1. An apparatus comprising:
a high power excimer or molecular fluorine gas discharge laser DUV light source system comprising:
a pulse stretcher comprising:
an optical delay line mirror,
an optical delay line mirror gas purging assembly comprising:
a purging gas supply system directing purging gas across a face of the optical delay line mirror.
2. The apparatus of claim 1 further comprising:
the optical delay line mirror comprising a plurality of optical delay line mirrors;
the purging gas supply system directing purging gas across a face of each of the plurality of optical delay line mirrors.
3. The apparatus of claim 1 further comprising:
the purging gas supply system comprising:
a purging gas supply line;
a purging gas distributing and directing mechanism directing purging gas across the face of the respective optical delay mirror.
4. The apparatus of claim 2 further comprising:
the purging gas supply system comprising:
a purging gas supply line;
a purging gas distributing and directing mechanism directing purging gas across the face of the respective optical delay mirror.
5. The apparatus of claim 1 further comprising:
the purging gas supply system comprising:
a purging gas supply line;
a purging gas distribution manifold and a baffle arrangement directing purging gas across the face of the respective optical delay path mirror.
6. The apparatus of claim 2 further comprising:
the purging gas supply system comprising:
a purging gas supply line;
a purging gas distribution manifold and a baffle arrangement directing purging gas across the face of the respective optical delay path mirror.
7. The apparatus of claim 3 further comprising:
the purging gas supply system comprising:
a purging gas supply line;
a purging gas distribution manifold and a baffle arrangement directing purging gas across the face of the respective optical delay path mirror.
8. The apparatus of claim 4 further comprising:
the purging gas supply system comprising:
a purging gas supply line;
a purging gas distribution manifold and a baffle arrangement directing purging gas across the face of the respective optical delay path mirror.
9. The apparatus of claim 5 further comprising:
the baffle comprising a light transmitting opening exposing a respective optical delay path mirror to a light beam in the delay path.
10. The apparatus of claim 6 further comprising:
the baffle comprising a light transmitting opening exposing a respective optical delay path mirror to a light beam in the delay path.
11. The apparatus of claim 7 further comprising:
the baffle comprising a light transmitting opening exposing a respective optical delay path mirror to a light beam in the delay path.
12. The apparatus of claim 8 further comprising:
the baffle comprising a light transmitting opening exposing a respective optical delay path mirror to a light beam in the delay path.
13. The apparatus of claim 5 further comprising:
the distribution manifold comprising:
a top plate and a bottom plate forming internal channels when joined together connecting a purging gas inlet plenum to gas manifold gas distribution openings.
14. The apparatus of claim 6 further comprising:
the distribution manifold comprising:
a top plate and a bottom plate forming internal channels when joined together connecting a purging gas inlet plenum to gas manifold gas distribution openings.
15. The apparatus of claim 7 further comprising:
the distribution manifold comprising:
a top plate and a bottom plate forming internal channels when joined together connecting a purging gas inlet plenum to gas manifold gas distribution openings.
16. The apparatus of claim 8 further comprising:
the distribution manifold comprising:
a top plate and a bottom plate forming internal channels when joined together connecting a purging gas inlet plenum to gas manifold gas distribution openings.
17. The apparatus of claim 9 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
18. The apparatus of claim 10 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
19. The apparatus of claim 11 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
20. The apparatus of claim 12 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
21. The apparatus of claim 13 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
22. The apparatus of claim 14 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
23. The apparatus of claim 15 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
24. The apparatus of claim 16 further comprising:
a mirror position adjustment mechanism adjusting the position of an optical delay path mirror to correct for errors in the alignment of the optical delay path.
25. The apparatus of claim 17 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
26. The apparatus of claim 18 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
27. The apparatus of claim 19 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
28. The apparatus of claim 20 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
29. The apparatus of claim 21 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
30. The apparatus of claim 22 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
31. The apparatus of claim 23 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
32. The apparatus of claim 24 further comprising:
the mirror position adjustment mechanism comprising:
an optical delay path mirror mount moveably connected to an optical delay path housing wall for movement of the optical delay path mirror relative to the optical delay path.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A mixture, comprising:
a first compound formed of 2-phenylimidazole; and
a second compound of at least one selected from the group consisting of a compound having a structure expressed in Chemical formula 1, a compound having a structure expressed in Chemical formula 2, and a compound having a structure expressed in Chemical formula 3:
where X1 represents an element of Group 1 in the long-period periodic table;
where X2 represents an element of Group 1 in the long-period periodic table; and
where Y represents hydrogen or halogen, X3 represents an element of Group 1 in the long-period periodic table, and n represents a positive integer,
wherein the mixture is insoluble in water.
2. The mixture according to claim 1, wherein the second compound contains at least one of a polymer having the structure expressed in Chemical formula 1, and a polymer having the structure expressed in Chemical formula 2.
3. The mixture of claim 1, wherein the second compound is pentafluoroethanesulfonimide.
4. A cation conductor, comprising:
a first compound formed of 2-phenylimidazole; and
a second compound of at least one selected from the group consisting of a compound having a structure expressed in Chemical formula 4, a compound having a structure expressed in Chemical formula 5, and a compound having a structure expressed in Chemical formula 6:
where X1 represents an element of Group 1 in the long-period periodic table;
where X2 represents an element of Group 1 in the long-period periodic table; and
where Y represents hydrogen or halogen, X3 represents an element of Group 1 in the long-period periodic table, and n represents a positive integer,
wherein a mixture of the first compound and the second compound is insoluble in water.
5. The cation conductor according to claim 4, wherein the second compound contains at least one of a polymer having the structure expressed in Chemical formula 4, and a polymer having the structure expressed in Chemical formula 5.
6. The cation conductor according to claim 4, further containing a support for supporting the first compound and the second compound.
7. The cation conductor according to claim 6, wherein the support contains a polymer.
8. The cation conductor according to claim 6, further containing a solvent.
9. The cation conductor of claim 4, wherein the second compound is pentafluoroethanesulfonimide.
10. An electrochemical device, comprising a pair of electrodes is arranged with a cation conductor in between,
wherein the cation conductor contains:
a first compound formed of 2-phenylimidazole; and
a second compound of at least one selected from the group consisting of a compound having a structure expressed in Chemical formula 7, a compound having a structure expressed in Chemical formula 8, and a compound having a structure expressed in Chemical formula 9:
where X1 represents an element of Group 1 in the long-period periodic table; and
where X2 represents an element of Group 1 in the long-period periodic table;
where Y represents hydrogen or halogen, X3 represents an element of Group 1 in the long-period periodic table, and n represents a positive integer
wherein a mixture of the first compound and the second compound is insoluble in water.
11. The electrochemical device according to claim 10, wherein the second compound contains at least one of a polymer having the structure expressed in Chemical formula 7, and a polymer having the structure expressed in Chemical formula 8.
12. The electrochemical device according to claim 10, wherein the cation conductor further contains a support for supporting the first compound and the second compound.
13. The electrochemical device according to claim 12, wherein the support contains a polymer.
14. The electrochemical device according to claim 12, wherein the cation conductor further contains a solvent.
15. The electrochemical device according to claim 10, which is a fuel cell.
16. The electrochemical device of claim 10, wherein the second compound is pentafluoroethanesulfonimide.