1. A conditioning assembly for polishing a semiconductor wafer, comprising:
a base with a first and a second side;
a plurality of diamonds on the second side, wherein the diamonds comprise a geometry having between six and eight sides and at least two 90 degree vertices, wherein each of the at least two 90 degree vertices is formed by two edges that meet to form an angle of about 90 degrees;
wherein the base has a diameter of between 0.5 and 1.5 inches;
wherein the plurality of diamonds includes between 150 and 900 diamonds;
wherein the diamonds are embedded within the base; and
wherein the second set of vertices of the diamonds having any exterior angles of about 60 degrees or less are embedded in the base;
wherein only two of the at least two 90 degree vertices having angles of about 90 degrees protrude from the base and protrude from the base by an approximately equal amount; and
wherein all other vertices located on the diamond are positioned below the surface of the base.
2. The conditioning assembly of claim 1, which includes approximately 600 diamonds.
3. The conditioning assembly of claim 1, wherein in the diamonds are octahedral.
4. The conditioning assembly of claim 1, wherein the diamonds are embedded within the base comprising a matrix adhesive bonding material.
5. The conditioning assembly of claim 1, wherein the diamonds protrude 50 to 90 microns from the base.
6. The conditioning assembly of claim 5, wherein the diamonds protrude 80 microns from the base.
7. The conditioning assembly of claim 1, wherein the diamonds are between 160 and 210 microns across.
8. The conditioning assembly of claim 7, wherein the diamond is 180 microns across.
9. The conditioning assembly of claim 1, wherein the spacing between each diamond is at least 700 micrometers.
10. The conditioning assembly of claim 1, wherein the diamonds per area are at least 50 per centimeter squared.
11. The conditioning assembly of claim 1, wherein the diamonds protrude about 44% of their structure from the base.
12. A conditioning assembly for polishing a semiconductor wafer, comprising:
a base with a first and a second side;
a plurality of diamonds on the second side, wherein the diamonds comprise a geometry having between six and eight sides and at least two 90 degree vertices, wherein each of the at least two 90 degree vertices is formed by two edges that meet to form an angle of about 90 degrees;
wherein the diamonds are embedded within the base;
wherein the diamonds protrude about 44% of their structure from the base
wherein the second set of vertices of the diamonds having any exterior angles of about 60 degrees or less are embedded in the base;
wherein only two of the at least two 90 degree vertices having angles of about 90 degrees protrude from the base and protrude from the base by an approximately equal amount: and
wherein all other vertices located on the diamond are positioned below the surface of the base;
wherein the base has a diameter of between 0.5 and 1.5 inches; and
wherein the conditioning assembly is capable of withstanding optimal processing conditions of applied force per diamond, heating related to cutting speed of the diamonds, and shear stresses on the diamonds, while maintaining a low defect environment.
13. The conditioning assembly of claim 12, wherein the diamonds are embedded within the base comprisina a matrix adhesive bonding material.
14. The conditioning assembly of claim 12, which includes between 150 and 900 diamonds.
15. The conditioning assembly of claim 12, which includes approximately 600 diamonds.
16. The conditioning assembly of claim 12, wherein the diamonds are octahedral.
17. A conditioning assembly for reconditioning a polishing pad, comprising:
a base with a first and a second side;
a plurality of diamonds on the second side, wherein the diamonds comprise a geometry having between six and eight sides and at least two 90 degree vertices, wherein each of the at least two 90 degree vertices is formed by two edges that meet to form an angle of about 90 degrees;
wherein the ratio of the base diameter to the polishing pad diameter is between 1:13 and 1:40;
wherein the base has a diameter of between 0.5 and 1.5 inches;
wherein the diamonds are embedded within the base; wherein only two of the at least two 90 degree vertices having angles of about 90 degrees protrude from the base and protrude from the base by an approximately equal amount: and
wherein all other vertices located on the diamond are positioned below the surface of the base; and
wherein the plurality of diamonds includes between 150 and 900 diamonds.
