What is claimed is:
1. A method of fabricating a semiconductor capacitor, comprising:
forming an impurity layer on a semiconductor substrate;
forming an interlayer insulating film on an upper surface of the impurity layer and the semiconductor substrate;
forming a contact hole through the interlayer insulating film to the impurity layer;
forming a conductive plug in the contact hole;
forming a metal film pattern on the conductive plug;
forming an irregularity on a surface of the metal film pattern;
forming a dielectric substance film on the irregular surface of the metal film pattern; and
forming a metal electrode on the dielectric substance film.
2. The method according to claim 1, wherein a material of the metal film pattern comprises one of Ti, Zr, Co, Ni, Mo, W, Pt, Ta, Nb, WN and TiN.
3. The method according to claim 2, wherein forming the irregularity on the surface of the metal film pattern comprises:
forming a polysilicon layer on the surface of the metal film pattern;
forming a silicide layer by a silicide reaction at an interface between the polysilicon layer and the metal film pattern;
removing the polysilicon layer; and
removing the silicide layer.
4. The method according to claim 3, wherein a thickness of the polysilicon layer is greater than about 10 .
5. The method according to claim 4, wherein a material of the metal film pattern comprises W.
6. The method according to claim 5, wherein forming the silicide layer comprises annealing at a temperature of between about 600 C. and about 1300 C.
7. The method according to claim 6, further comprising:
annealing the metal film pattern in one of an N2 plasma, an NH3 plasma, an N2 atmosphere and an NH3 atmosphere, after removing the silicide layer.
8. The method according to claim 4, wherein a material of the metal film pattern comprises Pt.
9. The method according to claim 8, wherein forming the silicide layer comprises annealing at a temperature of between about 400 C. and about 1000 C.
10. The method according to claim 4, wherein a material of the metal film pattern comprises Ti.
11. The method according to claim 11, wherein forming the silicide layer comprises annealing at a temperature of between about 500 C. and about 1100 C.
12. The method according to claim 11, further comprising:
annealing the metal film pattern in one of an N2 plasma, an NH3 plasma, an N2 atmosphere, and an NH3 atmosphere, after removing the silicide layer.
13. The method according to claim 1, wherein a material of the dielectric substance film comprises NO.
14. The method according to claim 1, wherein a material of the dielectric substance film comprises a ferroelectric substance.
15. The method according to claim 14, wherein the ferroelectric substance comprises one of NO, BaTiO3, SrTiO3, PbZrO3, and PbTiO3.
16. The method according to claim 1, wherein a material of the metal electrode comprises one of T, Al, Mo, Pt, Ru, Ir, RuO2, IrO2, Os, Rh, and Pd.
17. A method of fabricating a semiconductor capacitor having a substrate and an impurity layer on the substrate, the method comprising:
forming a conductive plug in contact with the impurity layer;
forming a metal film pattern on the conductive plugs, the metal film pattern having an irregular surface; and
forming a dielectric substance film on the metal film pattern.
18. The method according to claim 17, further comprising:
forming a metal electrode of the dielectric substance film.
19. A semiconductor capacitor, comprising:
a semiconductor substrate including an impurity layer;
a conductive plug contacting the impurity layer of the substrate;
a metal film pattern contacting the conductive plug; and
a dielectric substance film contacting the metal film pattern.
20. The semiconductor according to claim 19, further comprising:
a metal electrode contacting the dielectric substance film.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A lubricating apparatus for an internal combustion engine, comprising:
a tank body attached to an end face of an internal combustion engine crankcase;
an oil pump case attached to an end face of the tank body, the oil pump case housing an oil pump; and
a tank cover attached to the tank body, the tank cover covering the oil pump case;
wherein an oil discharge passage extending from the oil pump is provided straddling the oil pump case and the tank body;
a direction of extension of the oil discharge passage is changed in the tank body such that the oil discharge passage further extends, in the tank body, in parallel with a junction plane between the oil pump case and the tank body;
an opening for pressure reception by relief valve is provided in the oil discharge passage portion extending in parallel with the junction plane;
an inside end portion of the relief valve is fitted into the opening in a direction in which the oil pump case is attached; and
by attaching the oil pump case such that an outside end portion of the relief valve is held by a portion of the oil pump case, the relief valve is fixed between the tank body and the oil pump case.
