1. A lighting device mounting system for a dishwasher, comprising:
a lighting device having a first portion adapted to be disposed within a dishwasher tub portion and to emit light therefrom, the first portion being adapted to have a larger lateral area than a receiving aperture defined by a tub wall of the dishwasher tub portion, and a second portion engaged with the first portion and adapted to extend through the receiving aperture, the second portion further including at least one laterally-extending flange extending laterally outward therefrom; and
a securing device configured to interact with the second portion of the lighting device, opposite the tub wall from the first portion, so as to secure the lighting device to the tub wall, the securing device including a hinge portion and free opposing ends, the free opposing ends having complementarily-configured portions of a locking mechanism configured to secure the free opposing ends together, the securing device being configured to be received about the second portion, between the at least one laterally-extending flange and the tub wall, and to be secured thereabout through engagement of the locking mechanism such that the securing device extends about the second portion, laterally outward from the at least one laterally-extending flange and outwardly of the receiving aperture, so as to secure the second portion opposite the tub wall from the first portion.
2. A system according to claim 1 wherein the securing device is integrally formed such that the hinge portion couples the free opposing ends.
3. A system according to claim 1 wherein one portion of the locking mechanism comprises a hook portion and the other portion of the locking mechanism comprises a latch portion, the hook portion being configured to interact with and receive the latch portion in an interference fit so as to prevent the opposing ends from being laterally separated.
4. A system according to claim 1 wherein the second portion is substantially centered with respect to the first portion such that a lip portion is defined by and between the first and second portions of the lighting device, and the system further comprises a gasket member configured to extend continuously about the lip portion and to be received thereby, the gasket member being configured to form a seal between the lip portion and the tub wall, about the receiving aperture defined thereby, upon securement of the securing device about the second portion.
5. A system according to claim 1 wherein the securing device is comprised of a resilient polymer material.
6. A system according to claim 1 wherein the securing device is configured to be received about the second portion, between the at least one laterally-extending flange and the tub wall, in a securing plane parallel to the tub wall, and the portions of the locking mechanism are configured to interact along the securing plane so as to secure the free opposing ends together.
7. A dishwashing appliance, comprising:
a tub portion having a plurality of tub walls defining a forward access opening, at least one of the tub walls defining a receiving aperture;
a lighting device having a first portion disposed within the tub portion and configured to emit light therefrom, the first portion having a larger lateral area than the receiving aperture, and a second portion engaged with the first portion and extending through the receiving aperture, the second portion further including at least one laterally-extending flange extending laterally outward therefrom; and
a securing device configured to interact with the second portion of the lighting device, opposite the tub wall from the first portion, so as to secure the lighting device to the tub wall, the securing device including a hinge portion and free opposing ends, the free opposing ends having complementarily-configured portions of a locking mechanism configured to secure the free opposing ends together, the securing device being received about the second portion, between the at least one laterally-extending flange and the tub wall, and being secured thereabout through engagement of the locking mechanism such that the securing device extends about the second portion, laterally outward from the at least one laterally-extending flange and outwardly of the receiving aperture, so as to secure the second portion opposite the tub wall from the first portion.
8. A dishwashing appliance according to claim 7 wherein the securing device is integrally formed such that the hinge portion couples the free opposing ends.
9. A dishwashing appliance according to claim 7 wherein one portion of the locking mechanism comprises a hook portion and the other portion of the locking mechanism comprises a latch portion, the hook portion being configured to interact with and receive the latch portion in an interference fit so as to prevent the opposing ends from being laterally separated.
10. A dishwashing appliance according to claim 7 wherein the second portion is substantially centered with respect to the first portion such that a lip portion is defined by and between the first and second portions of the lighting device, and the system further comprises a gasket member configured to extend continuously about the lip portion and to be received thereby, the gasket member being configured to form a seal between the lip portion and the tub wall, about the receiving aperture defined thereby, upon securement of the securing device about the second portion.
