All The Claims

What is claimed is:

1. A method of selectively oxidizing one material with respect to another material formed on one or more semiconductor substrates, comprising:
contacting the one or more semiconductor substrates in a process chamber with an environment comprising approximately 10% to 30% steam and the balance hydrogen, at a temperature in the range of approximately 700 to 850 C. to form an oxide layer selectively on the one material.
2. The method of claim 1 wherein same method selectively oxidizes polysilicon material and does not substantially oxide a metal material on said one of more substrate.
3. The method of claim 1 further comprising:
heating the processing chamber to a temperature in the range of approximately 800 to 850 C.; and
oxidizing the one material with respect to the other material.
4. The method of claim 1 wherein the one material is polysilicon and the other material includes the metaltungsten.
5. The method of claim 3 wherein the oxidizing step is carried out for a time sufficient to form a layer of approximately 100 of silicon dioxide on the one material.
6. A method for selectively oxidizing one material with respect to another material on one or more substrates, comprising the steps of:
reacting hydrogen and oxygen in a torch chamber to generate a mixture of steam in a hydrogen rich atmosphere;
flowing said mixture of steam and hydrogen to a processing chamber containing said substrates;
sensing the existence of said flame with a flame sensor positioned in said torch chamber;
detecting leaks in said processing chamber with a pressure sensor positioned in said processing chamber; and
interrupting the flow of hydrogen to said torch chamber if said flame sensor fails to detect a flame in said torch chamber or if said pressure sensor detects a leak in said processing chamber.
7. A system for processing one or more substrates with steam in a hydrogen-rich atmosphere comprising:
a torch chamber; said torch chamber receiving gas supply of hydrogen and oxygen and generating a flame in said torch chamber to produce an atmosphere of steam in hydrogen;
a processing chamber into which said substrates are placed for processing, said processing chamber provided with the atmosphere of steam in hydrogen from the torch chamber via a sealed tubing network;
a flame sensor in said torch chamber for detecting the flame, said flame sensor providing feedback to an interlock system, said interlock system interrupting the gas supply of hydrogen to said torch chamber if said flame sensor does not detect the flame;
a pressure sensor in the processing chamber, said pressure sensor providing feedback to said interlock system regarding the leak integrity of said processing chamber, said interlock system interrupting the gas supply of hydrogen to said torch chamber if said pressure sensor detects a leak; and
a burn box coupled to the processing chamber, said burn box receiving outflow from said processing chamber prior to delivery of said outflow to an exhaust system, said burn box providing one or more igniters for combusting any unreacted hydrogen which passes through said torch and processing chambers.
8. The system of claim 7 wherein steam is present at a concentration of approximately 10% to 30% in the processing chamber with the balance being hydrogen.
9. The system of claim 7 wherein steam is present at a concentration of up to 20% in the process chamber with the balance being hydrogen.
10. The system of claim 7 wherein said processing chamber is adapted to receive a boat supporting a plurality of semiconductor wafers.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A method of fabricating an annular component part composed of an annular body formed from a plate-like metallic raw material by press forming and having a cylindrical wall, formed with a root portion and a distal end, which has an inner circumferential periphery formed with an inner diametric concave portion playing a role as an undercut, the method comprising:
expanding the inner circumferential periphery of the cylindrical wall to an inner diameter corresponding to the inner diametric concave portion upon forcing a punch into the inner circumferential periphery of the cylindrical wall; and
squeezing the cylindrical wall in a tapered profile such that the inner diameter of the cylindrical wall gradually decreases from the root portion to the distal end of the cylindrical wall.
2. The method of fabricating the annular component part according to claim 1, wherein the squeezing the cylindrical wall comprises:
preprocessing for preliminarily forming an annular stepped portion on the inner circumferential periphery of the cylindrical wall in a striation as a deformation starting point when squeezing the cylindrical wall; and
wherein the preprocessing is executed concurrently with the expanding the inner circumferential periphery of the cylindrical wall or in a phase between the expanding the inner circumferential periphery of the cylindrical wall and the squeezing the cylindrical wall.
3. The method of fabricating the annular component part according to claim 1, further comprising:
conducting inner diametric chamfering operation upon compressing an inner diametric corner of the distal end of the cylindrical wall to form a chamfer thereon prior to the squeezing the cylindrical wall.
4. The method of fabricating the annular component part according to claim 3, wherein:
the inner diametric chamfering operation is executed before the expanding the inner circumferential periphery of the cylindrical wall is executed.
