What is claimed is:
1. A wheel bearing assembly comprising an outer member having two raceways on an inner peripheral surface thereof, an inner member having two raceways formed thereon so as to be opposite to said two raceways on said outer member, and rolling elements arranged in two rows between said outer member and said inner member, said inner member being formed with a wheel mounting flange having bolt holes for receiving hub bolts, wherein at least one of said raceways formed on said inner member on the side near said wheel mounting flange is formed directly on said inner member, and wherein a heat-affected layer of a hardened layer formed on said raceway on the side near said wheel mounting flange is restricted so as not to reach said bolt holes of said wheel mounting flange.
2. The wheel bearing assembly as claimed in claim 1 wherein the depth of said hardened layer at said raceway on the side near said wheel mounting flange is 0.7-4 mm at the deepest portion, and the depth of said hardened layer at a seal land portion provided between said raceway and said wheel mounting flange is 0.3-2 mm.
3. The wheel bearing assembly as claimed in claim 2 wherein raceways are directly formed on the inner circumferential surface of said outer member.
4. The wheel bearing assembly as claimed claim 2 wherein a raceway on the side far from said wheel mounting flange is formed directly on the outer circumferential surface of said inner member.
5. The wheel bearing assembly as claimed in claim 2 wherein a drive shaft is mounted in said inner member.
6. The wheel bearing assembly as claimed in claim 1 wherein raceways are directly formed on the inner circumferential surface of said outer member.
7. The wheel bearing assembly as claimed claim 6 wherein a raceway on the side far from said wheel mounting flange is formed directly on the outer circumferential surface of said inner member.
8. The wheel bearing assembly as claimed in claim 6 wherein a drive shaft is mounted in said inner member.
9. The wheel bearing assembly as claimed claim 1 wherein a raceway on the side far from said wheel mounting flange is formed directly on the outer circumferential surface of said inner member.
10. The wheel bearing assembly as claimed in claim 9 wherein a drive shaft is mounted in said inner member.
11. The wheel bearing assembly as claimed in claim 1 wherein a drive shaft is mounted in said inner member.
12. The wheel bearing assembly as claimed in claim 1 wherein said inner member is formed integral with an outer ring of a constant-velocity joint.
13. A wheel bearing assembly comprising an outer member having two raceways on an inner peripheral surface thereof, an inner member having two raceways formed thereon so as to be opposite to said two raceways on said outer member, and rolling elements arranged in two rows between said outer member and said inner member, one of said outer member and said inner member being formed with a wheel mounting flange, a brake rotor fixing surface being formed on one side of said wheel mounting flange, wherein said brake rotor is mounted to one side of said wheel mounting flange and said one side of said wheel mounting flange has a finish with a finer surface roughness than the other side.
14. The wheel bearing assembly as claimed in claim 13 wherein said one side of said wheel mounting flange has a surface roughness value of 3 Ra or under, and the other side has a surface roughness value of 3-6 Ra.
15. The wheel bearing assembly as claimed in claim 14 wherein said wheel mounting flange is integrally formed on said inner member.
16. The wheel bearing assembly as claimed in claim 14 wherein said wheel mounting flange is integrally formed on said outer member.
17. The wheel bearing assembly as claimed in claim 14 wherein said raceways are formed directly on the outer circumferential surface of said inner member.
18. The wheel bearing assembly as claimed in claim 14 wherein said raceways are formed directly on the inner circumferential surface of said outer member.
19. The wheel bearing assembly as claimed in claim 14 wherein at least one of said raceways on said inner member is formed on a separate member.
20. The wheel bearing assembly as claimed in claim 14 wherein a drive shaft is mounted in said inner member.
21. The wheel bearing assembly as claimed in claim 14 wherein said inner member is integral with an outer ring of a constant-velocity joint.
22. The wheel bearing assembly as claimed in claim 14 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
23. The wheel bearing assembly as claimed in claim 13 wherein said wheel mounting flange is integrally formed on said inner member.
24. The wheel bearing assembly as claimed in claim 23 wherein said raceways are formed directly on the outer circumferential surface of said inner member.
25. The wheel bearing assembly as claimed in claim 23 wherein said raceways are formed directly on the inner circumferential surface of said outer member.
26. The wheel bearing assembly as claimed in claim 23 wherein at least one of said raceways on said inner member is formed on a separate member.
27. The wheel bearing assembly as claimed in claim 23 wherein a drive shaft is mounted in said inner member.
28. The wheel bearing assembly as claimed in claim 23 wherein said inner member is integral with an outer ring of a constant-velocity joint.
29. The wheel bearing assembly as claimed in claim 23 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
30. The wheel bearing assembly as claimed in claim 13 wherein said wheel mounting flange is integrally formed on said outer member.
