1. A wireless device comprising:
a transceiver;
a programmable processor; and
executable control software stored on a non-transitory computer readable medium,
wherein at least the transceiver is in a low power sleep mode until the programmable processor and the executable control software detect a first condition,
wherein, when the programmable processor and the executable control software detect the first condition, the transceiver exits the low power sleep mode and the programmable processor and the executable software construct and transmit a message, via the transceiver, to a remote device,
wherein, when the programmable processor and the executable control software detect a second condition, the transceiver enters the low power sleep mode,
wherein, when the programmable processor and the executable control software detect a third condition, the transceiver remains out of the low power sleep mode until detection of a fourth condition, and
wherein the third condition includes receiving a first acknowledgement message from the remote device that includes an asserted stay awake indication.
2. The wireless device according to claim 1 wherein the first condition includes at least one of an event detection and expiration of a first predetermined period of time.
3. The wireless device according to claim 2 wherein the second condition includes at least one of receiving a second acknowledgement message from the remote device and expiration of a second predetermined period of time.
4. The wireless device according to claim 3 wherein at least one of the message and the second acknowledgement message is at least partially encrypted or is at least partially protected by a cryptographic message integrity code.
5. The wireless device according to claim 2 wherein the second condition includes at least one of receiving a second acknowledgement message from the remote device, completing a retransmission of the message a predetermined number of times, and waiting a second predetermined period of time after each retransmission of the message.
6. The wireless device according to claim 5 wherein the first predetermined period of time is adjustable based on occurrences of the second condition.
7. The wireless device according to claim 3 wherein the remote device transmits the second acknowledgement message immediately after receiving the message so as to minimize a period of time the transceiver remains out of the low power sleep mode.
8. The wireless device according to claim 3 wherein the remote device transmits the second acknowledgement message immediately after receiving the message so as to minimize energy consumed by the transceiver before entering the low power sleep mode.
9. The wireless device according to claim 3 wherein the second predetermined period of time includes a time period longer than an expected round trip time period, and wherein the expected round trip time period includes a time for transmission of the message from the transceiver to the remote device, plus a time for processing the message at the remote device, plus a time for transmission of the second acknowledgement message from the remote device to the transceiver.
10. The wireless device according to claim 3 wherein the transceiver includes a wake period during which the transceiver remains out of the low power sleep mode during transmission of the message to the remote device and during reception of the second acknowledgement message from the remote device.
11. The wireless device according to claim 1 wherein the remote device includes at least one of a cloud server and a web server.
12. The wireless device according to claim 1 wherein the message includes a User Datagram Protocol (UDP) message, and wherein the transceiver converts from communicating with the remote device via the UDP message to communicating with the remote device via a Transmission Control Protocol (TCP) connection when a fifth condition is detected.
13. The wireless device according to claim 12 wherein the fifth condition includes detecting a need for a continued dialog with higher throughput or detecting a need for communication with higher reliability.
14. The wireless device according to claim 1 wherein the transceiver is associated with an access point local to a region in which the wireless device is located, and wherein the transceiver maintains an association with the access point while in the low power sleep mode.
15. The wireless device according to claim 1 wherein the fourth condition includes receiving a second acknowledgement message from the remote \u201cdevices\u201d that includes a de-asserted stay awake indication.
16. The wireless device according to claim 1 wherein, after receipt of the first acknowledgement message from the remote device that includes the asserted stay awake indication, the remote device transmits a reconfiguration message to the transceiver.
17. The wireless device according to claim 1 wherein, when the programmable processor and the executable control software fail to detect the second condition for a predetermined period of time, the programmable processor and the executable control software retransmit the message, via the transceiver, to the remote device.
18. The wireless device according to claim 1 wherein the message includes at least one of an event message, a periodic time interval report message, a configuration message, a reconfiguration message, and a second acknowledgement message.
19. The wireless device according to claim 1 wherein the transceiver receives a configuration message from the remote device and responsive thereto, the programmable processor and the executable control software execute configuration actions, and wherein the programmable processor and the executable control software transmit, via the transceiver, a second acknowledgement message of the configuration message to the remote device.
20. The wireless device according to claim 19 wherein the second condition includes receiving at least one message with a de-asserted stay awake indication and completing transmission of the second acknowledgement message.
21. A method comprising:
entering a low power sleep mode;
remaining in the low power sleep mode until detection of a first condition;
responsive to detecting the first condition, exiting the low power sleep mode and constructing and transmitting a message to a remote device;
responsive to detecting a second condition, reentering the low power sleep mode; and
responsive to detecting a third condition, remaining out of the low power sleep mode until detection of a fourth condition,
wherein the third condition includes receiving a first acknowledgement message from the remote device that includes an asserted stay awake indication.
22. The method of claim 21 wherein the first condition includes at least one of an event detection and expiration of a predetermined period of time.
23. The method of claim 21 wherein the second condition includes at least one of receiving a second acknowledgement message from the remote device, expiration of a predetermined period of time, and retransmitting the message a predetermined number of times.
