1. A method for preventing plasma charging damages comprising:
sequentially forming a gate insulating layer, a gate electrode, and a source and drain region on a substrate;
depositing an etching stop layer on the substrate;
depositing a premetallic dielectric layer and a charge preservation layer on the entire surface of the etching stop layer, wherein the charge preservation layer comprises polysilicon;
depositing an insulating layer on the surface of the resulting structure; and
forming an metallic interconnect on the insulating layer.
2. The method as defined by claim 1, wherein the etching stop layer comprises a silicon nitride layer.
3. The method as defined by claim 1, wherein the premetallic dielectric layer comprises BPSG.
4. The method as defined by claim 1, wherein the premetallic dielectric layer is deposited after the deposition of the charge preservation layer.
5. The method as defined by claim 1, wherein the premetallic dielelectric layer is deposited before the deposition of the charge preservation layer.
6. The method as defined by claim 1, wherein the charge preservation layer is deposited with a thickness between about 150 \u212b and about 1000 \u212b.
7. The method as defined by claim 1, wherein the premetallic dielectric layer is deposited both before and after the deposition of the charge preservation layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A terminal cover having flexibility to cover a terminal which supplies power to an electromotive element stored in a sealed container, the terminal cover comprising:
a storage section which is depressed so as to contain a cluster electronically connected to the terminal and whose terminal-side face opens; and
a recessed portion which is formed in a side wall inner portion connected to an opening of the storage section and which is to engage with a protruding portion protruding from the cluster,
an opening edge of the storage section being provided with a cut which corresponds to a terminal-side position of the recessed portion.
2. The terminal cover according to claim 1, further comprising:
a holding portion which holds a tip of a guard wound around peripheries of lead wires extending from the cluster.
3. A sealed type electromotive compressor whose terminal is covered with the terminal cover according to claim 1.
4. A refrigerant cycle device whose refrigerant circuit is constituted of the sealed type electromotive compressor according to claim 3.
5. A sealed type electromotive compressor whose terminal is covered with the terminal cover according to claim 2.
6. A refrigerant cycle device whose refrigerant circuit is constituted of the sealed type electromotive compressor according to claim 5.