1. A thermal processing apparatus irradiating a substrate with a flash thereby heating said substrate, comprising:
a light source having a plurality of flash lamps;
a holding element, capable of holding said substrate in spaced relation to said light source along a vertical direction, and comprising an assist-heating mechanism for preheating said substrate;
an adjusting element capable of adjusting a distance of irradiation between said holding element holding said substrate and said light source when said light source emits said flash, said adjusting element being operable to move said holding element substantially along said vertical direction; and
a table holding element holding a correlation table associating the intensity of irradiation on the surface of said substrate irradiated with said flash emitted from said light source and the distance of irradiation with each other, wherein
said adjusting element obtains the distance of irradiation corresponding to predetermined intensity of irradiation from said correlation table and adjusts the position of said holding element so that the distance between said holding element holding said substrate and said light source reaches obtained said distance of irradiation.
2. The thermal processing apparatus according to claim 1, further comprising an input element accepting entry of a correction quantity for the distance of irradiation, wherein,
said adjusting element adjusts the position of said holding element so that the distance between said holding element holding said substrate and said light source reaches a distance obtained by adding said correction quantity received from said input element to said distance of irradiation obtained from said correlation table.
3. A thermal processing apparatus irradiating a substrate with a flash, thereby heating said substrate, comprising:
a light source having a plurality of flash lamps;
a holding element, capable of holding said substrate in spaced relation to said light source, and comprising an assist-heating mechanism for preheating said substrate; and
an adjusting element capable adjusting a distance of irradiation between said holding element holding said substrate and said light source when said light source emits said flash, said adjusting element being operable to move said light source to adjust said distance; and
a table holding element holding a correlation table associating the intensity of irradiation on the surface of said substrate irradiated with said flash emitted from said light source and the distance of irradiation with each other, wherein
said adjusting element obtains the distance of irradiation corresponding to predetermined intensity of irradiation from said correlation table and adjusts the position of said light source so that the distance between said holding element holding said substrate and said light source reaches obtained said distance of irradiation.
4. The thermal processing apparatus according to claim 3, further comprising an input element accepting entry of a correction quantity for the distance of irradiation, wherein
said adjusting element adjusts the position of said light source so that the distance between said holding element holding said substrate and said light source reaches a distance obtained by adding said correction quantity received from said input element to said distance of irradiation obtained from said correlation table.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A turbo chiller comprising:
a turbo compressor;
a motor for driving the turbo compressor;
a refrigerant cooling pipe system and a lubricant pipe system connected to the turbo compressor and the motor;
pipe joint groups provided to the pipe systems;
a joint group of replacement components provided to the pipe systems;
an evaporator; and
a condenser,
wherein the evaporator and the condenser are arranged horizontally and in parallel to each other,
wherein a spatial region is provided between the evaporator and the condenser,
wherein an intensive placement region in which the pipe joint groups and the joint group are intensively placed in a part of the spatial region,
wherein at least one refrigerant detection sensor is arranged at a specified point at which refrigerant that leaks from each of the joint groups and flows downward is distributed and pools below the intensive placement region,
wherein the pipe systems and the replacement components are arranged in a vertical direction in the intensive placement region,
the joint groups of the pipe systems and the replacement components are respectively arranged on the same vertical lines, and
in a case where any of the pipe systems and the replacement components are arranged in a horizontal direction, the corresponding joint groups are also respectively arranged on the same horizontal lines, gutters or trays are respectively arranged below the joint groups, and the gutters or trays guide the slight amount of refrigerant that leaks from each of the joint groups, to a position of the refrigerant detection sensor arranged at the pre-identified point.
2. The turbo chiller according to claim 1, wherein
a plurality of the refrigerant cooling pipe systems are provided, said plurality of the refrigerant cooling pipe system at least includes a first refrigerant cooling pipe system that returns a refrigerant extracted from a downstream side of a condenser constituting a refrigeration cycle, to a lower-pressure side than that of the condenser through the motor and an oil cooler.
3. The turbo chiller according to claim 1, wherein
a plurality of the lubricant pipe systems are provided, said plurality of the lubricant pipe systems at least include: a first lubricant pipe system that connects an oil tank, an oil pump, an oil cooler, and the turbo compressor and that circulates lubricant oil from the oil tank through the oil pump, the oil cooler, and the turbo compressor to the oil tank; andor a second lubricant pipe system that connects an oil sump of the turbo compressor, an oil sump of an evaporator, and the oil tank and that returns the lubricant oil from the turbo compressor to the oil tank.
4. The turbo chiller according to claim 1, wherein
the refrigerant cooling pipe system and the lubricant pipe system are arranged in the spatial region that is located below the turbo compressor and the motor.