31. The wheel bearing assembly as claimed in claim 30 wherein said raceways are formed directly on the outer circumferential surface of said inner member.
32. The wheel bearing assembly as claimed in claim 30 wherein said raceways are formed directly on the inner circumferential surface of said outer member.
33. The wheel bearing assembly as claimed in claim 30 wherein at least one of said raceways on said inner member is formed on a separate member.
34. The wheel bearing assembly as claimed in claim 30 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
35. The wheel bearing assembly as claimed in claim 13 wherein said raceways are formed directly on the outer circumferential surface of said inner member.
36. The wheel bearing assembly as claimed in claim 35 wherein a drive shaft is mounted in said inner member.
37. The wheel bearing assembly as claimed in claim 35 wherein said inner member is integral with an outer ring of a constant-velocity joint.
38. The wheel bearing assembly as claimed in claim 35 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
39. The wheel bearing assembly as claimed in claim 13 wherein said raceways are formed directly on the inner circumferential surface of said outer member.
40. The wheel bearing assembly as claimed in claim 39 wherein a drive shaft is mounted in said inner member.
41. The wheel bearing assembly as claimed in claim 39 wherein said inner member is integral with an outer ring of a constant-velocity joint.
42. The wheel bearing assembly as claimed in claim 39 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
43. The wheel bearing assembly as claimed in claim 13 wherein at least one of said raceways on said inner member is formed on a separate member.
44. The wheel bearing assembly as claimed in claim 43 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
45. The wheel bearing assembly as claimed in claim 13 wherein a drive shaft is mounted in said inner member.
46. The wheel bearing assembly as claimed in claim 45 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
47. The wheel bearing assembly as claimed in claim 13 wherein said inner member is integral with an outer ring of a constant-velocity joint.
48. The wheel bearing assembly as claimed in claim 47 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
49. The wheel bearing assembly as claimed in claim 13 wherein said brake rotor is fixed on a side of said wheel mounting flange near said rolling elements.
50. A wheel bearing assembly comprising a wheel bearing and a constant-velocity joint, said wheel bearing comprising an outer member having two raceways on an inner peripheral surface thereof, an inner member having two raceways formed thereon so as to be opposite to said two raceways on said outer member, and rolling elements arranged in two rows between said outer member and said inner member, said inner member being formed with a wheel mounting flange which is formed with a brake rotor fixing surface on one side thereof, said constant-velocity joint comprising an outer ring having a shoulder portion on which an end face of said inner member of said wheel bearing abuts, and a stem coupled to said inner member, wherein the perpendicularity and the runout variation of one side of said shoulder portion on which the end face of said inner member of said wheel bearing abuts, relative to the axis of said stem are restricted within predetermined values.
51. The wheel bearing assembly as claimed in claim 50 wherein said predetermined value of runout variation is 30 m or less.
52. The wheel bearing assembly as claimed in claim 51 wherein the side of said shoulder portion has a surface treatment for reducing frictional resistance.
53. The wheel bearing assembly as claimed in claim 51 wherein said inner member has a shaft portion protruding inwardly, and an inner ring of said wheel bearing is mounted on said shaft portion.
54. The wheel bearing assembly as claimed in claim 51 wherein said inner member of said wheel bearing is fitted around said stem of said constant-velocity joint, and splines are formed at the tip of said stem so as to engage said inner member.
55. The wheel bearing assembly as claimed in claim 50 wherein the side of said shoulder portion has a surface treatment for reducing frictional resistance.
56. The wheel bearing assembly as claimed in claim 55 wherein said surface treatment comprises a circumferential grease groove in the side of said shoulder portion.
57. The wheel bearing assembly as claimed in claim 56 wherein said inner member has a shaft portion protruding inwardly, and an inner ring of said wheel bearing is mounted on said shaft portion.
58. The wheel bearing assembly as claimed in claim 56 wherein said inner member of said wheel bearing is fitted around said stem of said constant-velocity joint, and splines are formed at the tip of said stem so as to engage said inner member.
59. The wheel bearing assembly as claimed in claim 55 wherein said surface treatment comprises stripes in the side of said shoulder portion formed by grinding so as to be concentric relative to the axis of said stem.
60. The wheel bearing assembly as claimed in claim 59 wherein said inner member has a shaft portion protruding inwardly, and an inner ring of said wheel bearing is mounted on said shaft portion.
61. The wheel bearing assembly as claimed in claim 59 wherein said inner member of said wheel bearing is fitted around said stem of said constant-velocity joint, and splines are formed at the tip of said stem so as to engage said inner member.
62. The wheel bearing assembly as claimed in claim 55 wherein said surface treatment comprises a coating of a sliding agent.
