1. An exposure method comprising the steps of:
exposing a pattern of a reticle onto a substrate by scanning the reticle and the substrate, and by illuminating an illumination area having a slit shape on the reticle using a light from a light source, the slit shape having a longitudinal direction corresponding to a direction orthogonal to a scanning direction; and
correcting an accumulated illuminance in the scanning direction at each position of the illumination area in the longitudinal direction,
wherein said correcting step includes the steps of:
calculating a first illuminance correction amount common to plural areas on the substrate, the pattern being to be transferred to each area; and
calculating a second illuminance correction amount intrinsic to each area, said correcting step correcting the accumulated illuminance based on the first and second illuminance correction amounts.
2. An exposure method according to claim 1, wherein the first correction amount calculating method includes the steps of:
converting two-dimensional data expressed by a coordinate in the area into one-dimensional data expressed by a coordinate along the longitudinal direction;
obtaining a high order component expressed by the coordinate along the longitudinal direction; and
obtaining the first correction amount that is maintained constant during scanning irrespective of a coordinate in the scanning direction, said correcting step setting the first correction amount to a first corrector that includes a pair of blades arranged on a plane optically conjugate relationship with the reticle such that an interval between the blades can be adjusted in a direction corresponding to the scanning direction.
3. An exposure method according to claim 1, wherein the first correction amount calculating method includes the step of obtaining a gradient component expressed by a coordinate along the longitudinal direction from two-dimensional data expressed by a coordinate in the area, said correcting step setting the first correction amount to a second corrector arranged on a plane that has an optically conjugate or Fourier transformation relationship with the reticle, the second corrector being configured linearly movable in the longitudinal direction or rotatable around one axis that is parallel to a direction corresponding to the scanning direction.
4. An exposure method according to claim 1, wherein the second correction amount calculating method includes the step of obtaining a gradient component expressed by a coordinate along the longitudinal direction from two-dimensional data expressed by a coordinate in the area, said correcting step setting the second correction amount to a second corrector arranged on a plane that has an optically conjugate or Fourier transformation relationship with the reticle, the second corrector being configured linearly movable in the longitudinal direction or rotatable around one axis that is parallel to a direction corresponding to the scanning direction.
5. An exposure method according to claim 1, wherein the first correction amount calculating method includes the step of obtaining a high order component expressed by a coordinate along the longitudinal direction from two-dimensional data expressed by a coordinate in the area, said correcting step setting the first correction amount to a third corrector arranged on a plane that has an optically conjugate or Fourier transformation relationship with the reticle, the third corrector being configured linearly movable in the longitudinal direction or rotatable around one axis that is parallel to a direction corresponding to the scanning direction.
6. An exposure method according to claim 1, wherein at least one of the first and second correction amounts is maintained constant irrespective of a coordinate along the scanning direction.
7. An exposure method according to claim 1, wherein at least one of the first and second correction amounts is expressed by a function of a coordinate along the scanning direction, and said exposure method further comprises the step of controlling the at least one in synchronization with scanning.
8. An exposure method according to claim 1, further comprising the step of correcting a laser exposure dose, which step includes the steps of:
calculating a third illuminance correction amount common to the plural areas on the substrate; and
calculating a fourth illuminance correction amount intrinsic to each area, said laser exposure dose correcting step correcting the laser exposure dose based on the third and fourth illuminance correction amounts.
9. An exposure method according to claim 8, wherein the third illuminance correction amount calculating step includes the steps of:
obtaining a high order component including a gradient component expressed by a coordinate along the scanning direction from two-dimensional data expressed by a coordinate in the area so as to set a component of the third illuminance correction amount in the scanning direction as a function of the coordinate along the scanning direction; and
setting a component of the third illuminance correction amount in the longitudinal direction by canceling out an illuminance variation caused by the first illuminance correction amount.
10. An exposure method according to claim 8, wherein the fourth illuminance correction amount calculating step includes the steps of:
obtaining a gradient component expressed by a coordinate along the scanning direction from two-dimensional data expressed by a coordinate in the area so as to set a component of the fourth illuminance correction amount in the scanning direction as a function of the coordinate along the scanning direction; and
setting a component of the fourth illuminance correction amount in the longitudinal direction by canceling out an illuminance variation caused by the second illuminance correction amount.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A soft starter module for selectively electrically connecting a power line terminal with an electric motor load terminal, the module comprising:
a first switching device having a first terminal electrically coupled with a load terminal and a second terminal electrically coupled with a line terminal;
a second switching device having a first terminal electrically coupled with the line terminal and a second terminal electrically coupled with the load terminal;
a driver apparatus providing switching control signals to the first and second switching devices for selectively electrically connecting the line terminal with the load terminal; and
a housing with a top, a bottom, and at least one side, the housing comprising:
a first housing structure,
a second housing structure mounted to the first housing structure, the first and second housing structures defining a cavity in which the first and second switching devices are mounted and allowing for external access to the load terminal and the line terminal,
at least one of the first and second housing structures including driver support structures for mounting the driver apparatus to the housing,
a first set of module mounting structures located on at least one of the first and second housing structures and allowing the housing to be mounted to a flat structure with a first one of the top, the bottom, and the at least one side generally parallel to the flat structure; and
a second set of module mounting structures located on at least one of the first and second housing structures and allowing the housing to be mounted to the flat structure with a second one of the top, the bottom, and the at least one side generally parallel to the flat structure.
