first spectral peak.
6. The display of claim 1, wherein the spectral width of the third spectral peak is substantially equal to or narrower than the spectral width of the second spectral peak.
7. A method of making a display comprising:
forming at least one color interferometric modulator configured to selectively reflect ambient light having a characteristic color, said modulator having a spectral response characterized by a first spectral peak having a spectral width, wherein said first spectral peak corresponds to said characteristic color; and
forming at least one color filter having a spectral response characterized by a second spectral peak having a spectral width, said filter formed so as to transmit at least a portion of incident ambient light to said modulator and so as to transmit at least a portion of said selectively reflected ambient light to output light characterized by a third spectral peak,
wherein said third spectral peak has a spectral width that is substantially equal to or narrower than the spectral width of the first spectral peak and wherein the spectral width of said first spectral peak is the range of wavelengths of said first spectral peak at the full width at half maximum of intensity of said selectively reflected light, the spectral width of said second spectral peak is the range of wavelengths of said second spectral peak at the full width at half maximum of intensity of said spectral response of said color filter and the spectral width of the third spectral peak is the range of wavelengths of said third spectral peak at the full width at half maximum of intensity of said output light.
8. The display of claim 7, wherein said filter comprises an absorptive filter.
9. The display of claim 7, wherein said filter comprises an interference filter.
10. The method of claim 7, wherein said at least one interferometric modulator comprises an interferometric modulator configured to output red light, an interferometric modulator configured to output green light, and an interferometric modulator configured to output blue light, wherein the at least one color filter comprises a red color filter configured to transmit said red light, a green color filter configured to transmit said green light, and a blue color filter configured to transmit said blue light, said transmitted red light, green light, and blue light combining to produce a color.
11. The method of claim 7, wherein said forming of said filter comprises applying a layer of material to a surface of a substrate such that said substrate is between said filter and said interferometric modulator.
12. The method of claim 7, wherein said forming of said filter comprises applying a layer of material on a substrate, said filter being formed between said substrate and said modulator.
13. A display formed by the method of claim 7.
14. A display comprising:
means for selectively reflecting ambient light having a characteristic color, said means having a spectral response characterized by a first spectral peak having a spectral width, wherein said first spectral peak corresponds to said characteristic color; and
means for selectively filtering and transmitting light, said filtering means having a spectral response characterized by a second spectral peak having a spectral width such that said filtering means transmits colored light when illuminated by white light, said filtering means configured to transmit at least a portion of incident ambient light to said means for selectively reflecting ambient light and to transmit at least a portion of said selectively reflected ambient light to output light characterized by a third spectral peak,
wherein said third spectral peak has a spectral width that is substantially equal to or narrower than the spectral width of the first spectral peak and wherein the spectral width of said first spectral peak is the range of wavelengths of said first spectral peak at the full width at half maximum of intensity of said selectively reflected light, the spectral width of said second spectral peak is the range of wavelengths of said second spectral peak at the full width at half maximum of intensity of said spectral response of said filtering means when illuminated by white light and the spectral width of the third spectral peak is the range of wavelengths of said third spectral peak at the full width at half maximum of intensity of said output light.
15. The method of claim 14, wherein said means for selectively reflecting light comprises at least one interferometric modulator.
16. The method of claim 14, wherein said filtering means comprises means for selectively filtering and transmitting red, green, and blue light.
17. The display of claim 16, wherein said means for selectively reflecting light comprises means for selectively reflecting red light, means for selectively reflecting green light, and means for selectively reflecting blue light wherein said filtering means comprises a red color filter configured to transmit said red light, a green color filter configured to transmit said green light, and a blue color filter configured to transmit said blue light, said transmitted red light, green light, and blue light combining to produce a color.
18. The method of claim 14, wherein said filter comprises an absorptive filter.
19. The method of claim 14, wherein said filter comprises an interference filter.
20. The display of claim 1, wherein said filter is disposed with respect to a substrate such that said substrate is between said filter and said interferometric modulator.
21. The display of claim 1, wherein said filter is disposed with respect to a substrate such that said filter is between said substrate and said modulator.
22. The method of claim 1, wherein forming said at least one interferometric modulator comprises forming at least two interferometric modulators having different characteristic colors.
