1. A substrate holding and rotating device, comprising:
a turntable rotatable about a vertical rotation axis;
a rotative drive unit which rotates the turntable;
a holding member which is provided on the turntable and horizontally holds a substrate in upwardly spaced relation to the turntable;
a protection disk disposed between the turntable and a substrate holding position at which the substrate is held by the holding member, and attached to the turntable so as to be vertically movable relative to the turntable between a lower position and an adjacent position close to a lower surface of the substrate held by the holding member above the lower position, the protection disk having substantially the same size as the substrate held by the holding member; and
a magnetic levitation mechanism including a first magnet attached to the protection disk, a second magnet which has an annular shape coaxial about the rotation axis and generates a repulsive force with respect to the first magnet, a first support member which non-rotatably supports the second magnet, and a first relative movement mechanism which moves the first support member and the turntable relative to each other so as to change a distance between the first magnet and the second magnet, the magnetic levitation mechanism being configured to levitate the protection disk from the turntable by the repulsive force generated between the first magnet and the second magnet.
2. The substrate holding and rotating device according to claim 1,
wherein the holding member includes a movable holding member which is movable between a holding position at which the movable holding member holds the substrate and a retracted position to which the movable holding member is retracted from the holding position,
the substrate holding and rotating device further comprising a magnetic drive mechanism including a first magnetic member attached to the movable holding member, a second magnetic member which has an annular shape coaxial about the rotation axis and generates a magnetic force with respect to the first magnetic member, a second support member which non-rotatably supports the second magnetic member, and a second relative movement mechanism which moves the second support member and the turntable relative to each other so as to change a distance between the first magnetic member and the second magnetic member, the magnetic drive mechanism being configured to hold the movable holding member at the holding position by the magnetic force generated between the first magnetic member and the second magnetic member.
3. The substrate holding and rotating device according to claim 2,
wherein the second magnetic member, the second support member and the second relative movement mechanism serve as the second magnet, the first support member and the first relative movement mechanism, respectively,
wherein the magnetic drive mechanism and the magnetic levitation mechanism share the second magnet, the first support member and the first relative movement mechanism,
wherein the protection disk is held at the adjacent position by the repulsive force generated between the second magnet and the first magnet, and the movable holding member is held at the holding position by the magnetic force generated between the second magnet and the first magnetic member when the second magnet is located at a predetermined position.
4. The substrate holding and rotating device according to claim 1, further comprising a limitation member which limits upward relative movement of the protection disk with respect to the turntable at the adjacent position.
5. The substrate holding and rotating device according to claim 1, further comprising a guide mechanism which is provided on the turntable and guides the vertical relative movement of the protection disk.
6. The substrate holding and rotating device according to claim 1, further comprising a lateral side covering member which is attached to the turntable and covers a space defined between the substrate held by the holding member and the turntable from a lateral side.
7. A substrate treatment apparatus comprising:
a substrate holding and rotating device; and
a treatment liquid supply unit which supplies a treatment liquid to an upper surface of a substrate held by the substrate holding and rotating device;
the substrate holding and rotating device comprising:
a turntable rotatable about a vertical rotation axis;
a rotative drive unit which rotates the turntable;
a holding member which is provided on the turntable and horizontally holds the substrate in upwardly spaced relation to the turntable;
a protection disk disposed between the turntable and a substrate holding position at which the substrate is held by the holding member, and attached to the turntable so as to be vertically movable relative to the turntable between a lower position and an adjacent position close to a lower surface of the substrate held by the holding member above the lower position, the protection disk having substantially the same size as the substrate held by the holding member; and
a magnetic levitation mechanism including a first magnet attached to the protection disk, a second magnet which has an annular shape coaxial about the rotation axis and generates a repulsive force with respect to the first magnet, a first support member which non-rotatably supports the second magnet, and a first relative movement mechanism which moves the first support member and the turntable relative to each other so as to change a distance between the first magnet and the second magnet, the magnetic levitation mechanism being configured to levitate the protection disk from the turntable by the repulsive force generated between the first magnet and the second magnet.
8. The substrate treatment apparatus according to claim 7, further comprising a receiving member which receives a treatment liquid supplied from the treatment liquid supply unit to the substrate held by the substrate holding and rotating device and flowing outward from the surface of the substrate,
wherein the first support member is fixed to the receiving member,
wherein the first relative movement mechanism is configured to move the receiving member and the turntable relative to each other.
9. The substrate treatment apparatus according to claim 7, further comprising an inert gas supply unit which supplies an inert gas to a space defined between a substrate held and rotated by the substrate holding and rotating device and the protection disk located at the adjacent position.
10. The substrate treatment apparatus according to claim 9, wherein the protection disk has a restriction portion provided on an upper surface thereof for restricting an inert gas flow passage on a peripheral edge of the substrate held by the holding member.