18. The conditioning assembly of claim 17, wherein the ratio of the base diameter to the polishing pad diameter is between 1:16 and 1:26.
19. The conditioning assembly of claim 17, wherein the ratio of the base diameter to the polishing pad diameter has a ratio approximately 1:20.
20. The conditioning assembly of claim 17, wherein the diamonds are embedded within the base comprising a matrix adhesive bonding material; and
wherein the diamonds protrude about 44% of their structure from the base.
21. The conditioning assembly of claim 17, wherein the plurality of diamonds comprise cubic diamonds.
22. The conditioning assembly of claim 17, which includes approximately 600 diamonds.
23. A conditioning assembly for reconditioning a polishing pad, comprising:
a base with a first and a second side;
a plurality of diamonds on the second side, wherein the diamonds comprise a geometry having between six and eight sides and at least two 90 degree vertices, wherein each of the at least two 90 degree vertices is formed by two edges that meet to form an angle of about 90 degrees;
wherein the diamonds are embedded within the base;
wherein the diamonds protrude about 44% of their structure from the base;
wherein the second set of vertices of the diamonds having any exterior angles of about 60 degrees or less are embedded into the base;
wherein only two of the at least two 90 degree vertices having angles of about 90 degrees protrude from the base and protrude from the base by an approximately equal amount;
wherein all other vertices located on the diamond are positioned below the surface of the base;
wherein the base has a diameter of between 0.5 and 1.5 inches; and
wherein the plurality of diamonds includes between 450 and 900 diamonds.
24. The conditioning assembly of claim 23, wherein the ratio of the base diameter to the polishing pad diameter is between 1:16 and 1:26.
25. The conditioning assembly of claim 23, wherein the ratio of the base diameter to the polishing pad diameter has a ratio approximately 1:20.
26. The conditioning assembly of claim 23, wherein the diamonds protrude 50 to 90 microns from the base.
27. The conditioning assembly of claim 23, wherein the diamonds are between 160 and 210 microns across.
28. The conditioning assembly of claim 23, wherein the average spacing between each diamond is at least 700 micrometers.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A key switch device including:
a key top provided at its underside with a first engagement portion and a second engagement portion;
a third engagement portion in correspondence with the first engagement portion, and a fourth engagement portion in correspondence with the second engagement portion, both of which are arranged below the key top;
a guide member for supporting the key top to guide vertical movement of the key top, the guide member including a first link member provided with a first shaft movably engaged in the first engagement portion and a third shaft movably engaged in the third engagement portion and a second link member provided with a second shaft movably engaged in the second engagement portion and a fourth shaft movably engaged in the fourth engagement portion;
a first gear portion provided near the first shaft in the first link member;
a second gear portion provided near the second shaft in the second link member; and
a switching section for performing a switching operation in accordance with the vertical movement of the key top;
the first and second link members being arranged such that, in association with the vertical movement of the key top, the first and second link members are operated in synchronization with each other through a mutual contact relationship between the first and second gear portions;
wherein the first gear portion is provided with a first upper tooth portion and a first lower tooth portion which are arranged in adjacent relation in a direction of width of the first link member and in upper-and-lower relation in a direction of thickness of the first link member,
the second gear portion is provided with a second upper tooth portion and a second lower tooth portion which are arranged in adjacent relation in a direction of width of the second link member and in upper-and-lower relation in a direction of thickness of the second link member, and
the first upper tooth portion and the second lower tooth portion, and, the first lower tooth portion and the second upper tooth portion, are allowed to move, while maintaining mutually overlapping contact relation, in association with the vertical movement of the key top.
2. The key switch device according to claim 1, wherein the first link member is provided with a pair of arms, and the first gear portion is provided in a tip end of each of the arms, and
the second link member is provided with a pair of arms, and the second gear portion is provided in a tip end of each of the arms.
3. The key switch device according to claim 1, wherein each of the first and second upper tooth portions is formed with a first curved surface which is curved upwards, and
each of the first and second lower tooth portions is formed with a second curved surface which is curved downwards.
