All The Claims

1. A method of controlling a wastegate actuator coupled to a wastegate valve of a turbocharged internal combustion engine having an electronic controller including executable instructions stored in non-transitory memory, comprising:
determining a wastegate actuation force based on a determined bias force supplied by a bias and a determined net exhaust flow force across the wastegate valve via the electronic controller during engine operation; and
adjusting the wastegate actuator coupled to the wastegate valve in an exhaust passage of the engine to control a boost level in an intake of the engine in response to the wastegate actuation force via the electronic controller.
2. The method of claim 1 further including
adjusting a current supplied to the actuator, the bias including a spring, the spring pre-loaded with the wastegate fully closed, and where the electronic controller determines the net exhaust flow force across the wastegate valve based on a pressure differential across the valve.
3. The method of claim 1 further including
adjusting a voltage supplied to the actuator, the bias including a spring, the spring pre-loaded with the wastegate fully closed, and where the electronic controller determines the net exhaust flow force across the wastegate valve based on a lookup table with wastegate position as an input.
4. The method of claim 1 further including adjusting a duty cycle supplied to the actuator, the bias including a spring, the spring pre-loaded with the wastegate fully closed.
5. The method of claim 2 further including supplying a first current to move the wastegate valve toward a fully open position, and supplying a second current to move the wastegate valve toward a fully closed position.
6. The method of claim 5 wherein the first current is greater than the second current, and
wherein the supply of the first and second currents generates respective forces.
7. A wastegate system for a turbocharged internal combustion engine, comprising:
a wastegate valve disposed along an exhaust manifold of the engine;
an actuator operatively coupled to the wastegate valve;
a bias coupled to the wastegate valve, the bias supplying a closing force to the wastegate valve and the bias being pre-loaded in a fully closed position; and
an electronic controller including non-transitory instructions stored in memory executable to:
determine a bias force supplied by the bias;
determine a net exhaust flow force across the wastegate valve;
determine an actuator force by adding the bias force to the net exhaust flow force; and
adjust the actuator based on the actuator force.
8. The wastegate of claim 7 wherein the bias is a spring, and where the instructions are further executable to determine the bias force based on a spring pre-load force.
9. The wastegate of claim 7 wherein the bias maintains the wastegate valve in the fully closed position up to a threshold pressure via the closing force.
10. A method of controlling via an electronic controller including non-transitory instructions stored in memory an engine turbocharger wastegate valve via an electric actuator, comprising:
at a first fully closed position of the wastegate valve, supplying a first current via the electronic controller;
at a second partially open position of the wastegate valve, supplying a second current, greater than the first current via the electronic controller; and
at a third open position of the wastegate valve greater than the second partially open position, supplying a third current, greater than the second current; and
wherein the first, second and third currents are determined via the electronic controller in response to a net exhaust flow force determined by the electronic controller across the wastegate valve.
11. The method of claim 10, further comprising at the first fully closed position, adjusting the first current responsive to engine operating conditions determined by the electronic controller.
12. The method of claim 11 wherein the first current is increased at the first fully closed position responsive to increasing exhaust manifold pressure, with the wastegate valve remaining at the first fully closed position.
13. The method of claim 12 wherein the first current is decreased at the first fully closed position responsive to decreasing exhaust manifold pressure, with the wastegate valve remaining at the first fully closed position.
14. The method of claim 11 wherein the engine operating conditions include one or more of an exhaust pressure, engine speed, engine load, spark retard, and air-fuel ratio.
15. The method of claim 10, further comprising via the electronic controller supplying a current responsive to an instantaneous position of the electric actuator determined by the electronic controller.
16. The method of claim 10, further comprising in a degraded operation mode of the electric actuator, limiting an engine load, the degraded operation mode determined by the electronic controller.
17. The method of claim 10, further comprising:
determining a bias force; and
determining a wastegate actuation force by adding the determined net exhaust flow force to the bias force.
18. The method of claim 10 further comprising mapping a desired wastegate valve position determined by the electronic controller to a wastegate duty cycle for a given wastegate actuator force.
