1. A method comprising:
providing a substrate having a first active region defined therein by an oxide isolation region; and
forming a first high dielectric constant (high-k) dielectric and metal gate stack over the first active region in the substrate, the first high-k dielectric and metal gate stack overlapping the oxide isolation region to a minimum amount allowed by an overlay tool, wherein the first high-k dielectric and metal gate stack includes a gate dielectric layer directly over the first active region, a tuning layer directly over the gate dielectric layer, a metal layer directly over the tuning layer, and an amorphous silicon layer directly over the metal layer.
2. The method of claim 1, wherein the minimum amount is less than approximately 200 nanometers.
3. The method of claim 2, wherein the minimum amount is approximately 60 nanometers.
4. The method of claim 1, wherein the tuning layer is selected from the group consisting of: aluminum oxide (Al2O3) and tantalum nitride (TaN) wherein the first active region is doped n-type, and lanthanum oxide (La2O5), lanthanum (La), magnesium oxide (MgO), bismuth strontium (BiSr), strontium oxide (SrO), yttrium (Y), yttrium oxide (Y2O3), barium (Ba), barium oxide (BaO), scandium (Sc), scandium oxide (ScO), and any other group HA, IIIB element and lanthanides thereof wherein the first active region is doped p-type.
5. The method of claim 1, wherein the gate dielectric layer has a thickness of approximately 10-25 \u212bngstroms, the tuning layer has a thickness of approximately 1-5 \u212bngstroms, the metal layer has a thickness of approximately 3-7 \u212bngstroms, and the amorphous silicon layer has a thickness of approximately 5-20 \u212bngstroms.
6. The method of claim 1, further comprising depositing a polysilicon over the first high-k dielectric and metal gate stack and patterning the first high-k dielectric and metal gate stack to form a gate electrode.
7. The method of claim 1, further comprising depositing layers for a second high-k dielectric and metal gate stack over a second active region adjacent to the first high-k dielectric and metal gate stack and patterning to form the second high-k dielectric and metal gate stack over the second active region.
8. The method of claim 7, further comprising using a block level mask to trim the first and second high-k dielectric and metal gate stacks such that the first and second high-k dielectric and metal gate stacks do not overlap any adjacent isolation regions.
9. The method of claim 1, further comprising using a block level mask to trim the first high-k dielectric and metal gate stack such that the first high-k dielectric and metal gate stack does not overlap an adjacent isolation region.
10. A method comprising:
providing a substrate having a first active region defined therein by a first oxide isolation region and a second active region defined therein by a second oxide isolation region; and
forming a first high dielectric constant (high-k) dielectric and metal gate stack over the first active region in the substrate, the first high-k dielectric and metal gate stack overlapping the first oxide isolation region by less than 200 nanometers, wherein the first high-k dielectric and metal gate stack includes a gate dielectric layer directly over the first active region, a tuning layer directly over the gate dielectric layer, a metal layer directly over the tuning layer, and an amorphous silicon layer directly over the metal layer;
forming a second high dielectric constant (high-k) dielectric and metal gate stack over the second active region adjacent to the first high-k dielectric and metal gate stack, the second high-k dielectric and metal gate stack overlapping the second oxide isolation region by less than 200 nanometers, wherein the second high-k dielectric and metal gate stack includes a gate dielectric layer directly over the second active region, a tuning layer directly over the gate dielectric layer of the second high-k dielectric and metal gate stack, a metal layer directly over the tuning layer of the second high-k dielectric and metal gate stack, and an amorphous silicon layer directly over the metal layer of the second high-k dielectric and metal gate stack;
depositing a polysilicon over the first and second high-k dielectric and metal gate stacks; and
patterning the first and second high-k dielectric and metal gate stacks to form a pair of gate electrodes.
11. The method of claim 10, wherein the patterning includes using a block level mask to trim the first and second high-k dielectric and metal gate stacks such that the first and second high-k dielectric and metal gate stacks do not overlap any adjacent isolation region.
12. The method of claim 10, wherein the overlap of the first and second high-k dielectric and metal gate stacks with a respective isolation region is approximately 60 nanometers.
