1. A method for a broadcast client of a wireless communication network, the method comprising:
receiving broadcast content via broadcast delivery on a first resource associated with a first set of carriers;
determining, during unicast idle mode, a second set of carriers comprising neighbor carriers in a current cell;
modifying handoff priorities of the first set of carriers and the second set of carriers based on membership of each carrier in a common set of carriers comprising the first and second sets of carriers and further based on a priority order specified by the wireless communication network; and
determining whether to hand over to at least one carrier in one of the first and second sets of carriers based on a handoff decision that takes into account the modified handoff priorities.
2. The method of claim 1, further comprising determining a third set of carriers comprising carriers in the second set of carriers not included in the first set of carriers,
wherein the common set of carriers comprises an intersection of the first set of carriers and the second set of carriers, and modifying handoff priorities comprises modifying the handoff priorities such that carriers in the common set have a highest priority, carriers in the third set have a lowest priority, and relative priorities of carriers within the common set follow a priority order specified by a wireless communication network.
3. The method of claim 1, further comprising receiving content in a multicarrier reception mode.
4. The method of claim 3, wherein the at least one carrier is determined based on selecting a first carrier based on the modified handoff priorities, and further based on selecting a second carrier based on the broadcast content being unavailable on the first carrier.
5. The method of claim 1, wherein a desired set of content comprises the broadcast content and a previously indicated desired content, and determining whether to hand over is further based on availability of the desired set of content on the at least one carrier.
6. The method of claim 1, further comprising receiving additional multimedia content from the at least one carrier.
7. The method of claim 1, wherein the determining whether to hand over is further based on a configuration parameter received over the air.
8. The method of claim 1, further comprising handing over to at the least one carrier upon a determination to hand over.
9. An apparatus capable of both unicast and broadcast signaling, the apparatus comprising:
at least one transceiver configured to:
receive broadcast content via broadcast delivery on a first resource associated with a first set of carriers;
at least one processor configured to:
determine, during unicast idle mode, a second set of carriers comprising neighbor carriers in a current cell,
modify handoff priorities of the first set of carriers and the second set of carriers based on membership of each carrier in a common set of carriers comprising the first and second sets of carriers and further based on a priority order specified by the wireless communication network, and
determine whether to hand over to at least one carrier in one of the first and second sets of carriers based on a handoff decision that takes into account the modified handoff priorities; and
a memory coupled to the at least one processor for storing data.
10. The apparatus of claim 9, determining a third set of carriers comprising carriers in the second set of carriers not included in the first set of carriers,
wherein the common set of carriers comprises an intersection of the first set of carriers and the second set of carriers, and modifying handoff priorities comprises modifying the handoff priorities such that carriers in the common set have a highest priority, carriers in the third set have a lowest priority, and relative priorities of carriers within the common set follow a priority order specified by a wireless communication network.
11. The apparatus of claim 9, wherein the transceiver is further configured to receive content in a multicarrier reception mode.
12. The apparatus of claim 11, wherein the at least one carrier is determined based on selecting a first carrier based on the modified handoff priorities, and further based on selecting a second carrier based on the broadcast content being unavailable on the first carrier.
13. The apparatus of claim 9, wherein a desired set of content comprises the broadcast content and a previously indicated desired content, and to determine whether to hand over is further based on availability of the desired set of content on the at least one carrier.
14. The apparatus of claim 9, wherein the transceiver is further configured to receive additional multimedia content from the at least one carrier.
15. The apparatus of claim 9, wherein to determine whether to hand over is further based on a configuration parameter received over the air.
16. The apparatus of claim 9, wherein the at least one processor is further configured to hand over to at the least one carrier upon a determination to hand over.
17. An apparatus capable of both unicast and multicast signaling, the apparatus comprising:
means for receiving broadcast content via broadcast delivery on a first resource associated with a first set of carriers;
means for determining, during unicast idle mode, a second set of carriers comprising neighbor carriers in a current cell;
means for modifying handoff priorities of the first set of carriers and the second set of carriers based on membership of each carrier in a common set of carriers comprising the first and second sets of carriers and further based on a priority order specified by the wireless communication network; and
means for determining whether to hand over to at least one carrier in one of the first and second sets of carriers based on a handoff decision that takes into account the modified handoff priorities.
18. The apparatus of claim 17, further comprising means for determining a third set of carriers comprising carriers in the second set of carriers not included in the first set of carriers,
wherein the common set of carriers comprises an intersection of the first set of carriers and the second set of carriers, and modifying handoff priorities comprises modifying the handoff priorities such that carriers in the common set have a highest priority, carriers in the third set have a lowest priority, and relative priorities of carriers within the common set follow a priority order specified by a wireless communication network.
19. The apparatus of claim 17, further comprising means for receiving content in a multicarrier reception mode.
20. The apparatus of claim 19, wherein the at least one carrier is determined based on selecting a first carrier based on the modified handoff priorities, and further based on selecting a second carrier based on the broadcast content being unavailable on the first carrier.
