What is claimed is:
1. An image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document, the image data communication apparatus comprising:
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section;
the controller being configured to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and the mail address of the user set into the mail message of the e-mail can be utilized as a destination of a reply to the e-mail, the reply being sent from the receiving apparatus.
2. The image data communication apparatus according to claim 1, wherein the image data source comprises a scanner connected to the image data communication apparatus.
3. The image data communication apparatus according to claim 1, wherein the panel section comprises a personal computer connected to the image data communication apparatus.
4. The image data communication apparatus according to claim 3, wherein the personal computer displays an HTML document for storing the information regarding the identification of the user of the image communication apparatus and the mail address of the user in the memory.
5. The image data communication apparatus according to claim 1, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
6. The image data communication apparatus according to claim 1, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
7. An image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document, the image data communication apparatus comprising:
a memory configured to store default identification, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section;
the controller being configured to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail can be sent to the user without requiring input of the mail address of the user at the receiving apparatus, the reply being sent from the receiving apparatus.
8. The image data communication apparatus according to claim 7, wherein the image data source comprises a scanner connected to the image data communication apparatus.
9. The image data communication apparatus according to claim 7, wherein the panel section comprises a personal computer connected to the image data communication apparatus.
10. The image data communication apparatus according to claim 9, wherein the personal computer displays an HTML document for storing the information regarding the identification of the user of the image communication apparatus and the mail address of the user in the memory.
11. The image data communication apparatus according to claim 7, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
12. The image data communication apparatus according to claim 7, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
13. An image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document, the image data communication apparatus comprising:
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address of a user, and the mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section; the controller being configured to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail is returned to the mail address of the user.
14. The image data communication apparatus according to claim 13, wherein the image data source comprises a scanner connected to the image data communication apparatus.
15. The image data communication apparatus according to claim 13, wherein the panel section comprises a personal computer connected to the image data communication apparatus.
16. The image data communication apparatus according to claim 15, wherein the personal computer displays an HTML document for storing the information regarding the identification of the user of the image communication apparatus and the mail address of the user in the memory.
17. The image data communication apparatus according to claim 13, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
18. The image data communication apparatus according to claim 13, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
19. An image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data communication apparatus comprising:
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section, and to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section.
20. The image data communication apparatus according to claim 19, wherein the image data source comprises a scanner connected to the image data communication apparatus.
21. The image data communication apparatus according to claim 19, wherein the panel section comprises a personal computer connected to the image data communication apparatus.
22. The image data communication apparatus according to claim 21, wherein the personal computer displays an HTML document for storing the information regarding the identification of the user of the image communication apparatus and the mail address of the user in the memory.
23. The image data communication apparatus according to claim 19, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
24. The image data communication apparatus according to claim 19, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
25. An image data communication apparatus connected to a network, the image data communication apparatus comprising:
a transmitter configured to transmit image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document;
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section;
the controller being configured to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and the mail address of the user set into the mail message of the e-mail can be utilized as a destination of a reply to the e-mail, the reply being sent from the receiving apparatus.
26. The image data communication apparatus according to claim 25, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
27. The image data communication apparatus according to claim 25, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
28. An image data communication apparatus connected to a network, the image data communication apparatus comprising:
a transmitter configured to transmit image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document;
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section;
the controller being configured to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail can be sent to the user without requiring input of the mail address of the user at the receiving apparatus, the reply being sent from the receiving apparatus.
29. The image data communication apparatus according to claim 28, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
30. The image data communication apparatus according to claim 28, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
31. An image data communication apparatus connected to a network, the image data communication apparatus comprising:
a transmitter configured to transmit image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document;
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory; and
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section;
the controller being configured to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail is returned to the mail address of the user.
32. The image data communication apparatus according to claim 31, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
33. The image data communication apparatus according to claim 31, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
34. An image data communication apparatus connected to a network, the image data communication apparatus comprising:
a transmitter configured to transmit image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message;
a memory configured to store default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user;
a panel section configured to select the information regarding an identification of at least one user and the mail address of the at least one user other than the default information and the default mail address stored in the memory;
a controller configured to set the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected by the panel section, and to set the information regarding the identification of the user and the mail address of the user selected by the panel section into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected by the panel section.
