1. A method for robotically transferring semiconductor wafers between a plurality of stations of a machine for performing multiple operations on the wafers using a robot equipped with a dry end-effector and a wet end-effector for handling wafers, the method comprising:
transporting dry wafers from a cassette to an index station with the dry end-effector;
transporting wet wafers from a rinse station to a spin-dry station with the wet end-effector; and
transporting dry wafers from the spin-dry station to another cassette with the dry end-effector.
2. The method of claim 1, wherein transporting dry wafers from a cassette to an index station comprises flipping the wafers.
3. A method for transferring workpieces comprising the steps of:
retrieving said workpieces from a first station with a robot;
flipping said workpieces over with said robot;
placing said workpieces on a second station with said robot;
retrieving said workpieces from a third station with said robot after said workpieces are moved from the second station to the third station with a flipper arm that is separate from, and not a part of, the robot; and
placing said workpieces on said first station with said robot, wherein said robot includes at least one workpiece gripping device for retrieving and holding said workpieces which includes a dry end-effector for gripping dry workpieces and a wet end-effector for gripping wet workpieces.
4. A method as claimed in claim 3, wherein said workpieces are retrieved from a tilted cassette in said first station and transferred with said dry end-effector to an index table in said second station.
5. A method as claimed in claim 4, wherein said third station comprises a rinsing station and a drying station, and comprising the additional step of transferring said workpieces from said rinsing station to said drying station with said wet end-effector.
6. A method as claimed in claim 5, wherein said workpieces are retrieved from said drying station with said dry end-effector and transferred to said cassette.
7. A method as claimed in claim 6, wherein said robot has six axes to permit movement of said end-effectors among said tilted cassette, said index table, said rinsing station, and said drying station.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An optical assembly comprising light sources and a light emitting panel member, the light emitting panel member comprising:
opposite sides, one of the sides comprising a light emitting surface area;
an input edge for receiving light from the light sources, each of the light sources being optically coupled to a different location along the input edge; and
a pattern of individual optical deformities on or in at least one of the sides of the panel member for producing a light output distribution from the light emitting surface area, the individual optical deformities being varied throughout the pattern and being shaped or oriented throughout the pattern to extract light propagating through the panel member preferentially in one direction over another direction to cause regions of higher light intensity and lower light intensity in the light output distribution from the light emitting surface area.
2. The assembly of claim 1, wherein:
the light input edge is a first input edge;
the panel member additionally comprises a second input edge opposite or adjacent the first input edge; and
light sources of at least two different colors are optically coupled to the first and second input edges.
3. A general or decorative lighting assembly comprising the optical assembly of claim 1.
4. The assembly of claim 1, wherein the light sources are LEDs.
5. The assembly of claim 1, wherein the optical deformities have a sloped surface and a curved surface.
6. The assembly of claim 1, wherein the optical deformities have two sloped surfaces.
7. The assembly of claim 1, wherein the optical deformities have two curved surfaces.
8. The assembly of claim 1, wherein the optical deformities are quite small in relation to a length and width of the panel member.
9. The assembly of claim 1, wherein the light emitting surface area is curved or non-planar.
10. The assembly of claim 1, wherein:
the light input edge is a first input edge;
the panel member additionally comprises a second input edge; and
a first one of the light sources is optically coupled to the first input edge, and a second one of the light sources is optically coupled to the second input edge substantially facing toward the first one of the light sources.
11. The assembly of claim 1, wherein:
the light input edge is a first input edge;
the panel member additionally comprises a second input edge opposite the first input edge; and
one or more of the light sources are optically coupled to each of the input edges such that at least some of the light sources are substantially facing toward each other.
12. The assembly of claim 1, wherein:
the light input edge is a first input edge;
the panel member additionally comprises a second input edge substantially facing toward the first input edge; and
different ones of the light sources are optically coupled to the first input edge and the second input edge substantially facing toward each other.
13. The assembly of claim 1, wherein different sets of the optical deformities each have at least one surface that is shaped or oriented to direct the light extracted in the regions of higher light intensity and lower light intensity in different directions for viewing from different angles through one of the sides of the panel member.
14. An optical assembly comprising light sources and a light emitting panel member, the light emitting panel member comprising:
opposite sides, one of the sides comprising a light emitting surface area;
an input edge for receiving light from the light sources, each of the light sources being optically coupled to a different location along the input edge and;
a pattern of individual optical deformities on or in at least one of the sides of the panel member for producing a light output distribution from the light emitting surface area, the individual optical deformities being varied throughout the pattern, different sets of the optical deformities each having at least one surface that is shaped or oriented to extract light propagating through the panel member in different directions for viewing from different angles through one of the sides of the panel member.
15. The assembly of claim 14, wherein the light sources are LEDs.
16. The assembly of claim 14, wherein the optical deformities have a sloped surface and a curved surface.
17. The assembly of claim 14, wherein the optical deformities have two curved surfaces.
18. The assembly of claim 14, wherein the optical deformities have two sloped surfaces.
19. The assembly of claim 14, wherein the optical deformities are quite small in relation to a length and width of the panel member.
20. The assembly of claim 14, wherein the light emitting surface area is curved or non-planar.
21. The assembly of claim 14, wherein the sets of optical deformities cause regions of higher light intensity and lower light intensity in the light output distribution from the light emitting surface area.