1. An optical disc drive device comprising:
an FE signal generator which generates a focus error signal;
a TE signal generator which generates a tracking error signal;
a return beam detector which detects a return beam reflected by an optical disc after irradiated by an optical pickup to generate a return beam level signal;
a return beam gain setting part which sets amplitude adjustment amount of the return beam level signal so that a signal level of the return beam level signal generated by the return beam detector coincides with a predetermined reference level;
an FE gain setting part which sets amplitude adjustment amount of the focus error signal in accordance with the signal level of the return beam level signal adjusted by the return beam gain setting part so that a signal amplitude of the focus error signal is constant; and
a TE gain setting part which sets amplitude adjustment amount of the tracking error signal in accordance with the signal level of the return beam level signal adjusted by the return beam gain setting part so that a signal amplitude of the tracking error signal is constant;
wherein the return beam gain setting part includes:
a first amplitude adjustment part which adjusts an amplitude of a difference between the signal level of the return beam level signal and the reference level by a first amplitude adjustment coefficient corresponding to the return beam level signal; and
a first cumulative adder which calculates a cumulative adding value of the difference adjusted by the first amplitude adjustment coefficient,
the FE gain setting part includes:
a second amplitude adjustment part which adjusts the amplitude of the difference by a second amplitude adjustment coefficient corresponding to the focus error signal; and
a second cumulative adder which calculates a cumulative adding value of the difference adjusted by the second amplitude adjustment coefficient,
the TE gain setting part includes:
a third amplitude adjustment part which adjusts the amplitude of the difference by a third amplitude adjustment coefficient corresponding to the tracking error signal; and
a third cumulative adder which calculates a cumulative adding value of the difference adjusted by the third amplitude adjustment coefficient.
2. The drive device according to claim 1, further comprising:
a first offset correction part which performs offset adjustment of the return beam level signal detected by the return beam detector;
a second offset correction part which performs offset adjustment of the focus error signal generated by the FE signal generator; and
a third offset correction part which performs offset adjustment of the tracking error signal generated by the TE signal generator,
wherein the return beam gain setting part sets the amplitude adjustment amount of the return beam level signal after performing the offset adjustment by the first offset correction part;
the FE gain setting part sets the amplitude adjustment amount of the focus error signal after performing the offset adjustment by the second offset correction part; and
the TE gain setting part sets the amplitude adjustment amount of the tracking error signal after performing the offset adjustment by the third offset correction part.
3. The drive device according to claim 2, wherein each of the first to third offset correction parts is separately provided corresponding to playback and record operations of the optical disc.
4. The drive device according to claim 1, further comprising:
a first gain correction part which performs gain adjustment of the return beam level signal detected by the return beam detector;
a second gain correction part which performs gain adjustment of the focus error signal generated by the FE signal generator;
a third gain correction part which performs gain adjustment of the tracking error signal generated by the TE signal generator; and
a gain amount setting part which sets gain amount of the first to third gain correction parts based on the cumulative adding values of the first to third cumulative adders.
5. The drive device according to claim 4, wherein the gain amount setting part sets the gain amounts of the first to third gain correction parts based on the return beam level signal adjusted by the return beam gain setting part and a reference signal of the return beam level signal.
6. The drive device according to claim 4, wherein each of the first to third gain correction parts, the gain amount setting part and the first to third cumulative adders is separately provided corresponding to playback and record operations of the optical disc.
7. The drive device according to claim 4, wherein when the amplitude of the focus error signal and the amplitude of the tracking error signal increase in proportion to the amplitude of the return beam level signal, and a gradient of the focus error signal against the amplitude of the return beam level signal is equal to a gradient of the tracking error signal against the amplitude of the return beam level signal, the gain amount setting part sets the gain amounts of the first to third gain correction parts so that the amplitude of the focus error signal becomes equal to the amplitude of the tracking error signal, regardless of the amplitude of the return beam level signal.
8. The drive device according to claim 4, wherein when the amplitude of the focus error signal and the amplitude of the tracking error signal increase in proportion to the amplitude of the return beam level signal, and a gradient of the focus error signal against the amplitude of the return beam level signal is different from a gradient of the tracking error signal against the amplitude of the return beam level signal, the gain amount setting part sets the gain amounts of the first to third gain correction parts so that the amplitude of the focus error signal is constant, the amplitude of the tracking error signal is constant, and the amplitude of the focus error signal is different from the amplitude of the tracking error signal, regardless of the amplitude of the return beam level signal.
9. The drive device according to claim 4, wherein when the amplitude of the focus error signal and the amplitude of the tracking error signal increase in proportion to the amplitude of the return beam level signal, and a gradient of the focus error signal against the amplitude of the return beam level signal is different from a gradient of the tracking error signal against the amplitude of the return beam level signal, the gain amount setting part sets the gain amounts of the first to third gain correction parts so that the amplitude of the focus error signal is equal to the amplitude of the tracking error signal.
