1. A three-dimension image reproduce apparatus comprising:
an array of adjoining optical elements, which is an array of lenticular lens, a fly-eye lens array or an array of hologram optical elements; and
a cross-talk prevent part preventing cross-talk between the adjoining optical elements.
2. The image reproduce apparatus according to claim 1, wherein the cross-talk prevent part comprises:
at least one projector projecting a plurality of images each of which is separated into a strip shape and each of which has different parallax information so that each of the images has different polarization state from each other, in order that the ray from each of the images passes through the corresponding optical element; and
a polarizing plate provided on an emitting side of the optical elements and having a polarized character which is different on the adjoining optical elements and same on the next adjoining optical elements.
3. The image reproduce apparatus according to claim 2, wherein the polarized characters are lateral and longitudinal polarization.
4. The image reproduce apparatus according to claim 2, wherein the polarized characters are right-circular and left-circular polarization.
5. The image reproduce apparatus according to claim 2, wherein the projector controls the polarization state of each of the images by a polarization filter.
6. The image reproduce apparatus according to claim 2, wherein the projector controls the polarization state of each of the images by a polarization filter with polarization switch, in case the number of the projector is one.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A device for detecting contamination of a lens in an exposure device, the exposure device having a light source and the lens to expose a photoresist, the device comprising:
a sample for detecting contamination, formed of the same material as that of the lens and arranged in a path of the light source to react with amine or organic compounds in the air;
a sensor sensing transmission of the light from the sample; and
a controller analyzing transmittance of the light sensed by the sensor to detect a contamination level of the lens.
2. The device as claimed in claim 1, further comprising a display displaying the contamination level of the lens under the control of the controller.
3. The device as claimed in claim 1, wherein the sample is formed of a SiO2 glass.
4. A device for detecting contamination of a lens in an exposure device comprising:
a wafer stage arranging a wafer coated with a photoresist;
a light source emitting light;
a condenser lens condensing the light emitted from the light source;
a dichromic mirror partially reflecting and transmitting the light emitted from the condenser lens;
a reticle provided with a light-transmitting region and a light-shielding region to selectively transmit the light reflected by the dichromic mirror;
a projection lens system condensing the light from the reticle at a certain size to irradiate the light onto the wafer arranged on the wafer stage;
a sample for detecting contamination, formed of the same material as that of the condenser lens or the projection lens system and arranged in a path of the light reflected by the dichromic mirror to be contaminated by amine or organic compounds under the same condition as that of the lens;
a sensor sensing transmission of the light from the sample; and
a controller analyzing transmittance of the light sensed by the sensor to detect a contamination level of the lens and displaying the contamination level.
5. The device as claimed in claim 4, wherein the sample is formed of a SiO2 glass.
6. The device as claimed in claim 4, further comprising a mirror reflecting the light transmitted by the dichromic mirror toward the sample.
7. A method for detecting contamination of a lens in an exposure device comprising:
transmitting a light through a sample and the lens wherein the sample is formed of the same material as the lens; and
analyzing the light transmitted through the sample element.
8. The method of claim 7, wherein the sample element is formed of SiO2.
9. The method of claim 7, wherein transmitting the light toward the sample element comprises:
partially reflecting and transmitting the light transmitted through the lens toward the sample element using a dichromic mirror.
10. The method of claim 7, wherein the light transmitted through the lens is the same light transmitted through the sample.