19. The method of claim 18 wherein the wastegate valve is adjusted by adjusting the wastegate duty cycle delivered to the electric actuator from the electronic controller.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A personal security device in combination with a user’s communication device, the communication device capable of transmitting a signal, said security device comprising:
a housing;
an interface module in said housing for communication with the user’s communication device;
a circuit in said housing having a plurality of security components therein;
means for providing power to said circuit;
microprocessor means for regulating activation of said security components in said circuit;
a trigger, an operation of said trigger assembly causing operation of said microprocessor means for activating the security components, at least one of said components including means for providing a signal for transmission by the user’s communication device to a security monitor via the interface module indicative of a security problem.
2. The device as claimed in claim 1 wherein said trigger comprises an accelerometer, said accelerometer alternatively causing operation of said microprocessor means for activating said security components upon sensing a predetermined stimulus.
3. The device as claimed in claim 2 wherein at least one of said security components further comprises:
a camera module in said circuit, said microprocessor means activating said camera module to visually record the area about said security device.
4. The device as claimed in claim 2 wherein at least one of said security components comprises:
a first voice module in said circuit for storing a prerecorded message, said message producing at least one said signal for transmission to the security monitor indicative of the prerecorded message.
5. The device as claimed in claim 4 wherein at least one of said security components further comprises:
a second voice module in said circuit for recording the ambient audio surrounding said device, said ambient recording producing at least one of said signals for transmission to the security monitor indicative of the ambient noise.
6. The device as claimed in claim 5 wherein said microprocessor means regulates an alternative transmission of said messages in said first and second voice modules to the security monitor.
7. The device as claimed in claim 6 further comprising:
a microphone for establishing direct communication with the security monitor via said interface module, said microphone either operable by a user or placed in an operable state after a preselected time by said microprocessor means whereby to transmit live audio of the ambient surroundings to the security monitor.
8. The device as claimed in claim 2 wherein at least one of said security components comprises an audio alarm in said circuit, said alarm activated as regulated by said microprocessor means.
9. The device as claimed in claim 2 wherein at least one of said security components comprises a visual alarm in said circuit, said visual alarm activated as regulated by said microprocessor means.
10. The device as claimed in claim 9 wherein said microprocessor means alternately energizes said visual and audio alarms.
11. The device as claimed in claim 1 further comprising means for synchronizing said activation of said security components to preclude undesirable interference therebetween.
12. The device as claimed in claim 11 further comprising:
a mace canister for discharge of the mace therefrom;
value means for controlling a discharge of mace from said canister, a depression of said trigger assembly discharging mace from said canister.
13. The device as claimed in claim 1 further comprising means on said housing for manually inflicting undesirable pressure by the user on another party.
14. The device as claimed in claim 1 wherein said interface module comprises a Bluetooth\xae module.
15. A personal security device in combination with a user’s communication device, the communication device capable of transmitting a wireless signal, said security device comprising:
a housing;
an interface module for establishing communication between the security device and the user’s communication device;
a circuit in said housing having a plurality of security components therein, said components including a visual alarm and an audio alarm and a prerecorded message identifying the user;
means for providing power to said circuit;
microprocessor means for regulating an activation of said components;
a trigger, an operation of said trigger causing operation of said microprocessor means for activating said alarms and transmitting said prerecorded message to the user’s communication device via said interface module for transmission to a security monitor.
16. The device as claimed in claim 15 wherein said trigger comprises an accelerometer, said accelerometer alternatively causing said operation of said microprocessor means for activating said security components and transmission of said message.
17. The device as claimed in claim 15 further comprising:
a voice module in said circuit for automatically recording the ambient audio surrounding said device, said ambient recording transmitted to the security monitor via said established module and communication device upon said operation of said microprocessor means.
18. The device as claimed in claim 17 wherein said microprocessor means alternately transmits said message and audio to the security monitor.
19. A personal security device for interface with a user s communication device, the communication device capable of transmitting a signal, said security device comprising:
a housing;
an interface module in said housing for establishing said interface with the user’s communication device;
a circuit in said housing having a plurality of security components therein;
means for providing power to said circuit;
microprocessor means for regulating an activation of said components, said components including a visual alarm, an audio alarm, a prerecorded first audio message identifying the user and means for recording a second message indicative of the audio surrounding the security device;
a trigger, an operation of said trigger activating said alarms and transmitting said messages to the security monitor via the user’s communication device linked to said interface module;
means for synchronizing said alarms and transmission of messages in a preselected manner to preclude interference therebetween.
20. The device as claimed in claim 19 wherein said trigger comprises an accelerometer, said accelerometer causing operation of said microprocessor means.