10. The drive device according to claim 4, wherein when the amplitude of the focus error signal increases in proportion to the amplitude of the return beam level signal, and the amplitude of the tracking error signal is constant, the gain amount setting part sets the gain amounts of the first to third gain correction parts so that the amplitude of the focus error signal is constant, the amplitude of the tracking error signal is constant, and the amplitude of the focus error signal is different from the amplitude of the tracking error signal, regardless of the amplitude of the return beam level signal.
11. The drive device according to claim 1, further comprising:
a layer jump control data generator which generates layer jump control data for moving a beam spot of a read-out beam between different layers of the optical disc;
a track search control data generator which generates track search control data for moving the beam spot in radial direction;
an FE servo part which generates a focus servo signal based on the layer jump control data and the focus error signal, the amplitude of the focus error signal being adjusted by the amplitude adjustment amount set by the FE gain setting part;
a TE servo part which generates a tracking servo signal based on the track search control data and the tracking error signal, the amplitude of the tracking error signal being adjusted by the amplitude adjustment amount set by the TE gain setting part;
a focus servo amplitude adjustment part which adjusts the amplitude of the focus servo signal to drive a focus actuator; and
a tracking servo amplitude adjustment part which adjusts the amplitude of the tracking servo signal to drive a tracking actuator.
12. The drive device according to claim 11, further comprising:
a first AD converter which converts the focus error signal generated by the FE signal generator into a digital signal;
a second AD converter which converts the tracking error signal generated by the TE signal generator into a digital signal;
a first DA converter which converts the focus servo signal generated by the FE servo part into an analog signal; and
a second DA converter which converts the tracking error signal generated by the TE servo part into an analog signal,
wherein the return beam gain setting part, the FE gain setting part, the TE gain setting part, the FE servo part and the TE servo part perform digital signal processes.
13. A tilt correction device comprising:
a first tilt sensor which irradiates an optical disc with a tilt detecting beam and detects a first reflected beam from the optical disc;
a second tilt sensor which irradiates the optical disc with a tilt detecting beam and detects a second reflected beam from the optical disc;
a return beam detector which detects a return beam level signal indicative of an adding signal of the first and second reflected beam signals;
a return beam gain setting part which sets amplitude adjustment amount of the return beam level signal so that a signal level of the return beam level signal coincides with a reference level;
a tilt error signal generator which detects a tilt error signal indicative of a difference signal between the first and second reflected signals; and
a tilt error signal gain setting part which sets amplitude adjustment amount of the tilt error signal in accordance with the signal level of the return beam level signal so that detection sensitivity of the tilt error signal is constant.
14. The tilt correction device according to claim 13, wherein the tilt error signal gain setting part sets the amplitude adjustment amount of the tilt error signal based on the amplitude adjustment amount of the return beam level signal set by the return beam gain setting part.
15. The tilt correction device according to claim 13, further comprising a low pass filter which removes high frequency noise included in the tilt error signal, a gain of the tilt error signal being adjusted by the amplitude adjustment amount set by the tilt error signal gain setting part.
16. The tilt correction device according to claim 13, further comprising:
a first AD converter which converts the first reflected signal detected by the first tilt sensor into a digital signal;
a second AD converter which converts the second reflected signal detected by the second tilt sensor into a digital signal; and
a DA converter which converts the tilt error signal passing through the low pass filter into the analog signal,
wherein the return beam detector, the return beam gain setting part, the tilt error signal generator and the tilt error signal gain setting unit perform digital signal processes.
17. An optical disc drive device comprising:
an FE signal generator which generates a focus error signal;
a TE signal generator which generates a tracking error signal;
a return beam detector which detects a return beam reflected by an optical disc after irradiated by an optical pickup to generate a return beam level signal;
a return beam gain setting part which sets amplitude adjustment amount of the return beam level signal so that a signal level of the return beam level signal generated by the return beam detector coincides with a predetermined reference level;
an FE gain setting part which sets amplitude adjustment amount of the focus error signal in accordance with the signal level of the return beam level signal adjusted by the return beam gain setting part so that a signal amplitude of the focus error signal is constant;
a TE gain setting part which sets amplitude adjustment amount of the tracking error signal in accordance with the signal level of the return beam level signal adjusted by the return beam gain setting part so that a signal amplitude of the tracking error signal is constant; and
a tilt correction part which detects a tilt of the optical disc,
the tilt correction part includes:
a first tilt sensor which irradiates the optical disc with a tilt detecting beam and detects a first reflected beam from the optical disc;
a second tilt sensor which irradiates the optical disc with a tilt detecting beam and detects a second reflected beam from the optical disc;
a return beam detector which detects a return beam level signal indicative of an adding signal of the first and second reflected beam signals;
a return beam gain setting part which sets amplitude adjustment amount of the return beam level signal so that a signal level of the return beam level signal coincides with a reference level;
a tilt error signal generator which detects a tilt error signal indicative of a difference signal between the first and second reflected signals; and
a tilt error signal gain setting part which sets amplitude adjustment amount of the tilt error signal in accordance with the signal level of the return beam level signal so that detection sensitivity of the tilt error signal is constant.
