1. An electric brake comprising:
a caliper having provided therein a motor, a rotary-linear motion conversion mechanism for converting rotation of the motor to a linear motion and a piston adapted to press a brake pad against a disc rotor according to a force transmitted from the rotary-linear motion conversion mechanism and thus generate a braking force;
a parking brake mechanism including an engaging structure capable of being engaged with an associated-movement portion which operates in association with the motor, the parking brake mechanism being capable of exerting a parking brake function through engagement and disengagement of the engaging structure relative to the associated-movement portion; and
an actuator including a coil and a plunger capable of displacement under an electromagnetic force generated by energization of the coil, the actuator being adapted to enable the engagement or the disengagement of the engaging structure relative to the associated-movement portion according to the displacement of the plunger, wherein;
at least one of the plunger and the engaging structure is provided with a force-receiving portion, the force-receiving portion being adapted to receive a force to thereby enable the disengagement of the engaging structure relative to the associated-movement portion; and
an opening for insertion of a force-applying member for applying a force to the force-receiving portion is formed in a housing for accommodating the parking brake mechanism.
2. An electric brake according to claim 1, wherein the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion, the forward end portion is moved in a direction of displacement of the plunger, to thereby move the force-receiving portion in a direction for disengaging the engaging structure from the associated-movement portion.
3. An electric brake according to claim 1, wherein an axis of the opening for insertion of the force-applying member is substantially orthogonal to a direction of displacement of the plunger of the actuator.
4. An electric brake according to claim 3, wherein a forward end portion of the force-applying member includes an inclined portion so that when the force-applying member is inserted through the opening, with the inclined portion abutting against the force-receiving portion, the force-applying member is moved in a direction of the axis of the opening, to thereby move the force-receiving portion due to sliding along the inclined portion in a direction for disengaging the engaging structure from the associated-movement portion.
5. An electric brake according to claim 3, wherein the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion, the force-applying member is pivotally moved about the opening so as to move the forward end portion in the direction of displacement of the plunger, to thereby move the force-receiving portion in a direction for disengaging the engaging structure from the associated-movement portion.
6. An electric brake according to claim 1, wherein a direction of an axis of the opening for insertion of the force-applying member is substantially the same as a direction of displacement of the plunger of the actuator.
7. An electric brake according to claim 6, wherein the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion, the force-applying member is moved in the direction of the axis of the opening, to thereby move the force-receiving portion in a direction for disengaging the engaging structure from the associated-movement portion.
8. An electric brake according to claim 1, wherein the opening for insertion of the force-applying member is sealed with a cap member, the force-applying member being attached to the cap member.
9. An electric brake according to claim 1, wherein the associated-movement portion comprises a ratchet which rotates in association with the rotation of the motor, and the engaging structure comprises an engaging pawl that is disposed at a periphery of the ratchet so as to be capable of engaging a tooth portion of the ratchet.
10. An electric brake according to claim 9, wherein the engaging pawl is provided in a pivot arm pivotably disposed at the periphery of the ratchet, with a basal end portion of the pivot arm being pivotably attached to a pin.
11. An electric brake according to claim 10, wherein:
a direction of an axis of the opening for insertion of the force-applying member is substantially the same as a direction of displacement of the plunger of the actuator;
the force-receiving portion is formed at a forward end portion of the pivot arm; and
the force-applying member is inserted through the opening and, with a forward end portion of the force-applying member abutting against the force-receiving portion of the pivot arm, the force-applying member is moved in the direction of the axis of the opening, to thereby move the pivot arm in a direction for disengaging the engaging pawl from the ratchet.
12. An electric brake according to claim 11, wherein:
the opening for insertion of the force-applying member is sealed with a cap member, the force-applying member being attached to the cap member; and
the pivot arm is adapted to be moved in the direction for disengaging the engaging pawl from the ratchet by moving the cap member in a direction for separation from the opening.
13. An electric brake according to claim 9, wherein the force-applying member is preliminarily inserted through the opening for insertion of the force-applying member, and the engaging pawl is adapted to be disengaged from the ratchet by moving the force-applying member in the opening.
14. An electric brake according to claim 9, further comprising a bias device adapted to bias the engaging pawl in a direction for engagement with the tooth portion of the ratchet, the actuator being adapted to effect the displacement of the plunger so as to disengage the engaging pawl from the ratchet.
15. An electric brake according to claim 14, wherein the actuator comprises a self-holding type solenoid which is adapted to effect the displacement of the plunger so as to disengage the engaging pawl from the ratchet and maintains a position of the plunger after the displacement even when the coil is deenergized.
16. An electric brake according to claim 9, further comprising a bias device adapted to bias the engaging pawl in a direction for disengagement from the tooth portion of the ratchet, the actuator being adapted to effect the displacement of the plunger so as to engage the engaging pawl with the ratchet.
17. An electric brake comprising:
a caliper having provided therein a motor, a rotary-linear motion conversion mechanism for converting rotation of the motor to a linear motion and a piston adapted to press a brake pad against a disc rotor according to a force transmitted from the rotary-linear motion conversion mechanism and thus generate a braking force; and
a parking brake mechanism including an engaging structure capable of being engaged with an associated-movement portion which operates in association with the motor, the parking brake mechanism being capable of exerting a parking brake function through engagement and disengagement of the engaging structure relative to the associated-movement portion, the disengagement of the engaging structure being effected by operating the motor to temporarily rotate the associated-movement portion in a direction for braking, wherein:
a force-receiving portion is provided on the associated-movement portion, the force-receiving portion being adapted to receive a force to thereby enable the disengagement of the engaging structure relative to the associated-movement portion; and
an opening for insertion of a force-applying member for applying a force to the force-receiving portion is formed in a housing for accommodating the parking brake mechanism.