What is claimed is:

1. A hydraulic power steering apparatus for a vehicle comprising:
an input member interlocking with a steering wheel;
an output member connected to said input member so as to freely move relatively;
a steering mechanism steering a steered wheel in an interlocking relationship with said output member;
a main control valve having a first valve portion and a second valve portion in which a valve opening degree is controlled on the basis of a relative movement between said input member and said output member;
a power cylinder mechanism generating a steering assist force applied to said steering mechanism in correspondence to a fluid pressure in a working chamber in which a working fluid is supplied and discharged;
a first flow passage communicating a pump apparatus for discharging a fixed flow amount of working fluid with said main control valve;
a second flow passage branched from said first flow passage and communicated with a low pressure portion via an assist control valve and said main control valve;
a control unit controlling said assist control valve;
said first valve portion controlling a supply amount of the working fluid in said first flow passage to said working chamber; and
said second valve portion controlling a discharge amount of the working fluid in said second flow passage to said low pressure portion in accordance with cooperation with said assist control valve,
wherein a vehicle speed sensor for detecting a vehicle speed and a pressure sensor for detecting a fluid pressure of the working fluid in said first flow passage are provided, and said control unit controls a valve opening degree of said assist control valve to a set valve opening degree set on the basis of the vehicle speed detected by said vehicle speed sensor and the fluid pressure detected by said pressure sensor.
2. A hydraulic power steering apparatus for a vehicle as claimed in claim 1, wherein said control unit is arranged and constructed to set the valve opening degree of said assist control valve to a fully closed side at a time of a vehicle speed equal to or less than a predetermined low vehicle speed including a vehicle stop time, and is arranged and constructed to set the valve opening degree so as to be increased in accordance with an increase of the vehicle speed from the predetermined low vehicle speed, in connection with the vehicle speed detected by the vehicle speed sensor, and is arranged and constructed to set the valve opening degree so that the fluid pressure by which the steering assist force having an optimum magnitude is generated is generated in the power cylinder mechanism, with respect to the steering torque generated at a time when the driver operates the steering wheel at a certain vehicle speed, in connection with the fluid pressure detected by the pressure sensor.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

What is claimed is:

1. A projection optical system forming an image of an object in a first plane onto a second plane comprising:
an optical element group including at least one refractive member and a plurality of reflective members; and
a plurality of lens-barrel units holding said optical element group divided into a plurality of groupings;
wherein said plurality of reflective members is all held by one lens-barrel -unit of said plurality of lens-barrels units.
2. The projection optical system according to claim 1, further comprising;
a partial optical element group forming an intermediate image on a third plane between said first plane and said second plane;
wherein said partial optical element group is integrally held by one lens-barrel unit of said plurality of lens-barrel units.
3. The projection optical system according to claim 1, wherein said optical element group is disposed along a single optical axis.
4. The projection optical system according to claim 1, wherein
said optical element group comprising:
a first partial optical element group disposed along a first optical axis;
a second partial optical element group disposed belong a second optical axis which extends in a direction that intersects said first optical axis, and is optically connected to said first partial optical element group; and
a third partial optical element group disposed along a third optical axis which extends in the same direction as said first optical axis, and is optically connected to said second partial optical element group.
5. The projection optical system according to claim 1, wherein
said second partial optical element group comprises said plurality of reflective members; and
said one lens-barrel unit of said plurality of lens-barrel units holds said second partial optical element group.
6. The projection optical system according to claim 1, wherein said plurality of lens-barrel units are independently supported each other.
7. The projection optical system according to claim 1, wherein at least one lens-barrel unit of said plurality of lens-barrel units holds with an adjustable state of a predetermined optical element that is held by said lens-barrel unit.
8. The projection optical system according to claim 1, wherein
at least one of said plurality of lens-barrel units further comprising a plurality of holding blocks holding one or a plurality of optical elements;
wherein said plurality of holding blocks have an adjustment mechanism to adjust the state of optical elements respectively held therein.
9. The projection optical system according to claim 1, wherein at least one of said plurality of lens-barrel units is detachable.
10. The projection optical system according to claim 1, wherein
said projection optical system is used with illumination light with wavelengths of 200 nm or shorter; and
a purge gas through which said illumination light passes is supplied to inside said projection optical system.
11. The projection optical system according to claim 10, wherein each of said optical element groups is held by either a frame mechanism or a frame member with an opening through which purge gas may pass.
