1. A liquid crystal display device comprising:
a liquid crystal panel including,
(A) a first substrate,
(B) a second substrate opposite to and spaced from the first substrate,
(C) a color filter having a first plurality of grooves spaced from each other along a surface of the color filter; and
(D) a liquid crystal layer provided in a space between the first substrate and the second substrate, the liquid crystal layer having a built-in touch sensor switch in a display area operable to cause an image to be displayed by the liquid crystal panel, the touch sensor switch including (i) a first touch electrode provided on a surface of the first substrate facing the second substrate, and (ii) a second touch electrode provided on a surface of the second substrate facing the first substrate and spaced from and facing the first touch electrode,
wherein,
the first touch electrode and the second touch electrode are operable to contact each other when the liquid crystal panel is deformed by an external pressure,
liquid crystal molecules in the liquid crystal layer are oriented by (i) a first liquid crystal orientation film provided on the surface of the first substrate facing the second substrate and (ii) a second liquid crystal orientation film provided on the surface of the second substrate facing the first substrate,
the first touch electrode is provided on the surface of the first substrate facing the second substrate and covering a surface of a concave and convex area of an inter-layer insulating film, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area, the second plurality of grooves being complementary to the first plurality of grooves in the surface of the color filter, and
the surface of the first touch electrode includes an orientation material, the orientation material exposing a top face of a convex part of the concave and convex area in the first touch electrode.
2. The liquid crystal display device according to claim 1, wherein the second touch electrode is provided on the surface of the second substrate facing the first substrate and covers at least a top face of an elastic member protruding convexly.
3. The liquid crystal display device according to claim 2, wherein,
the liquid crystal panel includes a column spacer provided in the space between the first substrate and the second substrate, and
a height of the elastic member provided on the second substrate is lower than the column spacer.
4. The liquid crystal display device according to claim 1, wherein in a state where the first touch electrode is covered on the concave and convex area, a width of the convex part is 0.5 to 5.0 \u03bcm, and a distance between the top face of the convex part and a bottom face of the concave part is 0.5 to 2.0 \u03bcm.
5. A manufacturing method of a liquid crystal display device, the method comprising the step of:
forming a liquid crystal panel including a first substrate, a second substrate opposite to and spaced from the first substrate, a color filter having a first plurality of grooves spaced from each other along a surface of the color filter, and a liquid crystal layer provided in a space between the first substrate and the second substrate,
wherein,
the liquid crystal panel forming step includes the steps of,
(A) forming a touch sensor switch in a display area operable to cause an image to be displayed in the liquid crystal panel;
(B) forming a first liquid crystal orientation film on a surface of the first substrate facing the second substrate, and
(C) forming a second liquid crystal orientation film on a surface of the second substrate facing the first substrate,
the touch sensor switch forming step includes the steps of,
(A) forming a first touch electrode on the surface of the first substrate facing the second substrate, and
(B) forming a second touch electrode on the surface of the second substrate facing the first substrate, the second touch electrode spaced from and facing the first touch electrode,
in the first touch electrode forming step, the first touch electrode is formed on the surface of the first substrate facing the second substrate and covering a surface of a concave and convex area of an inter-layer insulation film, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area the second plurality of grooves being complementary to the first plurality of grooves in the surface of the color filter, and
in the first liquid crystal orientation film forming step, the first liquid crystal orientation film is formed by applying an orientation material such that a surface of a top face of a convex part of the concave and convex area in the first touch electrode is exposed.
6. A display device comprising:
a display panel including a first substrate, a second substrate spaced from and opposite to the first substrate, a color filter having a first plurality of grooves spaced from each other along a surface of the color filter, and a touch sensor switch, the touch sensor switch including (i) a first touch electrode provided on a surface of the first substrate facing the second substrate, and (ii) a second touch electrode provided on a surface of the second substrate facing the first substrate and spaced from and facing the first touch electrode,
wherein,
the first touch electrode and the second touch electrode are operable to contact each other when the touch panel is deformed by an external pressure, and
the first touch electrode is provided on the surface of the first substrate facing the second substrate and covering a surface of a concave and convex area of an inter-layer insulation film, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area, the second plurality of grooves corresponding to the first plurality of grooves in the surface of the color filter, and
the surface of the first touch electrode includes an application film formed to expose a surface of a top face of a convex part of the concave and convex area in the first touch electrode.
7. An information input device comprising:
a touch panel including a first substrate, a second substrate spaced from and opposite to the first substrate, a color filter having a first plurality of grooves spaced from each other along a surface of the color filter, and a touch sensor switch, the touch sensor switch including (i) a first touch electrode provided on a surface of the first substrate facing the second substrate, and (ii) a second touch electrode provided on a surface of the second substrate facing the first substrate and spaced from and facing the first touch electrode,
wherein,
the first touch electrode and the second touch electrode are operable to contact each other when the touch panel is deformed by an external pressure, and
the first touch electrode is provided on the surface of the first substrate facing the second substrate and covering a surface of a concave and a convex area, the concave and convex area including a second plurality of grooves spaced from each other along the concave and convex area, the second plurality of grooves being complementary to the first plurality of grooves in the surface of the color filter, and
the surface of the first touch electrode includes an application film formed to expose a surface of a top face of a convex part of the concave and convex area in the first touch electrode.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
I claim:
1. An installation for processing wafers in at least one clean room, comprising:
a multiplicity of production units for carrying out individual production steps on the wafers;
a measuring station having at least one measuring unit for inspecting the wafers and an unloading station;
a transport system connecting said production units to said measuring station, said transport system feeding and removing the wafers to and from said production units and said measuring units, said unloading station delivering the wafers to said transport system; and
transport containers transportable on said transport system including first transport containers for filling with defect free wafers from said measuring station, second transport containers for filling with the wafers to be reworked, and third transport containers for filling with rejected wafers, said first, second and third transport containers being marked differently, said first, second and third transport containers able to be loaded from said measuring station separately from one another via said unloading station, and said second transport containers filled with the wafers to be reworked can be fed to said production units for carrying out reworking processes.
2. The installation according to claim 1, wherein said unloading station has separate unloading ports and said first, second and third transport containers can be loaded via said separate unloading ports.
3. The installation according to claim 2, wherein said first, second and third transport containers are marked with different colors.
4. The installation according to claim 3, wherein said first transport containers are marked with a green color, said second transport containers are marked with a yellow color, and said third transport containers are marked with a red color.
5. The installation according to claim 3, wherein said unloading ports are marked with said different colors of said transport containers assigned to said unloading ports.
6. The installation according to claim 1, including a storage system for temporarily storing at least one of said second transport containers and said third transport containers.
7. The installation according to claim 6, wherein said storage system has storage devices and said second and third transport containers are temporarily stored in separate ones of said storage devices.
8. The installation according to claim 6, wherein at least one of the wafers to be reworked in said second transport containers and the rejected wafers in said third transport containers are removed from storage manually at said unloading ports of said unloading stations.
9. The installation according to claim 1, wherein the wafers have markings for identifying them.
10. The installation according to claim 9, wherein the wafers supplied in predetermined batch sizes to said measuring station are singularized in said measuring station.
11. The installation according to claim 10, wherein the wafers are processed individually in said measuring station, and said at least one measuring unit is one of a plurality of measuring units.
12. The installation according to claim 1, wherein said measuring station is one of a plurality of measuring stations.