1. Method for performing a statistical test on a device or radio channel, which has N outcomes in the form of N different events wherein N is higher than two, comprising:
measuring ns samples of the output of the device or radio channel under test, whereby occurs a specific number of each event,
defining a specific limit for the test in a space spanned out by specific numbers of each event,
erecting a N\u22121 dimensional likelihood distribution on several points of the limit, wherein the N\u22121 dimensional likelihood distribution is an N\u22121 dimensional binomial distribution, and
constructing a threshold for fail of the radio channel or device and a threshold for pass of the radio channel or device by summing or integrating the N\u22121 dimensional likelihood distribution along unbroken paths parallel to the limit L until a predefined confidence level is reached,
wherein the device or radio channel has three outcomes in the form of three different events and the two-dimensional binomial distribution
p
\u2061
(
na
,
nb
)
=
(
n
\u2062
\u2062
s
na
)
\u2062
Ra
na
*
(
n
\u2062
\u2062
s
–
na
nb
)
\u2062
Rb
nb
*
(
1
–
Ra
–
Rb
)
(
n
\u2062
\u2062
s
–
na
–
nb
)
is used, wherein
ns is the number of samples,
na is the number of first events within the ns samples,
nb is the number of second events within the ns samples,
Ra is the true ratio of the occurrence of the first event to all events,
Rb is the true ratio of the occurrence of the second event to all events, and
p(na,nb) is the probability of the occurrence of na first events and nb second events.
2. Method according to claim 1, comprising transmitting packets with N\u22121 different data quantities through the device or radio channel, wherein N\u22121 events are the reception of a packet with a specific one of the different data quantities and the Nth event is the loss of a packet.
3. Method according to claim 1, comprising transmitting packets with two different data quantities through the device or radio channel wherein the first event is the reception of a packet with the first data quantity, the second event is the reception of a packet with the second data quantity, and the third event is the loss of a packet.
4. Method according to any of claim 1, comprising constructing the thresholds for fail and pass only for a few points of the limit and interpolating between the thresholds of these points.
5. Method according to claim 1, comprising starting the summing or integrating from the origin.
6. Method for performing a statistical test on a device or radio channel, which has N outcomes in the form of N different events wherein N is higher than two, comprising:
measuring ns samples of the output of the device or radio channel under test, whereby occurs a specific number of each event,
defining a specific limit for the test in a space spanned out by specific numbers of each event,
erecting a N\u22121 dimensional likelihood distribution on several points of the limit, wherein the N\u22121 dimensional likelihood distribution is an N\u22121 dimensional binomial distribution, and
constructing a threshold for fail of the radio channel or device and a threshold for pass of the radio channel or device by summing or integrating the N\u22121 dimensional likelihood distribution along unbroken paths parallel to the limit L until a predefined confidence level is reached,
wherein the device or radio channel has four outcomes in the form of four different events and the three-dimensional binomial distribution
p
\u2061
(
na
,
nb
,
nc
)
=
n
\u2062
\u2062
s
!
na
!
\u2062
nb
!
\u2062
nc
!
*
(
n
\u2062
\u2062
s
–
na
–
nb
–
nc
)
!
\u2062
Ra
na
\u2062
Rb
nb
\u2062
Rc
nc
\u2061
(
1
–
Ra
–
Rb
–
Rc
)
(
n
\u2062
\u2062
s
–
na
–
nb
–
nc
)
is used, wherein
ns is the number of samples,
na is the number of first events within the ns samples,
nb is the number of second events within the ns samples,
nc is the number of third events within the ns samples,
Ra is the true ratio of the occurrence of the first event to all events,
Rb is the true ratio of the occurrence of the second event to all events,
Rc is the true ratio of the occurrence of the third event to all events, and
p(na,nb,nc) is the probability of the occurrence of na first events, nb second events and nc third events.
7. Method according to claim 6, comprising transmitting packets with N\u22121 different data quantities through the device or radio channel, wherein N\u22121 events are the reception of a packet with a specific one of the different data quantities and the Nth event is the loss of a packet.