12. A projection optical system comprising:
an optical element group including a first and a second optical element sub-group, and forming an image of a predetermined magnification of an object in a first plane onto a second plane;
a first lens-barrel unit holding said first optical element sub-group as a single body along a first optical axis; and
a second lens-barrel unit holding said second optical element sub-group as a single body along a second optical axis that is coaxis with said first optical axis;
wherein said first lens-barrel unit is held in a position at a plane that is orthogonal to said first optical axis and that passes through a point divides a line, along said first optical axis, between an object point and an image point relative to said first sub optical element group by 1:1 (where 1 is a real number other than zero), or in a position near said plane; and
said second lens-barrel unit is held in a position at a plane that is orthogonal to said second optical axis and that passes through a point divides a line, along said second optical axis, between an object point and an image point relative to said second sub optical element group by 1:2 (where 2 is a real number other than zero), or in a position near said plane.
13. The projection optical system according to claim 12, wherein said optical element group is disposed along one optical axis.
14. The projection optical system according to claim 12, wherein
said projection optical system is used with illumination light with wavelengths of 200 nm or shorter; and
a purge gas through which said illumination light passes is supplied to inside said projection optical system.
15. The projection optical system according to claim 14, wherein each of said optical element groups is held by either a frame mechanism or a frame member with an opening through which purge gas may pass.
16. A projection optical system which forms an image of an object in a first plane onto a second plane, comprising:
an optical element group having a plurality of aspherical surfaces; and
a plurality of holding blocks holding said optical element group in a plurality of groupings;
wherein the number of said plurality of holding blocks is equal to or greater than the number of said aspherical surfaces.
17. The projection optical system according to claim 16, wherein
said optical element group has a plurality of reflective members; and
each of said plurality of reflective members is held by each of said plurality of holding blocks different from each other.
18. The projection optical system according to claim 16, wherein said optical element group is disposed along one optical axis.
19. The projection optical system according to claim 16, wherein
said optical element group comprising:
a first partial optical element group disposed along a first optical axis;
a second partial optical element group disposed along a second optical axis which extends in a direction that intersects said first optical axis, and is optically connected to said first partial optical element group; and
a third partial optical element group disposed along a third optical axis which extends in the same direction as said first optical axis, and is optically connected to said second partial optical element group.
20. The projection optical system according to claim 16, wherein
said projection optical system is used with illumination light with wavelengths of 200 nm or shorter; and
a purge gas through which said illumination light passes is supplied to inside said projection optical system.
21. The projection optical system according to claim 20, wherein each of said optical element groups is held by either a frame mechanism or a frame member with an opening through which purge gas may pass.
22. A projection optical system which forms an image of an object in a first plane onto a second plane, comprising:
an optical element group;
a plurality of lens-barrel units, which hold said optical element group in a plurality of groupings; and
frame from which at least one lens-barrel unit of said plurality of lens-barrel units is held so as to hang down.
23. The projection optical system according to claim 22, comprising a partial optical element group, which forms an intermediate image on a third plane between said first plane and said second plane; wherein said partial optical element group is integrally held by one lens-barrel unit of said plurality of lens-barrel units.
24. The projection optical system according to claim 22, wherein said optical element group is disposed along one optical axis.
25. The projection optical system according to claim 22, wherein said plurality of lens-barrel units are each independently supported.
26. The projection optical system according to claim 22, wherein at least one of said plurality of lens-barrel units has an adjustment mechanism to adjust the state of predetermined optical elements held by said lens-barrel unit.
27. The projection optical system according to claim 22, at least one of said plurality of lens-barrel units further comprising:
a plurality of holding blocks holding one or a plurality of optical elements;
wherein said plurality of holding blocks have an adjustment mechanism to adjust the state of optical elements respectively held therein.
28. The projection optical system according to claim 22, wherein at least one of said plurality of lens-barrel units is detachable.
29. The projection optical system according to claim 22, wherein
said projection optical system is used with illumination light with wavelengths of 200 nm or shorter; and
a purge gas through which said illumination light passes is supplied to inside said projection optical system.
30. The projection optical system according to claim 29, wherein each of said optical element groups is held by either a frame mechanism or a frame member with an opening through which purge gas may pass.