18. An electric brake according to claim 17, wherein the associated-movement portion comprises a ratchet which rotates in association with the rotation of the motor, and the engaging structure comprises an engaging pawl that is disposed at a periphery of the ratchet so as to be capable of engaging a tooth portion of the ratchet.
19. An electric brake according to claim 18, wherein:
the force-receiving portion is formed at an outer peripheral portion of the ratchet, the outer peripheral portion of the ratchet being located along a line of extension of the opening for insertion of the force-applying member; and
the ratchet is capable of being rotated in a direction for disengagement from the engaging pawl, by means of the force-applying member inserted through the opening.
20. An electric brake according to claim 18, further comprising a bias device adapted to provide a force that biases the engaging pawl in a direction for disengagement from the tooth portion of the ratchet, and an actuator adapted to forcibly move the engaging pawl in a direction for engagement with the ratchet against the force of the bias device.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A refrigerant supply apparatus for supplying a refrigerant to a cooling target, the apparatus comprising:
a refrigerant supply channel through which pure water as the refrigerant is supplied to the cooling target; and
an impurity removing unit disposed in an impurity removing channel which is a channel different from said refrigerant supply channel.
2. The apparatus according to claim 1, further comprising a pure water tank which stores the pure water,
wherein an upstream side of said refrigerant supply channel is connected to said pure water tank, and
said impurity removing channel circulates the pure water through said pure water tank.
3. The apparatus according to claim 2, wherein a lower portion of said pure water tank has a tapered shape.
4. The apparatus according to claim 2, further comprising an oxygen removing mechanism which removes dissolved oxygen in the pure water by supplying an inert gas into said pure water tank.
5. The apparatus according to claim 4, wherein said oxygen removing mechanism supplies the inert gas into the pure water in said pure water tank.
6. The apparatus according to claim 1, wherein said impurity removing unit includes at least one of an ion exchange resin, active carbon, a filtration film, a reverse osmosis film, a distillation unit, and a deaeration film.
7. The apparatus according to claim 1, further comprising a germicidal lamp which sterilizes the pure water.
8. The apparatus according to claim 1, further comprising:
a sensor which measures a purity of the pure water; and
a valve which stops supply of the pure water to the cooling target when the purity of the pure water does not satisfy a predetermined standard.
9. The apparatus according to claim 8, further comprising:
a first pump provided to said refrigerant supply channel; and
a second pump provided to said impurity removing channel,
wherein said first and second pumps are controlled independently of each other, such that said first pump is stopped when the purity of the pure water does not satisfy the predetermined standard, and that said second pump is stopped when the purity of the pure water satisfies the predetermined standard.
10. The apparatus according to claim 8, wherein said sensor includes a resistivity sensor.
11. The apparatus according to claim 8, wherein said sensor includes a dissolved oxygen sensor.
12. The apparatus according to claim 1, further comprising a temperature adjustment unit which adjusts a temperature of the pure water.
13. A device manufacturing apparatus comprising the refrigerant supply apparatus defined in claim 1 as part of a cooling apparatus.
14. An exposure apparatus comprising the refrigerant supply apparatus defined in claim 1 as part of a cooling apparatus.
15. A device manufacturing apparatus comprising:
a driving section which generates heat;
a refrigerant supply channel through which pure water as a refrigerant is supplied to a cooling section that cools said driving section;
a sensor which is disposed in said refrigerant supply channel and measures a purity of the pure water; and
a controller which controls supply of the pure water to said cooling section on the basis of the purity of the pure water measured by said sensor.
16. The apparatus according to claim 15, wherein said controller stops supply of the pure water to said cooling section when the purity of the pure water does not satisfy a predetermined standard.
17. The apparatus according to claim 15, wherein said sensor includes a resistivity sensor.
18. The apparatus according to claim 15, wherein said sensor includes a dissolved oxygen sensor.
19. The apparatus according to claim 15, further comprising an impurity removing unit which removes impurities in the pure water.
20. The apparatus according to claim 19, wherein said impurity removing unit is disposed in an impurity removing channel which is a channel different from said refrigerant supply channel.
21. The apparatus according to claim 20, further comprising:
a first pump provided to said refrigerant supply channel; and
a second pump provided to said impurity removing channel,
wherein said first and second pumps are controlled independently of each other, such that said first pump is stopped when the purity of the pure water does not satisfy the predetermined standard, and that said second pump is stopped when the purity of the pure water satisfies the predetermined standard.
22. The apparatus according to claim 19, wherein said impurity removing unit is disposed in a branch channel of said refrigerant removing channel.
23. The apparatus according to claim 19, wherein said impurity removing unit includes at least one of an ion exchange resin, active carbon, a filtration film, a reverse osmosis film, a distillation unit, and a deaeration film.
24. The apparatus according to claim 15, further comprising a germicidal lamp which sterilizes the pure water.
25. The apparatus according to claim 15, further comprising a pure water tank which stores the pure water, wherein an upstream side of said refrigerant supply channel is connected to said pure water tank.
26. The apparatus according to claim 25, wherein a lower portion of said pure water tank has a tapered shape.
27. The apparatus according to claim 25, further comprising an oxygen removing mechanism which removes dissolved oxygen in the pure water by supplying an inert gas into said pure water tank.
28. The apparatus according to claim 27, wherein said oxygen removing mechanism supplies the inert gas into the pure water in said pure water tank.
29. The apparatus according to claim 15, further comprising a temperature adjustment unit which adjusts a temperature of the pure water.
30. The apparatus according to claim 15, which is formed as an exposure apparatus.
31. A device manufacturing method including a step of processing a substrate using the device manufacturing apparatus according to claim 15.
32. A device manufacturing method including steps of:
transferring a pattern to a substrate with the device manufacturing apparatus according to claim 30; and
developing the substrate.