1. A packaged searching system, comprising:
a memory configured to store program instructions; and
a processor configured to execute the program instructions, the program instructions when executed configured to:
display search target objects selected on a map to distinguish the search target objects from unselected objects;
create and display search boxes on the map, wherein each of the search boxes correspond to the respective distinguished search target objects;
map the distinguished search target objects to the created search boxes;
search information regarding the search target objects mapped to the respective search boxes using input search keywords; and
display the searched information for each search target object.
2. The packaged searching system according to claim 1, wherein the program instructions when executed am further configured to display the search boxes on the map to locate each of the search boxes on the respective search target objects.
3. The packaged searching system according to claim 1, wherein the program instructions when executed are further configured to create the search boxes in a layer different from a layer in which map information is displayed.
4. The packaged searching system according to claim 1, wherein the program instructions when executed are further configured to search for relation information between the search target objects with the searched information.
5. The packaged scanting system according to claim 4, wherein the program instructions when executed are further configured to display the relation information on a search result display box for each search target object.
6. The packaged searching system according to claim 1, wherein the program instructions when executed are further configured to map the search boxes to search target objects by assigning a value of each search box object to member variables of the respective objects to base each of the search box objects on the respective search target objects.
7. The packaged searching system according to claim 1, wherein the program instructions when executed are further configured to map the search boxes to the search target objects by invoking a method between the search target objects or the search box objects to transmit identifier information.
8. The packaged searching system according to claim 1, wherein the program instructions when executed are further configured to map the search boxes to the search target objects by invoking an interface disposed between layers to transmit identifier information, when the search target objects and the search box objects are configured as layers.
9. The packaged searching system according to claim 1, wherein the search target objects are space of interest (SOI) objects displayed on a SOI map.
10. A packaged searching system, comprising:
a memory configured to store program instructions; and
a processor configured to execute the program instructions, the program instructions when executed configured to:
create search boxes to define at least one search target object;
display a plurality of search target objects moved into the search boxes to distinguish the search target objects;
map the search target objects in the search box to corresponding search boxes;
a search for information regarding the at least one search target object in the corresponding search box using search keywords input in the search boxes; and
display on a screen the searched information for the at least one search target object.
11. The packaged searching system according to claim 10, wherein the program instructions when executed are further configured to create the search boxes as a bucket that includes a keyword input box in which a search keyword is input and an area in which the search target objects are dropped.
12. The packaged searching system according to claim 11, wherein the program instructions when executed are further configured to creates search boxes wherein different space of interest (SOI) objects correspond to different search keywords.
13. The packaged searching system according to claim 11, wherein the search box includes a list from which lower-level space of interest objects may be selected when the search target objects include lower-level space of interest objects.
14. The packaged searching system according to claim 11, wherein the program instructions when executed are further configured to display the searched information as a bucket for each search target object or display the search target objects and searching information regarding the search target objects as a list.
15. The packaged searching system according 14, wherein the program instructions when executed are further configured to display a number of search results for each search target object on the corresponding search target object on the map.
16. The packaged searching system according to claim 14, wherein the program instructions when executed are further configured to display the information regarding the search target object in the selected bucket on the search area when one of the buckets displayed on a search area is selected.
17. The packaged searching system according to claim 16, wherein the program instructions when executed are further configured to display the search target object with the information to distinguish turn other search target objects on the map.
18. The packaged searching system according to claim 11, wherein the program instructions when executed are further configured to display buckets that correspond to the search target objects as being stacked and display a number that indicates how many buckets are stacked when a plurality of search target objects are searched for with a same search keyword.
19. The packaged searching system according to claim 10, wherein the program instructions when executed are further configured to display recommendation information on a map based on user preference when recommendation information is detected for the search target objects.
20. The packaged searching system according to claim 10, wherein the program instructions when executed are further configured to determine dropped search target objects as selected search target objects when the search target objects are dragged and dropped in one of the search boxes.
21. The packaged searching system according to claim 10, wherein the program instructions when executed are further configured to perform packaged searching for information regarding the plurality of search target objects with a same search keyword input in the search box when a plurality of search target objects are included in a same search box.
22. The packaged searching system according to claim 10, wherein the program instructions when executed are further configured to perform packaged searching for information regarding the plurality of search target objects with search keywords each input in the respective search boxes when a plurality of search target objects are included in a plurality of search boxes.
23. The packaged searching system according to claim 22, wherein the program instructions when executed are further configured to search for relation information between the search target objects in the search boxes.
24. The packaged searching system according to claim 10, wherein the program instructions when executed are further configured to search for information regarding lower-level objects when the search target objects include lower-level objects.
25. The packaged searching system according to claim 10, wherein the search target objects are space of interest (SOI) objects displayed on a SOI map.
26. A packaged searching method, comprising
selecting, by a processor, searching target objects on a map;
creating, by the processor, a search box for each selected search target object to display the search box on the map;
performing, by the processor, packaged searching for information regarding the search target objects using a search keyword input in the search box; and
displaying, by the processor, searched information for each selected search target on the map.
27. The packaged searching method according to claim 26, wherein performing the packaged searching includes searching, by the processor, relation information between the search target objects.
28. The packaged searching method according to claim 26, wherein performing the packaged searching includes searching, by the processor, information regarding lower-level objects when the search target objects include lower-level objects.
29. The packaged searching method according to claim 26, wherein the search target objects are space of interest (SOI) objects displayed on a SOI map.
