We claim:
1. A method for producing a semiconductor structure, which comprises:
applying a first layer to a substrate;
applying a masking layer to the first layer;
etching the first layer utilizing the masking layer as a mask to produce fences;
removing the masking layer;
applying an auxiliary layer to mechanically stabilize the fences; and
subsequently removing the auxiliary layer and the fences except for a predetermined thickness of the auxiliary layer measured from a surface of the substrate.
2. The method according to claim 1, which further comprises carrying out the etching step with an ion milling method.
3. The method according to claim 1, which further comprises carrying out the etching step by ion milling.
4. The method according to claim 1, which further comprises
applying at least one second layer to the first layer before applying the masking layer; and
carrying out the etching step by at least etching the second layer in addition to the first layer.
5. The method according to claim 1, which further comprises removing the auxiliary layer and the fences by chemical-mechanical polishing.
6. The method according to claim 1, which further comprises, before application of the first layer, treating the substrate to produce a local projection at the substrate.
7. The method according to claim 1, which further comprises carrying out the first layer application step by applying a first layer to a substrate having a local projection.
8. The method according to claim 1, which further comprises producing a local projection at the substrate before application of the first layer.
9. A method for producing a semiconductor structure, which comprises:
applying a first layer to a surface of a substrate;
applying a masking layer to the first layer;
producing fences by etching the first layer and masking the first layer with the masking layer;
removing the masking layer;
mechanically stabilizing the fences by applying an auxiliary layer; and
subsequently removing the auxiliary layer and the fences except for a predetermined thickness of the auxiliary layer measured from the substrate surface.
10. A method for producing spacers in a semiconductor structure, which comprises:
applying a first layer to a substrate;
applying a masking layer to the first layer;
etching the first layer utilizing the masking layer as a mask to produce fences;
removing the masking layer;
applying an auxiliary layer to mechanically stabilize the fences; and
producing spacers at the substrate by subsequently removing the auxiliary layer and the fences except for a predetermined thickness of the auxiliary layer measured from a surface of the substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
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9. An apparatus for straightening vehicular structure, the apparatus comprising:
a U-shaped main frame, the main frame having a vehicle-receiving open end, a vehicle-stopping closed end, laterally-opposed vehicular guide portions, and a plurality of main frame support posts for elevating the main frame above a support surface substantially parallel thereto, the closed end and guide portions defining a peripheral main frame length, the main frame length defining a frame width and frame depth, the frame width and frame depth for receiving a vehicular body in a fixed vehicle position intermediate the guide portions adjacent the closed end in superior adjacency to the support surface such that the guide portions and closed end corral the vehicular body in spaced relation thereto, the main frame length comprising vertically and axially paired main frame apertures, the main frame apertures being horizontally spaced along the main frame length;
an L-shaped, repositionable tower assembly, the tower assembly comprising a horizontal base section, a vertical upright section, and tension applying means for applying tension to the vehicular body, the base section having a base section length, the base section length having vertically oriented, horizontally spaced base apertures, the base section being receivable intermediate the main frame and the support surface inferior to the main frame apertures such that the base section length extends toward the vehicular body; and
an axial pin member, the pin member being receivable by a select set of apertures selected from a pair of the main frame apertures along the main frame length and a base aperture from the base section length, the pin member thus for attaching the tower assembly to the main frame at a select frame location along the main frame length, the tension applying means for applying tension to a select vehicular structure adjacent the select frame location, applied tension from the tension applying means for displacing the select vehicular structure relative to the fixed vehicle position, the apparatus thus for straightening vehicular structure.
10. The apparatus of claim 9 comprising a vehicle support cross member, the cross member comprising first and second cross member ends, the first and second cross member ends being attachable to the main frame at the guide portions, the cross member and the guide portions for supporting the vehicular body.
11. The apparatus of claim 9 comprising a rear frame member, the rear frame member comprising first and second rear frame ends, and vertically and axially paired rear frame apertures intermediate the first and second rear frame ends, the rear frame member being attachable to the main frame at the open end to close the open end, the select frame location being selected based upon the main frame apertures and the rear frame apertures.
12. The apparatus of claim 9 wherein multiple tower assemblies are cooperable with the main frame to effect select structural displacement via applied tension.
13. The apparatus of claim 11, wherein the main frame comprises an I-shaped transverse cross-section, the I-shaped transverse cross-section of the main frame having upper and lower main frame flanges, the upper and lower main frame flanges comprising the main frame apertures.
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23. The apparatus of claim 9 comprising a pair of laterally-opposed lift tower assemblies, the lift tower assemblies being fastened to the guide portions of the main frame intermediate the open end and the closed end, each lift tower assembly comprising a lift member and vehicle-engaging arms pivotally attached to the lift member, the main frame and lift tower assemblies for enhancing the fixed position of the vehicular body.
24. The apparatus of claim 13 wherein the rear frame member comprises an I-shaped transverse cross-section, the I-shaped transverse cross-section of the rear frame member having upper and lower rear frame flanges, the upper and lower rear frame flanges comprising the rear frame apertures.