31. A projection optical system forming an image of an object in a first plane onto a second plane by using light with wavelengths of 200 nm or shorter, comprising:
at least two refractive members disposed in the optical path of said light;
at least two lens-barrel units aligning said at least two refractive members;
a pipeline being connected to at least one lens-barrel unit of said at least two lens-barrel units and supplying purge gas through which said light can pass within the space between said at least two refractive members; and
at least two holding units being included in each of said at least two lens-barrel units and holding each of said at least two refractive members;
wherein said at least two holding units having openings to allow said purge gas to pass through.
32. The projection optical system according to claim 31, wherein said light has wavelengths of 160 nm or shorter.
33. A projection optical system provided in a projection exposure apparatus, comprising:
an imaging optical system including all of a plurality of reflective members which are structural components of said projection optical system;
another imaging optical system including at least one refractive member which is a structural component of said projection optical system and not including a reflective member which is a structural component of said projection optical system;
a lens-barrel unit holding said imaging optical system; and
another lens-barrel unit holding said another imaging optical system.
34. The projection optical system according to claim 33, wherein
said lens-barrel unit is structured with a plurality of divided lens-barrels, which include a mechanism for adjusting the state of said imaging optical system; and
said another lens-barrel unit is structured with a plurality of divided lens-barrels, which include a mechanism for adjusting the state of said another imaging optical system.
35. The projection optical system according to claim 34, wherein each of said plurality of reflective members is held by each of divided lens-barrel different from each other in said plurality of divided lens-barrels forming said lens-barrel unit.
36. The projection optical system according to claim 33, wherein
said projection optical system is used with illumination light with wavelengths of 200 nm or shorter; and
a purge gas through which said illumination light passes is supplied to inside said projection optical system.
37. A method of manufacturing a projection optical system which comprises an optical element group having at least one refractive member and a plurality of reflective members, and a plurality of lens-barrel units holding said optical element group as a plurality of groupings;
said method of manufacturing a projection optical system comprising the step of:
a first step of pre-setting a predetermined lens-barrel unit of said plurality of lens-barrel units to be detachable, putting together a lens-barrel unit to be adjusted at the position of said predetermined lens-barrel unit of a first projection optical system that is already completed as said projection optical system, and performing adjustment on said lens-barrel unit to be adjusted while measuring optical characteristics of said first projection optical system; and
a second step of building up a second projection optical system by an adjusted lens-barrel unit on which adjustment is performed in said first step and lens-barrel units other than this, and performing adjustment of said second projection optical system using said adjusted lens-barrel unit as a standard.
38. A projection optical system, which is manufactured in accordance with the method of manufacturing according to claim 37.
39. A method of manufacturing a projection optical system which comprises an optical element group including at least one refractive member and at least one reflective member, a plurality of lens-barrel units holding said optical element group as a plurality of groupings, a holding block being a component of at least one lens-barrel unit of said plurality of lens-barrel units and holding at least one optical element, wherein said holding block is adjustable in at least one of relative orientation and relative position to said lens-barrel unit including said holding block as structural component, and at least one entire lens-barrel unit of said plurality of lens-barrel units is adjustable;
said method comprising the step of:
a first step of adjusting said plurality of lens-barrel units relative to each other; and
a second step of adjusting said at least one of said relative orientation and said relative position of said holding block, so as to adjust residual aberrations, after said first step.
40. A projection optical system, which is manufactured in accordance with the method of manufacturing according to claim 39.
41. A projection exposure apparatus, which comprises the projection optical system according to claim 1, and which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system.
42. A projection exposure apparatus, which comprises the projection optical system according to claim 12, and which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system.
43. A projection exposure apparatus, which comprises the projection optical system according to claim 16, and which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system.
44. A projection exposure apparatus, which comprises the projection optical system according to claim 22, and which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system.
45. A projection exposure apparatus, which comprises the projection optical system according to claim 31, and which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system.
46. A projection exposure apparatus, which comprises the projection optical system according to claim 33, and which projects an image of a projection original disposed on a first plane onto a workpiece, with said projection optical system.
47. A projection exposure method, which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system according to claim 1.
48. A projection exposure method, which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system according to claim 12.
49. A projection exposure method, which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system according to claim 16.
50. A projection exposure method, which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system according to claim 22.
51. A projection exposure method, which projects an image of a projection original disposed on said first plane onto a workpiece, with said projection optical system according to claim 31.
52. A projection exposure method, which projects an image of a projection original disposed on a first plane onto a workpiece, with said projection optical system according to claim 33.