What is claimed is:
1. A chemical vapor deposition method comprising the steps of:
supplying a passivating gas into a chamber, in which a chemical vapor deposition is carried out, while no object to be processed exists in the chamber, to form a passivation film on at least one of the inner wall of the chamber and the surface of a member in the chamber;
subsequently to said step of forming said passivation film, supplying a pre-coating gas into said chamber while no object to be processed exists in said chamber, to form a pre-coat film on the surface of said passivation film;
introducing an object to be processed, into said chamber; and
supplying a depositing gas into said chamber to carry out a deposition process on said object.
2. A chemical vapor deposition method comprising the steps of:
supplying a passivating gas into a chamber, in which a chemical vapor deposition is carried out, while no object to be processed exists in the chamber, to form a passivation film on at least one of the inner wall of the chamber and the surface of a member in the chamber;
subsequently to said step of forming said passivation film, supplying a pre-coating gas into said chamber while no object to be processed exists in said chamber, and producing a first plasma, to form a pre-coat film on the surface of said passivation film;
introducing an object to be processed, into said chamber; and
supplying a depositing gas into said chamber and producing a second plasma to carry out a deposition process on said object.
3. A chemical vapor deposition method as set forth in claim 1 or 2, wherein said passivation film contains at least one of a metal fluoride and a metal chloride.
4. A chemical vapor deposition method as set forth in claim 3, wherein said passivating gas contains a fluorine containing gas.
5. A chemical vapor deposition method as set forth in claim 4, wherein said fluorine containing gas contained in said passivating gas is ClF3, NF3, HF, F2, C2F6 or C4F8.
6. A chemical vapor deposition method as set forth in any one of claims 1 through 5, wherein said pre-coating gas and said depositing gas contain a metal chloride, an organic metal compound and a reducing gas and a innert gas.
7. A chemical vapor deposition method comprising the steps of:
supplying a fluorine containing gas into a chamber, in which a chemical vapor deposition is carried out, while no object to be processed exists in the chamber, to previously form a passivation film of a metal fluoride on at least one of the inner wall of the chamber and the surface of a member in the chamber;
subsequently to said step of forming said passivation film, supplying a depositing gas into said chamber while no object to be processed exists in said chamber, to form a pre-coat film on the surface of said passivation film;
introducing an object to be processed, into said chamber; and
supplying a depositing gas into said chamber to carry out a deposition process on said object.
8. A chemical vapor deposition method comprising the steps of:
supplying a fluorine containing gas into a chamber, in which a chemical vapor deposition is carried out, while no object to be processed exists in the chamber, to previously form a passivation film of a metal fluoride on at least one of the inner wall of the chamber and the surface of a member in the chamber;
subsequently to said step of forming said passivation film, supplying a depositing gas into said chamber while no object to be processed exists in said chamber, and producing a first plasma, to form a pre-coat film on the surface of said passivation film;
introducing an object to be processed, into said chamber; and
supplying a depositing gas into said chamber and producing a second plasma to carry out a deposition process on said object.
9. A chemical vapor deposition method for carrying out a deposition process using a chemical vapor deposition system comprising a chamber for carrying out a chemical vapor deposition, a deposition gas supply system for supplying a deposition gas into said chamber, and a cleaning gas supply system for supplying a fluorine containing gas into said chamber as a cleaning gas for cleaning after deposition, said method comprising the steps of:
supplying said fluorine containing gas serving as said cleaning gas into said chamber while no object to be processed exists in said chamber, to form a passivation film of a metal fluoride on at least one of the inner wall of said chamber and the surface of a member in said chamber;
subsequently to said step of forming said passivation film, supplying a depositing gas from said deposition gas supply system into said chamber while no object to be processed exists in said chamber, to form a pre-coat film on the surface of said passivation film;
introducing an object to be processed, into said chamber; and
supplying a depositing gas from said deposition gas supply system into said chamber to carry out a deposition process on said object.
10. A chemical vapor deposition method as set forth in any one of claims 7 through 9, wherein said fluorine containing gas is ClF3, NF3, HF, F2, C2F6, or C4F8.
11. A chemical vapor deposition method as set forth in any one of claims 7 through 10, wherein said depositing gas contains a metal chloride, an organic metal compound and a reducing gas, and innert gas.
12. A chemical vapor deposition method as set forth in any one of claims 1 through 11, wherein said at least one of the inner wall of said chamber and the surface of the member in said chamber, on which said passivation film is formed, is formed of a metal containing material or a ceramic material.
