1. A displacement measurement apparatus for a microstructure having a fixed electrode including a first electrode and a second electrode and a movable electrode opposed to the fixed electrode, the apparatus comprising:
a bias generator that applies a bias signal to between the second electrode and the movable electrode after the bias generator has applied the bias signal to between the first electrode and the movable electrode so as to decrease an effect of noise signals associated with a detection signal obtained from between the second electrode and the movable electrode; and
a detector that detects a signal arising from a resonance of the movable electrode by detecting a difference between a first detection signal obtained from between the second electrode and the movable electrode and a second detection signal obtained from between the first electrode and the movable electrode.
2. The apparatus of claim 1, wherein the bias signal is a direct current, which changes a voltage level from a certain level to another voltage or an alternating current voltage.
3. The apparatus of claim 1, wherein the bias signal is a random signal including a random noise signal, and the first detection signal arises from a resonance of the movable electrode in response to the random signal.
4. The apparatus of claim 1, wherein the bias generator applies the bias signal until the movable electrode starts moving and stops applying the bias signal after the movable electrode has started moving, and
the detector detects the first detection signal outputted by a damped oscillation of the movable electrode after the application of the bias signal has stopped.
5. The apparatus of claim 1, wherein the first electrode and the second electrode are located separately.
6. The apparatus of claim 1, the microstructure further comprising a third electrode and a fourth electrode,
wherein the first electrode and the second electrode are located in a first direction with respect to the movable electrode,
the third electrode and the fourth electrode are located in a second direction that is different from the first direction with respect to the movable electrode,
the bias generator applies the bias signal to the third electrode and the movable electrode in addition to applying the bias signal to the first electrode and the movable electrode, and
the detector detects the displacement of the movable electrode in the second direction based on a third detection signal obtained from between the fourth electrode and the movable electrode.
7. The apparatus of claim 6, further comprising:
a synchronous detector that detects the displacement of the movable electrode in the second direction in synchronization with the bias signal applied to the first electrode and the movable electrode.
8. A displacement measurement method for a microstructure having a fixed electrode including a first electrode and a second electrode and a movable electrode opposed to the fixed electrode, the method comprising the steps of:
applying a bias signal to between the second electrode and the movable electrode after a bias generator has applied the bias signal to between the first electrode and the movable electrode so as to decrease an effect of noise signals associated with a detection signal obtained from between the second electrode and the movable electrode; and
detecting a signal arising from a resonance of the movable electrode by detecting a difference between a first detection signal obtained from between the second electrode and the movable electrode and a second detection signal obtained from between the first electrode and the movable electrode.
9. The method of claim 8, wherein the bias signal is a direct current voltage, which changes a voltage level from a certain level to another voltage or an alternating current voltage.
10. The method of claim 9, wherein the alternating current voltage has a frequency that is substantially the same as a resonance frequency of the movable electrode.
11. The method of claim 8, wherein the bias signal is a random signal including a random noise signal, and the first detection signal arises from a resonance of the movable electrode in response to the random signal.
12. The method of claim 8, further comprising the step of:
stopping the application of the bias signal when the movable electrode starts moving after the application of the bias signal,
wherein the first detection signal is outputted by a damped oscillation of the movable electrode after the application of the bias signal has stopped.
13. The method of claim 8, wherein the microstructure is formed on a wafer.
14. A displacement measurement apparatus comprising:
a microstructure having a first fixed electrode including a first electrode and a second electrode and a movable electrode opposed to the first fixed electrode;
a pseudo-microstructure having a second fixed electrode including a third electrode and a fourth electrode, and a pseudo-moving electrode being fixed so as to opposed to the second fixed electrode and arranged to have substantially the same positioning and substantially the same structure as the microstructure;
a bias generator that applies a bias signal to between the first electrode and the movable electrode;
a first detector that extracts a first detection signal including noise signals obtained from between the second electrode and the movable electrode;
a second detector that extracts a second detection signal corresponding to the noise signals, the second detection signal being outputted from between the fourth electrode and the pseudo-moving electrode while the bias signal is applied to between the third electrode and the pseudo-moving electrode; and
a detector for detecting a displacement of the movable electrode by detecting a difference between the first detection signal including noise signals extracted by the first detector and the second detection signal corresponding to the noise signals extracted by the second detector.