23. The display of claim 1, wherein said at least one interferometric modulator comprises a first surface that is partially reflective and partially transmissive and a second surface that is reflective and non-transmissive, wherein said reflective surface is movable with respect to the partially reflective surface.
24. The method of claim 23, wherein said movable reflective surface is associated with a first electrode and said partially reflective surface is associated with a second electrode and wherein said movable reflective surface is configured to be moved in response to a voltage difference applied between the first and second electrodes.
25. The method of claim 23, wherein said movable reflective surface comprises aluminum.
26. The display of claim 14, wherein said filtering means is disposed with respect to a substrate such that said substrate is between said filtering means and said means for selectively reflecting light.
27. The display of claim 14, wherein said filtering means is disposed with respect to a substrate such that said filtering means is between said substrate and said means for selectively reflecting light.
28. The method of claim 15, wherein forming said at least one interferometric modulator comprises forming at least two interferometric modulators having different characteristic colors.
29. The display of claim 14, wherein said means for selectively reflecting light comprises a first surface that is partially reflective and partially transmissive and a second surface that is reflective and non-transmissive, wherein said second surface is movable with respect to said first surface.
30. The display of claim 29, wherein said movable reflective surface is associated with a first electrode and said partially reflective surface is associated with a second electrode and wherein said movable reflective surface is configured to be moved in response to a voltage difference applied between the first and second electrodes.
31. The display of claim 29, wherein said movable reflective surface comprises aluminum.
32. The method of claim 7, wherein said filter is formed with respect to a substrate such that said substrate is between said filter and said interferometric modulator.
33. The method of claim 7, wherein said filter is formed with respect to a substrate such that said filter is between said substrate and said modulator.
34. The display of claim 7, wherein said at least one interferometric modulator comprises at least two interferometric modulators having different characteristic colors.
35. The display of claim 7, wherein forming said at least one interferometric modulator comprises forming a first surface that is partially reflective and partially transmissive and a second surface that is reflective and non-transmissive, wherein said second reflective surface is movable with respect to said first surface.
36. The display of claim 35, wherein said movable reflective surface is associated with a first electrode and said partially reflective surface is associated with a second electrode and wherein said movable reflective surface is configured to be moved in response to a voltage difference applied between the first and second electrodes.
37. The display of claim 35, wherein said movable reflective surface comprises aluminum.
38. The method of claim 1, wherein said at least one interferometric modulator comprises an interferometric modulator configured to output light of a first color, and an interferometric modulator configured to output light of a second color, wherein the at least one color filter comprises a first color filter configured to transmit said first color of light, and a second color filter configured to transmit said second color of light, said transmitted first and second color of light combining to produce a color.
39. The method of claim 7, wherein said at least one interferometric modulator comprises an interferometric modulator configured to output light of a first color, and an interferometric modulator configured to output light of a second color, wherein the at least one color filter comprises a first color filter configured to transmit said first color of light, and a second color filter configured to transmit said second color of light, said transmitted first and second color of light combining to produce a color.
40. The display of claim 14, wherein said selectively reflecting means comprises an interferometric modulator configured to output light of a first color, and an interferometric modulator configured to output light of a second color, wherein said filtering means comprises a first color filter configured to transmit said first color of light, and a second color filter configured to transmit said second color of light, said transmitted first and second color of light combining to produce a color.
41. The display of claim 1, wherein the display comprises a reflective display.
42. The display of claim 1, wherein the display is configured to form an image by selectively reflecting ambient light by altering the reflective state one or more interferometric modulators.
43. The display of claim 1, wherein said at least one color interferometric modulator is included in an array of display elements comprising interferometric modulators comprising movable reflectors and partial reflectors, said array of display elements being configured to form an image by moving said movable reflectors with respect to said partial reflectors.
44. The display of claim 23, further comprising electronics configured to drive the movable reflective surface such that light reflected by said movable reflective surface and said first partial reflective surface can be modulated so as to form part of an image viewable on a display.
45. The display of claim 24, wherein said at least one color interferometric modulator is included in a plurality of interferometric modulators each configured to receive a respective control voltage across corresponding first and second electrodes to move a movable reflective surface therein, the plurality of interferometric modulators configured to display an image in response to selectively applying one or more control voltages across the first and second electrodes of one or more of the plurality of interferometric modulators.