18. The drive device according to claim 17, further comprising:
a first offset correction part which performs offset adjustment of the return beam level signal detected by the return beam detector;
a second offset correction part which performs offset adjustment of the focus error signal generated by the FE signal generator; and
a third offset correction part which performs offset adjustment of the tracking error signal generated by the TE signal generator,
wherein the return beam gain setting part sets the amplitude adjustment amount of the return beam level signal after performing the offset adjustment by the first offset correction part;
the FE gain setting part sets the amplitude adjustment amount of the focus error signal after performing the offset adjustment by the second offset correction part; and
the TE gain setting part sets the amplitude adjustment amount of the tracking error signal after performing the offset adjustment by the third offset correction part.
19. The drive device according to claim 17, further comprising:
a layer jump control data generator which generates layer jump control data for moving a beam spot of a read-out beam between different layers of the optical disc;
a track search control data generator which generates track search control data for moving the beam spot in radial direction;
an FE servo part which generates a focus servo signal based on the layer jump control data and the focus error signal, the amplitude of the focus error signal being adjusted by the amplitude adjustment amount set by the FE gain setting part;
a TE servo part which generates a tracking servo signal based on the tracking error signal, the amplitude of the tracking error signal being adjusted by the amplitude adjustment amount set by the TE gain setting part;
a focus servo amplitude adjustment part which adjusts the amplitude of the focus servo signal to drive a focus actuator; and
a tracking servo amplitude adjustment part which adjusts the amplitude of the tracking servo signal to drive a tracking actuator.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of precisely timed control over semiconductor manufacturing processes using a tool host and a process IO controller, wherein the process IO controller includes electrical interfaces to process chamber monitors and controls and supports precisely timed input and output through the electrical interfaces, and the tool host includes a programming environment that symbolically represents the electrical interfaces, the method including:
using the tool host, preparing a control program that includes instructions for the process IO controller to sample inputs and control outputs through the electrical interfaces;
from the tool host to the process IO controller, loading the control program;
and using the process IO controller, upon receiving a command invoking the control program, running the control program to generate statistically accurate timing of sampling inputs and controlling outputs through the electrical interfaces;
wherein the sampling inputs and controlling outputs is considered to have statistically accurate timing when variances in a 99.99 percent range of distribution of variances between a target time and actual times are less than or equal to 5 (five) milliseconds.
2. The method of claim 1, wherein the control program is prepared in an interpretative programming language.
3. The method of claim 2, wherein the loading the control program proceeds with a load processing priority that preserves priority of processing commands by the process IO controller.
4. The method of claim 3, wherein the loading the control program further proceeds without taking the process IO controller off-line from at least some sampling inputs and controlling outputs through the electrical interfaces.
5. The method of claim 1, wherein the sampling inputs and controlling outputs is performed with a 99.99 percent range of distribution of variances between a target time and actual times are less than or equal to 3 (three) milliseconds.
6. The method of claim 1, wherein the sampling inputs and controlling outputs is performed with a 99.99 percent range of distribution of variances between a target time and actual times are less than or equal to 1 (one) millisecond.
7. The method of claim 1, further including the process IO controller sending the tool host virtual digital signals corresponding to the sampling inputs and changing outputs through the electrical interfaces, without disrupting the statistically accurate timing of the sampling and controlling.
8. The method of claim 7, wherein the virtual digital signals include time stamps.
9. The method of claim 7, further including the tool host, responsive to the virtual digital signals, sending the process IO controller a command causing the process IO controller to stop running the control program.
10. The method of claim 1, further including the process IO controller sending control commands to another process IO controller, responsive to the control program, with statistically accurate timing.
11. The method of claim 1, further including specifying timing tolerances for control steps to the tool host and having the tool host determine whether to delegate timing of the control steps to the process IO controller by the preparation and loading of an interpretive control program.
12. A method of controlling a process running in a process chamber in a repeatable interval using a process IO controller cooperating with a central controller, the method including:
using the process IO controller that monitors and controls one or more aspects of operating the process chamber, receiving control commands from the central controller and processing the control commands within a first statistically repeatable short interval of 5 milliseconds or less after the receiving;
wherein a short interval is considered statistically repeatable when times in a 99.99 percent range of distribution of the times are less than or equal to the short interval;
without failing statistical repeatability in the processing of the control commands, sampling one or more sensors coupled to the process chamber and buffering the samples within a statistically repeatable tolerance of a sampling schedule; and
wherein a tolerance is considered statistically repeatable when variances in a 99.99 percent range of distribution of variance between a target time and actual times are less than or equal to the tolerance.