5. The method of fabricating the annular component part according to claim 1, further comprising:
conducting preliminarily chamfering operation prior to the expanding the inner circumferential periphery of the cylindrical wall to form a chamfering annular concave portion on an end face of the annular body in an entire circumference thereof at a position in opposition to the cylindrical wall so as to allow a final configuration to have an outer peripheral corner portion formed with a chamfer; and
conducting outer diametric blanking operation after the squeezing the cylindrical wall to blank the annular body at the chamfering annular concave portion thereof in an outer diameter of a final shape.
6. The method of fabricating the annular component part according to claim 1, wherein:
the squeezing the cylindrical wall is executed upon using a tapered punch held in abutting engagement with an outer circumferential periphery of the cylindrical wall of the annular body.
7. The method of fabricating the annular component part according to claim 1, wherein:
the squeezing the cylindrical wall is executed upon using a roller held in abutting engagement with an outer circumferential periphery of the cylindrical wall of the annular body.
8. An annular component part fabricated by the method according to claim 1 and comprising a stop collar available to be mounted on an output shaft of a starter carrying thereon a pinion movable toward a ring gear of an engine for startup of the engine, the stop collar being operative to restrict a shift position of the pinion.
9. A method of fabricating an annular component part composed of an annular body formed from a plate-like metallic raw material by press forming and having a cylindrical wall, formed with a root portion and a distal end, which has an inner circumferential periphery formed with an inner diametric concave portion playing a role as an undercut, the method comprising:
a) conducting a first outer diametric blanking operation to form the metallic raw material into a circular component by blanking;
b) conducting a base bore punching operation to form a base bore in the circular component at a radially central area thereof;
c) conducting a base bore expanding operation to form the annular body upon expanding the base bore of the circular component so as to allow the cylindrical wall to be formed on the circular component on one side thereof while forming an annular flange portion radially extending from the root portion of the cylindrical wall;
d) conducting a preliminarily chamfering operation to preliminarily form a chamfering annular concave portion on the annular flange portion at an end face thereof in opposition to the cylindrical wall so as to allow the annular body to be formed in a final configuration with an outer peripheral corner portion formed with a chamfer;
e) conducting an inner diametric chamfering operation to compress an inner diametric corner area of the distal end of the cylindrical wall to from a chamfer thereon;
f) conducting an inner diametric expanding operation upon forcing a punch into the inner circumferential periphery of the cylindrical wall and expanding the same to an inner diameter corresponding to that of the inner diametric concave portion;
g) conducting a squeezing operation to squeeze the cylindrical wall in a tapered profile such that the cylindrical wall has an inner diameter that gradually decreases from the root portion to the distal end; and
h) conducting a second outer diametric blanking operation to blank the circular component along with the chamfering annular concave portion into the final configuration.
10. The method of fabricating the annular component part according to claim 9, wherein the conducting the squeezing operation comprises:
preprocessing for preliminarily forming an annular stepped portion on the inner circumferential periphery of the cylindrical wall in a striation as a deformation starting point when conducting the squeezing operation; and
wherein the preprocessing is executed concurrently with the inner diametric expanding operation or in a phase between inner diametric expanding operation and the squeezing operation.
11. The method of fabricating the annular component part according to claim 9, wherein:
the squeezing operation is executed upon using a tapered punch held in abutting engagement with an outer circumferential periphery of the cylindrical wall of the annular body.
12. The method of fabricating the annular component part according to claim 9, wherein:
the squeezing operation is executed upon using a roller held in abutting engagement with an outer circumferential periphery of the cylindrical wall of the annular body.
13. An annular component part fabricated by the method according to claim 9 and comprising a stop collar available to be mounted on an output shaft of a starter carrying thereon a pinion movable toward a ring gear of an engine for startup of the engine, the stop collar being operative to restrict a shift position of the pinion.
