1. A method for step-and-align interference lithography, comprising the steps of:
(a) providing a carrier capable of moving in a first axial direction and a second axial direction as well as rotating about the same;
(b) providing an interference light beam while detecting a displacement error of the interference light beam relating to the moving of the carrier;
(b1) disposing a position sensor on the carrier;
(b2) projecting a first beam of the interference light beam on the position sensor while forming a lighting area thereon and registering a first position relating to the lighting area;
(b3) controlling the carrier to move a specific distance along the first axial direction while registering a second position relating to a lighting area being formed by projecting a second beam of the interference light beam on the position sensor;
(b4) calculating a position difference between the first and the second position with respect to the second axial direction; and
(b5) calculating the ratio between the position difference and the specific distance so as to obtain the displacement error basing upon the obtained ratio;
(c) enabling the interference light beam to project on a workpiece mounted on the carrier for forming a specific interference-patterned region on the workpiece;
(d) performing a position adjustment according to the displacement error in a stepwise manner so as to prepare the workpiece for a next formation of interference-patterned region; and
(e) repeating the execution of the step (c) to step (d) for multiple times so as to form a large-area interference pattern by stitching the so-generated interference-patterned regions together.
2. The method of claim 1, wherein the step (d) further comprises the steps of:
(d1) basing on the displacement error to rotate the carrier by a specific angle; and
(d2) adjusting the position of the carrier for interference lithography in a stepwise manner.
3. The method of claim 1, wherein the step (d) further comprises the steps of:
(d1) driving the carrier to move along the first axial direction in a stepwise manner; and
(d2) driving the carrier to move along the second axial direction in a stepwise manner for compensating the displacement error.
4. The method of claim 1, wherein the position adjustment of the carrier includes a delicate adjustment and a coarse adjustment.
5. The method of claim 1, wherein the diameter of the lighting region being detected is equal to the width of a sensing area of the position sensor.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A battery pack capacity adjustment apparatus installed in a vehicle, which executes a capacity adjustment for a battery pack constituted by connecting in series a plurality of cells, comprising:
capacity adjustment circuits each provided in correspondence to one of the plurality of cells to execute the capacity adjustment by discharging the corresponding cell when a voltage at the corresponding cell exceeds a predetermined bypass engaging voltage;
a voltage variance abnormality detection device that detects a voltage variance abnormality manifesting among the plurality of cells;
a vehicle stop predicting device that predicts that the vehicle, which is currently traveling, is to stop; and
a chargedischarge control device that controls chargedischarge of the battery pack so as to increase cells with voltages thereof exceeding the predetermined bypass engaging voltage if the voltage variance abnormality detection device detects a voltage variance abnormality among the plurality of cells and the vehicle stop predicting device predicts that the traveling vehicle is to stop.
2. A battery pack capacity adjustment apparatus according to claim 1, further comprising:
a vehicle speed detection device that detects a speed of the vehicle, wherein:
the vehicle stop predicting device predicts that the vehicle is to stop when the vehicle speed detected by the vehicle speed detection device becomes equal to or lower than a predetermined vehicle speed.
3. A battery pack capacity adjustment apparatus according to claim 1, wherein:
the chargedischarge control device raises a target charging rate for the battery pack from a first target charging rate to a second target charging rate in order to increase the cells with the voltages thereof exceeding the predetermined bypass engaging voltage.
4. A battery pack capacity adjustment apparatus according to claim 3, wherein:
the predetermined bypass engaging voltage is a voltage higher than an average voltage among the individual cells achieved by chargingdischarging the battery pack at the first target charging rate and also equal to or lower than an average voltage among the individual cells achieved by chargingdischarging the battery pack at the second target charging rate.
5. A battery pack capacity adjustment apparatus installed in a vehicle, which executes a capacity adjustment for a battery pack constituted by connecting in series a plurality of cells, comprising:
capacity adjustment means, each provided in correspondence to one of the plurality of cells, for executing the capacity adjustment by discharging the corresponding cell when a voltage at the corresponding cell exceeds a predetermined bypass engaging voltage;
a voltage variance abnormality detection means for detecting a voltage variance abnormality manifesting among the plurality of cells;
a vehicle stop prediction means for predicting that the vehicle, which is currently traveling, is to stop; and
a chargedischarge control means for controling chargedischarge of the battery pack so as to increase cells with voltages thereof exceeding the predetermined bypass engaging voltage if the voltage variance abnormality detection means detects a voltage variance abnormality among the plurality of cells and the vehicle stop prediction means predicts that the traveling vehicle is to stop.
6. A battery pack capacity adjustment method for executing a capacity adjustment for a plurality of cells constituting a battery pack by using capacity adjustment circuits each provided in correspondence to one of the plurality of cells to discharge the corresponding cell when a voltage at the corresponding cell exceeds a predetermined bypass engaging voltage, comprising steps for:
detecting a voltage variance abnormality among the plurality of cells;
predicting that the vehicle with the battery pack installed therein, which is currently traveling, is to stop; and
controlling chargedischarge of the battery pack so as to increase cells with voltages thereof exceeding the predetermined bypass engaging voltage when a voltage variance abnormality among the plurality of cells is detected and the traveling vehicle is predicted to stop.