1. A method for processing a substrate, the method comprising
positioning a chuck above a first surface region of a substrate, wherein the chuck is levitated using a magnetic force;
forming a layer of gas between a bottom surface of the chuck and the first surface region of the substrate; and
applying a fluid on a second region of the substrate, wherein the second region is different from the first surface region.
2. The method as in claim 1 further comprising
sealing an edge of the substrate.
3. The method as in claim 1 further comprising
lowering the chuck onto the first surface region of the substrate.
4. The method as in claim 1 further comprising
controlling a magnitude of the magnetic force between the chuck and the first surface region of the substrate to achieve a separation distance between the bottom surface of the chuck and the first surface region of the substrate.
5. The method as in claim 1 further comprising
adjusting a gas flow or a gas flow path conductance to achieve a gas pressure of the layer of gas.
6. The method as in claim 1 further comprising:
measuring a gas pressure between the bottom of the chuck and the first surface region; and
dynamically regulating the gas flow to achieve a gas pressure of the layer of gas.
7. The method as in claim 1 further comprising at least one of
cleaning the second region of the substrate; or
wet etching the second region of the substrate.
8. The method as in claim 1 further comprising
submerging the substrate in a fluid tank with the first surface region protected by the layer of gas between the chuck and the first surface region.
9. The method as in claim 1 further comprising
regulating the layer of gas to either generate gas bubbles flowing to the fluid outside the first surface region or to generate fluid bubbles flowing toward the gas layer.
10. A chuck comprising
a bottom surface;
a first gas conduit terminating at the bottom surface;
a second gas conduit terminating at the bottom surface; and
a magnetic material disposed in the chuck,
wherein the magnetic material is configured to levitate the chuck above a surface region of the substrate by magnetic repulsion.
11. The chuck of claim 10 wherein the magnetic material comprises a magnet or a diamagnetic material.
12. The chuck of claim 10 wherein the first gas conduit comprises a plurality of gas outlets disposed in a periphery of a recessed area of the bottom surface of the chuck.
13. The chuck of claim 10 wherein the second conduit comprises a recessed ring surrounding a periphery of the bottom surface of the chuck.
14. The chuck of claim 10 further comprising
a pressure gauge coupled to the bottom surface of the chuck to measure a gas pressure.
15. The chuck of claim 10 further comprising
a restricting valve coupled to the second gas conduit to regulate a flow resistance of the second gas conduit.
16. A combinatorial processing system comprising
a chuck comprising a first gas conduit and second gas conduit, wherein each of the gas conduits is operable to provide a gas flow across a bottom surface of the chuck;
a first magnetic material disposed in the chuck; and
a substrate support comprising a second magnetic material,
wherein the first and second magnetic materials are configured to generate magnetic repulsion to levitate the chuck above the substrate support.
17. The combinatorial processing system of claim 16 wherein the first or second magnetic material comprises a magnet or a diamagnetic material.
18. The combinatorial processing system of claim 16 further comprising
a gas flow controller coupled to the first gas conduit to regulate the gas flow.
19. The combinatorial processing system of claim 16 further comprising
a pressure gauge coupled to either the first gas conduit or second gas conduit to measure a gas pressure.
20. The combinatorial processing system of claim 16 further comprising
a gas flow controller coupled to the first gas conduit to regulate the gas flow;
a pressure gauge coupled to either the first gas conduit or second gas conduit to measure a gas pressure; and
a controller to regulate the gas flow utilizing inputs from the pressure gauge.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A Self-Service Terminal (SST), comprising:
a fascia panel comprising a panel portion having a circular arc-shaped cross-section and at least one panel aperture; and
at least one media transfer device comprising an outer body portion having a circular arc-shaped cross-section, proximate to and spaced apart from the panel portion, and at least one body aperture; wherein
the body portion is rotatable with respect to the curved panel portion to selectively reveal the body aperture through the panel aperture; and wherein
the media transfer device comprises a drum element comprising a substantially hollow cylindrical body closed at a first and further end thereof and rotatable about a respective longitudinal axis of rotation, said outer body portion comprising a region of the outer surface of the cylindrical body, the outer body portion comprises at least two further body apertures and at least item support surface wherein the two further body apertures are aligned when the drum element is at a still further rotation position to thereby provide an item pathway from said panel aperture to a pair of opposed grip rollers of the SST.
2. The SST as claimed in claim 1, further comprising:
the media transfer device comprises a card reader housing supporting a user card reader device, and a front panel secured to the housing comprising said outer body portion, said housing being rotatable about a respective axis of rotation to rotate the outer body portion therewith.
3. The SST as claimed in claim 1, further comprising:
the panel portion and said body portion are manufactured from a tamper resistant material, wherein when the body aperture of the media transfer device is not aligned with the panel aperture, a remainder region of the outer body portion closes the panel aperture to unauthorized access.
4. The SST as claimed in claim 1, further comprising:
when the at least one media transfer device comprises a plurality of media transfer devices, each media transfer device is arranged to rotate together andor separately about a common axis of rotation, said common axis comprising a centre of an imaginary circle including the circular arc of each respective body portion.
5. The SST as claimed in claim 1, further comprising:
the transfer device further comprises a pair of opposed clamping elements supported in the cylindrical body that move apart and close together as the drum element is rotated to receive items of media therebetween when apart at at least one rotation position and present items of media from therebetween when apart and aligned with said panel aperture at a further rotation position.
6. The SST as claimed in claim 5, further comprising:
the opposed clamping elements are locatable together towards said panel aperture when the drum element is at said further rotation position.
7. The SST as claimed in claim 5, further comprising:
the opposed clamping elements comprise a pair of clamp plates that are secured together at respective first ends thereof and open and close at respective further ends thereof automatically as the drum member rotates.
8. The SST as claimed in claim 1, wherein the SST is an Automated Teller Machine (ATM) and each item of media comprises a currency note.