24. A cloud server comprising:
a transceiver;
a programmable processor; and
executable control software stored on a non-transitory computer readable medium,
wherein, upon receipt of a first message from a wireless device, via the transceiver, the programmable processor and the executable control software determine whether a reconfiguration request for the wireless device is pending and responsive thereto transmit a second message, via the transceiver, to the wireless device,
wherein, when the reconfiguration request for the wireless device is pending, the second message includes at least one of a reconfiguration message, a stay awake message, and an acknowledgement message with an asserted stay awake bit instructing a wireless device transceiver to remain out of a low power sleep mode, and
wherein, when the reconfiguration request for the wireless device is not pending, the second message includes an acknowledgement message with a de-asserted stay awake bit instructing the wireless device transceiver to enter a low power sleep mode.
25. The cloud server of claim 24 wherein, when the reconfiguration request for the wireless device is pending, the programmable processor and the executable control software retransmit the second message, via the transceiver, to the wireless device until the programmable processor and the executable control software receive, via the transceiver, an acknowledgement message of the second message from the wireless device within a first predetermined period of time, until a second predetermined period of time has expired, or until the programmable processor and the executable control software retransmit the second message, via the transceiver, a predetermined number of times.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method comprising:
measuring a resistivity of a substrate after an annealing process; and
fine tuning a subsequent annealing process to achieve a target resistivity of the substrate, based on the measured resistivity.
2. The method of claim 1, wherein the measuring is provided after completion of an initial BEOL process and a last metallization layer process.
3. The method of claim 2, wherein the fine tuning comprises adjusting a final anneal of the substrate to a predetermined temperature and time to achieve the target resistivity, based on extrapolated correlation data of a substrate of a known initial resistivity and the measured resistivity.
4. The method of claim 3, wherein the correlation data comprises resistivity data and oxygen concentrations at a known anneal temperature and time.
5. The method of claim 4, further comprising obtaining a base line resistivity by measuring the resistivity of the substrate after completion of a first metallization layer processes.
6. The method of claim 1, further comprising adjusting anneal rates for one or more of the metallization layers based on the target resistivity of the substrate and an amount of metallization layers required for a structure.
7. The method of claim 6, wherein the fine tuning comprises adjusting an anneal temperature after completion of a final metallization layer.
8. The method of claim 6, wherein the fine tuning comprises adjusting an annealing temperature based on the measured resistivity of the substrate after any of the one or more of metallization layers processes.
9. The method of claim 8, wherein the fine tuning comprises providing a final anneal at a predetermined temperature and time, based on extrapolated correlation data of a substrate of a known initial resistivity and the measured resistivity.
10. The method of claim 9, wherein the correlation data comprises resistivity data and oxygen concentrations at a known anneal temperature and time for several different resistances.
11. The method of claim 8, wherein the fine tuning comprises adjusting the annealing processes based on a measured resistivity of the substrate after each of the metallization layers.
12. A method comprising:
obtaining a starting resistivity of a substrate;
depositing subsequent metallization layers on the substrate using annealing processes;
after a final metallization layer, measuring a resistivity of the substrate; and
adjusting a final anneal process based on the starting resistivity and measured resistivity, to meet a target resistivity.
13. The method of claim 12, further comprising obtaining a base line resistivity after front end of the line processes are performed on the substrate.
14. The method of claim 12, wherein the starting resistivity is obtained after an initial BEOL processes on the substrate.
15. The method of claim 14, wherein the initial BEOL processes include a first metallization layer and contact.
16. The method of claim 15, further comprising obtaining substrate resistivity measurements after each BEOL annealing process.
17. The method of claim 16, wherein the adjusting of the final anneal process is performed after a final metallization layer.
18. The method of claim 16, wherein the adjusting is based on extrapolated correlation data of a substrate of a known initial resistivity and the measured resistivity at a known anneal temperature and time.
19. A method comprising:
determining a target resistivity of a substrate after a final annealing process;
determining how many metallization layers are required for a particular build structure on the substrate;
determining required anneal rates for each BEOL process to obtain the target resistivity;
measuring the resistivity of the substrate after each BEOL process; and
adjusting the anneal rates to achieve the target resistivity, based on the measured resistivity.
20. The method of claim 19, further comprising obtaining a starting resistivity of the substrate after a first metallization layer process, wherein the adjusting is based on the measured resistivity and the starting resistivity.
21. The method of claim 19, wherein the adjusting of the anneal rates to achieve the target resistivity based on the measured resistivity comprises extrapolating correlation data of a substrate of a known initial resistivity and the measured resistivity.
22. A method comprising:
providing a substrate having a first resistivity value;
forming structures upon the substrate through annealing processes, wherein the annealing processes change the first resistivity value to a second resistivity value; and
modifying a dopant concentration in the substrate to change the second resistivity value to a target resistivity value through BEOL annealing processes.
23. The method of claim 22, wherein the modifying the dopant concentration comprises an oxygen content.
24. The method of claim 22, wherein the modifying comprises providing a final anneal rate based on extrapolated correlation data of a substrate with a known initial resistance to a measured resistance after a final metallization process, at a known anneal rate.
25. A computer program product comprising a computer usable tangible storage medium having readable program code embodied in the storage medium which can be read by a computer, the computer program product includes at least one component operable to:
receive a base line resistivity of a substrate;
measure resistivity values of the substrate after annealing processes; and
extrapolate a final anneal rate for the substrate to achieve a target resistivity of the substrate, based on the base line resistivity, at least a last measured resistivity value and a known anneal time and temperature.