11. A dishwashing appliance according to claim 7 further comprising a door assembly pivotably engaged with the tub portion about a lower end thereof and configured to cover the forward access opening, and a releaseable door lock mechanism operably engaged between the door assembly and the tub portion, the door lock assembly having a switch element associated therewith and in electrical communication with the lighting device, the switch element being configured to actuate the lighting device in response to disengagement of the door lock mechanism, and to de-actuate the lighting device in response to engagement of the door lock mechanism.
12. A dishwashing appliance according to claim 7 wherein the lighting device comprises a light-emitting diode.
13. A dishwashing appliance according to claim 7 wherein the securing device is comprised of a resilient polymer material.
14. A dishwashing appliance according to claim 7 wherein the securing device is configured to be received about the second portion, between the at least one laterally-extending flange and the tub wall, in a securing plane parallel to the tub wall, and the portions of the locking mechanism are configured to interact along the securing plane so as to secure the free opposing ends together.
15. A method of mounting a lighting device to a tub portion of a dishwasher, the method comprising:
disposing a first portion of a lighting device within a dishwasher tub portion, the first portion being configured to emit light therefrom and having a larger lateral area than a receiving aperture defined by a tub wall of the dishwasher tub portion;
extending a second portion of the lighting device through the receiving aperture, the second portion being engaged with the first portion and including at least one laterally-extending flange extending laterally outward therefrom; and
securing the lighting device to the tub wall by engaging a securing device with the second portion of the lighting device, between the at least one laterally-extending flange and the tub wall opposite from the first portion, the securing device including a hinge portion and free opposing ends, the free opposing ends having complementarily-configured portions of a locking mechanism configured to secure the free opposing ends together, the securing device being received about the second portion, between the at least one laterally-extending flange and the tub wall, and being secured thereabout through engagement of the locking mechanism such that the securing device extends about the second portion, laterally outward from the at least one laterally-extending flange and outwardly of the receiving aperture, so as to secure the second portion opposite the tub wall from the first portion.
16. A method according to claim 15 wherein securing the lighting device further comprises engaging one portion of the locking mechanism comprising a hook portion with the other portion of the locking mechanism comprising a latch portion, the hook portion being configured to interact with and receive the latch portion in an interference fit so as to prevent the opposing ends from being laterally separated.
17. A method according to claim 15 further comprising engaging a gasket member with a lip portion defined by and between the first and second portions of the lighting device, the second portion being substantially centered with respect to the first portion, such that the gasket member extends continuously about the lip portion, the gasket member being configured to form a seal between the lip portion and the tub wall, about the receiving aperture defined thereby, upon securement of the securing device about the second portion.
18. A method according to claim 15 wherein securing the lighting device further comprises installing the securing device about the second portion, between the at least one laterally-extending flange and the tub wall, in a securing plane parallel to the tub wall, and urging the portions of the locking mechanism into interaction along the securing plane so as to secure the free opposing ends together.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A thermal processing apparatus including a processing chamber containing a heat source and a table for a substrate having a processed film thereon to be placed thereon, comprising:
a discharger for discharging process gas from the processing chamber; and
a ceiling plate provided between the substrate and the discharger, having apertures at different aperture ratios in accordance with distances from the center of the ceiling plate.
2. The thermal processing apparatus according to claim 1, wherein the ceiling plate is made of a porous material with different aperture ratios in accordance with distances from the center of the material.
3. A thermal processing apparatus including a processing chamber containing a heat source and a table for a substrate having a processed film thereon to be placed thereon, comprising:
a plurality of dischargers, provided over concentric circles of the substrate, for discharging process gas from the processing chamber; and
a plurality of discharging-amount adjusters each for adjusting a discharging amount of the corresponding discharger.
4. The thermal processing apparatus according to claim 3 further comprising a plurality of buffers so as to face the substrate under the dischargers, for providing uniform gas pressure over the concentric circles of the substrate.
5. The thermal processing apparatus according to claim 3 further comprising a density sensor provided along each discharger, for detecting density of solvent for the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding discharger in accordance with the density detected by the density sensor.