13. The method of claim 12, wherein the first statistically repeatable short interval is 3 milliseconds or less.
14. The method of claim 12, wherein the first statistically repeatable short interval is 1 millisecond or less.
15. The method of claim 12, wherein the statistically repeatable tolerance is 5 milliseconds or less.
16. The method of claim 12, wherein the statistically repeatable tolerance is 3 milliseconds or less.
17. The method of claim 12, further including buffering time stamps corresponding to the sampling.
18. The method of claim 12, further including the process IO controller distributing at least some of the buffered samples without failing in statistical repeatability of the processing of the control commands or failing in statistical repeatability of the sampling.
19. The method of claim 12, further including:
without failing in statistical repeatability of the processing of the control commands or failing in statistical repeatability of the sampling, executing dynamically loadable instructions from memory of the process IO controller;
wherein the instructions include responding to selected results of the sampling, the responding happening within a second statistically repeatable short interval that is less than a statistically repeatable feedback interval required to report the sampling to the central controller and receive from the central controller a responsive command.
20. The method of claim 12, further including:
without failing in statistical repeatability of the processing of the control commands or failing in statistical repeatability of the sampling, executing dynamically loadable instructions from memory of the process IO controller;
wherein the instructions include responding to selected results of the sampling, the responding happening within a second statistically repeatable short interval that is less than half as long as the first statistically repeatable short interval.
21. The method of claim 20, wherein the second statistically repeatable short interval that is less than one-fifth as long as the first statistically repeatable short interval.
22. The method of claim 20, further including at the process IO controller, receiving, recognizing and dynamically loading instructions into memory of the process IO controller, without taking the process IO controller offline from monitoring and controlling aspects of operating the process chamber.
23. The method of claim 20, further including the process IO controller distributing at least some of the buffered samples without failing in statistical repeatability of the receiving and processing of the control commands or failing in statistical repeatability of the sampling or failing in statistical repeatability of the executing dynamically loaded instructions.
24. The method of claim 12, further including:
without failing in statistical repeatability of the receiving and initiating processing of the control commands or failing in statistical repeatability of the sampling, executing dynamically loadable instructions from memory of the process IO controller;
wherein the instructions include initiating closed loop control of at least one particular aspect of operating the process chamber, the initiating happening within a second statistically repeatable short interval that is less than half as long as the first statistically repeatable short interval.
25. The method of claim 24, wherein the second statistically repeatable short interval that is less than one-fifth as long as the first statistically repeatable short interval.
26. The method of claim 24, further including at the process IO controller, receiving, recognizing and loading dynamically loadable instructions into memory of the process IO controller, without taking the process IO controller off-line from monitoring and controlling aspects of operating the process chamber.
27. The method of claim 24, further including the process IO controller distributing at least some of the buffered samples without failing in statistical repeatability of the receiving and initiating processing of the control commands or failing in statistical repeatability of the sampling or failing in statistical repeatability of the executing dynamically loadable instructions.
28. A process IO controller including:
a port adapted to communicate with the central processor;
memory;
logic and resources coupled to the port and the memory, adapted to receive control commands from the central controller and processing the control commands within a first statistically repeatable short interval of 5 milliseconds or less after the receiving;
wherein a short interval is considered statistically repeatable when times in a 99.99 percent range of distribution of the times are less than or equal to the short interval;
and adapted, without failing statistical repeatability in the processing of the control commands, to sample one or more sensors coupled to the process chamber and buffering the samples within a statistically repeatable tolerance of a sampling schedule; and
wherein a tolerance is considered statistically repeatable when variances in a 99.99 percent range of distribution of variance between a target time and actual times are less than or equal to the tolerance.
29. The controller of claim 28, wherein the process IO controller is further adapted to distribute at least some of the buffered samples without failing in statistical repeatability of the processing of the control commands or failing in statistical repeatability of the sampling.
30. The controller of claim 28, wherein the process IO controller is further adapted to, execute dynamically loadable instructions from memory of the process IO controller;
wherein the instructions include responding to selected results of the sampling, the responding happening within a second statistically repeatable short interval that is less than half as long as the first statistically repeatable short interval.
31. The controller of claim 28, wherein the process IO controller is further adapted to execute dynamically loadable instructions from memory of the process IO controller;
wherein the instructions include initiating closed loop control of at least one particular aspect of operating the process chamber, the initiating happening within a second statistically repeatable short interval that is less than half as long as the first statistically repeatable short interval.