14. A die for use in the inner diametric expanding operation conducted in the method according to claim 9, the die comprising:
a lower die for holding the annular flange portion of the annular body that is subjected to operations up to the inner diametric chamfering operation; and
an upper die movable toward and away from the lower die;
wherein the lower die has an annular protrusion available to be fitted to the chamfering annular concave portion of the annular flange portion and operative to hold the annular body under a condition where the chamfering annular concave portion is fitted to the annular protrusion of the lower die; and
wherein the upper die includes an expanding punch for expanding the inner circumferential periphery of the cylindrical wall to the inner diameter corresponding to that of the inner diametric concave portion, and a holder die for holding the outer periphery of the cylindrical wall during movement of the expanding punch to expand the inner circumferential periphery of the cylindrical wall, the holder die being spring biased to be pressurized toward the lower die and movable along an axis of the annular body and having an inner circumferential periphery, engageable with the outer periphery of the cylindrical wall, and a bottom wall operative to hold the annular flange portion of the annular body before the expanding punch begins to expand the cylindrical wall.
15. The die for use in the inner diametric expanding operation conducted in the method according to claim 14, wherein:
the expanding punch has an end portion formed with an outer diametric stepped portion for preliminarily forming the annular stepped portion on the inner circumferential periphery of the cylindrical wall in the striation as the deformation start point when executing the squeezing operation.
16. A die for use in the inner diametric chamfering operation conducted in the method according to claim 9, the die comprising:
a lower die for holding the annular flange portion of the annular body that is subjected to operations up to the preliminarily chamfering operation; and
an upper die movable toward and away from the lower die;
wherein the lower die has an annular protrusion available to be fitted to the chamfering annular concave portion, formed on the annular flange portion of the annular body, and operative to hold the annular body under a condition where the chamfering annular concave portion is fitted to the annular protrusion of the lower die; and
wherein the upper die includes a chamfering punch for compressing an inner diametric corner area of the distal end of the cylindrical wall to form a chamfer thereon, and a holder die for holding the outer periphery of the cylindrical wall during movement of the chamfering punch, the holder die being spring biased to be pressurized toward the lower die and movable along an axis of the annular body and having an inner circumferential periphery, engageable with the outer periphery of the cylindrical wall, and a bottom wall operative to hold the annular flange portion of the annular body before the chamfering punch begins to form the chamfer on the inner diametric corner area of the cylindrical wall.
17. A die for use in the squeezing operation conducted in the method according to claim 9, the die comprising:
a lower die for holding the annular flange portion of the annular body that is subjected to operations up to the inner diametric expanding operation;
wherein the lower die has an annular protrusion available to be fitted to the chamfering annular concave portion, formed on the annular flange portion of the annular body, and operative to hold the annular body under a condition where the chamfering annular concave portion is fitted to the annular protrusion of the lower die.

1. A self regulating and constant pressure maintaining beverage dispenser assembly comprising a dispensing device and a beverage container, said beverage container defining an inner space, said inner space constituting:
a beverage space filled with carbonated beverage and communicating with said dispensing device for allowing dispensing of said carbonated beverage; and
a head space communicating with said beverage space and filled with CO2 having an initial pressure of 0.1-3 bar above the atmospheric pressure when subjected to a specific temperature of 2\xb0 C.-50\xb0 C.;
said beverage dispenser assembly further comprising at least one carbonisation canister communicating with said head space via a hydrophobic labyrinth and comprising a particular amount of adsorption material having adsorbed a specific amount of CO2, said particular amount of adsorption material being inherently capable of regulating the pressure in said head space and capable of preserving the carbonisation of said carbonated beverage in said beverage space by releasing CO2 into said head space via said hydrophobic labyrinth or by adsorbing CO2 from said head space via said hydrophobic labyrinth, said specific amount of CO2 being sufficient for allowing said head space to increase in volume and substituting said beverage space when said carbonated beverage having said specific temperature is being dispensed from said container by using said dispensing device and maintaining at least a pressure of 0.1-3 bar above the atmospheric pressure in said head space during the complete substitution of said beverage space by said head space.
2. The beverage dispenser assembly according to claim 1, wherein said head space and said canister have an initial pressure of less than 2 bar above the atmospheric pressure.
3. The beverage dispenser assembly according to claim 1, wherein said head space, after the complete substitution of said beverage space by said head space, has a pressure of at least 0.5 bar above the atmospheric pressure.
4. The beverage dispenser assembly according to claim 1, wherein said beverage space initially occupies at least 70% of said inner space.
5. The beverage dispenser assembly according to claim 1, wherein said beverage space has a volume of 0.5-50 litres.
6. The beverage dispenser assembly according to claim 1, wherein said carbonisation canister allows said adsorption material to adsorb CO2 when said beverage container is being heated above said specific temperature for avoiding any substantial increase of the pressure in said head space.