4. The key switch device according to claim 3, wherein the first and second curved surfaces are in close contact with each other during the vertical movement of the key top.
5. A keyboard provided with at least one key switch device according to claim 1.
6. An electronic apparatus including:
a keyboard for inputting various data such as characters, symbols, and others, the keyboard being provided with a key switch device including:
a key top provided at its underside with a first engagement portion and a second engagement portion;
a third engagement portion arranged below the key top in correspondence with the first engagement portion and, a fourth engagement portion arranged below the key top in correspondence with the second engagement portion;
a guide member for supporting the key top to guide vertical movement of the key top, the guide member including a first link member provided with a first shaft movably engaged in the first engagement portion and a third shaft movably engaged in the third engagement portion and a second link member provided with a second shaft movably engaged in the second engagement portion and a fourth shaft movably engaged in the fourth engagement portion;
a first gear portion provided near the first shaft in the first link member;
a second gear portion provided near the second shaft in the second link member; and
a switching section for performing a switching operation in accordance with the vertical movement of the key top;
the first and second link members being arranged such that, in association with the vertical movement of the key top, the first and second link members are operated in synchronization with each other through a mutual contact relationship between the first and second gear portions;
wherein the first gear portion is provided with a first upper tooth portion and a first lower tooth portion which are arranged in adjacent relation in a direction of width of the first link member and in upper-and-lower relation in a direction of thickness of the first link member,
the second gear portion is provided with a second upper tooth portion and a second lower tooth portion which are arranged in adjacent relation in a direction of width of the second link member and in upper-and-lower relation in a direction of thickness of the second link member, and
the first upper tooth portion and the second lower tooth portion, and, the first lower tooth portion and the second upper tooth portion, are allowed to move, while maintaining mutually overlapping contact relation, in association with the vertical movement of the key top;
display means for displaying the characters, symbols, and others; and
control means for controlling the display means to display the characters, symbols, and others based on input data from the keyboard.
7. A key switch device including:
a key top provided at its underside with a first engagement portion and a second engagement portion;
a third engagement portion arranged below the key top in correspondence with the first engagement portion, and a fourth engagement portion arranged below the key top in correspondence with the second engagement portion;
a guide member for supporting the key top to guide vertical movement of the key top, the guide member including a first link member provided with a first shaft movably engaged in the first engagement portion and a third shaft movably engaged in the third engagement portion and a second link member provided with a second shaft movably engaged in the second engagement portion and a fourth shaft movably engaged in the fourth engagement portion;
a first gear portion provided near the first shaft in the first link member;
a second gear portion provided near the second shaft in the second link member; and
a switching section for performing a switching operation in accordance with the vertical movement of the key top;
the first and second link members being arranged such that, in association with the vertical movement of the key top, the first and second link members are operated in synchronization with each other through a mutual contact relationship between the first and second gear portions;
wherein the first gear portion is provided with a first tooth portion formed in the first link member,
the second gear portion is provided with a second tooth portion formed in the second link member, and
the first tooth portion of the first link member and the second tooth portion of the second link member are allowed to move, while maintaining mutually overlapping contact relation, in association with the vertical movement of the key top.
8. The key switch device according to claim 7, wherein
one of the first and second tooth portions is formed with a first curved surface which is curved upwards, while the other is formed with a second curved surface which is curved downwards, and
the first and second curved surfaces are in close contact with each other during the vertical movement of the key top.
