What is claimed is:
1. A structure for use in DNA separation including:
a semiconductor substrate; and
a plurality of columns formed on the semiconductor substrate and at least of which surface layer is made of an oxide of the semiconductor, wherein
passage of DNAs through the columns enables separation of said DNAs.
2. The structure according to claim 1 wherein a height of said columns from a surface of said semiconductor substrate is between 1 m and 1 mm.
3. The structure according to claim 2 wherein a height of said columns is 10 m.
4. The structure according to claim 1 wherein part of said column is embedded in a hole provided in a surface of said semiconductor substrate.
5. The structure according to claim 1 wherein a pitch of said adjacent columns is between 10 nm and 4 m.
6. The structure according to claim 1 wherein said semiconductor substrate is made of silicon and said oxide is made of a silicon oxide.
7. The structure according to claim 6 wherein said silicon is n-type silicon.
8. The structure according to claim 1 wherein said surface layer of said columns is a thermally oxidized layer of said semiconductor.
9. The structure according to claim 8 wherein an interior of said column is made of one selected between said semiconductor and a hollow space.
10. A method of manufacturing a structure for use in DNA separation including:
a step of preparing a semiconductor substrate;
a step of forming a mask layer with a plurality of openings on the surface of the semiconductor substrate;
an etching step of immersing the semiconductor substrate in an etching liquid so as to etch the semiconductor substrate exposed in the openings and form holes;
a step of thermally oxidizing the semiconductor substrate and forming a thermally oxidized film so that the film covers the surface of the holes;
a step of removing the mask layer; and
a step of etching the semiconductor substrate from the surface thereof so that the thermally oxidized film protrudes from the surface of the semiconductor substrate and forming columns at least of which surface is made of the thermally oxidized film.
11. The method according to claim 10 wherein said etching step is an electrolytic etching step in which said semiconductor substrate is immersed in a solution containing hydrofluoric acid and used as an anode for etching.
12. The method according to claim 11 wherein said etching step is a step of using n-type silicon as said semiconductor and performing electrolytic etching of said semiconductor substrate while irradiating the back of said semiconductor substrate with light with a wavelength of 1100 nm or smaller.
13. The method according to claim 10 including a step of forming microscopic asperities on the surface of said semiconductor substrate exposed in said openings prior to said etching step.
14. A DNA separation device for use in DNA separation including:
a semiconductor substrate;
a recess provided in the surface of the semiconductor substrate so as to hold a liquid;
a plurality of columns provided at the bottom of the recess and at least of which surface layer is made of an oxide of the semiconductor; and
a pair of electrodes sandwiching the columns, wherein
voltage is applied across the electrodes so that DNAs in said liquid held in the recess perform electrophoresis through the columns.
15. The DNA separation device according to claim 14 wherein a height of said columns from the bottom of said recess is between 1 m and 1 mm.
16. The DNA separation device according to claim 15 wherein a height of said columns is 10 m.
17. The DNA separation device according to claim 14 wherein a pitch of said adjacent columns is between 10 nm and 4 m.
18. The DNA separation device according to claim 14 wherein said semiconductor substrate is made of silicon and said oxide is a silicon oxide.
19. The DNA separation device according to claim 14 wherein said surface layer of said columns is a thermally oxidized layer of said semiconductor.
20. The DNA separation device according to claim 19 wherein the interior of said column is made of one selected between said semiconductor and a hollow space.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A turnout of a guideway beam-based transit system comprising a plurality of serially aligned guideway beams, at least one guide plate assembly, a drive means, at least one carriage assembly bed, and a plurality of carriage assemblies, wherein
at least two of said guideway beams having a guideway beam frame and at least one inner beam,
said frame of said guideway beam being generally of rigid construction, and
said guideway beam having a plurality of guideway segments, wherein
said guideway beam frame in said guideway segment having first and second sidewalls,
said sidewalls having working surfaces in at least two of said guideway beam segment,
said working surface of said first sidewall of said guideway beam frame, and said working surface of said second sidewall of said guideway beam frame having horizontally different curvatures in at least one of said guideway segments.
2. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said guide plate assembly having first guide plate and second guide plate, a plurality of guide plate holders, and a plurality of tie bars,
said first and second guide plates being held by said guide plate holders, and
said guide plate holder of said first guide plate and said guide plate holder of said second guide plate being affixed to said tie bar.
3. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said guide plate assembly having first guide plate, second guide plate, and a plurality of tie bars, and
said first and second guide plates being connected to said tie bar.
4. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said first and second guide plates slidably being held by said guide plate holders.
5. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said first and second sidewalls of said guideway beam frame having a plurality of holes,
said tie bars of said guide plate assembly extend through said holes of said first and second sidewalls.
6. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said inner beam of one of said guideway beams and said inner beam of another one of said guideway beams being slidably connected together.
7. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said inner beam of one of said guideway beams and said inner beam of another one of said guideway beams being rigidly connected together.
8. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said guide plate having a running surface for guide wheels.