13. A chemical vapor deposition method as set forth in claim 12, wherein said metal containing material is a metal or alloy containing at least one of Al, Ni, Fe, Cr, Cu and Ag.
14. A chemical vapor deposition method as set forth in claim 12 or 13, wherein a coating film is formed on said at least one of the inner wall of said chamber and the surface of the member in said chamber.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A learning support system comprising:
an information processing apparatus,
a portable information terminal, and
a learning management server,
the information processing apparatus, the portable information terminal and the learning management server being connected through a network,
wherein the information processing apparatus comprises a first memory unit for storing first learning contents which comprise a learning program and data for use in learning words in an index, a second memory unit for storing first learning information which includes at least a result of learning for a user when the user uses the information processing apparatus, a first control unit for executing the learning program to provide first word-learning displays comprising the index words, and a first communication unit for communicating with the learning management server,
the portable information terminal comprises a third memory unit for storing second learning contents which comprise a portable use learning program and data for use in learning the index words, a fourth memory unit for storing second learning information which includes at least a result of learning for the user when the user uses the portable information terminal, a second control unit for executing the portable use learning program to provide second word-learning displays comprising the index words and a second communication unit for communicating with the learning management server,
the learning management server comprises a third communication unit for communicating with the information processing apparatus and the portable information terminal, and a fifth memory unit for storing the first learning information which is transferred from the information processing apparatus and the second learning information which is transferred from the portable information terminal,
the first control unit executes the learning program after the second learning information is acquired through the fifth memory unit so that the user’s learning when the user uses the portable information terminal can be resumed and continued at the information processing apparatus,
the second control unit executes the portable use learning program after the first learning information is acquired through the fifth memory unit so that the user’s learning when the user uses the information processing apparatus can be resumed and continued at the portable information terminal, and
the first and second learning information includes numbers of searches for the index words and the first and second control units use the numbers of searches for the index words to determine which index words are displayed in the first and second word-learning displays.
2. A learning support system of claim 1, wherein the learning management server further comprises a sixth memory unit, and in case that the user purchases the first and second learning contents, the learning management server is connected through the network to a content server which stores the first and second learning contents, the first and second learning contents are acquired from the content server and stored in the sixth memory unit, and the stored first and second learning contents are transferred to the information processing apparatus and the portable information terminal, respectively.
3. A learning support system of claim 1, wherein the information processing apparatus further comprises an input unit, and in case that an instruction to complete learning or to discontinue learning is inputted by the input unit, the first learning information which has been stored in the second memory unit is transferred to the learning management server through the first communication unit, and after the transferred first learning information is stored in the fifth memory unit by the learning management server, the first learning information stored in the fifth memory unit is acquired by the portable information terminal through the second communication unit and stored in the fourth memory unit.
4. A learning support system of claim 1, wherein the portable information terminal further comprises an input unit, and in case that an instruction to complete learning or to discontinue learning is inputted by the input unit, the second learning information which has been stored in the fourth memory unit is transferred to the learning management server through the second communication unit, and after the transferred second learning information is stored in the fifth memory unit by the learning management server, the second learning information stored in the fifth memory unit is stored in the second memory unit or the fourth memory unit by the information processing apparatus or the portable information terminal.
5. A learning support system of claim 1, wherein the learning management server further comprises a sixth memory unit for storing pre-registered user information, the learning support system comprises a plurality of additional portable information terminals whose users are different, and in case that the first learning information which is transferred to the fifth memory unit of the learning management server includes specific user information, the first learning information is transferred only to a portable information terminal which corresponds to user information that is stored in the sixth memory unit and coincides with the specific user information.
6. A learning support system of claim 1, wherein, if the number of searches for one of the index words exceeds a specified number, a frequency of presenting a test for the one index word is increased.