46. The method of claim 7, wherein the display comprises a reflective display.
47. The method of claim 7, wherein the display is configured to form an image by selectively reflecting ambient light by altering the reflective state of one or more interferometric modulators.
48. The method of claim 7, wherein said at least one color interferometric modulator is included in an array of display elements comprising interferometric modulators comprising movable reflectors and partial reflectors, said array of display elements being configured to form at least part of an image produced by moving said movable reflectors with respect to said parital reflectors.
49. The method of claim 35, further comprising electronics configured to drive the movable reflective surface such that light reflected by said movable reflective surface and said first partially reflective surface can be modulated so as to form part of an image viewable on a display.
50. The method of claim 36, wherein said at least one color interferometric modulator is included in a plurality of interferometric modulators each configured to receive a respective control voltage across corresponding first and second electrodes to move a movable reflective surface therein, the plurality of interferometric modulators configured to display an image in response to selectively applying one or more control voltages across the first and second electrodes of one or more of the plurality of interferometric modulators.
51. The display of claim 14, wherein the display comprises a reflective display.
52. The display of claim 14, wherein the display is configured to form an image by selectively reflecting ambient light by altering the reflecting state of said means for selectively reflecting light.
53. The display of claim 29, further comprising electronics configured to drive the movable reflective surface such that light reflected by said movable reflective surface and said first partially reflective surface can be modulated so as to form part of an image viewable on a display.
54. The display of claim 30, wherein said means for selectively reflecting ambient light is included in a plurality of interferometric modulators each configured to receive a respective control voltage across corresponding first and second electrodes to move a movable reflective surface therein, the plurality of interferometric modulators configured to display an image in response to selectively applying one or more control voltages across the respective first and second electrodes of one or more of the plurality of interferometric modulators.

1. A method comprising:
receiving, at a data analyzer, captured email over a network, the captured email being communicated between a sender and an intended recipient through the network;
analyzing the captured email including:
scanning the captured email for search terms defining personal or confidential information, and
identifying trends based on the personal or confidential information contained in the captured email including, after the scanning, evaluating occurrences in the captured email of the personal or confidential information and determining the nature and amount of personal or confidential information passing through the captured email; and

identifying, based on the identified trends, one or more security-related protocols for securing future communications between the sender and the intended recipient wherein the one or more security-related protocols are different than protocols used to send communications between the sender and the recipient that were included in the captured email.
2. The method of claim 1, where receiving the captured email includes copying the captured email for analysis.
3. The method of claim 2, wherein receiving the captured email includes receiving a sampling of the captured email.
4. The method of claim 2, wherein receiving the captured email includes receiving a selected ratio of all the captured email.
5. The method of claim 2, further comprising encrypting the captured email and decrypting the encrypted email before analysis.
6. The method of claim 1, further comprising receiving the captured email from and transferring the captured email to a server.
7. The method of claim 1, wherein scanning the captured email includes scanning one or more attachments contained in the captured email.
8. The method of claim 1, wherein analyzing the captured email includes:
identifying one or more categories of the personal or confidential information; and
storing the identified categories of personal or confidential information without storing the personal or confidential information.
9. The method of claim 1, further comprising identifying the personal or confidential information with the search terms.
10. The method of claim 1, wherein:
the search terms have an associated mask, the mask being a filter used to include or exclude values from the search terms based on a predefined criteria; and
analyzing the captured email includes searching the email for both the search terms and the associated mask of the search terms.
11. The method of claim 10, wherein the mask defines a specified format of digits.
12. The method of claim 10, wherein the mask defines a nine digit format for a social security number.
13. The method of claim 1, where identifying the one or more security-related protocols includes identifying information for developing one or more encryption protocols for securing a network that processes the captured email.
14. The method of claim 1, where identifying the one or more security-related protocols includes identifying information for developing one or more encryption protocols for securing the future communications.
15. The method of claim 1, wherein scanning the captured email includes scanning the captured email for search terms defining personal or confidential information that are stored in a lexicon, the lexicon having one or more categories each associated with a different class of personal or confidential information.