35. The image data communication apparatus according to claim 34, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
36. The image data communication apparatus according to claim 34, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
37. A method for controlling an image data communication apparatus connected to an image data source and to a network, and transmitting the image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected; and
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and the mail address of the user set into the mail message of the e-mail can be utilized as a destination of a reply to the e-mail, the reply being sent from the receiving apparatus.
38. The method according to claim 37, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
39. The method according to claim 37, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
40. A method for controlling an image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected; and
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding identification of the user and the mail address of the user are selected, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail can be sent to the user without requiring input of the mail address of the user at the receiving apparatus, the reply being sent from the receiving apparatus.
41. The method according to claim 40, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
42. The method according to claim 40, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
43. A method for controlling an image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, the image data attached to the e-mail as an openable document, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected; and
setting the information regarding the information of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected, whereby opening, at the receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail is returned to the mail address of the user.
44. The method according to claim 43, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
45. The method according to claim 43, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
46. A method for controlling an image data communication apparatus connected to an image data source and to a network, and transmitting image data attached to an e-mail to a receiving apparatus via the network, the e-mail including a mail from command and a mail message, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected; and
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected.
47. The method according to claim 46, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
48. The method according to claim 46, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
49. A method for controlling an image data communication apparatus connected to a network, and transmitting image data attached to an e-mail, the e-mail including a mail from command and a mail message, an image data being attached to the e-mail as an openable document, a memory storing default identification, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected;
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected, whereby opening, at a receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and the mail address of the user set into the mail message of the e-mail can be utilized as a destination of a reply to the e-mail, the reply being sent from the receiving apparatus; and
transmitting the image data attached to the e-mail to the receiving apparatus via the network.
50. The method according to claim 49, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
51. The method according to claim 49, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
52. A method for controlling an image data communication apparatus connected to a network, and transmitting image data attached to an e-mail, the e-mail including a mail from command and a mail message, an image data being attached to the e-mail as an openable document, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected;
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected, whereby opening, at a receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail can be sent to the user without requiring input of the mail address of the user at the receiving apparatus, the reply being sent from the receiving apparatus; and
transmitting the image data attached to the e-mail to the receiving apparatus via the network.
53. The method according to claim 52, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
54. The method according to claim 52, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
55. A method for controlling an image data communication apparatus connected to a network, and transmitting image data attached to an e-mail, the e-mail including a mail from command and a mail message, an image data being attached to the e-mail as an openable document, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected;
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected, whereby opening, at a receiving apparatus, of the attached image data is not required to determine the information regarding the identification of the user, and a reply to the e-mail is returned to the mail address of the user; and
transmitting the image data attached to the e-mail to the receiving apparatus via the network.
56. The method according to claim 55, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
57. The method according to claim 55, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
58. A method for controlling an image data communication apparatus connected to a network, and transmitting image data attached to an e-mail, the e-mail including a mail from command and a mail message, a memory storing default information, information regarding an identification of at least one user of the image communication apparatus, a default mail address, and a mail address of the at least one user, the information regarding an identification of at least one user being information other than the default information, the mail address of the at least one user being an address other than the default mail address, the method comprising:
setting the default information and the default mail address into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are not selected;
setting the information regarding the identification of the user and the mail address of the user into the mail message of the e-mail to which the image data is attached when the information regarding the identification of the user and the mail address of the user are selected, and
transmitting the image data attached to the e-mail to a receiving apparatus via the network.
59. The method according to claim 58, wherein the image data attached to the e-mail is converted into a format for e-mail transmission.
60. The method according to claim 58, wherein the default information and the default mail address are pre-stored in the memory and the information regarding the identification of the user and the mail address of the user are stored in the memory by the user.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of forming variable shaped features in a silicon substrate comprising:
etching an opening having a first sidewalls section in a silicon substrate at a first etch rate;
depositing a fluorocarbon polymer conformally on the first sidewalls section of the opening at a first deposition rate using a polymer forming gas so as to protect the first sidewalls section from further etching;
performing a second silicon etching step at a second etch rate to expose a second sidewalls section below the first sidewalls section;
depositing a fluorocarbon polymer conformally on the second sidewalls section of the opening at a second deposition rate using a polymer forming gas so as to protect the second sidewalls; and
performing a third silicon etching step at a third etch rate to expose a third sidewalls section below the second sidewalls section, wherein the first, second and third sidewalls sections have different profiles.