7. A learning support system comprising:
an information processing apparatus,
a portable information terminal, and
a learning management server,
the information processing apparatus, the portable information terminal and the learning management server being connected through a network,
wherein the information processing apparatus comprises a first input unit, a first memory unit for storing first learning contents which comprise a learning program and data for use in learning, a second memory unit for storing first learning information which includes at least result of learning, a first control unit for executing the learning program to provide first word-learning displays comprising index words, an information memory unit comprising the index words and information associated with the index words, a first communication unit for transferring first learning information which is test preparation use information for the portable information terminal to the learning management server and for receiving second learning information which is result of learning at the portable information terminal from the learning management server, a search unit for searching the information memory unit by an index word which is inputted from the first input unit, a temporary storage unit for storing the second information associated with the index word which is searched by the search unit, a data acquiring unit for acquiring data necessary for learning in the second information stored in the temporary storage unit, a file preparation unit for preparing a search information file which includes data acquired by the data acquiring unit and the inputted index word, and a first test preparation unit for preparing the first learning contents by use of the search information file prepared by the file preparation unit,
the portable information terminal comprises a third memory unit for storing second learning contents which comprise a portable use learning program and data for use in learning, a fourth memory unit for storing second learning information which includes at least result of learning at the portable information terminal, a second control unit for executing the portable use learning program to provide second word-learning displays comprising the index words and a second communication unit for receiving the first learning information from the learning management server and for transferring the second learning information to the learning management server, and a second test preparation unit for preparing the second learning contents associated with the first learning information and for storing the second learning contents in the third memory unit,
the learning management server comprises a third communication unit for communicating with the information processing apparatus and the portable information terminal, and a fifth memory unit for storing the first learning information which is transferred from the information processing apparatus and the second learning information which is transferred from the portable information terminal,
one of the information processing apparatus and the portable information terminal carries out learning, after learning information of the other of the information processing apparatus and the portable information terminal is acquired through the fifth memory unit, and
the first and second learning information includes numbers of searches for the index words and the first and second control units use the numbers of searches for the index words to determine which index words are displayed in the first and second word-learning displays.
8. An information processing apparatus which is part of a learning support system which also includes a learning management server and a portable information terminal, the information processing apparatus comprising a first memory unit for storing first learning contents which comprise a learning program and data for use in learning words in an index, a second memory unit for storing first learning information which includes at least a result of learning for a user when the user uses the information processing apparatus, a first control unit for executing the learning program to provide first word-learning displays comprising the index words, and a first communication unit for communicating with a learning management server, wherein the first learning information which has been stored in the second memory unit is transferred to the learning management server through the first communication unit, second learning information, which includes at least a result of learning for the user when the user uses the portable information terminal, is received from the learning management server through the first communication unit and stored in the second memory unit, the first control unit executes the learning program with reference to the second learning information so that the user’s learning when the user uses the portable information terminal can be resumed and continued at the information processing apparatus, the first and second learning information includes numbers of searches for the index words, and the first control unit uses the number of searches for the index words to determine which index words are displayed in the first word-learning displays.
9. An information processing apparatus of claim 8 comprising a first input unit for inputting characters and marks, a first display unit for displaying text, an information memory unit comprising first information of the index words and second information associated with the index words, a search unit for searching the information memory unit by an index word which is inputted from the first input unit, a temporary storage unit for storing the second information associated with the index word which is searched by the search unit, a data acquiring unit for acquiring data necessary for learning in the second information stored in the temporary storage unit, a file preparation unit for preparing a search information file which includes data acquired by the data acquiring unit and the inputted index word, and a test preparation unit for preparing the first learning contents by use of the search information file prepared by the file preparation unit.
10. An information processing apparatus of claim 9, wherein in case that the first information is an index of a word, the data acquiring unit acquires head translation of each acceptation or head translation of head acceptation which is included in the second information associated with the searched index word.
11. An information processing apparatus of claim 10, wherein the data acquiring unit acquires a sentence which includes the inputted index word in the text displayed on the first display unit.
12. An information processing apparatus of claim 9, further comprising a learning information preparation unit for preparing a learning information file to prepare a test for learning, in which the learning information preparation unit prepares a learning information file which includes at least one of the index words, data acquired by the data acquiring unit, and the number of searches for the index word with regard to the index word which is included in the search information file, and in case that the index word is already included in the learning information file, the number of searches is updated.
13. An information processing apparatus of claim 12, wherein the learning information file includes master information which is given based upon master instruction inputted from the first input unit with respect to each index word and its master date, and in case that an index word which is already registered in the learning information file and to which master information is given is searched by the search unit, the learning information preparation unit deletes master information which corresponds to the index word from the learning information file, and an alarm which shows that the index word has already been mastered is displayed on the first display unit.
14. An information processing apparatus of claim 9 further comprising a taken-out information setting unit for setting a criterion which determines information to be taken out from the search information file, and an information selecting unit for selecting information to be taken out based upon the criterion which is set by the taken-out information setting unit.