25. An apparatus for straightening vehicular structure, the apparatus comprising:
a U-shaped main frame, the main frame having a vehicle-receiving open end, a vehicle-stopping closed end, laterally-opposed vehicular guide portions, and main frame support means for elevating the main frame above a support surface substantially parallel thereto, the closed end and guide portions defining a peripheral main frame length, the main frame length defining a frame width and frame depth, the frame width and frame depth for receiving a vehicular body in a fixed vehicle position intermediate the guide portions adjacent the closed end in superior adjacency to the support surface such that the guide portions and closed end corral the vehicular body in spaced relation thereto, the main frame length comprising vertically oriented main frame apertures, the main frame apertures being horizontally spaced along the main frame length;
a series of L-shaped, repositionable tower assemblies, each tower assembly comprising a horizontal base section, a vertical upright section, and tension applying means for applying tension to the vehicular body as received by the U-shaped main frame, each base section having a base section length, the base section lengths each having vertically oriented, horizontally spaced base apertures, the base sections each being receivable intermediate the main frame and the support surface inferior to the main frame apertures such that the base section lengths extend toward the vehicular body; and
a series of axial pin members, the pin members each being receivable by a select set of apertures selected from the main frame apertures along the main frame length and the base apertures from the base section lengths, the pin members thus for attaching the tower assemblies to the main frame at select frame locations along the main frame length, the tension applying means for applying tension to a select vehicular structure adjacent the select frame locations, applied tension from the tension applying means for displacing the select vehicular structure relative to the fixed vehicle position, the apparatus thus for straightening vehicular structure.
26. The apparatus of claim 25 comprising a vehicle support cross member, the cross member comprising first and second cross member ends, the first and second cross member ends being attachable to the main frame at the guide portions, the cross member and the guide portions for supporting the vehicular body as received by the main frame.
27. The apparatus of claim 25 comprising a rear frame member, the rear frame member comprising first and second rear frame ends and vertically oriented rear frame apertures intermediate the first and second rear frame ends, the rear frame member being attachable to the main frame at the open end to close the open end, the select frame locations being selected based upon the main frame apertures and the rear frame apertures.
28. The apparatus of claim 25 wherein the main frame comprises axially paired main frame apertures.
29. The apparatus of claim 25 comprising a pair of laterally-opposed lift tower assemblies, the lift tower assemblies being fastened to the main frame intermediate the open end and closed end, each lift tower assembly comprising a lift member and vehicle-engaging arms pivotally attached to the lift member, the main frame and lift tower assemblies for fixing the position of the vehicular body as received by the main frame.
30. The apparatus of claim 27 wherein the rear frame member comprises axially paired rear frame apertures.
31. An apparatus for straightening vehicular structure, the apparatus comprising:
a U-shaped main frame, the main frame having a vehicle-receiving open end, a vehicle-stopping closed end, laterally-opposed vehicular guide portions, and main frame support means for elevating the main frame above a support surface substantially parallel thereto, the closed end and guide portions defining a peripheral main frame length, the main frame length defining a frame width and frame depth, the frame width and frame depth for receiving a vehicular body in a fixed vehicle position intermediate the guide portions adjacent the closed end in superior adjacency to the support surface such that the guide portions and closed end corral the vehicular body in spaced relation thereto, the main frame length comprising horizontally spaced, main frame structure for removably attaching repositionable tension applying means; and
a portable pull tower assembly removably attachable to the horizontally spaced main frame structure, the pull tower assembly comprising a horizontal base section, a vertical upright section, tension applying means for applying tension to the vehicular body, and attachment means for attaching the pull tower assembly to the horizontally spaced, main frame structure, the base section having a base section length, the base section length having horizontally spaced, base structure, the base section being receivable intermediate the main frame and the support surface inferior to the horizontally spaced, main frame structure such that the base section length extends toward the vehicular body, the main frame for fixing the position of the vehicular body as received via the open end intermediate the vehicular guide portions, the tension applying means for applying tension to a select vehicular structure, said means thus for displacing the select vehicular structure relative to the fixed vehicle position via applied tension, the apparatus thus for straightening vehicular structure.
32. The apparatus of claim 31 comprising a vehicle support cross member, the cross member comprising first and second cross member ends, the first and second cross member ends being attachable to the main frame at the guide portions, the cross member and the guide portions for supporting the vehicular body as received by the main frame.
33. The apparatus of claim 31 comprising a rear frame member, the rear frame member comprising first and second rear frame ends and horizontally spaced, rear frame structure intermediate the first and second rear frame ends, the rear frame member being attachable to the main frame at the open end to close the open end.
34. The apparatus of claim 31 wherein the main frame comprises an I-shaped transverse cross-section, the I-shaped transverse cross-section of the main frame having upper and lower main frame flanges, the upper and lower main frame flanges comprising vertically and axially paired main frame apertures and the base section of the tower assembly comprising vertically oriented, horizontally spaced base apertures, said attachment means being cooperable with the main frame apertures and the base apertures for adjusting the tower assembly relative to the main frame.
35. The apparatus of claim 31 wherein a series of portable pull tower assemblies are cooperable with the main frame to effect select structural displacement of the vehicular body as received by the main frame via applied tension.
36. The apparatus of claim 31 comprising a pair of laterally-opposed lift tower assemblies, the lift tower assemblies being fastened to the main frame intermediate the open end and closed end, each lilt tower assembly comprising a lift member and vehicle-engaging arms pivotally attached to the lift member, the main frame and lift tower assemblies for fixing the position of the vehicular body as received by the main frame.
37. The apparatus of claim 34 comprising a rear frame member, the rear frame member comprising an I-shaped transverse cross section, and first and second rear frame ends, the I-shaped transverse cross-section of the rear frame member having upper and lower rear frame flanges, the upper and lower rear frame flanges comprising vertically and axially paired rear frame apertures intermediate the first and second rear frame ends, the rear frame member being attachable to the main frame at the open end to close the open end, said attachment means being cooperable with the rear frame apertures and base apertures for adjusting the tower assembly relative to the main frame.