63. The wheel bearing assembly as claimed in claim 62 wherein said inner member has a shaft portion protruding inwardly, and an inner ring of said wheel bearing is mounted on said shaft portion.
64. The wheel bearing assembly as claimed in claim 62 wherein said inner member of said wheel bearing is fitted around said stem of said constant-velocity joint, and splines are formed at the tip of said stem so as to engage said inner member.
65. The wheel bearing assembly as claimed in claim 55 wherein said inner member has a shaft portion protruding inwardly, and an inner ring of said wheel bearing is mounted on said shaft portion.
66. The wheel bearing assembly as claimed in claim 55 wherein said inner member of said wheel bearing is fitted around said stem of said constant-velocity joint, and splines are formed at the tip of said stem so as to engage said inner member.
67. The wheel bearing assembly as claimed in claim 50 wherein said inner member has a shaft portion protruding inwardly, and an inner ring of said wheel bearing is mounted on said shaft portion.
68. The wheel bearing assembly as claimed in claim 50 wherein said inner member of said wheel bearing is fitted around said stem of said constant-velocity joint, and splines are formed at the tip of said stem so as to engage said inner member.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A micromechanical sensor device, comprising:
a CMOS wafer having a front side and a rear side;
a rewiring device formed on the front side of the CMOS wafer and including a plurality of stacked printed conductor levels and insulation layers;
an MEMS wafer having a front side and a rear ;
a micromechanical sensor device formed across the front side of the MEMS wafer;
a bond connection between the MEMS wafer and the CMOS wafer;
a cavern between the MEMS wafer and the CMOS wafer, in which the sensor device is hermetically enclosed; and
an exposed getter layer area applied to at least one of the plurality of stacked printed conductor levels and insulation layers.
2. The micromechanical sensor device as recited in claim 1, wherein:
an uppermost layer of the rewiring device is an uppermost printed conductor level, and
the getter layer area is embedded in the uppermost printed conductor level in such a way that the getter layer is applied to an insulation layer situated under the uppermost printed conductor level.
3. The micromechanical sensor device as recited in claim 1, wherein:
an uppermost layer of the rewiring device is an uppermost printed conductor level, and
the getter layer area is embedded in the uppermost printed conductor level and an insulation area situated under the uppermost printed conductor level in such a way that the getter layer area is applied to a second uppermost printed conductor level situated under the insulation layer.
4. The micromechanical sensor device as recited in claim 1, wherein the getter layer area is connected electrically to a CMOS circuit of the CMOS wafer via at least one via in the rewiring device.
5. The micromechanical sensor device as recited in claim 1, wherein the getter layer area has a lower height than an uppermost layer of the rewiring device.
6. A method for manufacturing a micromechanical sensor device, comprising:
providing a CMOS wafer having a front side and a rear side and a rewiring device formed on the front side of the CMOS wafer including a plurality of stacked printed conductor levels and insulation layers;
applying a resist mask layer to an uppermost layer of the rewiring device including an opening that exposes the uppermost layer;
carrying out an etching process which removes at least the uppermost layer of the rewiring device in an area of the opening, an undercut of the resist mask layer being formed;
depositing a getter layer on the resist mask layer and on the etched area of the rewiring device exposed by the opening;
removing the resist mask layer by a lift-off process step, a portion of the getter layer deposited on the resist mask layer being removed and the portion of the getter layer deposited on the etched area of the rewiring device exposed by the opening remaining as a getter layer area;
providing an MEMS wafer having a front side and a rear side and a micromechanical sensor device formed across the front side of the MEMS wafer; and
forming a bond connection between the MEMS wafer and the CMOS wafer, the sensor device being hermetically enclosed in a cavern between the MEMS wafer and the CMOS wafer.
7. The method for manufacturing a micromechanical sensor device as recited in claim 6, wherein:
the uppermost layer of the rewiring device is an uppermost printed conductor level, and
the getter layer area is embedded in the uppermost printed conductor level in such a way that the getter layer is deposited onto an insulation layer situated under the uppermost printed conductor level.
8. The method for manufacturing a micromechanical sensor device as recited in claim 6, wherein:
the uppermost layer of the rewiring device is an uppermost printed conductor level, and
the getter layer area is embedded in the uppermost printed conductor level and an insulation area situated under the uppermost printed conductor level in such a way that the getter layer is deposited onto a second uppermost printed conductor level situated under the insulation layer.
9. The method for manufacturing a micromechanical sensor device as recited in claim 6, wherein the getter layer area is connected electrically to a CMOS circuit of the CMOS wafer via at least one via.
10. The method for manufacturing a micromechanical sensor device as recited in claim 6, wherein the getter layer area has a lower height than the uppermost layer of the rewiring device.