15. A portable information terminal which is part of a learning support system which also includes a learning management server and an information processing apparatus, the portable information terminal comprising a first memory unit for storing first learning contents which comprise a portable use learning program and data for use in learning words in an index, a second memory unit for storing first learning information which includes at least a result of learning at the portable information terminal, a first control unit for executing the portable use learning program to provide first word-learning displays comprising the index words, and a first communication unit for communicating with the learning management server, wherein the first learning information which has been stored in the second memory unit is transferred to the learning management server through the first communication unit, and second learning information, which includes at least a result of learning for the user when the user uses the information processing apparatus, is received from the learning management server through the first communication unit and is stored in the first memory unit, and the second control unit executes the portable use learning program with reference to the second learning information so that the user’s learning when the user uses the information processing apparatus can be resumed and continued at the portable information terminal, the first and second learning information includes number of searches for the index words, and the first control unit uses the numbers of searches for the index words to determine which index words are displayed in the first word-learning displays.
16. A portable information terminal of claim 15 comprising an information receiving unit for receiving a plurality of kinds of the second learning information, a test preparation unit for preparing learning contents of a test in accordance with the second learning information, and a display unit for displaying display contents which include the prepared learning contents on a screen.
17. A portable information terminal of claim 16 further comprising an input unit for inputting an answer and an answer evaluation unit for evaluating the inputted answer and displaying an evaluation result on the display unit.
18. A portable information terminal of claim 16 further comprising a display content adjustment unit for adjusting the display contents to be displayed on the display unit in such a manner that the display contents are displayed within one screen of the display unit.
19. A portable information terminal of claim 16, wherein in case that the received test preparation use information comprises a plurality of index words, translations and semantic attributes which correspond to each index word, the test preparation unit prepares learning contents of a test in which a correct translation is asked to be selected from a translation of one index word and a plurality of translations which have the same semantic attribute with regard to the one index word.
20. A portable information terminal of claim 16, wherein in case that the received test preparation use information comprises an index word and text which includes the index word, the test preparation unit searches and deletes the index word from the text and prepares learning contents of a test in which the text with the deleted index word is asked to be filled in with the index word.
21. A portable information terminal of claim 16, wherein in case that the received test preparation use information includes a plurality of index words and a translation which corresponds to one of the index words, the test preparation unit prepares learning contents of a test in which an index word corresponding to the translation is asked to be selected from said plurality of index words.
22. A portable information terminal of claim 16, wherein in case that the received test preparation use information comprises an index word and text which includes the index word and an identification mark is added to the index word in the text, the test preparation unit deletes the index word having the identification mark from the text and prepares learning contents of a test in which the text with the deleted index word is asked to be filled in with the index word.
23. A portable information terminal of claim 16, wherein, in case that the received test preparation use information comprises an index word, text which includes the index word and a plurality of other index words, the test preparation unit deletes the index word in the text and prepares learning contents of a test in which a correct index word is asked to be selected from the deleted index word and said plurality of other index words and the deleted portion of the text is asked to be filled in with the selected index word.
24. A portable information terminal of claim 16, wherein in case that the received test preparation use information comprises an index word and its translation, the test preparation unit prepares learning contents of a test in which the translation of the index word is asked to be answered.
25. A learning management server connecting an information processing apparatus and a portable information terminal through a network and comprising a communication unit for communicating with the information processing apparatus and the portable information terminal, and a first memory unit for storing first learning information which is transferred from the information processing apparatus and second learning information which is transferred from the portable information terminal, and the learning management server transfers the first learning information to the portable information terminal through the communication unit, and transfers the second learning information to the information processing apparatus through the communication unit, wherein the first and second learning information includes numbers of searches for words in an index which are used in learning and control units of the information processing apparatus and the portable information terminal use the numbers of searches for the index words to determine which index words are displayed in respective word-learning displays provided by the information processing apparatus and the portable information terminal.
26. A learning management server of claim 25, wherein the learning management server further comprises a second memory unit, and in case that a user purchases first and second learning contents, the learning management server is connected through the network to a content server which stores the first and second learning contents, the first and second learning contents are acquired from the content server and stored in the second memory unit, and the stored first and second learning contents are transferred to the information processing apparatus and the portable information terminal, respectively.
27. A learning management server of claim 25, wherein the learning management server further comprises a third memory unit for storing pre-registered user information, and in case that the first learning information which is transferred to the first memory unit of the learning management server includes specific user information, the first learning information is transferred only to a portable information terminal which corresponds to user information that is stored in the third memory unit and coincides with the specific user information.