9. A key switch device including:
a key top provided at its underside with a first engagement portion and a second engagement portion;
a third engagement portion arranged below the key top in correspondence with the first engagement portion, and a fourth engagement portion arranged below the key top in correspondence with the second engagement portion;
a guide member for supporting the key top to guide vertical movement of the key top, the guide member including a first link member provided with a first shaft movably engaged in the first engagement portion and a third shaft movably engaged in the third engagement portion and a second link member provided with a second shaft movably engaged in the second engagement portion and a fourth shaft movably engaged in the fourth engagement portion;
a first and a second arms formed in the first link member, each of which is provided with the first shaft;
a third and a fourth arms formed in the second link member, each of which is provided with the second shaft;
the first link member being provided with a first gear portion formed near the first shaft of the first arm and a second gear portion formed near the first shaft of the second arm;
the second link member being provided with a second gear portion formed near the second shaft of the third arm and a first gear portion formed near the second shaft of the fourth arm;
a switching section for performing a switching operation in accordance with the vertical movement of the key top;
the first and second link members being arranged such that, in association with the vertical movement of the key top, the first and second link members are operated in synchronization with each other through a mutual contact relationship between the first gear portion of the first arm and the second gear portion of the third arm and through a mutual contact relationship between the second gear portion of the second arm and the first gear portion of the fourth arm;
wherein each of the first gear portions in the first arm of the first link member and the fourth arm of the second link member is provided with a first tooth portion;
each of the second gear portions in the second arm of the first link member and the third arm of the second link member is provided with a second tooth portion; and
the first tooth portion of the first arm and the second tooth portion of the third arm, and, the second tooth portion of the second arm and the first tooth portion of the fourth arm, are allowed to move, while maintaining mutually overlapping contact relation, in association with the vertical movement of the key top.
10. A keyboard provided with at least one key switch device according to claim 7.
11. An electronic apparatus including:
a keyboard for inputting various data such as characters, symbols, and other, the keyboard being provided with a key switch device including:
a key top provided at its underside with a first engagement portion and a second engagement portion;
a third engagement portion arranged below the key top in correspondence with the first engagement portion, and a fourth engagement portion arranged below the key top in correspondence with the second engagement portion;
a guide member for supporting the key top to guide vertical movement of the key top, the guide member including a first link member provided with a first shaft movably engaged in the first engagement portion and a third shaft movably engaged in the third engagement portion and a second link member provided with a second shaft movably engaged in the second engagement portion and a fourth shaft movably engaged in the fourth engagement portion;
a first gear portion provided near the first shaft in the first link member;
a second gear portion provided near the second shaft in the second link member and in contact with the first gear portion; and
a switching section for performing a switching operation in accordance with the vertical movement of the key top;
the first and second link members being arranged such that, in association with the vertical movement of the key top, the first and second link members are operated in synchronization with each other through a mutual contact relationship between the first and second gear portions,
wherein the first gear portion is provided with a first tooth portion formed in the first link member,
the second gear portion is provided with a second tooth portion formed in the second link member, and
the first tooth portion of the first link member and the second tooth portion of the second link member are allowed to move, while maintaining mutually overlapping contact relation, in association with the vertical movement of the key top;
display means for displaying the characters, symbols, and others; and
control means for controlling the display means to display the characters, symbols, and others based on input data from the keyboard.
12. A key switch device including:
two upper engagement portions provided extending downward from an underside of a key top;
two lower engagement portions arranged below the key top in correspondence with the upper engagement portions respectively;
a guide member for supporting the key top to guide vertical movement thereof, the guide member including a first link member provided with a first engagement member engaged in one of the upper engagement portions and a third engagement member engaged in one of the lower engagement portions and a second link member provided with a second engagement member engaged in the other upper engagement portion and a fourth engagement member engaged in the other lower engagement portion;
a switching member for performing a switching operation in accordance with the vertical movement of the key top;
wherein the third engagement member of the first link member is slidably engaged in one of the lower engagement portions and the fourth engagement member of the second link member is slidably engaged in the other engagement portion, and
motion restraining means for restraining horizontal motion of the key top in course of depression is disposed between one of the lower engagement portions and first link member and between the other lower engagement portion and the second link member.
13. The key switch device according to claim 12, wherein the motion restraining means includes a slide groove formed by a wall portion to which the third or fourth engagement member is brought into contact during non-depression of the key top and a sloped portion sloping from the wall portion, the slide groove being disposed in at least one of the lower engagement portions.
