1. A method of manufacturing a solar cell, comprising:
forming a first electrode,
forming a first thin film comprising a Group III-VI compound comprising a first Group III element and a first Group VI element on the first electrode,
forming a second thin film comprising a Group I-III compound comprising a Group I element and a second Group III element that is different from the first Group III element on the first thin film,
forming a third thin film comprising the first Group III element on the second thin film,
heat-treating the first thin film, the second thin film, and the third thin film under a gas atmosphere containing a second Group VI element that is the same or different from the first Group VI element to form a photoactive layer, and
forming a second electrode on the photoactive layer.
2. The method of claim 1, wherein the first Group III element has a higher reactivity with the second Group VI element than the second Group III element.
3. The method of claim 2, wherein the first Group III element is indium (In), and the second Group III element is gallium (Ga).
4. The method of claim 1, wherein the first Group III element is indium (In), and the second Group III element is gallium (Ga).
5. The method of claim 1, wherein the first Group VI element and the second Group VI element are the same.
6. The method of claim 5, wherein the Group VI element is selected from the group consisting of selenium (Se), tellurium (Te), sulfur (S) and combinations thereof.
7. The method of claim 1, wherein the Group I element is selected from the group consisting of copper (Cu), silver (Ag), gold (Au), and combinations thereof.
8. The method of claim 1, wherein the first thin film, the second thin film, and the third thin film are formed using deposition or sputtering.
9. The method of claim 1, wherein the gas atmosphere containing the second Group VI element is supplied at a temperature of about 400\xb0 C. to about 600\xb0 C.
10. The method of claim 1, wherein the first thin film is formed with a thickness of about 50 nm to about 100 nm.
11. The method of claim 1, wherein the first Group III element and the first Group VI element are included in an atomic ratio of about 0.66:1 to about 1:1.
12. The method of claim 1, wherein
the Group III-VI compound of the first thin film is selected from the group consisting of InSe, In2Se3, and combinations thereof,
the Group I-III compound of the second thin film comprises CuGa,
the Group III element of the third thin film is In, and
the gas atmosphere containing the second Group VI element comprises a Se-containing compound.
13. The method of claim 1, wherein the photoactive layer comprises a Group I-III-VI compound.
14. The method of claim 13, wherein the photoactive layer comprises CuInxGa1-xSe, wherein 0.1\u2266x\u22660.9.
15. The method of claim 13, wherein the photoactive layer has a single phase.
16. A solar cell manufactured according to claim 1.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. Axial piston machine having a swash plate or oblique axis which can be adjusted by means of servopistons and has a valve segment and an adjustment unit for the electrically proportional adjustment of the volumetric displacement, the adjustment unit comprising proportional magnets 12, 12\u2032 which can be activated electrically, and a control piston 2 for controlling the oil pressure which moves the servopistons, the proportional magnets 12, 12\u2032 acting on the control piston 2 along a common tappet axis, and a feedback device for feeding back the current swash plate or oblique axis valve segment position to the control piston 2 being provided, and the feedback device comprising spring levers 6, 6\u2032 and a pointer 3 which can be pivoted about an axis 5, the pointer 3 which is embodied as a two-armed lever engaging in the control piston 2 on one side of the pivot axis 5, and between the spring levers 6, 6\u2032 on the other side.
2. Axial piston machine according to claim 1, the spring levers 6, 6\u2032 being mounted on the pivot axis 5, each with a bearing shell 15, each of which is composed of two component shells which support the spring lever 6, 6\u2032 on the pivot axis at separate locations and each of which essentially encloses a half-space about the pivot axis 5.
3. Axial piston machine according to claim 1, the pointer 3 being mounted on the spring levers 6, 6\u2032.
4. Axial piston machine according to claim 1, the spring levers 6, 6\u2032 each being mounted in a fork-like fashion on the pivot axis 5, said levers being supported at two locations on the axis and enclosing the bearing of the pointer 3 between them (FIG. 4).
5. Axial piston machine according to claim 1, the pointer 3 being mounted with a fork on the pivot axis 5 so that it is supported at two locations on the axis and the fork of the pointer 3 encloses the bearings of the spring levers 6, 6\u2032 (FIG. 5).
6. Axial piston machine according to one of claim 1, the pointer head 14 and the faces 11, 11\u2032 of the spring levers on which it bears being processed separately, in particular coated, in order to reduce friction.
7. Axial piston machine according to one of claim 1, the pointer header 14 being of cylindrical construction.
8. Axial piston machine according to one of claim 1, the pointer head 14 being of spherical construction.
9. Axial piston machine according to one of claim 1, the pointer head 14 having a rectangular cross section.
10. Axial piston machine according to one of claim 1, the end of the pointer 3 which engages in the control piston 2 being of spherical construction.
11. Axial piston machine according to one of claim 1, the point where the pointer 3 engages in the control piston 2 lying outside the centre line of the piston.
12. Axial piston machine according to one of claim 1, the point where the pointer 3 engages in the control piston 2 lying on the tappet axis of the magnets 12, 12\u2032.
13. Axial piston machine according to one of claim 1, the control piston 2 having, in the longitudinal direction, a bore through which leakage oil can be conducted away.
14. Axial piston machine of claim 1 having a series of machines with different volumetric displacements and the same adjustment device being provided for all the models in the series.