9. The turnout of a beam-based transit system as defined in claim 1, wherein
said guideway beam including a plurality of gate-shaped track bed support frames, wherein
said gate-shaped support frame having a top member and side members,
said tie bar being affixed to said side members,
said gate-shaped track bed support frame being mounted on said top member of said guideway beam frame.
10. The turnout of a guideway beam-based transit system as defined in claim 1, wherein
said turnout having two states,
said two states being a straight state and a bent state,
said guideway beams being separated by a generally acceptable distance under said bent state.
11. The turnout of a guideway beam-based transit system as defined in claim 1 wherein
said turnout having an expandable guideway beam.
12. The turnout of a guideway beam-based transit system as defined in claim 1 wherein
said turnout having a plurality of carriage assembly locking means.
13. The turnout of a guideway beam-based transit system as defined in claim 1 wherein
said turnout having first and second states,
said frame having first and second sidewalls,
each of said first and second sidewalls of said sidewalls having a working surface,
each of said first and second sidewalls of said frame having a plurality of holes,
said inner beam having first and second sidewalls,
each of said first and second sidewalls of said inner beam having a plurality of guide plate support means, and
each of said guide plate support means of said first sidewall having a working surface.
14. The turnout of a guideway beam-based transit system as defined in claim 1 wherein
said turnout having first and second states,
said frame having first and second sidewalls,
each of said first and second sidewalls of said frame having a working surface,
said inner beam having first and second sidewalls,
each of said first and second sidewalls of said inner beam having a working surface,
said working surface of said first sidewall of said frame and said working surface of said first sidewall of said inner beam being separated by a generally equal distance along their lengths under said first state, and
said working surface of said second sidewall of said frame and said working surface of said second sidewall of said inner beam being separated by a generally equal distance along their lengths under said second state.
15. A turnout of a guideway beam-based transit system comprising a plurality of serially aligned guideway beams, at least one guide plate assembly, a drive means, at least one carriage assembly bed, and a plurality of carriage assemblies, wherein
said guideway beam having at least one guideway beam segment,
said guideway beam being generally of rigid construction.
said guideway beam in said guideway beam segment having first and second sides,
said first side and second side having a working surface in at least one of said guideway beams, and
said working surface of said first side of said guideway segment and said working surface of said second side of said guideway segment having horizontally different curvatures.
16. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said guide plate assembly having first guide plate and second guide plate, a plurality of guide plate holders, and a plurality of tie bars,
said first and second guide plates being held by said guide plate holders, and
said guide plate holders of said first guide plate and said guide plate holders of said second guide plate being affixed to said tie bar.
17. The turnout of a guideway beam-based transit system as defined in claim 16, wherein
said turnout having first and second outer edges,
said turnout having a plurality of locking means along said first outer edge, in at least selected segment of said first outer edge,
said turnout having a plurality of locking means along said second outer edge, in at least selected segment of said second outer edge,
said locking means on said first outer edge press against said guide plate holders of said first guide plate, and
said locking means on said second outer edge press against said guide plate holders of said second guide plate.
18. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said guide plate assembly having first guide plate, second guide plate, and a plurality of tie bars, and
said first and second guide plates being connected to said tie bar.
19. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said first and second guide plates slidably being held by said guide plate holders.
20. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said guide plate having a running surface for guide wheels.
21. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said turnout having two states,
said two states being a straight state and a bent state,
said guideway beams being separated by a generally acceptable distance under said bent state.
22. The turnout of a guideway beam-based transit system as defined in claim 15 wherein
said turnout having an expandable guideway beam.
23. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said guideway beam including a plurality of gate-shaped track bed support frames, wherein
said gate-shaped support frame having a top member and side members,
said tie bar being affixed to said side members,
said gate-shaped track bed support frame being mounted on said top member of said guideway beam frame.
24. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
at least in one of said guideway beams said first working surface being flat, and
said second working surface being concavely curved.
25. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said turnout having carriage assembly locking means.
26. The turnout of a guideway beam-based transit system as defined in claim 16, wherein
said turnout having tie bar locking means,
metal means affixed to said tie bar, and
said tie-bar locking means and said metal means lock up said tie bar under a locked state.
27. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said guideway beam being of steel structure.
28. The turnout of a guideway beam-based transit system as defined in claim 15, wherein
said guideway beam being of concrete construction.
29. A turnout of a guideway beam-based transit system having at least one segment comprising a plurality of serially aligned guideway beams, at least one guide plate assembly, a drive means, at least one carriage assembly bed, and a plurality of carriage assemblies, wherein
said guideway beam generally of rigid construction,
said carriage assembly having first and second sides,
said guideway beam having first and second longitudinal ends,
facing longitudinal first and second ends of two neighboring guideway beams being slidably mounted on said carriage assembly,
a pivot being affixed to top surface of said carriage assembly,
said pivot pivotably connected to one of said neighboring guideway beams having said first end,
said pivot pivotably and slidably connected to the other of neighboring said guideway beams having said second end,
said guide plate assembly having first guide plate and second guide plate, a plurality of guide plate holders, and tie bars,
said first guide plate being slidably held by said guide plate holders,
said guide plate holder of said first guide plate being affixed to said first side surface of said carriage assembly, and said guide plate holders of said second guide plate being affixed to said second side surface of said carriage assembly, and
said guide plate holder of said first guide plate being affixed to said first side surface of said tie bar, and said guide plate holders of said second guide plate being affixed to said second side surface of said tie bar.