13. The method of claim 10, wherein the tuning layer is selected from the group consisting of: aluminum oxide (Al2O3) and tantalum nitride (TaN) wherein the first active region is doped n-type, and lanthanum oxide (La2O5), lanthanum (La), magnesium oxide (MgO), bismuth strontium (BiSr), strontium oxide (SrO), yttrium (Y), yttrium oxide (Y2O3), barium (Ba), barium oxide (BaO), scandium (Sc), scandium oxide (ScO), and any other group IIA, IIIB element and lanthanides thereof wherein the first active region is doped p-type.
14. The method of claim 10, wherein the gate dielectric layer has a thickness of approximately 10-25 \u212bngstroms, the tuning layer has a thickness of approximately 1-5 \u212bngstroms, the metal layer has a thickness of approximately 3-7 \u212bngstroms, and the amorphous silicon layer has a thickness of approximately 5-20 \xe6ngstroms.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A device performing second processing included in a job which first processing and the second processing are performed sequentially, the first processing being performed by another device separated from the device, the device comprising:
a processing unit configured to perform the second processing;
a reading unit configured to read information related to progress about the job from a portable recording medium, the information being recorded on the portable recording medium by the other device;
a determining unit configured to determine whether the first processing is done by the other device based on the information related to progress about the job; and
a control unit configured to control the processing unit so that the second processing is performed by the processing unit, if the determining unit determines that the first processing is done by the other device based on the information related to progress about the job.
2. The device according to claim 1, wherein the control unit controls the processing unit not to perform the second processing if it is determined that the first processing is not yet done by the other device.
3. The device according to claim 1, further comprising a notification unit configured to notify an operator of guidance information based on the information related to progress about the job recorded on the portable recording medium.
4. The device according to claim 1, further comprising a distinguishing unit configured to distinguish an operator based on the information related to progress about the job recorded on the portable recording medium.
5. The device according to claim 1, further comprising a restriction unit configured to restrict a user operation in the device based on the information related to progress about the job recorded on the portable recording medium.
6. The device according to claim 1, wherein print data can be recorded on the portable recording medium.
7. The device according to claim 1, wherein the device is at least one of a computer, a scanner, a printer, an apparatus utilized in postpress, a digital camera, and a notebook computer.
8. The device according to claim 1, wherein the control unit is further configured to cause a notification unit to output warning information so that the first processing is not performed by the other device if it is determined that the first processing is not yet done by the other device.
9. A system controlling a job for making first processing and second processing to be performed sequentially, the system comprising a first device and a second device,
wherein the first device comprises:
a first processing unit configured to perform the first processing; and
a recording unit configured to record information on a portable recording medium, the information being related to progress about the job, and
wherein the second device comprises:
a second processing unit configured to perform the second processing;
a reading unit configured to read the information related to progress about the job from the portable recording medium; and
a determining unit configured to determine whether the first processing is done by the first processing unit based on the information related to progress about the job, and
wherein the system further comprises a control unit configured to control the second processing unit so that the second processing is performed by the second processing unit if the determining unit determines that the first processing has been done by the first processing unit based on the information related to progress about the job.
10. The system according to claim 9, wherein the control unit controls the second processing unit so that the second processing is not performed by the second processing unit if it is determined that the first processing is not yet done by the first processing unit.
11. A method for controlling a job for making first processing and second processing to be performed sequentially, the first processing being performed by a first device and the second processing being performed by a second device separated from the first device, the method comprising:
reading information related to progress about the job from a portable recording medium;
determining whether the first processing has been done by the first device based on the information related to progress about the job, the information being recorded on the portable recording medium by the first device and read from the portable recording medium; and
controlling the second device so that the second processing is performed by the second device if it is determined that the first processing has been done by the first device, based on the information related to progress about the job.
12. The method according to claim 11, further comprising controlling the second device so that the second processing is not performed by the second device, if it is determined that the first processing is not yet done by the first device.
13. A computer-readable storage medium storing a program for causing a computer to execute the method according to claim 11.