7. The beverage dispenser assembly according to claim 1, wherein said carbonisation canister allows said adsorption material to release CO2 when said beverage container is being chilled below said specific temperature for avoiding any substantial decrease of the pressure in said head space.
8. The beverage dispenser assembly according to claim 1, wherein said hydrophobic labyrinth comprises a gas permeable, liquid impermeable membrane.
9. The beverage dispenser assembly according to claim 1, wherein said beverage container and said dispensing device consist entirely of a material selected from the group consisting of disposable polymeric materials and combustible polymeric materials.
10. The beverage dispenser assembly according to claim 1, wherein said beverage container is made of flexible material.
11. The beverage dispenser assembly according to claim 1, wherein the mass of said particular amount of adsorbing material amounts to approximately 1%-10% of the initial mass of said carbonated beverage in said beverage space.
12. The beverage dispenser assembly according to claim 1, wherein said adsorption material comprises activated carbon.
13. The beverage dispenser assembly according to claim 1, wherein said specific amount of CO2 initially adsorbed by said adsorbing material is equal to 1-3 times the volume of said carbonated beverage in said beverage space at atmospheric pressure.
14. The beverage dispenser assembly according to claim 1, wherein at least one of said head space and said adsorption material further includes an inert gas being substantially non-reacting to said beverage and said CO2.
15. A carbonisation canister for use in a beverage container according to claim 1, said beverage container when filled defining a head space and a beverage space for accommodating a carbonated beverage, said carbonisation canister having a specific density of less than 50% of the specific density of said beverage and defining a centre of gravity, said carbonisation canister comprising:
an outer wall,
a first opening,
a second opening being located opposite said first opening,
a channel interconnecting said first and second openings, said channel being substantially straight and including said centre of gravity of said carbonisation canister,
an inner chamber located between said channel and said outer wall, said inner chamber comprising a particular amount of adsorption material having adsorbed a specific amount of CO2, said particular amount of adsorption material being inherently capable of regulating the pressure in said head space and capable of preserving the carbonisation of said carbonated beverage in said beverage space by releasing CO2 into said head space, said specific amount of CO2 being sufficient for allowing said head space to increase in volume and substituting said beverage space when said carbonated beverage having said specific temperature is being dispensed from said container by using said dispensing device and maintaining at least a pressure of 0.1-3 bar above the atmospheric pressure in said head space during the complete substitution of said beverage space by said head space, and
a hydrophobic labyrinth providing gaseous communication between said inner chamber and said head space for said adsorbing material to adsorb CO2 from said head space or release CO2 into said head space, said hydrophobic labyrinth having an entrance in said channel approximately at the centre of gravity of said carbonisation canister.
16. A method for producing a self-regulating and constant pressure maintaining beverage dispenser assembly, comprising:
providing a flexible and compressible beverage container having an opening and defining an inner space for filling and accommodating a carbonated beverage, said inner space and said beverage container being variable between a compressed state and an uncompressed state, wherein, when filled with carbonated beverage, said inner space defines a beverage space and a head space;
providing a dispensing device communicating with said beverage space;
providing at least one carbonisation canister comprising a particular amount of adsorption material, said adsorption material being capable of adsorbing a specific amount of CO2, said specific amount of CO2 being sufficient for during beverage dispensing at a specific temperature of 2\xb0 C.-50\xb0 C. and an initial pressure of 0.1-3 bar above the atmospheric pressure allowing said head space to substitute said beverage space while maintaining at least a pressure of 0.1-3 bar above the atmospheric pressure in said head space, said adsorption material being separated from the outside of said canister by a hydrophobic labyrinth, said hydrophobic labyrinth being initially sealed by a burst membrane having a specific burst pressure;
introducing said carbonisation canister into said beverage container;
introducing carbonated beverage through said opening into said inner space thereby establishing said beverage space and said head space, said beverage space communicating with said head space and said head space communicating with said carbonisation canister;
causing said beverage container and said inner space to assume said compressed state and substantially eliminating said head space; and
introducing a pre-determined amount of CO2 at a specific pressure profile into said inner space while causing said beverage container to assume said uncompressed state for re-establishing said head space having said initial pressure and communicating with said carbonisation canister and said beverage space while said specific pressure profile at least at some instance exceeding said bursting pressure of said burst membrane for causing said burst membrane to rupture and said adsorption material in said canister to adsorb said specific amount of CO2.