8. Method according to any of claim 6, comprising constructing the thresholds for fail and pass only for a few points of the limit and interpolating between the thresholds of these points.
9. Method according to claim 6, comprising starting the summing or integrating from the origin.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1.-20. (canceled)
21. An apparatus, comprising:
an optical assembly comprising:
an optical element;
an actuator configured to mechanically actuate the optical element; and
a sensor configured to sense the optical element; and
a member selected from the group consisting of a device configured to provide control signals to the sensor, a device configured to transmit energy to the sensor in a contactless manner, and combinations thereof;
wherein the member is configured to introduce no parasitic mechanical effects into the optical assembly at least during specific operating states of the apparatus, and the apparatus is a microlithography projection objective.
22. The apparatus of claim 21, wherein the member comprises a device configured to transmit energy to the sensor in a contactless manner.
23. The apparatus of claim 21, wherein the member comprises a device configured to transmit energy to the sensor in a contactless manner via induction or electromagnetic waves.
24. The apparatus of claim 21, wherein the member comprises a device configured to provide control signals to the sensor.
25. The apparatus of claim 21, wherein the member comprises a device configured to provide control signals to the sensor in a contactless manner.
26. The apparatus of claim 21, wherein the member comprises a device configured to provide control signals to the sensor in a contactless manner via induction or electromagnetic waves.
27. The apparatus of claim 21, wherein the member comprises a transmitting device and a receiving device.
28. The apparatus of claim 21, wherein the apparatus comprises a housing, the member comprises a transmitting device and a receiving device, and the housing comprises the transmitting device andor the receiving device.
29. The apparatus of claim 21, wherein the apparatus comprises a housing, the member comprises a transmitting device and a receiving device, and the optical element or the optical assembly comprises the transmitting device andor the receiving device.
30. The apparatus of claim 21, wherein the apparatus comprises a housing, the housing comprises the transmitting device, and the optical assembly comprises the receiving device.
31. The apparatus of claim 21, wherein the apparatus comprises a housing, the housing comprises the transmitting device, and the optical element comprises the receiving device.
32. The apparatus of claim 21, wherein the member comprises a signal processing device.
33. The apparatus of claim 21, wherein the optical assembly further comprises an energy store.
34. The apparatus of claim 21, wherein the actuator is configured so that, during use of the actuator, the actuator outputs a low power loss.
35. The apparatus of claim 21, wherein the actuator comprises a piezo-actuator.
36. The apparatus of claim 21, wherein the optical element comprises a mirror.
37. The apparatus of claim 21, further comprising a housing, wherein the actuator comprises a plurality of Lorentz actuators, and the optical assembly is mounted in the housing via the Lorentz-actuators.
38. The apparatus of claim 21, wherein the member is further configured to provide control signals to the actuator, to provide energy to the actuator in a contactless manner, or both.
39. The apparatus of claim 21, wherein:
the member is a first member;
the apparatus comprises a second member; and
the second member selected from the group consisting of a device configured to provide control signals to the actuator, a device configured to transmit energy to the actuator in a contactless manner, and combinations thereof.
40. The apparatus of claim 39, wherein the second member comprises a device configured to transmit energy to the actuator in a contactless manner.
41. The apparatus of claim 39, wherein the second member comprises a device configured to transmit energy to the actuator in a contactless manner via induction or electromagnetic waves.
42. The apparatus of claim 39, wherein the second member comprises a device configured to provide control signals to the actuator.
43. The apparatus of claim 39, wherein the second member comprises a device configured to provide control signals to the actuator in a contactless manner.
44. The apparatus of claim 39, wherein the second member comprises a device configured to provide control signals to the actuator in a contactless manner via induction or electromagnetic waves.
45. The apparatus of claim 39, wherein the second member is configured to operate independently of the first member.
46. A system, comprising:
an apparatus according to claim 21,
wherein the system is a microlithography projection exposure apparatus.