21. The apparatus of claim 17, wherein a desired set of content comprises the broadcast content and a previously indicated desired content, and the means for determining whether to hand over is further configured for determining based on availability of the desired set of content on the at least one carrier.
22. The apparatus of claim 17, further comprising means for receiving additional multimedia content from the at least one carrier.
23. The apparatus of claim 17, wherein the means for determining whether to hand over is further configured for determining based on a configuration parameter received over the air.
24. The apparatus of claim 17, further comprising means for handing over to at the least one carrier upon a determination to hand over.
25. A computer program product, comprising:
a non-transitory computer-readable storage medium comprising code for causing at least one computer to:
receive broadcast content via broadcast delivery on a first resource associated with a first set of carriers;
determine, during unicast idle mode, a second set of carriers comprising neighbor carriers in a current cell;
modify handoff priorities of the first set of carriers and the second set of carriers based on membership of each carrier in a common set of carriers comprising the first and second sets of carriers and further based on a priority order specified by the wireless communication network; and
determine whether to hand over to at least one carrier in one of the first and second sets of carriers based on a handoff decision that takes into account the modified handoff priorities.
26. The computer program product of claim 25, wherein the non-transitory computer-readable storage medium further comprises code for causing the at least one computer to determine a third set of carriers comprising carriers in the second set of carriers not included in the first set of carriers,
wherein the common set of carriers comprises an intersection of the first set of carriers and the second set of carriers, and to modify handoff priorities comprises to modify the handoff priorities such that carriers in the common set have a highest priority, carriers in the third set have a lowest priority, and the relative priorities of carriers within the common set follow a priority order specified by a wireless communication network.
27. The computer program product of claim 25, wherein the non-transitory computer-readable storage medium further comprises code for causing the at least one computer to receive content in a multicarrier reception mode.
28. The computer program product of claim 27, wherein the at least one carrier is determined based on selecting a first carrier based on the modified handoff priorities, and further based on selecting a second carrier based on the broadcast content being unavailable on the first carrier.
29. The computer program product of claim 25, wherein a desired set of content comprises the broadcast content and a previously indicated desired content, and to determine whether to hand over is further based on availability of the desired set of content on the at least one carrier.
30. The computer program product of claim 25, wherein the non-transitory computer-readable storage medium further comprises code for causing the at least one computer to receive additional multimedia content from the at least one carrier.
31. The computer program product of claim 25, wherein to determine whether to hand over is further based on a configuration parameter received over the air.
32. The computer program product of claim 25, wherein the non-transitory computer-readable storage medium further comprises code for causing the at least one computer to hand over to at the least one carrier upon a determination to hand over.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for creating a microlithographic pattern on a workpiece sensitive to radiation using a spatial light modulator having a multitude of modulating elements, the modulating elements having a piston action, including:
reading from an information storage device a pattern description,
extracting from the pattern description a sequence of partial patterns,
converting said partial patterns to modulator signals,
operating at least some groups of the modulating elements so that adjoining piston elements are driven to opposing phases to produce a desired real amplitude as a sum of complex amplitudes,
emitting electromagnetic radiation in the wavelength range from extreme ultraviolet (EUV) to infrared (IR),
illuminating by said radiation the spatial light modulator,
projecting the illumination from the spatial light modulator onto the workpiece forming a partial image, and
moving said workpiece andor projection system relative to each other, coordinating the movement of the workpiece, the operating groups of modulating elements and intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns.
2. The method of claim 1, wherein the electromagnetic radiation is emitted by a pulsed laser.
3. The method of claim 2, wherein the pulse length is approximately 10 ns.
4. The method of claim 2, wherein the pulse length is short enough to freeze the moving of the workpiece andor projection system while illuminating the workpiece.
5. The method of claim 1, wherein the desired real amplitude takes on more than two discrete values.
6. The method of claim 1, wherein the desired real amplitude takes on intermediate values, between an off-state and an on-state.
7. A system adapted to carry out the method of claim 1, the system including:
a data processing subsystem adapted to carry out the reading, the extracting, the converting, the moving and the coordinating,
an SLM subsystem under control of the data processing subsystem adapted to carry out the operating the modulating elements,
an illumination source under control of the data processing subsystem adapted to carry out the emitting,
a projection subsystem receiving said radiation from the illumination source adapted to carry out the illuminating and the projecting,
a relative motion subsystem under control of the data processing subsystem adapted to carry out the moving said workpiece andor projection system relative to each other.
8. A method for creating a microlithographic pattern on a workpiece sensitive to radiation using a spatial light modulator having a multitude of modulating elements, the modulating elements having a piston action, including:
reading from an information storage device a digital pattern description,
extracting from the pattern description a sequence of partial patterns,
converting said partial patterns to modulator signals,
modulating groups of the piston elements to positions corresponding to an on-state, an off-state and at least one intermediate value,
emitting electromagnetic radiation in the wavelength range from extreme ultraviolet (EUV) to infrared (IR),
illuminating by said radiation the spatial light modulator,
projecting the illumination from of the spatial light modulator onto the workpiece forming a partial image, and
moving said workpiece andor projection system relative to each other, coordinating the movement of the workpiece, the modulate groups of piston elements and intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns.