30. The turnout of a guideway beam-based transit system as defined in claim 29, wherein
said guideway beam and two of said carriage assemblies on which said guideway beam being mounted on forming a guideway beam unit,
said guideway beam unit having at least one tie-bar holder,
said tie bar holder having first and second sides,
said first side of said tie bar holder and said first side of said carriage assemblies forming a first working surface,
said second side of said tie bar holder and said second side of said carriage assemblies forming a second working surface,
said first and second working surfaces having different curvatures under a locked state.
31. The turnout of a guideway beam-based transit system as defined in claim 29, wherein
said first and second guide plates slidably being held by said guide plate holders,
said carriage assembly bed having a plurality of carriage assembly locking means.
32. The turnout of a guideway beam-based transit system as defined in claim 29, wherein
said turnout having two states,
said two states being a straight state and a bent state,
said guideway beams being separated by a generally acceptable distance under said bent state.
33. A turnout of a guideway beam-based transit system comprising a plurality of guideway beams, at least one guide plate assembly, a drive means, at least one carriage assembly bed, and a plurality of carriage assemblies, wherein
said guideway beam being generally of rigid construction,
said guideway beam having first and second sides,
at least one of said guideway beams having a plurality of cam assemblies along first and second sides of said guideway beam, wherein
said cam assembly having a camshaft and a plurality of cams,
said cam being coaxially mounted on said camshaft, and
said cam shaft rotatably connected to said drive means.
34. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said cam having a cam surface,
a plurality of said cam surface of cams on first side of said guideway beam having first imaginary plane enveloping said cam surfaces,
said first imaginary plane being working surface of said first side of said guideway beam,
a plurality of said cam surface of cams on same side of said guideway beam having second imaginary plane enveloping said cam surfaces,
said second imaginary plane being working surface of said second side of said guideway beam, and
said working surface of said first side and said working surface of said second side having generally identical horizontal curvature along lengths of said working surfaces.
35. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said guide plate assembly having first guide plate and second guide plate, a plurality of guide plate holders, and a plurality of tie bars,
said first and second guide plates being held by said guide plate holders, and
said guide plate holders of said first guide plate and said guide plate holders of said second guide plate being affixed to said tie bar.
36. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said guide plate assembly having first guide plate, second guide plate, and a plurality of tie bars, and
said first and second guide plates being connected to said tie bar.
37. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said first and second guide plates slidably being held by said guide plate holders.
38. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said guideway beam having a frame,
said frame having first and second sidewalls,
said first and second sidewalls of said frame having a plurality of holes,
said tie bars of said guide plate assembly extend through said holes of said first and second sidewalls.
39. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said guide plate having a running surface for guide wheels.
40. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said guideway beam including a plurality of gate-shaped track bed support frames, wherein
said gate-shaped support frame having a top member and side members,
said tie bar being affixed to said side members,
said gate-shaped track bed support frame being mounted on said top member of said guideway beam frame.
41. The turnout of a guideway beam-based transit system as defined in claim 33, wherein
said turnout having two states,
said two states being a straight state and a bent state,
said guideway beams being separated by a generally acceptable distance under said bent state.
42. The turnout of a guideway beam-based transit system as defined in claim 33 wherein
said turnout having an expandable guideway beam.
43. A turnout of a guideway beam-based transit system comprising a plurality of guideway beams, at least one guide plate assembly, a drive means, at least one carriage assembly bed, and a plurality of carriage assemblies, wherein
said turnout having two states,
said two states being a straight state and a bent state,
said guideway beams being separated by a generally acceptable distance under said bent state.
44. The turnout of a guideway beam-based transit system as defined in claim 43, wherein
said guide plate having a running surface for guide wheels.
45. The turnout of a guideway beam-based transit system as defined in claim 43, wherein
said turnout having first and second outer edges,
said turnout having a plurality of locking means along said first outer edge, in at least selected segment of said first outer edge,
said turnout having a plurality of locking means along said second outer edge, in at least selected segment of said second outer edge,
said locking means on said first outer edge press against said guide plate holders of said first guide plate, and
said locking means on said second outer edge press against said guide plate holders of said second guide plate.
46. A turnout of a guideway beam-based transit system comprising a plurality of guideway beams, at least one guide plate assembly, a drive means, at least one carriage assembly bed, and a plurality of carriage assemblies, wherein
said turnout including an expandable guideway beam.
47. The turnout of a guideway beam-based transit system as defined in claim 46, wherein
said guide plate having a running surface for guide wheels.
48. The turnout of a guideway beam-based transit system as defined in claim 46, wherein
said turnout having first and second outer edges,
said turnout having a plurality of locking means along said first outer edge, in at least selected segment of said first outer edge,
said turnout having a plurality of locking means along said second outer edge, in at least selected segment of said second outer edge,
said locking means on said first outer edge press against said guide plate holders of said first guide plate, and
said locking means on said second outer edge press against said guide plate holders of said second guide plate.