2. The method according to claim 1 wherein different polymer forming gas is used to produce openings having different sidewalls shapes.
3. The method according to claim 1 wherein one of the etching steps is an isotropic etch process and releases etched features.
4. The method according to claim 1 wherein the polymer forming gas used to protect the first sidewalls section comprises at least one of C4F4, CH2F26 and C4F8.
5. The method according to claim 1 wherein a ratio of the second deposition rate to the second etch rate is less than 0.7.
6. The method according to claim 1 wherein a ratio of the second deposition rate to the second etch is greater than 0.7.
7. The method according to claim 1 wherein to form the opening having straight, parallel sidewalls a ratio of the first deposition rate to the first etch is equal to 0.7.
8. The method according to claim 1 further comprising applying bias power during the deposition step to prevent polymer deposition on the bottom of the opening.
9. The method according to claim 1 comprising performing deposition and etch steps for time periods that determine the shape of an opening.
10. The method according to claim 1 wherein the polymer forming gas further comprises HBr.
11. A method of forming variable shaped features in a silicon substrate comprising:
etching an opening having sidewails in a silicon substrate at an etch rate;
depositing a polymer on the sidewalls of the opening at a deposition rate, the etching and deposition steps defining a cycle having a sidewall etch rate; and
sequentially repeating the cycle at least three times, wherein at least one of the etch or deposition rate is different in at least two cycles, wherein the sidewall etch rates are different between at least two cycles.
12. The method of claim 11, wherein a different polymer forming gas is used in the least two of the cycles.
13. The method according to claim 11, wherein a polymer forming gas used in the deposition step comprises at least one of C4F4, CH2F2, and C4F8.
14. The method according to claim 11, wherein a ratio of the deposition rate to the etch rate in at least one of the cycles is less than 0.7.
15. The method according to claim 11, wherein a ratio of the deposition rate to the etch rate is greater than 0.7 in a first cycle and less than 0.7 in a second cycle.
16. The method according to claim 11, wherein at least a first cycle has a ratio of the deposition rate to the etch rate greater than 0.7, at least a second cycle has a ratio of the deposition rate to the etch rate less than 0.7; and at least one cycle has a ratio of the deposition rate to the etch rate equal to about 0.7.
17. The method according to claim 11 further comprising:
applying bias power during the deposition step to prevent polymer deposition on the bottom of the opening.
18. The method according to claim 11, wherein the polymer forming gas further comprises HBr.
19. A method of forming variable shaped features in a silicon substrate comprising:
etching an opening having first sidewalls portion in a silicon substrate at an etch rate;
depositing a polymer on the first sidewalls portion of the opening at a deposition rate, the etching and deposition steps defining a first process cycle;
performing a second process cycle to etch a second sidewalls portion the silicon substrate below the first sidewalls portion of the opening, the second process cycle having a ratio of etch rate to deposition rate different than the first process cycle, wherein silicon sidewall etch rates of the first cycle is slower than the second cycle; and
performing a third process cycle to etch a third sidewalls portion the silicon substrate below the second sidewalls portion of the opening, the first, second and third sidewall portions having different profiles.
20. The method of claim 19, wherein a different polymer forming gas is used in each of the first and second cycles.
21. The method according to claim 19, wherein a polymer forming gas uses in at least one of the cycles further comprises at least one of C4F4, CH2F2, and 04F8.
22. The method according to claim 19, wherein a ratio of the deposition rate to the etch rate in at least one of the cycles is less than 0.7.
23. The method according to claim 19, wherein at least one of the first and second cycles has a ratio of the deposition rate to the etch rate is greater than 0.7 and at least one of the first and second cycles has a ratio of the deposition rate to the etch rate less than 0.7.
24. The method according to claim 19 further comprising: a third cycle having a ratio of the deposition rate to the etch rate equal to about 0.7.
25. The method according to claim 19 further comprising: applying bias power during the deposition step to prevent polymer deposition on the bottom of the opening.
26. The method according to claim 19 wherein a polymer forming gas used during at least one of the deposition steps further comprises HBr.
27. The method according to claim 19, wherein the second cycle does not etch the first sidewalls portion.
28. The method according to claim 19, wherein the third cycle does not etch the second sidewalls portion.