9. The method of claim 8, wherein the electromagnetic radiation is emitted by a pulsed laser.
10. The method of claim 9, wherein the pulse length is approximately 10 ns.
11. A system adapted to carry out the method of claim 9, the system including:
a data processing subsystem adapted to carry out the reading, the extracting, the converting, the moving and the coordinating,
an SLM subsystem under control of the data processing subsystem adapted to carry out the modulating the groups of the piston elements,
an illumination source under control of the data processing subsystem adapted to carry out the emitting,
a projection subsystem receiving said radiation from the illumination source adapted to carry out the illuminating and the projecting,
a relative motion subsystem under control of the data processing subsystem adapted to carry out the moving said workpiece andor projection system relative to each other.
12. A method for creating a microlithographic pattern on a workpiece sensitive to radiation using a spatial light modulator having a multitude of modulating elements, the modulating elements having a piston action, comprising the steps of:
reading from an information storage device a pattern description,
extracting from the pattern description a sequence of partial patterns,
converting said partial patterns to modulator signals,
modulating groups of the piston elements to positions that produce real amplitude values of \u22121 to 0 to +1,
emitting electromagnetic radiation in the wavelength range from extreme ultraviolet (EUV) to infrared (IR),
illuminating by said radiation the spatial light modulator,
projecting the illumination from of the spatial light modulator onto the workpiece forming a partial image, and
moving said workpiece andor projection system relative to each other, coordinating the movement of the workpiece, the modulate groups of piston elements and intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns.
13. The method of claim 12, wherein the pulse length is short enough to freeze the motion of the stage while the image is projected onto the workpiece.
14. A method of translating an edge placement value to a mirror modulation signal to produced in a microlithographic pattern on a workpiece sensitive to radiation using a spatial light modulator having a multitude of modulating elements, including:
reading from an information storage device a pattern description,
extracting from the pattern description a sequence of partial patterns,
converting said partial patterns to modulating signals, including
calculating a desired edge placement in an area of the partial pattern and
applying a non-linear transfer function that translates the desired edge placement value into a modulating signal,
modulating the elements using the modulating signal to positions that produce the partial patterns,
emitting electromagnetic radiation in the wavelength range from extreme ultraviolet (EUV) to infrared (IR),
illuminating by said radiation the spatial light modulator,
projecting the illumination from of the spatial light modulator onto the workpiece forming a partial image, and
moving said workpiece andor projection system relative to each other, coordinating the movement of the workpiece, the modulate groups of piston elements and intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns.
15. The method of claim 14, wherein applying the non-linear transfer function includes accepting the desired edge displacement value in a precision of n bit and producing the modulating signal in a precision of at least n+3 bits.
16. The method of claim 14, wherein applying the non-linear transfer function includes processing the desired edge displacement value through a semiconductor switch to select a modulating signal from a non-linear set of modulating signals corresponding to particular edge displacement values.
17. The method of claim 14, wherein modulating the elements includes driving elements in groups, such that adjoining elements in the group collectively produce the desired edge placement.
18. A method for creating a microlithographic pattern on a workpiece sensitive to radiation using a spatial light modulator having a multitude of modulating element groups, including:
reading from an information storage device a digital pattern description,
extracting from the pattern description a sequence of partial patterns,
converting said partial patterns to modulator signals,
actuating a piston motion of at least one element in a group of the elements using the modulator signal to select among at least an on-state and an off-state, differentiated by diffractive effects among adjoining elements,
emitting electromagnetic radiation in the wavelength range from extreme ultraviolet (EUV) to infrared (IR),
illuminating by said radiation the spatial light modulator,
projecting the illumination from of the spatial light modulator onto the workpiece forming a partial image, and
moving said workpiece andor projection system relative to each other, coordinating the movement of the workpiece, the modulate groups of piston elements and intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns.
19. The method of claim 18, wherein actuating the piston motion selects among at least the on-state, the off-state and an intermediate value, differentiated by the diffractive effects among the adjoining elements.
20. A system adapted to carry out the method of claim 18, the system including:
a data processing subsystem adapted to carry out the reading, the extracting, the converting, the moving and the coordinating,
an SLM subsystem under control of the data processing subsystem adapted to carry out the actuating the piston motion of the at least one element in the group of elements, an illumination source under control of the data processing subsystem adapted to carry out the emitting,
a projection subsystem receiving said radiation from the illumination source adapted to carry out the illuminating and the projecting,
a relative motion subsystem under control of the data processing subsystem adapted to carry out the moving said workpiece andor projection system relative to each other.