6. The thermal processing apparatus according to claim 4 further comprising a density sensor provided in each buffer, for detecting density of solvent for the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding discharger in accordance with the density detected by the density sensor.
7. The thermal processing apparatus according to claim 4 further comprising at least one optical film-thickness sensor provided in one of the buffers, for detecting a thickness of the processed film, wherein each discharging-amount adjuster adjusts the discharging amounts of the corresponding discharger in accordance with the film thickness detected by the density sensor.
8. A thermal processing apparatus including a processing chamber containing a heat source and a table on which a substrate having a processed film thereon is to be placed, comprising:
a plurality of dischargers, provided over concentric circles of the substrate, for discharging process gas from the processing chamber;
a plurality of gas suppliers, provided over the concentric circles of the substrate, for supplying process gas into the processing chamber;
a plurality of discharging-amount adjusters each for adjusting a discharging amount of the corresponding discharger; and
a plurality of supply-amount adjusters each for adjusting a supply amount of the corresponding supplier.
9. The thermal processing apparatus according to claim 8 further comprising a gas-density adjuster for adjusting density of process gas supplied to each supplier.
10. The thermal processing apparatus according to claim 8 further comprising a plurality of buffers so as to face the substrate under the dischargers or the suppliers, for providing uniform gas pressure over the concentric circles of the substrate.
11. The thermal processing apparatus according to claim 8 further comprising a density sensor provided along each discharger or supplier, for detecting density of solvent for the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding discharger or each supply-amount adjuster adjusts the supply amount of the corresponding supplier, in accordance with the density detected by the density sensor.
12. The thermal processing apparatus according to claim 10 further comprising a density sensor provided in each buffer, for detecting density of solvent for the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding discharger or each supply-amount adjuster adjusts the supply amount of the corresponding supplier, in accordance with the density detected by the density sensor.
13. The thermal processing apparatus according to claim 8 further comprising at least one optical film-thickness sensor provided over the substrate, for detecting a thickness of the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding discharger or each supply-amount adjuster adjusts the supply amount of the corresponding supplier, in accordance with the film thickness detected by the density sensor.
14. A thermal processing apparatus including a processing chamber containing a heat source and a table for a substrate having a processed film thereon to be placed thereon, comprising:
a plurality of supply and discharging units, provided over concentric circles of the substrate, for supplying and discharging process gas into and from the processing chamber;
a switch for switching the supply and discharging units between the supplying and discharging of the process gas;
a plurality of supply-amount adjusters each for adjusting a supply amount of the corresponding supply and exhaust unit; and
a plurality of discharging-amount adjusters each for adjusting a discharging amount of the corresponding supply and discharging unit.
15. The thermal processing apparatus according to claim 14 further comprising a gas-density adjuster for adjusting density of a solvent for the process gas supplied by each supply and discharging unit.
16. The thermal processing apparatus according to claim 14 further comprising a plurality of buffers so as to face the substrate under the supply and discharging units, for providing uniform gas pressure over the concentric circles of the substrate.
17. The thermal processing apparatus according to claim 14 further comprising a density sensor provided in each supply and discharging unit, for detecting density of solvent for the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding supply and discharging unit or each supply-amount adjuster adjusts the supply amount of the corresponding supply and discharging unit, in accordance with the density detected by the density sensor.
18. The thermal processing apparatus according to claim 16 further comprising a density sensor provided in each buffer, for detecting density of solvent for the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding supply and discharging unit or each supply-amount adjuster adjusts the supply amount of the corresponding supply and discharging unit, in accordance with the density detected by the density sensor.
19. The thermal processing apparatus according to claim 14 further comprising at least one optical film-thickness sensor over the substrate, for detecting a thickness of the processed film, wherein each discharging-amount adjuster adjusts the discharging amount of the corresponding discharger each supply-amount adjuster adjusts the supply amount of the corresponding supply and discharging unit, in accordance with the film thickness detected by the density sensor.