17. A method for producing a self-regulating and constant pressure maintaining beverage dispenser assembly, comprising:
providing a flexible and compressible beverage container having an opening and defining an inner space for filling and accommodating a carbonated beverage, said inner space and said beverage container being variable between a compressed state and an uncompressed state, wherein, when filled with carbonated beverage said inner space defines a beverage space and a head space;
providing a dispensing device communicating with said inner space;
providing at least one carbonisation canister comprising a particular amount of adsorption material, said adsorption material being pre-loaded with a specific amount of CO2, said specific amount of CO2 being sufficient for during beverage dispensing at a specific temperature of 2\xb0 C.-50\xb0 C. and an initial pressure of 0.1-3 bar above the atmospheric pressure allowing said head space to substitute said beverage space while maintaining at least a pressure of 0.1-3 bar above the atmospheric pressure in said head space, said adsorption material being separated from the outside of said canister by a hydrophobic labyrinth, said hydrophobic labyrinth being initially sealed by a burst membrane having a specific burst pressure;
introducing said carbonisation canister into said beverage container;
introducing carbonated beverage through said opening into said inner space thereby establishing said beverage space and said head space, said beverage space communicating with said head space and said head space communicating with said carbonisation canister;
causing said beverage container and said inner space to assume said compressed state and substantially eliminating said head space; and
introducing a pre-determined amount of CO2 at a specific pressure profile into said inner space while causing said beverage container to assume said uncompressed state for re-establishing said head space having said initial pressure and communicating with said carbonisation canister and said beverage space while said specific pressure profile at least at some instance exceeds said bursting pressure of said burst membrane for causing said burst membrane to rupture.
18. A method for producing a self-regulating and constant pressure maintaining beverage dispenser assembly by providing a pressurised chamber having an initial CO2 pressure of 0.1-3 bar above the outside ambient pressure, said method comprising the following steps to be performed within said pressurised chamber:
providing a beverage container having an opening and defining an inner space for filling and accommodating a carbonated beverage, wherein, when filled with carbonated beverage, said inner space defines a beverage space and a head space;
providing a dispensing device communicating with said inner space;
providing at least one carbonisation canister comprising a particular amount of adsorption material, said adsorption material being pre-loaded with a specific amount of CO2, said specific amount of CO2 being sufficient for during beverage dispensing at a specific temperature of 2\xb0 C.-50\xb0 C. and said initial pressure of 0.1-3 bar above the atmospheric pressure allowing said head space to substitute said beverage space while maintaining at least a pressure of 0.1-3 bar above the atmospheric pressure in said head space, said adsorption material being separated from the outside of said canister by a hydrophobic labyrinth;
introducing said carbonisation canister into said beverage container through said opening; and
introducing carbonated beverage through said opening into said inner space thereby establishing said beverage space and said head space, said beverage space communicating with said head space and said head space communicating with said carbonisation canister.
19. A method for producing a self-regulating and constant pressure maintaining beverage dispenser assembly, comprising:
providing a flexible and compressible beverage container having an opening and defining an inner space for filling and accommodating a carbonated beverage, said inner space and said beverage container being variable between a compressed state and an uncompressed state, wherein, when filled with carbonated beverage, said inner space defines a beverage space and a head space;
providing a dispensing device communicating with said inner space;
providing at least one carbonisation canister comprising a particular amount of adsorption material, said adsorption material being pre-loaded with a specific amount of CO2, said specific amount of CO2 being sufficient for during beverage dispensing at a specific temperature of 2\xb0 C.-50\xb0 C. and an initial pressure of 0.1-3 bar above the atmospheric pressure allowing said head space to substitute said beverage space while maintaining at least a pressure of 0.1-3 bar above the atmospheric pressure in said head space, said adsorption material being separated from the outside of said canister by a hydrophobic labyrinth, said canister being initially kept in a CO2 atmosphere at said initial pressure;
introducing carbonated beverage through said opening into said inner space thereby establishing said beverage space and said head space, said beverage space communicating with said head space;
causing said beverage container and said inner space to assume said compressed state and substantially eliminating said head space;
introducing a pre-determined amount of CO2 at a specific pressure profile into said inner space while causing said beverage container to assume said uncompressed state for re-establishing said head space having said initial pressure and communicating with said beverage space; and
introducing said carbonisation canister into said head space while permanently keeping said carbonisation canister at said CO2 atmosphere at said initial pressure.

The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.