14. The key switch device according to claim 13, wherein the third or fourth engagement member is formed into a shaft member having an elliptic shape in side view so that the shaft member is slid in the slide groove along an inclined surface of the sloped portion in association with the vertical movement of the key top while turning a longitudinal axis of the elliptic shape into a horizontal situation or a vertical situation.
15. The key switch device according to claim 13, wherein the sloped portion slopes outwardly.
16. The key switch device according to claim 16, wherein the third or fourth engagement member is formed into a shaft member having an elliptic shape in side view so that the shaft member is slid in the slide groove along an inclined surface of the sloped portion in association with the vertical movement of the key top while turning a longitudinal axis of the elliptic shape into a horizontal situation.
17. The key switch device according to claim 12, wherein the motion restraining means including:
a shaft member formed extending from a side face of the first or second link members; and
a wall member formed near at least one of the lower engagement portions, for guiding the shaft member in contact therewith when the third or fourth engagement member is slid in association with depression of the key top.
18. A keyboard provided with one or more key switch device according to claim 12.
19. An electronic apparatus including:
a keyboard for inputting various data such as characters, symbols, and others, the keyboard being provided with a key switch device including:
two upper engagement portions provided extending downward from an underside of a key top;
two lower engagement portions arranged below the key top in correspondence with the upper engagement portions respectively;
a guide member for supporting the key top to guide vertical movement thereof, the guide member including a first link member provided with a first engagement member engaged in one of the upper engagement portions and a third engagement member engaged in one of the lower engagement portions and a second link member provided with a second engagement member engaged in the other upper engagement portion and a fourth engagement member engaged in the other lower engagement portion;
a switching member for performing a switching operation in accordance with the vertical movement of the key top;
wherein the third engagement member of the first link member is slidably engaged in one of the lower engagement portions and the fourth engagement member of the second link member is slidably engaged in the other engagement portion, and
motion restraining means for restraining horizontal motion of the key top in course of depression is disposed between one of the lower engagement portions and first link member and between the other lower engagement portion and the second link member;
display means for displaying the characters, symbols, and others; and
control means for controlling the display means to display the characters, symbols, and others based on input data from the keyboard.
20. The key switch device according to claim 1, wherein an engagement relationship between the third engagement portion and the third shaft of the first link member and that between the fourth engagement portion and the fourth shaft of the second link member are established easier to release than an engagement relationship between the first engagement portion of the key top and the first shaft of the first link member and that between the second engagement portion of the key top and the second shaft of the second link member.
21. The key switch device according to claim 20 further including:
a first shaft support portion elastically deformable, provided at a lower portion of the first link member; and
a second shaft support portion elastically deformable, provided at a lower portion of the second link member;
the third shaft being provided in the first shaft support portion and the fourth shaft being provided in the second shaft support portion.
22. The key switch device according to claim 21, wherein the switching member includes a circuit board provided with a movable switch electrode and a fixed switch electrode,
the third and fourth engagement portions are constructed from an engagement member formed with a pair of longitudinal groove-shaped engagement portions and fixed on the circuit board, and
the third and fourth shafts are engaged in the corresponding longitudinal groove-shaped engagement portions of the engagement member.
23. The key switch device according to claim 22, wherein the engagement portions of the engagement member each include a portion formed in a round shape in section, with which the third and fourth shafts are brought into contact.
24. The key switch device according to claim 22, wherein the engagement member is produced by molding a linear material having a substantially circular shape in section into a predetermined shape and then cutting it into chips each having a unit length of the key switch device.
25. The key switch device according to claim 22, wherein the circuit board is constructed of an upper sheet provided with the movable switch electrode disposed on an underside, a lower sheet provided with the fixed switch electrode disposed facing the movable switch electrode, and a spacer body disposed between the upper and lower sheets to hold the movable switch electrode and the fixed switch electrode at a distance from each other, and
the spacer body is constructed to provide a space between the upper and lower sheets in an area having a shape corresponding to a lower end of the key top and a width larger than a width of the lower end of the key top.
26. The key switch device according to claim 25, wherein the spacer body is constructed of a dot spacer provided on the upper or lower sheet, the dot spacer being formed to form the area.