30. A packaged searching method, comprising;
creating, by a processor, search boxes to define search target objects;
defining, by the processor, search target objects by selecting objects on a map to move the selected objects to the search boxes;
searching, by the processor, for information regarding the defined search target objects with search keywords input in the search boxes; and
displaying, by the processor, the searched information.
31. The packaged searching system according to claim 30, wherein searching for the information includes performing, by the processor, packaged searching for information regarding the defined search target objects with a same search keyword input in the search box when a plurality of search target objects are included in a same search box.
32. The packaged searching system according to claim 30, wherein searching for the information includes performing, by the processor, packaged searching for the search target objects moved into the search boxes with search keywords each input in the respective search boxes when a plurality of search boxes are created and at least one search target object is included in each of the search boxes.
33. The packaged searching system according to claim 30, wherein the search target objects are space of interest (SOI) objects displayed on an SOI map.
34. A non-transitory computer readable medium containing program instructions executed by a processor, the computer readable medium comprising:
program instructions that select searching target objects on a map;
program instructions that create a search box for each selected search target object to display the search box on the map;
program instructions that perform packaged searching for information rewarding the search target objects using a search keyword input in the search box; and
program instructions that display searched information for each selected search target on the map.
35. The non-transitory computer readable medium of claim 34, wherein performing the packaged searching includes program instructions that search relation information between the search target objects.
36. The non-transitory computer readable medium of claim 34, wherein performing the packaged searching includes program instructions that search information regarding lower-level objects when the search target objects include lower-level objects.
37. A non-transitory computer readable medium containing program instructions executed by a processor, the computer readable medium comprising:
program instructions that create search boxes to define search target objects;
program instructions that define search target objects by selecting objects on a map to move the selected objects to the search boxes;
program instructions that search for information regarding the defined search target objects with search keywords input in the search boxes; and
program instructions that display the searched information.
38. The non-transitory computer readable medium of claim 37, wherein the search target objects are space of interest (SOI) objects displayed on an SOI map.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A bottom antireflective coating for photolithography using wavelengths of 157 nm or less, comprising a crosslinkable polymer which includes cinnamic acid derivatives.
2. The bottom antireflective coating of claim 1, wherein cinnamic acid derivatives are contained either in the polymer backbone or in side chains of the polymer.
3. The bottom antireflective coating of claim 1, wherein the bottom antireflective coating contains a polymer of one of the following formulas I-III:
wherein:
R1 comprises H, halogen, and a straight or branched alkyl chain including 1-10 C atoms;
R2 comprises one or more substituents at one or more of the 1, 2, 3, 4 and 5 positions on the phenyl ring, the one or more substituents being independent of each other and each substituent comprising at least one of H, a straight or branched alkyl chain including 1-4 C atoms, a halogen, NO2, NH2 or OH;
R3 is one of the following:
or another group comprising polymer units that are polymerizable with each other;
m is an integer of 1-10,000;
n is 0 or an integer of 1-10,000;
o and p are independent of each other and each is an integer of 1-10;
R4 comprises a carboxyl protective group, a straight or branched alkyl group including 1-4 C atoms, or a group cleavable by a nucleophilic reagent or acid; and
X comprises a reactive anchor group.
4. The bottom antireflective coating of claim 1, wherein the polymer is a copolymer between the cinnamic ester monomers and a monomer including an anchor group.
5. The bottom antireflective coating of claim 3, wherein the reactive anchor group (X) is selected from the group consisting of acid anhydride, epoxide and ketene.
6. The bottom antireflective coating of claim 5, wherein the reactive anchor group (X) is an acid anhydride group.
7. The bottom antireflective coating of claim 6, wherein the acid anhydride group is derived from maleic anhydride, itaconic anhydride, methacrylic anhydride, cyclohexenedicarboxylic anhydride or norbornenedicarboxylic anhydride.
8. The bottom antireflective coating of claim 7, wherein the acid anhydride group is derived from maleic anhydride.
9. The bottom antireflective coating of claim 8, wherein the polymer has a structure according to the following formula V:
wherein R1, R2, R4, m and n are as described above for formulas (I-III).
10. The bottom antireflective coating of claim 9, wherein the polymer has a structure of the following formula VI:
wherein R1, R2, m and n are as defined for formulas (I-III).
11. The bottom antireflective coating of claim 5, wherein a molar proportion of a second repeating unit of the polymer is in a range from 10 to 50 mol %.
12. The bottom antireflective coating of claim 1, wherein the polymer is crosslinked.
13. The bottom antireflective coating of claim 12, wherein the crosslinking is achieved photochemically.
14. The bottom antireflective coating of claim 12, wherein the crosslinking is achieved utilizing a wet chemical method.
15. The bottom antireflective coating of claim 14, wherein the crosslinking is achieved using a bisalkylamine, a bisisocyanate or a bisalcohol.
16. A formulation for the production of a bottom antireflective coating for photolithography using wavelengths of not more than 157 nm, comprising the polymer of claim 1, a solvent and a stabilizer.
17. The formulation of claim 16, comprising a protected, bifunctional crosslinking agent.
18. The formulation of claim 15, wherein the protected, bifunctional crosslinking agent is selected from the group consisting of thermally labile bisamines and bifunctional thermo acids.
19. A process for the production of a bottom antireflective coating, comprising the following steps:
applying the formulation of claim 16 to a substrate by spin coating;
evaporating the solvent in a post apply bake (PAB) step; and
crosslinking the polymer contained in the formulation.
20. A process for conducting photolithography using wavelengths of 157 nm or less, comprising the step of using the polymer of claim I for the production of a bottom antireflective coating for the photolithography process.