11. The substrate treatment apparatus according to claim 9, wherein the inert gas supply unit includes an inert gas nozzle which ejects the inert gas radially toward a peripheral edge of the substrate held by the holding member from a rotation center of the turntable.
12. A substrate treatment method to be performed by utilizing a substrate holding and rotating device, the substrate holding and rotating device including a turntable rotatable about a vertical rotation axis, a holding member which horizontally holds a substrate, a protection disk attached to the turntable in relatively vertically movable manner and having substantially the same size as the substrate, a first magnet attached to the protection disk, and an annular second magnet non-rotatably provided coaxially about the rotation axis, the substrate treatment method comprising:
a holding step of causing the holding member to horizontally hold the substrate;
a rotating step of rotating the substrate held by the holding member by rotating the turntable;
a lower surface covering step of moving the first magnet and the second magnet toward each other to levitate the protection disk from the turntable to an adjacent position close to a lower surface of the substrate by a repulsive force generated between the first magnet and the second magnet to cover the lower surface of the substrate; and
a treatment liquid supplying step of supplying a treatment liquid to an upper surface of the substrate with the lower surface of the substrate covered with the protection disk in the holding step and the rotating step.
13. The substrate treatment method according to claim 12,
wherein the holding member includes a movable holding member which is movable between a holding position at which the movable holding member holds the substrate and a retracted position to which the movable holding member is retracted from the holding position,
wherein the holding step includes the step of holding the movable holding member at the holding position by applying a magnetic force to a magnetic member attached to the movable holding member.
14. The substrate treatment method according to claim 13,
wherein the lower surface covering step includes the step of locating the second magnet at a predetermined position to levitate the protection disk at the adjacent position by the repulsive force generated between the second magnet and the first magnet,
wherein the holding step includes the step of locating the second magnet at the predetermined position to hold the movable holding member at the holding position by a magnetic force generated between the second magnet and the magnetic member.
15. The substrate treatment method according to claim 12, further comprising the step of causing a limiting member to limit upward relative movement of the protection disk with respect to the turntable at the adjacent position.
16. The substrate treatment method according to claim 12, further comprising the step of causing a receiving member to receive a treatment liquid flowing outward from the substrate during the rotation of the substrate,
wherein the second magnet is supported by the receiving member,
wherein the lower surface covering step includes the step of moving the receiving member and the turntable toward each other.
17. The substrate treatment method according to claim 12, further comprising an inert gas supplying step of supplying an inert gas to a space defined between the substrate being rotated and the protection disk located at the adjacent position in the treatment liquid supplying step.
18. The substrate treatment method according to claim 17,
wherein the protection disk has a restriction portion provided on an upper surface portion thereof to be opposed to a peripheral edge of the substrate held by the holding member,
the method further comprising the step of restricting an inert gas flow passage by the restriction portion in the inert gas supplying step.
19. The substrate treatment method according to claim 17, wherein the inert gas supplying step includes the step of ejecting the inert gas radially toward a peripheral edge of the substrate held by the holding member from a rotation center of the turntable.
20. The substrate treatment method according to claim 12, further comprising the step of covering a space defined between the substrate held by the holding member and the turntable from a lateral side by a lateral side covering member attached to the turntable in the lower surface covering step.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
I claim:
1. A fluid delivery system, comprising:
a nasal delivery tube for facilitating the delivery of fluids to the lungs of a user;
an ear hook support tube coupled in an airtight manner to said nasal delivery tube and plugged at its distal end with an elongated flexible ear hook;
a slider support tube coupled in an airtight manner to said nasal delivery tube and coupled at its distal end in an airtight manner to a fluid supply system for delivering fluids to said nasal delivery tube through said slider support tube; and
another elongated flexible ear hook slidably mounted to said slider support tube for sliding along said slider support tube to a user adjusted position.
2. A fluid delivery system according to claim 1, wherein said nasal delivery tube includes a pair of spaced apart nasal tips of sufficient length for insertion into the nostrils of a user.
3. A fluid delivery system according to claim 2, wherein said pair of spaced apart nasal tips have substantially smaller outer diameter than said nasal delivery tube.
4. A fluid delivery system according to claim 3, wherein said pair of spaced apart nasal tips are trimmable to custom fit the user.
5. A fluid delivery system according to claim 1, wherein said another elongated flexible ear hook includes:
a slider slidably mounted to said slider support tube for permitting a user to adjust the overall spacing between said elongated ear hook and said another elongated ear hook so they can loop over the ears of the user to facilitate supporting said nasal delivery tube substantially equally therebetween below the nostrils of the user.
6. A fluid delivery system according to claim 5, wherein said nasal delivery tube includes a pair of spaced apart nasal tips of sufficient length for insertion into the nostrils of a user.
7. A fluid delivery system according to claim 6, wherein said pair of spaced apart nasal tips have substantially smaller outer diameter than said nasal delivery tube.