5. A turbo chiller comprising:
a turbo compressor;
a motor for driving the turbo compressor;
a refrigerant cooling pipe system and a lubricant pipe system connected to the turbo compressor and the motor;
pipe joint groups provided to the pipe systems;
a joint group of replacement components provided to the pipe systems;
an evaporator; and
a condenser,
wherein, in a case where the pipe systems and the replacement components are arranged in a vertical direction, the corresponding joint groups are respectively arranged on the same vertical lines,
wherein, in a case where any of the pipe systems and the replacement components are arranged in a horizontal direction, the corresponding joint groups are respectively arranged on the same horizontal lines,
wherein at least one refrigerant detection sensor is arranged at a specified point at which refrigerant that leaks from each of the joint groups and flows downward is distributed and pools below an area where the pipe systems, the replacement components, and the corresponding joint groups are arranged,
wherein a plurality of trays are arranged below the joint groups,
wherein a first tray in which at least one of said plurality of the trays has a size large enough to cover an area below: the turbo compressor and the motor; part of the pipe joint groups provided to the pipe systems connected to the turbo compressor and the motor; and part of the joint group of the replacement components provided to the pipe systems,
wherein the first tray is arranged between the turbo compressor and the motor; part of the pipe joint groups provided to the pipe systems connected to the turbo compressor and the motor; and part of the joint group of the replacement components provided to the pipe systems, and, the evaporator; the condenser,
wherein, in a case where the refrigerant leaks from at least one of the turbo compressor and the motor; the pipe joint groups; and the joint group of the replacement components, the first tray serves to receive the refrigerant that flows downward from a leakage site and to guide the refrigerant along an oblique direction,
wherein a second tray which is another tray of said plurality of the trays brings the refrigerant which is guided from the first tray further downward, and
wherein a third tray which is further another tray of said plurality of the trays guides the refrigerant which is brought from the second tray to the position of the refrigerant detection sensor.
6. The turbo chiller according to claim 1,
wherein the intensive placement region is provided on a one-end side in the longitudinal direction of the spatial region.
7. The turbo chiller according to claim 1,
wherein, the occurrence of refrigerant leakage from the joint groups is assumed and a flow analysis is carried out, whereby a pooling point of the refrigerant having a concentration detectable by the refrigerant detection sensor can be clarified in advance on the basis of a concentration distribution of the refrigerant that continuously flows out downward, and
wherein the pooling point is determined as the specified point.
8. A turbo chiller comprising:
a turbo compressor;
a motor for driving the turbo compressor;
a refrigerant cooling pipe system and a lubricant pipe system connected to the turbo compressor and the motor;
pipe joint groups provided to the pipe systems;
a joint group of replacement components provided to the pipe systems;
an evaporator; and
a condenser,
wherein the evaporator and the condenser are arranged horizontally and in parallel to each other,
wherein a spatial region is provided between the evaporator and the condenser,
wherein an intensive placement region in which the pipe joint groups and the joint group are intensively placed in a part of the spatial region,
wherein at least one refrigerant detection sensor is arranged at a specified point at which refrigerant that leaks from each of the joint groups and flows downward is distributed and pools below the intensive placement region,
wherein, the occurrence of refrigerant leakage from the joint groups is assumed and a flow analysis is carried out, whereby a pooling point of the refrigerant having a concentration detectable by the refrigerant detection sensor can be clarified in advance on the basis of a concentration distribution of the refrigerant that continuously flows out downward, and
wherein the pooling point is determined as the specified point.
9. The turbo chiller according to claim 8,
wherein a plurality of the refrigerant cooling pipe systems are provided, said plurality of the refrigerant cooling pipe systems at least include a first refrigerant cooling pipe system that returns a refrigerant extracted from a downstream side of a condenser constituting a refrigeration cycle, to a lower-pressure side than that of the condenser through the motor and an oil cooler.
10. The turbo chiller according to claim 8,
wherein a plurality of the lubricant pipe systems are provided, said plurality of the lubricant pipe systems at least include: a first lubricant pipe system that connects an oil tank, an oil pump, an oil cooler, and the turbo compressor and that circulates lubricant oil from the oil tank through the oil pump, the oil cooler, and the turbo compressor to the oil tank; andor a second lubricant pipe system that connects an oil sump of the turbo compressor, an oil sump of an evaporator, and the oil tank and that returns the lubricant oil from the turbo compressor to the oil tank.
11. The turbo chiller according to claim 8,
wherein the refrigerant cooling pipe system and the lubricant pipe system are arranged in the spatial region that is located below the turbo compressor and the motor.
12. The turbo chiller according to claim 8,
wherein the intensive placement region is provided on a one-end side in the longitudinal direction of the spatial region.