1. A system for self-checkout within a store, the system having a processor and memory in a computing apparatus that:
reads a customer’s credit card number;
uses the credit card number to check whether a transaction stored under the credit card number is for a particular store from which the customer claims to have purchased one or more products;
uses the credit card number to check whether a transaction stored under the credit card number is for a particular amount equal to that of a total price plus any sales tax on items the customer claims to have purchased from the store; and
uses the credit card number to check for individual products bought by the customer from a particular store in what appears to be in a single visit by the customer to the store; and
verifies that a total weight of items carried out of the store by the customer for a single visit matches that of what a weight should be for all items that appeared to have been purchased in the single visit when checking individual products using the credit card number.
2. The system of claim 1 wherein the at least one subsystem that uses the credit card number to check whether a transaction stored under that credit card number is for a particular store comprises at least one subsystem that verifies that the transaction was made payable to a particular store having a code matching that of the transaction being checked.
3. The system of claim 1 further comprising at least one subsystem that prints a receipt for the customer if after using the credit card number to check for a particular store and check for a particular amount, it is determined the user did purchase items from the store that the user claims to have purchased.
4. The system of claim 3 wherein the at least one subsystem that reads the credit card number comprises at least one subsystem that receives a wireless signal from a user’s mobile device containing the credit card number.
5. The system of claim 1 wherein the at least one subsystem that uses the credit card number to check whether a transaction is for a particular amount or for a particular store comprises at least one subsystem that communicates with a credit card payment center located remotely from the store.
6. The system of claim 1 further comprising:
at least one subsystem that first receives from a mobile device at a payment center at least price and seller identification data of a product wherein at least the price of said product having been electronically read by the mobile device; and
at least one subsystem that charges a user for the product based upon the received price and identification data.
7. A method for self-checkout within a store, comprising:
reading a customer’s credit card number with a computing device;
using the credit card number to check, with the computing device, whether a transaction stored under the credit card number is for a particular store from which the customer claims to have purchased one or more products;
using the credit card number to check, with the computing device, whether a transaction stored under the credit card number is for a particular amount equal to that of a total price plus any sales tax on items the customer claims to have purchased from the store; and
using the credit card number to check for individual products bought by the customer from a particular store in what appears to be in a single visit by the customer to the store; and
verifying that a total weight of items carried out of the store by the customer for a single visit matches that of what a weight should be for all items that appeared to have been purchased in the single visit when checking individual products using the credit card number.
8. The method of claim 7 wherein the using the credit card number to check whether a transaction stored under that credit card number is for a particular store comprises verifying that the transaction was made payable to a particular store having a code matching that of the transaction being checked.
9. The method of claim 7 further comprising printing a receipt for the customer if after using the credit card number to check for a particular store and check for a particular amount, it is determined the user did purchase items from the store that the user claims to have purchased.
10. The method of claim 9 wherein the reading the credit card number comprises receiving a wireless signal from a user’s mobile device containing the credit card number.
11. The method of claim 7 wherein the using the credit card number to check whether a transaction is for a particular amount or for a particular store comprises communicating with a credit card payment center located remotely from the store.
12. The method of claim 7 further comprising:
first receiving from a mobile device at a payment center at least price and seller identification data of a product wherein at least the price of said product having been electronically read by the mobile device; and
charging a user for the product based upon the received price and identification data.
13. A non-transitory computer-readable medium comprising computer-readable instructions for self-checkout within a store, said computer-readable instructions comprising instructions for:
reading a customer’s credit card number;
using the credit card number to check whether a transaction stored under the credit card number is for a particular store from which the customer claims to have purchased one or more products;
using the credit card number to check whether a transaction stored under the credit card number is for a particular amount equal to that of a total price plus any sales tax on items the customer claims to have purchased from the store; and
using the credit card number to check for individual products bought by the customer from a particular store in what appears to be in a single visit by the customer to the store; and
verifying that a total weight of items carried out of the store by the customer for a single visit matches that of what a weight should be for all items that appeared to have been purchased in the single visit when checking individual products using the credit card number.
14. The computer-readable medium of claim 13 wherein the instructions for using the credit card number to check whether a transaction stored under that credit card number is for a particular store comprise instructions for verifying that the transaction was made payable to a particular store having a code matching that of the transaction being checked.
15. The computer-readable medium of claim 13 further comprising instructions for printing a receipt for the customer if after using the credit card number to check for a particular store and check for a particular amount, it is determined the user did purchase items from the store that the user claims to have purchased.
16. The computer-readable medium of claim 15 wherein the instructions for reading the credit card number comprise instructions for receiving a wireless signal from a user’s mobile device containing the credit card number.
17. The computer-readable medium of claim 13 wherein the instructions for using the credit card number to check whether a transaction is for a particular amount or for a particular store comprise instructions for communicating with a credit card payment center located remotely from the store.
18. The computer-readable medium of claim 13 further comprising instructions for:
first receiving from a mobile device at a payment center at least price and seller identification data of a product wherein at least the price of said product having been electronically read by the mobile device; and
charging a user for the product based upon the received price and identification data.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of manufacturing a semiconductor device, comprising forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a first predetermined number of times, the cycle comprising:
forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate;
forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer; and
supplying a reaction gas to the substrate, the reaction gas being different from the first precursor gas and the second precursor gas.
2. A method of manufacturing a semiconductor device, comprising forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a first predetermined number of times, the cycle comprising:
forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate;
forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer;
modifying the second layer by supplying a reaction gas to the substrate, the reaction gas being different from the first precursor gas and the second precursor gas.
3. A method of manufacturing a semiconductor device, comprising forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a first predetermined number of times, the cycle comprising:
forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate;
forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer; and
forming a third layer having a carbon concentration lower than a carbon concentration of the second layer by supplying a reaction gas to the substrate and modifying the second layer, the reaction gas being different from the first precursor gas and the second precursor gas.
4. The method of claim 1, wherein the reaction gas includes a nitriding gas.
5. The method of claim 1, wherein the reaction gas includes a nitriding gas activated by heat.
6. The method of claim 1, wherein the reaction gas includes a nitriding gas activated by plasma.
7. The method of claim 1, wherein the reaction gas includes a gas containing nitrogen and carbon.
8. The method of claim 3, wherein in the act of forming the thin film by performing the cycle the first predetermined number of times, the cycle performs in the following order:
alternately performing the act of forming the first layer and the act of forming the second layer a second predetermined number of times; and
the act of forming the third layer.
9. The method of claim 1, wherein in the act of forming the first layer, a carbon-containing gas is supplied to the substrate together with the first precursor gas.
10. The method of claim 1, wherein in the act of forming the second layer, a carbon-containing gas is supplied to the substrate together with the second precursor gas.
11. The method of claim 1, wherein in the act of supplying the reaction gas, a carbon-containing gas is supplied to the substrate together with the reaction gas.
12. A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process of forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate in a process chamber by performing a cycle a predetermined number of times, the cycle comprising:
forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate;
forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer; and
supplying a reaction gas to the substrate, the reaction gas being different from the first precursor gas and the second precursor gas.