8. A fluid delivery system according to claim 7, wherein said pair of spaced apart nasal tips are trimmable to custom fit the nostril depths of the user.
9. A fluid delivery system according to claim 1, wherein said ear hook support tube has a sufficient length to enable said elongated flexible ear hook to loop over the ear of the user to facilitate supporting one end of said nasal delivery tube in proximity to the face of the user.
10. A fluid delivery system according to claim 9, wherein said another flexible ear hook is mounted to said slider support tube by a pinchable slider.
11. A fluid delivery system according to claim 10, wherein said slider in an unpinched state holds said another flexible ear hook in a substantially stationary position relative to said flexible ear hook and said slider support tube.
12. A fluid delivery system according to claim 11, wherein said slider in a pinched state enables the user to slide said another elongated ear hook along said slider support tube to permit the user to adjust the overall spacing between said elongated ear hook and said another elongated ear hook so they can loop over the ears of the user to facilitate supporting said nasal delivery tube substantially below the nose of the user and in close proximity to the nostrils of the user.
13. A fluid delivery system according to claim 9, wherein said slider support tube has another sufficient length to enable said another elongated flexible ear hook to be positioned on said slider support tube so that said nasal delivery tube is suspended directly below the nostrils of a user when said elongated flexible ear hook and said another elongated flexible ear hook are looped over opposite ears of the user.
14. A fluid delivery system according to claim 13, where in said sufficient length of said ear hook support tube is substantially less than said sufficient length of said slider support tube.
15. A fluid delivery system according to claim 1, wherein said fluid supply system includes:
an elongated fluid delivery tube coupled between a pair of adapters;
wherein one of said pair of adapters enables said elongated fluid delivery tube to be coupled to said slider support tube in an airtight manner; and
wherein another one of said pair of adapters enables said elongated fluid delivery tube to be coupled to a fluid source.
16. A fluid delivery system according to claim 15, wherein said fluid source is a source of air.
17. A fluid delivery system according to claim 15, wherein said fluid source is a source of oxygen.
18. A fluid delivery system according to claim 15, wherein said fluid source is a gas mixture source to help facilitate user breathing.
19. A method of using an air cannula, comprising:
providing a nasal delivery tube having a pair of spaced apart nasal tips for facilitating the delivery of fluids to the lungs of a user;
providing an ear hook support tube coupled in an airtight manner to said nasal delivery tube and plugged at its distal end with an elongated flexible ear hook;
providing a slider support tube coupled in an airtight manner to said nasal delivery tube and coupled at its distal end in an airtight manner to a fluid supply system for delivering fluids to said nasal delivery tube; and
providing another elongated flexible ear hook slidably mounted to said slider support tube for sliding along said slider support tube to a user adjusted position;
coupling said fluid supply system to a fluid source of a predetermined gas mixture;
looping said elongated ear hook over one ear of the user to support therefrom one end of said nasal delivery tube;
looping said another elongated ear hook is looped over another ear of the user to support therefrom an opposite end of said nasal delivery tube;
inserting respective ones of said nasal tips into corresponding ones of the nostrils of the user; and
sliding said another elongated ear hook along said slider support tube to a user desired position where said nasal tips comfortable rest within the nostrils of the user.
20. A method of using a cannula according to claim 19, wherein said step of inserting includes trimming the length of respective ones of said nasal tips to custom fit them to the nostrils of the user.
21. An air cannula, comprising:
a flexible tube;
a universal connector coupled to one end of said tube, said connector for coupling said tube to a source of fluid under pressure;
a reduction connector coupled to the other end of said tube, said reduction connector for coupling said tube to a fluid delivery device;
said fluid delivery device including:
a nasal delivery tube for facilitating the delivery of fluids to the lungs of a user, said nasal delivery tube includes a pair of spaced apart nasal tips of sufficient length for insertion into the nostrils of a user;
an ear hook support tube coupled in an airtight manner to said nasal delivery tube and plugged at its distal end with an elongated flexible ear hook;
a slider support tube coupled in an airtight manner to said nasal delivery tube and coupled at its distal end in an airtight manner to said reduction connector for facilitating the delivering of fluids to said nasal delivery tube; and
another elongated flexible ear hook slidably mounted to said slider support tube for sliding along said slider support tube to facilitating fitting said fluid delivery device to an adjusted position supported on the ears of a user by said elongated flexible ear hook and said another elongated flexible ear hook with said pair of spaced apart nasal tips sufficiently inserted into the nostrils of the user for fluid delivery purposes.
22. An oxygen delivery system, comprising:
a nasal cannula having a pair of nasal prongs is plugged at a distal end thereof with a car hook and is adapted to be coupled at a proximate end thereof to a supply of air; and
another ear hook slidably mounted to said nasal cannula at about its proximate end cooperates with said ear hook to facilitate supporting said nasal cannula from the ears of the user with said nasal prongs inserted into the nasal cavities of the user.