2. The soft starter module of claim 1, wherein the driver apparatus comprises a first driver board providing switching control signals to the first switching device, and a second driver board providing switching control signals to the second switching device; and wherein the first and second housing structures individually include first driver support structures for mounting one of the driver boards thereto, and second driver support structures for mounting the driver boards to both the first and second housing structures.
3. The soft starter module of claim 2, wherein the first and second housing structures individually include driver support structures on a first side of the housing for mounting the driver apparatus to the first side of the housing, and wherein the first and second housing structures individually include first module mounting structures on a different second side of the housing allowing the housing to be mounted to a flat structure with the second side generally parallel to the flat structure.
4. The soft starter module of claim 1, wherein the first and second housing structures individually include driver support structures on a first side of the housing for mounting the driver apparatus to the first side of the housing, and wherein the first and second housing structures individually include first module mounting structures on a different second side of the housing allowing the housing to be mounted to a flat structure with the second side generally parallel to the flat structure.
5. The soft starter module of claim 1, wherein the module mounting structures include flanges on at least one of the first and second housing structures, and wherein the flanges individually include at least one hole or slot allowing the housing to be mounted to the flat structure with a fastener that extends through the hole or slot.
6. The soft starter module of claim 1, wherein the first and second housing structures each include first module mounting structures located on a side of the housing, and wherein at least one of the first and second housing structures includes second module mounting structures located on one of the top and the bottom of the housing.
7. The soft starter module of claim 6, wherein the module mounting structures comprise flanges that include at least one hole or slot allowing the housing to be mounted to the flat structure with a fastener that extends through the hole or slot.
8. The soft starter module of claim 6, wherein the first housing structure includes a set of second module mounting structures located on the top of the housing allowing the housing to be mounted to the flat structure with the top generally parallel to the flat structure, and wherein the second housing structure includes a set of second module mounting structures located on the bottom of the housing allowing the housing to be mounted to the flat structure with the bottom generally parallel to the flat structure.
9. The soft starter module of claim 8, wherein the module mounting structures comprise flanges that include at least one hole or slot allowing the housing to be mounted to the flat structure with a fastener that extends through the hole or slot.
10. The soft starter module of claim 1, further comprising:
a first heat sink connected to the first terminal of the first switching device and to the load terminal;
a second heat sink connected to the second terminal of the first switching device, to the first terminal of the second switching device, and to the line terminal;
a third heat sink connected to the second terminal of the second switching device, and to the load terminal; and
a clamp that clamps the first heat sink, the first switching device, the second heat sink, the second switching device, and the third heat sink into a stack arrangement mounted in the cavity of the housing.
11. The soft starter module of claim 1, further comprising at least one snubber resistor and at least one snubber capacitor operatively coupled with the driver apparatus and located within the housing cavity.
12. The soft starter module of claim 11, wherein the at least one snubber resistor is a tubular structure extending axially within the cavity between the first and second housing structures, and wherein the first and second housing structures individually include at least one resistor support extending into the cavity to engage the interior of an end of the snubber resistor.
13. The soft starter module of claim 12, wherein the resistor supports of the first and second housing structures are cone shaped.
14. The soft started module of claim 13, wherein the cone shaped resistor supports of the first and second housing structures include slots allowing the supports to flex to accommodate dimensional variations in the size of the snubber resistor.
15. The soft starter module of claim 11, wherein the at least one snubber capacitor is a cylindrical structure extending axially within the cavity between the first and second housing structures, and wherein the first and second housing structures individually include at least one capacitor support extending into the cavity to engage the end of the snubber capacitor.
16. The soft starter module of claim 1, further comprising at least one sharing resistor coupled between the line terminal and the load terminal and located within the housing cavity.
17. The soft starter module of claim 16, wherein the at least one sharing resistor is a tubular structure extending axially within the cavity between the first and second housing structures, and wherein the first and second housing structures individually include at least one resistor support extending into the cavity to engage the interior of an end of the sharing resistor.
18. The soft starter module of claim 17, wherein the resistor supports of the first and second housing structures are cone shaped.
19. The soft started module of claim 18, wherein the cone shaped resistor supports of the first and second housing structures include slots allowing the supports to flex to accommodate dimensional variations in the size of the sharing resistor.
20. The soft starter module of claim 1, wherein the first and second housing structures are joined along a closure line extending around a plurality of sides of the housing in a closure plane, wherein the first housing structure includes a first seal structure having at least two ribs and at least one groove between the ribs, the ribs and the groove extending along the closure line, and wherein the second housing structure includes a second seal structure having at least two ribs and at least one groove between the ribs, the ribs and the groove extending along the closure line, and wherein one of the ribs of the first seal structure is within the groove of the second seal structure when the first and second housing structures are joined along the closure line and one of the ribs of the second seal structure is within the groove of the first seal structure when the first and second housing structures are joined along the closure line.
21. The soft starter module of claim 1, wherein the first and second housing structures individually include a plurality of housing closure structures with holes for mounting the second housing structure to the first housing structure using fasteners extending through the holes.
22. The soft starter module of claim 21, wherein the housing closure structure holes of at least one of the first and second housing structures are adapted to fixedly receive self-tapping screws to mount the second housing structure to the first housing structure.
23. The soft starter module of claim 21, wherein the housing closure structures of at least one of the first and second housing structures include hexagonal recesses to receive hex nuts for mounting the second housing structure to the first housing structure using screws extending through the holes to engage the hex nuts.