1. A ceramic-and-plastic composite, comprising:
a ceramic article;
a nano-silicon containing coating bonded on a surface of the ceramic article and partially permeating into the ceramic article;
a glue layer bonded with the nano-silicon containing coating; and
at least a plastic article bonded to the glue layer.
2. The composite as claimed in claim 1, further comprising a silane coupling agent layer formed between the nano-silicon containing coating and the glue layer, the silane coupling agent layer bonding to the nano-silicon containing coating and the glue layer.
3. The composite as claimed in claim 2, wherein the nano-silicon containing coating is a nano silicon dioxide coating.
4. The composite as claimed in claim 3, wherein the nano-silicon containing coating comprises a permeating part and a non-permeating part, the permeating part permeates into the ceramic article near the surface of the ceramic article, and the non-permeating part adheres to the surface of the ceramic article.
5. The composite as claimed in claim 4, wherein the permeating part has a thickness of about 1 \u03bcm to about 3 \u03bcm, the non-permeating part has a thickness of about 1 \u03bcm to about 3 \u03bcm.
6. The composite as claimed in claim 2, wherein the silane coupling agent layer comprises epoxy groups, the glue layer comprises amino functional groups, the epoxy groups react with the amino functional groups forming a crosslinked structure at the interface of the silane coupling agent layer and the glue layer.
7. The composite as claimed in claim 4, wherein the non-permeating part of the nano-silicon containing coating comprises Si\u2014OH groups at the surface of the non-permeating part, the silane coupling agent layer also comprises Si\u2014OH groups, the Si\u2014OH groups of the nano-silicon containing coating condensation react with the Si\u2014OH groups of the silane coupling agent and form Si\u2014O\u2014Si groups at the interface of the silane coupling agent layer and the nano-silicon containing coating.
8. The composite as claimed in claim 1, wherein the glue layer has a thickness of about 38 \u03bcm to about 52 \u03bcm.
9. An electronic device, comprising:
a main body; and
a ceramic-and-plastic composite assembling with the main body, the ceramic-and-plastic composite comprising:
a ceramic article;
a nano-silicon containing coating bonded on a surface of the ceramic article and partially permeating into the ceramic article;
a glue layer bonded with to the nano-silicon containing coating; and
at least a plastic article bonded to the glue layer.
10. The electronic device as claimed in claim 9, further comprising a silane coupling agent layer formed between the nano-silicon containing coating and the glue layer, the silane coupling agent layer bonding to the nano-silicon containing coating and the glue layer.
11. The electronic device as claimed in claim 10, wherein the nano-silicon containing coating is a nano silicon dioxide coating.
12. The electronic device as claimed in claim 11, wherein the nano-silicon containing coating comprises a permeating part and a non-permeating part, the permeating part permeates in the ceramic article near the surface of the ceramic article, and the non-permeating part adheres to the surface of the ceramic article.
13. The electronic device as claimed in claim 12, wherein the permeating part has a thickness of about 1 \u03bcm to about 3 \u03bcm, the non-permeating part has a thickness of about 1 \u03bcm to about 3 \u03bcm.
14. The electronic device as claimed in claim 10, wherein the silane coupling agent layer comprises epoxy groups, the glue layer comprises amino functional groups, the epoxy groups react with the amino functional groups forming a crosslinked structure at the interface of the silane coupling agent layer and the glue layer.
15. The electronic device as claimed in claim 12, wherein the non-permeating part of the nano-silicon containing coating comprises Si\u2014OH groups at the surface of the non-permeating part, the silane coupling agent layer also comprises Si\u2014OH groups, the Si\u2014OH groups of the nano-silicon containing coating condensation react with the Si\u2014OH groups of the silane coupling agent and form Si\u2014O\u2014Si groups at the interface of the silane coupling agent layer and the nano-silicon containing coating.
16. The electronic device as claimed in claim 9, wherein the glue layer has a thickness of about 38 \u03bcm to about 52 \u03bcm.
17. A ceramic-and-plastic composite, comprising:
a ceramic article; and
at least a plastic article integrally coupled to the ceramic article;
wherein the composite further comprises a nano-silicon containing coating formed on and coupled to the ceramic article, a silane coupling agent layer bonded with the nano-silicon containing coating, and a glue layer bonded with the silane coupling agent layer, the nano-silicon containing coating partially permeates into the ceramic article, the at least a plastic article directly bonds with the glue layer.