2. The lubricating apparatus for an internal combustion engine according to claim 1, wherein the tank body includes an AC generator cover for covering the AC generator, a forward projecting portion of a crankshaft and a driven gear for a starter.
3. The lubricating apparatus for an internal combustion engine according to claim 1, wherein said oil pump includes a scavenging pump case including a scavenging pump and a feed pump case including a feed pump being operatively connected to the tank body with a pump shaft extending therethrough, said pump shaft being operatively connected to a crankshaft.
4. The lubricating apparatus for an internal combustion engine according to claim 3, and further including an inner rotor of the scavenging pump being coupled to the pump shaft and being operatively provided within the scavenging pump case.
5. The lubricating apparatus for an internal combustion engine according to claim 4, and further including an outer rotor of the scavenging pump being coupled to the pump shaft and being rotatably mounted over an outer circumference of the inner rotor.
6. The lubricating apparatus for an internal combustion engine according to claim 3, and further including an inner rotor of the feed pump being coupled to the pump shaft and being operatively provided within the feed pump case.
7. The lubricating apparatus for an internal combustion engine according to claim 6, and further including an outer rotor of the feed pump being coupled to the pump shaft and being rotatably mounted over an outer circumference of the inner rotor.
8. The lubricating apparatus for an internal combustion engine according to claim 1, wherein the relief valve is installed by fitting an inside end portion substantially horizontally into the opening for the pressure reception by the relief valve and installing a scavenging pump case wherein an outside end portion of the relief valve is held by the scavenging pump case.
9. The lubricating apparatus for an internal combustion engine according to claim 1, wherein the relief valve is disposed to be offset a predetermined distance and not aligned relative to the oil pump.
10. The lubricating apparatus for an internal combustion engine according to claim 1, and further including an oil cooler operatively positioned relative to the tank body for cooling the oil disposed therein.
11. A lubricating apparatus for an internal combustion engine, comprising:
a tank body attached to an end face of an internal combustion engine crankcase;
an oil pump case attached to an end face of the tank body, the oil pump case housing an oil pump; and
a tank cover attached to the tank body, the tank cover covering the oil pump case;
an oil discharge passage extending from the oil pump and straddling the oil pump case and the tank body;
a relief valve;
an opening for the relief valve being provided in the oil discharge passage portion extending in parallel with the junction plane;
an inside end portion of the relief valve being fitted into the opening; and
an outside end portion of the relief valve being held by a portion of the oil pump case, the relief valve being fixed between the tank body and the oil pump case.
12. The lubricating apparatus for an internal combustion engine according to claim 11, wherein the tank body includes an AC generator cover for covering the AC generator, a forward projecting portion of a crankshaft and a driven gear for a starter.
13. The lubricating apparatus for an internal combustion engine according to claim 11, wherein said oil pump includes a scavenging pump case including a scavenging pump and a feed pump case including a feed pump being operatively connected to the tank body with a pump shaft extending therethrough, said pump shaft being operatively connected to a crankshaft.
14. The lubricating apparatus for an internal combustion engine according to claim 13, and further including an inner rotor of the scavenging pump being coupled to the pump shaft and being operatively provided within the scavenging pump case.
15. The lubricating apparatus for an internal combustion engine according to claim 14, and further including an outer rotor of the scavenging pump being coupled to the pump shaft and being rotatably mounted over an outer circumference of the inner rotor.
16. The lubricating apparatus for an internal combustion engine according to claim 13, and further including an inner rotor of the feed pump being coupled to the pump shaft and being operatively provided within the feed pump case.
17. The lubricating apparatus for an internal combustion engine according to claim 16, and further including an outer rotor of the feed pump being coupled to the pump shaft and being rotatably mounted over an outer circumference of the inner rotor.
18. The lubricating apparatus for an internal combustion engine according to claim 11, wherein the relief valve is installed by fitting an inside end portion substantially horizontally into the opening for the relief valve and installing a scavenging pump case wherein an outside end portion of the relief valve is held by the scavenging pump case.
19. The lubricating apparatus for an internal combustion engine according to claim 11, wherein the relief valve is disposed to be offset a predetermined distance and not aligned relative to the oil pump.
20. The lubricating apparatus for an internal combustion engine according to claim 11, and further including an oil cooler operatively positioned relative to the tank body for cooling the oil disposed therein.