16. The method of claim 1 wherein the one or more trends relate to identification of a specific type of information that has been located when scanning, or individuals, context or types of communications associated with one or more of the occurrences.
17. A method of analyzing email, comprising:
identifying a copy of an email transferred over a network;
encrypting the copy of the email;
transferring the encrypted copied email to a data analyzer;
decrypting the encrypted copied email;
analyzing the copied email including:
scanning the copied email for search terms defining personal or confidential information, and
identifying trends based on the personal or confidential information contained in the copied email including, after the scanning, evaluating occurrences in the copied email of the personal or confidential information and determining the nature and amount of personal or confidential information passing through the copied email; and
identifying, based on the identified trends, one or more security-related protocols for securing future communications between the sender and the intended recipient wherein the one or more security-related protocols are different than protocols used to send communications between the sender and the recipient that were included in the captured email.
18. The method of claim 17, wherein scanning the copied email includes scanning the captured email for search terms defining personal or confidential information that are stored in a lexicon, the lexicon having one or more categories each associated with a different class of personal or confidential information.
19. The method of claim 17 wherein the one or more trends relate to identification of a specific type of information that has been located when scanning, or individuals, context or types of communications associated with one or more of the occurrences.
20. A method comprising:
receiving a plurality of messages transmitted over a network, each message being communicated between a sender and an intended recipient;
analyzing the messages to identify personal or confidential information contained in the messages including evaluating occurrences of the personal or confidential information and determining the nature and amount of personal or confidential information passing through one or more of the messages;
identifying a security protocol based on the analysis; and
securing future messages as between the sender and the intended recipient using the identified security protocol wherein the security-related protocol is different than a protocol used to send the message between the sender and the recipient.
21. The method of claim 20, wherein identifying a security protocol includes identifying an encryption protocol for encrypting the message.
22. The method of claim 21, wherein securing the message includes encrypting the message based on the encryption protocol prior to delivering the message.
23. The method of claim 20 wherein the nature relates to identification of a specific type of information that has been located based on the analysis, or individuals, context or types of communications associated with one or more of the occurrences in the messages.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. A semiconductor laser device, comprising: a first conductivity type cladding layer; an active layer; and a second conductivity type cladding layer, which are on a substrate,
wherein the semiconductor laser device further comprises a stripe structure for injecting carriers therein,
a width of the stripe is wider at a front end face of a resonator from which laser light is emitted than at a rear end face that is located on an opposite side of the front end face, and
a reflectance of the front end face is lower than a reflectance of the rear end face.
2. The semiconductor laser device according to claim 1, wherein at least the active layer comprises a Group III-V nitride based semiconductor material.
3. The semiconductor laser device according to claim 2, wherein at least the active layer comprises an AlGaAs based semiconductor material.
4. The semiconductor laser device according to claim 2, wherein at least the active layer comprises an AlGaInP based semiconductor material.
5. The semiconductor laser device according to claim 1, wherein a ratio between the stripe width at the front end face and the stripe width at the rear end face satisfies a relationship of 1<(the stripe width at the front end face)(the stripe width at the rear end face)<2.
6. The semiconductor laser device according to claim 5, wherein the ratio between the stripe width at the front end face and the stripe width at the rear end face satisfies a relationship of 1.4<(the stripe width at the front end face)(the stripe width at the rear end face)<1.8.
7. The semiconductor laser device according to claim 1, wherein the width of the stripe decreases continuously from the front end face toward the rear end face.
8. The semiconductor laser device according to claim 1,
wherein the stripe structure has a region in which the width of the stripe varies continuously and a region in which the width of the stripe is constant, and
the stripe width at a boundary between the respective regions varies seamlessly.
9. The semiconductor laser device according to claim 1, wherein the stripe structure has regions adjacent to the front end face and the rear end face, the regions respectively extending inwardly from the front end face and the rear end face and each having a constant stripe width.
10. The semiconductor laser device according to claim 9, wherein the regions having the constant stripe widths extend inwardly from the front end face and the rear end face, respectively, by a length of one-twentieth or shorter of a length of the resonator.
11. The semiconductor laser device according to claim 1, wherein the reflectance of the front end face is lower than the reflectance of the rear end face by 15% or more.