15. The method of claim 14, wherein the displacement measurement apparatus is formed on a wafer.
16. A displacement measurement method having a microstructure including a first fixed electrode having a first electrode and a second electrode and a movable electrode opposed to the first fixed electrode, and a pseudo-microstructure having a second fixed electrode including a third electrode and a fourth electrode, a pseudo-moving electrode being fixed so as to opposed to the second fixed electrode and arranged to have substantially the same positioning and substantially the same structure as the microstructure, the method comprising the steps of:
applying a bias signal to between the first electrode and the movable electrode;
extracting a first detection signal including noise signals obtained from between the second electrode and the movable electrode;
extracting a second detection signal corresponding to the noise signals from between the fourth electrode and the pseudo-moving electrode while the bias signal is applied to between the third electrode and the pseudo-moving electrode; and
outputting a displacement signal of the movable electrode by detecting a difference between the first detection signal including noise signals extracted by the first detector and the second detection signal corresponding to the noise signals extracted by the second detector.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A gate driving circuit for outputting driving signals to a plurality of gate lines, the circuit comprising:
p shift registers for driving gate lines divided into p groups, respectively, wherein the plurality of gate lines comprises first to p-th gate lines sequentially deposited and corresponding to first to p-th shift registers, respectively,
wherein each of the p shift registers includes a plurality of stages dependently connected to one another, and each of p start signals is sequentially input to an input terminal of a first stage of each of the first to p-th shift registers, respectively, and an output signal from a selected stage is connected to an input terminal of the next stage of each of the p shift registers, whereby the first to p-th gate lines are sequentially driven by means of the output signals of first to p-th stages corresponding to the first to p-th shift registers, respectively,
wherein each of the p start signals of a high state are partially overlapped,
wherein the p start signals used in the p shift registers are shifted from one another by 1p, and
wherein p is a natural number of four, and the gate lines are divided into four groups in an order of 4n-3, 4n-2, 4n-1 and 4n, wherein n is a natural number of one or more.
2. The gate driving circuit as claimed in claim 1, wherein each of the plurality of stages comprises:
an input terminal for receiving a stage driving signal output from any one stage of the previous stages;
a clock terminal for receiving any one clock signal of a plurality of clock signals with phases different from one another;
a control terminal for receiving a stage driving signal output from any one stage of the next stages;
a first output terminal for outputting a gate driving signal.
3. The gate driving circuit as claimed in claim 2 further comprising a second output terminal for outputting the stage driving signal to any one stage of the next stages.
4. The gate driving circuit as claimed in claim 1, wherein each of the plurality of stages comprises:
an input terminal for receiving a stage driving signal output from any one stage of the previous stages;
a clock terminal for receiving any one clock signal of a plurality of clock signals with phases different from one another;
a control terminal for receiving a stage driving signal output from any one stage of the next stages;
a first output terminal for outputting a gate driving signal.
5. The gate driving circuit as claimed in claim 4 further comprising a second output terminal for outputting the stage driving signal to any one stage of the next stages.
6. A display device, comprising:
a display device including a plurality of gate lines, a plurality of data lines crossing the gate lines, and a switching element and a pixel electrode formed between the gate and data lines;
a gate driving circuit for selecting a gate line and allowing a switching element connected to the selected gate line to be switched on; and
a source driving circuit for driving a data line connected to the pixel electrode by means of the switching on of the switching element in accordance with input image data,
wherein the gate driving circuit includes p shift registers for driving the gate lines divided into p groups, respectively, wherein the plurality of gate lines comprises first to p-th gate lines sequentially deposited and corresponding to first to p-th shift registers, respectively, each of the shift registers includes a plurality of stages dependently connected to one another, and each of first to p-th start signals is sequentially input to an input terminal of a first stage of each of the first to p-th shift registers, respectively, and an output signal from a selected stage is connected to an input terminal of the next stage of each shift register, whereby the first to p-th gate lines are sequentially driven by the output signals of first to p-th stages, corresponding to the first to p-th shift registers, respectively, and
wherein each of the p start signals of a high state are partially overlapped,
wherein the p start signals used in the p shift registers are shifted from one another by 1p, and
wherein p is a natural number of four, and the plurality of gate lines are divided into four groups in an order of 4n-3, 4n-2, 4n-1 and 4n,
wherein n is a natural number of one or more.
7. The display device as claimed in claim 6, wherein each of the plurality of stages comprises:
an input terminal for receiving a stage driving signal output from any one stage of the previous stages;
a clock terminal for receiving any one clock signal of a plurality of clock signals with phases different from one another;
a control terminal for receiving a stage driving signal output from any one stage of the next stages;
a first output terminal for outputting a gate driving signal.
8. The display device as claimed in claim 7 further comprising a second output terminal for outputting the stage driving signal to any one stage of the next stages.
9. The display device as claimed in claim 6, wherein each of the plurality of stages comprises:
an input terminal for receiving a stage driving signal output from any one stage of the previous stages;
a clock terminal for receiving any one clock signal of a plurality of clock signals with phases different from one another;
a control terminal for receiving a stage driving signal output from any one stage of the next stages;
a first output terminal for outputting a gate driving signal.
10. The display device as claimed in claim 9 further comprising a second output terminal for outputting the stage driving signal to any one stage of the next stages.
11. The display device as claimed in claim 6, wherein the source driving circuit applies a data voltage for the last period among p periods obtained by dividing a period when the gate driving signal is applied to the gate line by p.